CN103606583A - Upconversion amorphous silicon solar cell with one-dimensional photonic crystal and manufacturing process thereof - Google Patents

Upconversion amorphous silicon solar cell with one-dimensional photonic crystal and manufacturing process thereof Download PDF

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Publication number
CN103606583A
CN103606583A CN201310641793.0A CN201310641793A CN103606583A CN 103606583 A CN103606583 A CN 103606583A CN 201310641793 A CN201310641793 A CN 201310641793A CN 103606583 A CN103606583 A CN 103606583A
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solar cell
amorphous silicon
silicon solar
photon crystal
upconverter
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CN201310641793.0A
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Inventor
周建朋
汤叶华
马跃
夏建汉
郝秀利
王孟
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EOPLLY NEW ENERGY TECHNOLOGY Co Ltd
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EOPLLY NEW ENERGY TECHNOLOGY Co Ltd
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/02Details
    • H01L31/0232Optical elements or arrangements associated with the device
    • H01L31/02327Optical elements or arrangements associated with the device the optical elements being integrated or being directly associated to the device, e.g. back reflectors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/04Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
    • H01L31/06Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
    • H01L31/075Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PIN type
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L31/00Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
    • H01L31/18Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
    • H01L31/20Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials
    • H01L31/202Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof such devices or parts thereof comprising amorphous semiconductor materials including only elements of Group IV of the Periodic System
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/52PV systems with concentrators
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E10/00Energy generation through renewable energy sources
    • Y02E10/50Photovoltaic [PV] energy
    • Y02E10/548Amorphous silicon PV cells
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Abstract

The invention discloses an upconversion amorphous silicon solar cell with a one-dimensional photonic crystal. The upconversion amorphous silicon solar cell structurally comprises an amorphous silicon solar cell body, EVA, an upconverter, EVA and a one-dimensional photonic crystal reflector from top to bottom in sequence, and a manufacturing process of the upconversion amorphous silicon solar cell comprises the steps of manufacturing the amorphous silicon solar cell body, manufacturing the upconverter, manufacturing the one-dimensional photonic crystal reflector and carrying out overlapping and lamination. Near-infrared photons used by the amorphous silicon solar cell can be increased, the short-circuit current of the solar cell is improved, and then the conversion efficiency of the solar cell is improved. The one-dimensional photonic crystal reflector can enhance the reflection effect and reduce the transmission loss of the photons, and is beneficial for improving the conversion efficiency of the cell. Meanwhile, the one-dimensional photonic crystal reflector replaces a metal reflector, material cost can be lowered, the upconversion amorphous silicon solar cell can be manufactured through the production equipment of the amorphous silicon solar cell, and equipment cost does not need to be increased.

Description

Upper conversion amorphous silicon solar cell and the manufacturing process thereof with 1-D photon crystal
Technical field
The present invention relates to a kind of solar cell, particularly structure and the preparation method of the novel solar cell of a kind of while combination and upper switch technology and 1-D photon crystal total reflection technology.
Background technology
Current solar energy generation technology has obtained application and development to a certain degree, but not extensive universal, one of them important reason is the high cost of solar cell, for reducing the cost of solar cell, will reduce on the one hand the manufacturing cost of solar cell.To improve the conversion efficiency of solar cell on the other hand.
Amorphous silicon solar cell belongs to hull cell, and its thickness only has 0.2 to 0.4 micron.The thickness of crystal silicon solar battery is 200 microns of left and right, and the former can save material cost greatly.Yet the former conversion efficiency is high less than the latter, limited its application and development.
Summary of the invention
Goal of the invention: the object of the invention is in order to solve deficiency of the prior art, a kind of conversion efficiency is high, save material upper conversion amorphous silicon solar cell and the manufacturing process thereof with 1-D photon crystal are provided.
Technical scheme: a kind of upper conversion amorphous silicon solar cell with 1-D photon crystal of the present invention, its structure is followed successively by amorphous silicon solar cell, ethylene-vinyl acetate copolymer EVA, upconverter, ethylene-vinyl acetate copolymer EVA, 1-D photon crystal speculum from top to bottom.
As preferably, described amorphous silicon solar cell comprises glass substrate, transparency conductive electrode (TCO), Window layer p layer, intrinsic layer i layer and n layer.
As preferably, described upconverter is to be made by rare earth ion doped materials that contains Powdered or glassy state such as halide, oxide or sulfide.
The invention also discloses a kind of manufacturing process with the upper conversion amorphous silicon solar cell of 1-D photon crystal:
(1) prepare amorphous silicon solar cell:
1) adopt common process, utilize magnetically controlled DC sputtering technology to prepare the front electrode of aluminum-doped zinc oxide transparent conduction;
2) utilize PECVD p layer, i layer, the n layer of deposited amorphous silicon solar cell successively, source of the gas used is silane and phosphine, silane and hydrogen, silane and borine;
3) utilize magnetically controlled DC sputtering technology to prepare aluminum-doped zinc oxide transparent conduction rear electrode;
(2) prepare upconverter:
1) adopt the synthetic up-conversion of hydro thermal method, upper conversion by matrix and and be entrained in wherein trivalent rare earth ions and form, the luminescence center that rare earth ion is material;
2) gained up-conversion is mixed and is colloidal with curing materials dimethyl silicone polymer, use sol evenning machine to adopt the mode of spin coating to prepare filmated upconverter;
(3) prepare 1-D photon crystal speculum:
1) adopt the silicon nitride film of PECVD deposition techniques one deck high index of refraction, source of the gas used is ammonia, silane;
2) adopt the hydrogenation non crystal silicon film of PECVD deposition techniques one deck low-refraction, source of the gas used is silane and hydrogen;
3) repetitive process 1) and process 2), 1-D photon crystal formed;
(4) lamination:
1) according to the area of battery, cut out the EVA of suitable size;
2) in order according to successively 1-D photon crystal speculum, EVA, upconverter, EVA, amorphous silicon solar cell being carried out to lamination from top to bottom;
(5) lamination: put into laminating machine after lamination and will carry out lamination, amorphous silicon solar cell, upconverter, 1-D photon crystal speculum are packaged together and form the upper conversion solar cell with 1-D photon crystal speculum.
As preferably, before described step conduction, electrode square resistance is 10 Ω, and thickness is 450-500nm;
As preferably, the refractive index of described silicon nitride film is 1.3-2.1, and thickness is 35-45nm.
As preferably, the refractive index of described hydrogenation non crystal silicon film is 3.2-4.2, and thickness is 70-80nm.
Beneficial effect: a kind of upper conversion amorphous silicon solar cell with 1-D photon crystal of the present invention, the total reflection technology of upper switch technology and photon crystal reflecting mirror is combined and is applied to amorphous silicon solar cell, the application of upconverter can increase the utilization of amorphous silicon solar cell to near-infrared photon, improve the short circuit current of solar cell, and then improve the conversion efficiency of solar cell.1-D photon crystal back reflector can strengthen reflecting effect, reduces the transmission loss of photon, is conducive to improve the conversion efficiency of battery.1-D photon crystal substituted metal speculum, can reduce material cost simultaneously, can utilize the production equipment of amorphous silicon solar cell to be prepared, without increasing equipment cost.
Accompanying drawing explanation
Fig. 1 is the structural representation that the present invention has the upper conversion amorphous silicon solar cell of 1-D photon crystal.
Fig. 2 is the reflectogram spectrogram of speculum of the present invention.
Embodiment
A kind of upper conversion amorphous silicon solar cell with 1-D photon crystal as depicted in figs. 1 and 2, its structure is followed successively by amorphous silicon solar cell 1, ethylene-vinyl acetate copolymer EVA2, upconverter 3, ethylene-vinyl acetate copolymer EVA2,1-D photon crystal speculum 4 from top to bottom, wherein amorphous silicon solar cell 1 comprises glass substrate, transparency conductive electrode (TCO), Window layer p layer, intrinsic layer i layer and n layer, and upconverter is to be made by rare earth ion doped materials that contains Powdered or glassy state such as halide, oxide or sulfide.
The invention also discloses a kind of manufacturing process with the upper conversion amorphous silicon solar cell of 1-D photon crystal:
(1) prepare amorphous silicon solar cell:
1) adopt common process, utilize magnetically controlled DC sputtering technology to prepare the front electrode of aluminum-doped zinc oxide transparent conduction, electrode square resistance is 10 Ω, and thickness is 450-500nm;
3) utilize PECVD p layer, i layer, the n layer of deposited amorphous silicon solar cell successively, source of the gas used is silane and phosphine, silane and hydrogen, silane and borine;
3) utilize magnetically controlled DC sputtering technology to prepare aluminum-doped zinc oxide transparent conduction rear electrode;
(2) prepare upconverter:
1) adopt the synthetic up-conversion of hydro thermal method, upper conversion by matrix and and be entrained in wherein trivalent rare earth ions and form, rare earth ion is the luminescence center of material, and its effect is the conversion realizing photon energy, absorbs an out high-energy photon of two or above low-enerugy photon radiation.Generally select rare earth Er 3+as doping ion.The effect of matrix is for rare earth ion provides crystalline field, and it can be chloride, oxide or sulfide that matrix is divided according to its chemical composition, and the chlorides that adopt because of having less phonon energy more at present;
2) gained up-conversion is mixed and is colloidal with curing materials dimethyl silicone polymer, use sol evenning machine to adopt the mode of spin coating to prepare filmated upconverter;
(3) prepare 1-D photon crystal speculum:
1) adopt the silicon nitride film of PECVD deposition techniques one deck high index of refraction, refractive index is 1.3-2.1, and thickness is 35-45nm, and source of the gas used is ammonia, silane;
3) adopt the hydrogenation non crystal silicon film of PECVD deposition techniques one deck low-refraction, refractive index is 3.2-4.2, and thickness is 70-80nm, and source of the gas used is silane and hydrogen;
3) repetitive process 1) and process 2), 1-D photon crystal formed;
(4) lamination:
1) according to the area of battery, cut out the EVA of suitable size;
2) in order according to successively 1-D photon crystal speculum, EVA, upconverter, EVA, amorphous silicon solar cell being carried out to lamination from top to bottom;
(5) lamination: put into laminating machine after lamination and will carry out lamination, amorphous silicon solar cell, upconverter, 1-D photon crystal speculum are packaged together and form the upper conversion solar cell with 1-D photon crystal speculum.
A kind of upper conversion amorphous silicon solar cell with 1-D photon crystal of the present invention, the total reflection technology of upper switch technology and photon crystal reflecting mirror is combined and is applied to amorphous silicon solar cell, the application of upconverter can increase the utilization of amorphous silicon solar cell to near-infrared photon, improve the short circuit current of solar cell, and then improve the conversion efficiency of solar cell.1-D photon crystal back reflector can strengthen reflecting effect, reduces the transmission loss of photon, is conducive to improve the conversion efficiency of battery.1-D photon crystal substituted metal speculum, can reduce material cost simultaneously, can utilize the production equipment of amorphous silicon solar cell to be prepared, without increasing equipment cost.

Claims (7)

1. a upper conversion amorphous silicon solar cell with 1-D photon crystal, is characterized in that: its structure is followed successively by amorphous silicon solar cell (1), ethylene-vinyl acetate copolymer EVA(2 from top to bottom), upconverter (3), ethylene-vinyl acetate copolymer EVA(2), 1-D photon crystal speculum (4).
2. a kind of upper conversion amorphous silicon solar cell with 1-D photon crystal according to claim 1, is characterized in that: described amorphous silicon solar cell (1) comprises glass substrate, transparency conductive electrode (TCO), Window layer p layer, intrinsic layer i layer and n layer.
3. a kind of upper conversion amorphous silicon solar cell with 1-D photon crystal according to claim 1, is characterized in that: described upconverter is to be made by rare earth ion doped materials that contains Powdered or glassy state such as halide, oxide or sulfide.
4. the preparation technology of a upper conversion amorphous silicon solar cell with 1-D photon crystal is as follows:
(1) prepare amorphous silicon solar cell:
1) adopt common process, utilize magnetically controlled DC sputtering technology to prepare the front electrode of aluminum-doped zinc oxide transparent conduction;
Utilize PECVD p layer, i layer, the n layer of deposited amorphous silicon solar cell successively, source of the gas used is silane and phosphine, silane and hydrogen, silane and borine;
3) utilize magnetically controlled DC sputtering technology to prepare aluminum-doped zinc oxide transparent conduction rear electrode;
(2) prepare upconverter:
1) adopt the synthetic up-conversion of hydro thermal method, upper conversion by matrix and and be entrained in wherein trivalent rare earth ions and form, the luminescence center that rare earth ion is material;
2) gained up-conversion is mixed and is colloidal with curing materials dimethyl silicone polymer, use sol evenning machine to adopt the mode of spin coating to prepare filmated upconverter;
(3) prepare 1-D photon crystal speculum:
1) adopt the silicon nitride film of PECVD deposition techniques one deck high index of refraction, source of the gas used is ammonia, silane;
The hydrogenation non crystal silicon film that adopts PECVD deposition techniques one deck low-refraction, source of the gas used is silane and hydrogen;
3) repetitive process 1) and process 2), 1-D photon crystal formed;
(4) lamination:
1) according to the area of battery, cut out the EVA of suitable size;
2) in order according to successively 1-D photon crystal speculum, EVA, upconverter, EVA, amorphous silicon solar cell being carried out to lamination from top to bottom;
(5) lamination: put into laminating machine after lamination and will carry out lamination, amorphous silicon solar cell, upconverter, 1-D photon crystal speculum are packaged together and form the upper conversion solar cell with 1-D photon crystal speculum.
5. a kind of preparation technology with the upper conversion amorphous silicon solar cell of 1-D photon crystal according to claim 4, is characterized in that: before described step conduction, electrode square resistance is 10 Ω, and thickness is 450-500nm.
6. a kind of preparation technology with the upper conversion amorphous silicon solar cell of 1-D photon crystal according to claim 4, is characterized in that: the refractive index of described silicon nitride film is 1.3-2.1, and thickness is 35-45nm.
7. a kind of preparation technology with the upper conversion amorphous silicon solar cell of 1-D photon crystal according to claim 4, is characterized in that: the refractive index of described hydrogenation non crystal silicon film is 3.2-4.2, and thickness is 70-80nm.
CN201310641793.0A 2013-12-05 2013-12-05 Upconversion amorphous silicon solar cell with one-dimensional photonic crystal and manufacturing process thereof Pending CN103606583A (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109119538A (en) * 2018-07-27 2019-01-01 暨南大学 The translucent no indium polymer solar battery of flexible 1-D photon crystal regulation

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003347571A (en) * 2001-09-28 2003-12-05 Sanyo Electric Co Ltd Photovoltaic element and photovoltaic device
CN101369609A (en) * 2008-10-10 2009-02-18 南开大学 Solar battery with upper conversion material and preparation method
US20120266942A1 (en) * 2011-04-25 2012-10-25 Hitachi Chemical Company, Ltd. Seal sheet and solar cell module
CN103296145A (en) * 2013-05-09 2013-09-11 南开大学 Photonic crystal back reflector provided with adjustable forbidden band and applied to silicon-based thin-film solar cell

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003347571A (en) * 2001-09-28 2003-12-05 Sanyo Electric Co Ltd Photovoltaic element and photovoltaic device
CN101369609A (en) * 2008-10-10 2009-02-18 南开大学 Solar battery with upper conversion material and preparation method
US20120266942A1 (en) * 2011-04-25 2012-10-25 Hitachi Chemical Company, Ltd. Seal sheet and solar cell module
CN103296145A (en) * 2013-05-09 2013-09-11 南开大学 Photonic crystal back reflector provided with adjustable forbidden band and applied to silicon-based thin-film solar cell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109119538A (en) * 2018-07-27 2019-01-01 暨南大学 The translucent no indium polymer solar battery of flexible 1-D photon crystal regulation

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Application publication date: 20140226