CN102856425A - Method for manufacturing soft silicon-based thin film solar cell integrated component - Google Patents

Method for manufacturing soft silicon-based thin film solar cell integrated component Download PDF

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CN102856425A
CN102856425A CN2011101823197A CN201110182319A CN102856425A CN 102856425 A CN102856425 A CN 102856425A CN 2011101823197 A CN2011101823197 A CN 2011101823197A CN 201110182319 A CN201110182319 A CN 201110182319A CN 102856425 A CN102856425 A CN 102856425A
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solar cell
thin film
film solar
method
based thin
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CN2011101823197A
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陈亮
马宁华
叶晓军
刘成
张梦炎
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上海空间电源研究所
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    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product
    • Y02P70/52Manufacturing of products or systems for producing renewable energy
    • Y02P70/521Photovoltaic generators

Abstract

The invention discloses a method for manufacturing a soft silicon-based thin film solar cell integrated component. The method includes that a composite back reflection bottom electrode, a silicon-based thin film layer and a transparent electric conduction layer are manufactured by a vacuum method, a laser scribing process and a screen printing process are combined, and finally the soft silicon-based thin film solar cell integrated component is obtained. According to the method for manufacturing the soft silicon-based thin film solar cell integrated component, the laser scribing and the screen printing are performed after the vacuum plating process is finished, the pollution of the antivacuum process to the vacuum process is prevented, the substrate can be directly etched by the laser scribing, the difficulty is small, and the method is easy to implement, the grid line is manufactured by relatively simple screen printing process, and the interconnection is achieved. Besides, the manufacturing difficulty of the soft silicon-based thin film solar cell integrated component is greatly reduced, the cost is low, and the industrial production is easy to achieve.

Description

柔性硅基薄膜太阳电池集成组件的制备方法 The method of preparing a flexible silicon thin film solar cell module integrated

技术领域 FIELD

[0001] 本发明涉及属于新型能源中薄膜太阳电池的技术领域,具体涉及ー种柔性薄膜太阳电池集成组件的制备方法。 [0001] The present invention relates to the technical field of thin film solar cells is a new type of energy, and particularly relates to a method for preparing a flexible thin film solar cell species ー integration components.

背景技术 Background technique

[0002] 能源是ー个国家能得以发展的动力。 [0002] Energy is ー countries able to develop power. 在化石能源日益趋于枯竭的时代,新型可替代能源的研究,将是能使国民经济持续发展的保障和显示国力的标志。 In the era of fossil energy increasingly become exhausted, the study of new alternative energy sources, will enable sustained development is a sign of protection and display of national strength. 本发明涉及ー种柔性薄膜太阳电池集成组件制备技术,可以提高太阳电池的光电转化效率和成品率,降低成本,属于新能源中薄膜太阳电池的技术领域。 The present invention relates to a flexible thin film solar cell species ー integrated component preparation technology, can improve the photoelectric conversion efficiency of the solar cell and yield, lower costs, new energy belongs to the field of thin film solar cells. [0003]目前,玻璃衬底硅基薄膜太阳电池集成内联技术,比较成熟,并广泛应用于エ业生产中。 [0003] Currently, a glass substrate, a silicon thin film solar cell integrated inline technology is relatively mature, and is widely used in industrial production Ester. 由于柔性聚酰亚胺透光性不好,及NIP结构的特点,柔性聚酰亚胺衬底硅基薄膜太阳电池集成内联需要解决更多问题,尚在研究摸索阶段。 Since the light-transmissive flexible polyimide poor, and characteristics of the NIP structure, flexible polyimide film substrate of the silicon solar cell integrated inline more problems to be solved, still under study exploratory stage.

[0004]文献(F. Liu, J. Owens, G. Pietka, K. Beermink, A. Baner jee, J. Yang, and S. Guha,“Advances in flexible and ultra lightweight monolithically integrated a-Si :H based triple-junction PV modules made using roll-to roll deposition”,Proceedings of Thirty-four IEEE PVSC, 2009)报道了一种采用激光划线与金属丝邦定技术来实现子电池的集成互联,可以获得高电压、低电流的输出特性。 [0004] Document (F. Liu, J. Owens, G. Pietka, K. Beermink, A. Baner jee, J. Yang, and S. Guha, "Advances in flexible and ultra lightweight monolithically integrated a-Si: H based triple-junction PV modules made using roll-to roll deposition ", Proceedings of Thirty-four IEEE PVSC, 2009) reported the use of an integrated interconnect one kind of the metal Sibang laser scribing techniques to achieve a given sub-cell, a high voltage , low current output characteristic. 但是,金属丝邦定技术目前被少数国外大公司所垄断,其线材昂贵,其布线热压エ艺非常特殊,实现这种エ艺的设备也十分昂贵,且具有严格的商业技术保密性。 However, the metal Si Bang given technology is currently being monopolized by a small number of large foreign companies, whose wire is expensive, it is very special wiring hot Ester arts, to achieve this Ester arts equipment is very expensive, and with strict confidentiality of commercial technology.

[0005] 发明人提出一种采用采用激光划线与丝网印刷技术来实现柔性薄膜太阳电池的集成互联,采用传统的丝网印刷技术替代金属丝邦定技术,并做了一定的改进,更易于实现柔性薄膜太阳电池集成组件的制备。 [0005] The inventors have proposed a network using an integrated laser scribing and screen printing technology to achieve a flexible thin film solar cell, using conventional screen printing technology instead of the metal Sibang given technology, and make certain improvements, more a flexible thin film solar cell is easy to prepare an integrated component of the implementation.

发明内容 SUMMARY

[0006] 本发明所要解决的技术问题是提供一种柔性薄膜太阳电池集成组件的制备方法,本发明采用激光划线技术与丝网印刷技术来实现子电池的集成互联,获得了高电压、低电流的输出特性。 [0006] The present invention solves the technical problem is to provide a flexible integrated thin film solar cell module production method, the present invention uses a laser scribing technique with the screen printing technology to achieve integration of interconnected subcells, a high voltage, low output current characteristic.

[0007] 本发明为解决其技术问题而采用的的技术方案:一种柔性薄膜太阳电池集成组件的制备方法,包括如下步骤: [0007] The present invention is to solve the technical problem and the use of the technical solution: A method for preparing a flexible integrated thin film solar cell module, comprising the steps of:

[0008] I)在清洗过的绝缘柔性衬底卷上(如聚酰亚胺),依次卷对卷真空制备背反射电极(如Ag/ΖηΟ)、吸收层(如nip型非晶硅或叠层结构)、透明导电膜(如ΙΤ0)。 [0008] I) on an insulating flexible substrate roll cleaned (e.g., polyimide), a reflective electrode are sequentially volume (e.g., Ag / ΖηΟ) Preparation of back-to-roll vacuum, the absorbent layer (or a stack of such nip-type amorphous silicon layer structure), a transparent conductive film (e.g. ΙΤ0). 真空腔室采用盖板、挡板或其他技术,使得吸收层的宽度小于背反射电极,透明导电膜的宽度小于吸收层; Use of a vacuum chamber cover, baffle, or other techniques, so that the absorbent layer is smaller than the width of the back reflective electrode, a transparent conductive film is smaller than the width of the absorbent layer;

[0009] 2)剪裁,将真空制备的电池卷剪裁成合适的尺寸; [0009] 2) tailoring the battery prepared vacuum roll cut to size;

[0010] 3)激光划线,激光按照折线型一直刻蚀到电池底部,将整个大电池分成许多小电池。 [0010] 3) laser scribing, laser etching according mansard up to the bottom of the battery, the whole battery is divided into a large number of small cells. 激光器采用Nd = YVO4全固态ニ极管泵浦激光器,激光波长1064nm,脉冲宽度15〜25ns ;[0011] 4)丝网印刷绝缘浆料,将绝缘浆料印入激光划线的刻槽内; Nd = YVO4 laser using Ni diode pumped solid-state laser with a wavelength of 1064 nm, pulse width 15~25ns; [0011] 4) screen printing an insulating paste, the insulating paste printed into the engraved grooves laser scribing;

[0012] 5)丝网印刷导电浆料,将设计好的导电线条印在电池上,相邻的电池通过导电线条实现串联; [0012] 5) screen-printing a conductive paste, the conductive lines designed printed on the battery, adjacent cells in series through a conductive line achieved;

[0013] 6)贴附引线并封装,制得柔性薄膜太阳电池集成组件。 [0013] 6) attached to the package and the leads, the flexible thin film solar cell was prepared integrated component.

[0014] 本发明方法中,柔性薄膜太阳电池集成组件的制备顺序为真空依次生长背反射电极、吸收层、透明电极;激光刻蚀背反射电极、吸收层、透明电极,一直刻到衬底,刻线为折线;丝网印刷绝缘浆料于刻槽处,并固化绝缘浆料,绝缘线条同样为折线;丝网印刷ー些导电线条,使得相邻电池的背反射电极与透明电极连接,并固化导电浆料,形成互联。 [0014] The method of the present invention, the preparation order of the flexible thin film solar cell module is integrated back reflector electrode are sequentially grown in vacuo, the absorbent layer, a transparent electrode; laser etching back reflector electrode, the absorption layer, a transparent electrode, has been carved into the substrate, polyline engraved lines; screen printing an insulating paste in the groove, and solidified insulating paste, insulating the same line as a line; screen printing ー plural conductive lines, such that adjacent cell back reflective electrode is connected to the transparent electrode, and curing the conductive paste to form a network.

[0015] 本发明方法中,激光刻蚀同时将反射电极、吸收层、透明电极一次性刻蚀到底,非选择性激光刻蚀容易实现;绝缘线条完全覆盖并填充折形刻槽区,保护了刻槽区域,同时阻挡了后面的导电线条不与该区域短路;线条连接相邻两个子电池的背放射电极与透明电极,形成互联。 [0015] The method of the present invention, the laser etching while the reflective electrode, the absorption layer, the transparent electrode is etched in the end-time, non-selective laser etching easily realized; completely covered and filled with an insulating fold lines shaped notch area, protected groove region, while blocking conductive line is not short-circuited to the back region; back line connecting two adjacent subcells radiation electrode and the transparent electrode is formed interconnect.

[0016] 采用本发明制备的柔性薄膜太阳电池集成组件,可以提高电池组件的开压,简化组件拼接的复杂性,组件的可靠性也会有很大的提高。 [0016] Prepared according to the present invention, a flexible thin film solar cell integrated assembly can be increased opening pressure of the battery assembly, simplify the complexity of assembly of the splice, component reliability will be greatly improved. 具体优点有:(I)电池制备可采用卷对卷制备;(2)激光划线直接刻到衬底。 Specific advantages include: Preparation of (I) can be roll-to-cell volume was prepared; (2) laser scribing engraved directly to the substrate. 柔性薄膜电池通常采用substrate与nip结构,这给柔性薄膜太阳电池选择性刻蚀带来了很大的挑战。 Cells typically employ a flexible film substrate and the nip structure, which gives the flexible thin film solar selective etching is a big challenge. 激光划线直接刻到衬底,这大大降低了柔性薄膜电池激光划线的难度。 Scribing laser engraved directly to the substrate, which greatly reduces the difficulty of the flexible thin-film batteries laser scribing. (3)避开了金属丝栅线技术,采用了成熟的丝网印刷技木。 (3) avoid the wire grid wire technique, using a screen printing technique mature wood. (4)巧妙的采用丝网印刷绝缘线条来防止导电线条与激光刻槽处的短路,同时保护了激光刻槽区域。 (4) by screen printing an insulating clever lines to the conductive lines and prevent a short circuit at the laser-patterning, laser while protecting the groove area.

附图说明 BRIEF DESCRIPTION

[0017] 图I为卷对卷真空制备柔性薄膜太阳电池俯视图。 [0017] Figure I is a flexible thin film solar cells prepared a plan view of the vacuum roll to roll.

[0018] 图2为激光切割柔性薄膜太阳电池的示意图。 [0018] FIG 2 flexible thin film solar cell cutting laser. FIG.

[0019] 图3为丝网印刷绝缘浆料填充刻槽区的结构示意图。 [0019] FIG. 3 is a schematic view of a screen printing an insulating paste is filled in the groove area.

[0020] 图4为固化后的柔性薄膜电池集成组件的俯视图。 [0020] FIG. 4 is a top plan view of a flexible integrated thin-film battery module after the curing.

[0021] 图5为柔性非晶硅薄膜太阳电池集成组件的IV特性图(含4个子电池,单结,每个子电池面积6cm2)。 [0021] FIG. 5 is a characteristic view of the flexible IV amorphous silicon thin film solar cell module integrated (including 4 sub-cells, a single junction, each sub-cell area 6cm2).

具体实施方式 Detailed ways

[0022] 下面结合附图和具体实施例,进ー步阐述本发明。 [0022] conjunction with the accompanying drawings and the following specific examples, intake ー further illustrate the invention. 这些实施例应理解为仅用于说明本发明而不用于限制本发明的保护范围。 These examples should be understood as merely illustrative of the invention and are not intended to limit the scope of the present invention. 在阅读了本发明记载的内容之后,本领域技术人员可以对本发明作各种改动或修改,这些等效变化和修饰同样落入本发明权利要求所限定的范围。 After having read the description of the present invention, those skilled in the art that various changes or modifications may be made to the present invention, such equivalent variations and modifications are also within the claims of the invention defined in the scope.

[0023] I、将ー卷柔性聚酰亚胺(厚度125um)依次经过真空腔室,磁控溅射生长Ag/ZnO背反射层,Ag厚300nm, ZnO厚500nm ;非晶娃nip结构,η层30nm, i层300nm, p层15nm、ITO透明导电膜,ITO厚80nm。 [0023] I, the volume ー flexible polyimide (thickness 125um) sequentially passes through the vacuum chamber, the growth magnetron sputtering Ag / ZnO back reflection layer, Ag thickness 300nm, ZnO 500 nm thick; baby nip amorphous structure, [eta] layer 30nm, i layer 300nm, p layer 15nm, ITO transparent conductive film, ITO thickness of 80nm. 真空腔室采用盖板、挡板或其他技术,使得吸收层非晶硅的宽度小于背反射电极Ag/ZnO,透明导电膜ITO的宽度小于吸收层非晶娃。 Use of a vacuum chamber cover, baffle, or other techniques, so that the amorphous silicon layer is smaller than the width of the absorbent back reflective electrode Ag / ZnO, ITO transparent conductive film width is smaller than the absorbent layer amorphous baby.

[0024] 2、将生长好的电池卷裁剪成合适的尺寸,裁剪好的电池片如图1,衬底在最底下,图中不可见;[0025] 3、激光切割柔性薄膜太阳电池,激光按照折线型将电池分割成许多小电池,见图2,虚线为激光切割槽; [0024] 2, good growth of the cell volume cut to size, good battery cut sheet 1, in the bottom of the substrate, not visible; [0025] 3, the flexible thin film solar cell laser cutting, laser according to the broken-line divided into many small battery cells, shown in Figure 2, the dashed line laser cut groove;

[0026] 4、丝网印刷绝缘浆料,在激光划线区覆盖绝缘浆料,如图3所示,该浆料通常为低温固化浆料,如固化条件150°C X30min ; [0026] 4, screen printing an insulating paste, the insulating paste to cover the laser scribing area, shown in Figure 3, the slurry is generally low temperature curing paste, such as curing conditions 150 ° C X30min;

[0027] 5、丝网印刷导电浆料。 [0027] 5, screen-printing a conductive paste. 导电线既作为透明导电膜上的栅线,也作为相邻子电池的互连线,如图4所示。 Electrically conductive wire as both the transparent conductive film of the gate line, but also as an adjacent sub-cell interconnects, as shown in FIG. 该浆料通常为低温固化浆料,如固化条件150°C X30min。 The slurry usually the slurry low temperature curing, the curing condition such as 150 ° C X30min. [0028] 6、在两侧的子电池上引出连接线,并涂覆一层保护膜,如EVA等,制得柔性薄膜太阳电池集成组件。 [0028] 6, connecting lines drawn on both sides of the subcell, and coated with a protective film, such as EVA, etc., to obtain a flexible thin film solar cell integrated assembly.

[0029] 本实施例制得的柔性薄膜太阳电池集成组件IV特性如图5所示。 The flexible thin film solar cell integrated component IV characteristics [0029] The present embodiment is obtained as shown in FIG.

Claims (3)

1. 一种柔性硅基薄膜太阳电池集成组件的制备方法,其特征是,包括如下步骤: 1)在清洗过的绝缘柔性衬底卷上,依次卷对卷真空制备背反射电极、吸收层和透明导电膜;真空腔室采用盖板或挡板,使得吸收层的宽度小于背反射电极,透明导电膜的宽度小于吸收层; 2)剪裁:将真空制备的电池卷剪裁成合适的尺寸; 3)激光划线:激光按照折线型一直刻蚀到电池底部,将整个剪裁好的大电池分成许多小电池; 4)丝网印刷绝缘浆料:将绝缘浆料印入激光划线的刻槽内; 5)丝网印刷导电浆料:将导电线条印在电池上,相邻的电池通过导电线条实现串联; 6)贴附引线并封装。 A method for producing a flexible thin-film silicon solar cell integrated assembly, characterized by comprising the steps of: 1) roll on an insulating flexible substrate cleaned sequentially roll back reflection electrode prepared volume in vacuo, and the absorbent layer the transparent conductive film; vacuum chamber using covers or guards, so that the absorbent layer is smaller than the width of the back reflective electrode, a transparent conductive film is smaller than the width of the absorbent layer; 2) cut: the prepared battery vacuum roll cut to size; 3 ) laser scribing: laser etching according to the broken-line up to the bottom of the battery, a large battery entire cropped into small battery; 4) screen printing an insulating paste: insulating paste printed into grooves engraved laser scribing ; 5) screen-printing a conductive paste: conductive lines printed on the battery, adjacent cells in series through the conductive lines achieved; 6) and attached to the package leads.
2.根据权利要求I所述的一种柔性硅基薄膜太阳电池集成组件的制备方法,其特征是,步骤I)中,绝缘柔性衬底卷为聚酰亚胺,背反射电极为Ag/ZnO,吸收层为nip型非晶硅或叠层结构,透明导电膜为IT0。 The production method I of the silicon thin film solar cell is a flexible integrated assembly as claimed in claim, characterized in that, in step I), the volume of the insulating polyimide flexible substrate, the back of the reflective electrode Ag / ZnO the absorbent layer is a laminate structure or a nip-type amorphous silicon, a transparent conductive film IT0.
3.根据权利要求I或2所述的一种柔性硅基薄膜太阳电池集成组件的制备方法,其特征是,步骤3)中,激光器采用NchYVO4全固态二极管泵浦激光器,激光波长1064nm,脉冲宽度15 〜25ns。 The preparation method I or a flexible thin-film silicon solar cell integrated assembly according to claim 2, characterized in that, in step 3), using a laser diode pumped solid-state NchYVO4 laser with a wavelength of 1064 nm, a pulse width 15 ~25ns.
CN2011101823197A 2011-06-30 2011-06-30 Method for manufacturing soft silicon-based thin film solar cell integrated component CN102856425A (en)

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CN104377273A (en) * 2014-11-14 2015-02-25 厦门惟华光能有限公司 Roll-to-roll production equipment and method for perovskite thin film solar cell assembly
CN106229354A (en) * 2016-08-26 2016-12-14 泰州中来光电科技有限公司 A kind of solaode string and preparation method thereof and assembly, system
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TWI660518B (en) * 2014-05-27 2019-05-21 美商太陽電子公司 Shingled solar cell module

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