CN103579037B - Utilize thickness detection apparatus and the method for digit optical technology - Google Patents
Utilize thickness detection apparatus and the method for digit optical technology Download PDFInfo
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- CN103579037B CN103579037B CN201310311671.5A CN201310311671A CN103579037B CN 103579037 B CN103579037 B CN 103579037B CN 201310311671 A CN201310311671 A CN 201310311671A CN 103579037 B CN103579037 B CN 103579037B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/022—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by means of tv-camera scanning
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/108—Beam splitting or combining systems for sampling a portion of a beam or combining a small beam in a larger one, e.g. wherein the area ratio or power ratio of the divided beams significantly differs from unity, without spectral selectivity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2225/00—Details relating to assemblies covered by the group H01L25/00 but not provided for in its subgroups
- H01L2225/03—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00
- H01L2225/04—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers
- H01L2225/065—All the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/648 and H10K99/00 the devices not having separate containers the devices being of a type provided for in group H01L27/00
- H01L2225/06503—Stacked arrangements of devices
- H01L2225/06596—Structural arrangements for testing
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- Spectroscopy & Molecular Physics (AREA)
- Optics & Photonics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Abstract
The invention discloses a kind of thickness detection apparatus and method thereof of utilizing digit optical technology. Thickness detection apparatus and the method thereof of utilizing digit optical technology of the present invention, comprising: light source, for ray; Beam splitter, for reflecting from the light of light source radiation or the light that reflects by detected object; Lens section, for converging to detected object by the light being reflected by beam splitter; Reflection type optical path transformation component, for reflecting selectively from the light of beam splitter transmission; Optical splitter, for analyzing from the light of reflection type optical path transformation component reflection to obtain the thickness information of described detected object. Therefore according to the present invention, provide a kind of reflection that utilizes light can make minimum optical losses, and can detect the thickness detection apparatus that utilizes digit optical technology and the method thereof of multiple surveyed area thickness simultaneously.
Description
Technical area
The present invention relates to a kind of thickness detection apparatus and method thereof of utilizing digit optical technology, in more detail, relate to a kind of light of reflection type optical path transformation component reflection from beam splitter transmission that passes through, thereby make minimum optical losses, and can detect the thickness detection apparatus that utilizes digit optical technology and the method thereof of the thickness in place, many places by accommodation reflex angle simultaneously.
Background technology
In semiconductor technology and FPD technique, determine in the factors of product quality, the shared proportion of the control of thin layer thickness is larger, therefore, in technique, must directly monitor this. " thin layer " refers to the layer with atomic thin thickness forming at substrate surface at basalis, and typically referring to thickness is the layer of the scope of several nm～a few μ m. For this thin layer is applied to special-purpose, be necessary to understand thickness, composition, roughness and other physical optics character of thin layer.
Particularly, recently in order to improve the integrated level of semiconductor element, generally on substrate, form Multilayer ultrathin rete. In order to develop this highly integrated semiconductor element, correctly control the physical property that the larger factor of its properties influence is comprised to the film of thin layer thickness.
Thickness detection apparatus in the past has to be made, after the light of beam splitter transmission passes through the LCD for transmitted ray, to incide the structure of optical splitter.
This invention in the past there will be light loss to cause obtaining the problem for the correct information of detected object thickness because light sees through LCD.
And, while obtaining the thickness information for a detected object part, also to carry out Thickness Analysis to detected object entirety, if the membrane structure of each surveyed area of a detected object is different, need to carry out repeated detection, can cause detection time elongated.
Summary of the invention
The present invention proposes in view of the above problems, and its object is to provide a kind of thickness detection apparatus and method thereof of utilizing digit optical technology, and this device and method utilizes light reflection can make minimum optical losses.
And, the object of this invention is to provide a kind of thickness detection apparatus and method thereof of utilizing digit optical technology, this device and method makes to incide different optical splitters from the light of different multiple surveyed area incidents by controlling reflection type optical path transformation component, thereby can detect the thickness of multiple surveyed areas simultaneously.
In order to achieve the above object, the thickness detection apparatus that utilizes digit optical technology of the present invention comprises: light source, for ray; Beam splitter, for reflecting from the light of light source radiation or the light of transmission detected object reflection; Lens section, for converging to detected object by the light being reflected by beam splitter; Reflection type optical path transformation component, for reflecting selectively from the light of beam splitter transmission; And optical splitter, for analyzing from the light of reflection type optical path transformation component reflection to obtain the thickness information of described detected object.
At this preferably, optical splitter arranges as multiple, and reflection type optical path transformation component is the light from multiple the different surveyed area reflections of detected object with each spectrophotometric reflection.
And, can further include display part, the image for the light taking from beam splitter transmission as benchmark demonstration detected object.
At this, display part preferably receives from the light of light chopper portion reflection to show the image of described detected object.
And, can further comprise fill-in light beam splitter, it is configured in the light path between beam splitter and reflection type optical path transformation component, for reflect or transmission from the light of beam splitter transmission. Display part can receive from light and divide the light of adaptation transmission and show the image of detected object.
At this, can further comprise light absorption unit, for absorbing and removing the light beyond light from from reflection type optical path transformation component to spectrophotometric reflection.
And, in order to achieve the above object, the invention provides a kind of thickness detecting method, the thickness detection apparatus that utilizes digit optical technology that it utilizes described in Section 3 mode, comprising: storing step, for storing the image of detected object; Coupling step, the image of storing for movement images storing step and be presented at the image on described display part, to judge whether surveyed area is shown in display part; Angle of reflection regulating step, for the angle of reflection of accommodation reflex type light chopper portion, so that reflex to respectively multiple optical splitters from the light of different multiple surveyed area reflections; With thickness detecting step, be basis for the light to obtain from optical splitter, measure the thickness of described detected object.
And, coupling step can repeatedly proceed to surveyed area and all be presented at display part, and comprise: centering step, in the time only having a part for surveyed area to be shown in display part, detected object is moved so that surveyed area is all shown in the image that is presented at display part, mate again afterwards step; And search step, in the time that surveyed area is not shown in display part, detected object is moved to till display part shows surveyed area some or all of along the hand of spiral, mate again afterwards step.
At this, thickness detecting step can comprise: reflectance detecting step, according to the reflectance of the spectral detection light of the light obtaining from optical splitter; Reflectance comparison step, the reflectance relatively measuring and the reflectance arranging with theoretical model, to search for close copy; With thickness output step, output is equivalent to the one-tenth-value thickness 1/10 of the model searching in reflectance comparison step.
According to the present invention, provide one to utilize reflection of light to make minimum optical losses, thereby can improve the thickness detection apparatus that utilizes digit optical technology and the method thereof of detection efficiency.
And the minimum mirror of controlling reflection type optical path transformation component makes to incide each optical splitter at the light of different surveyed area reflection, even if the membrane structure difference of surveyed area also can detect the thickness of surveyed area thus simultaneously.
And, the image of the detected object that can measure from thickness detection apparatus with visual confirmation by display part.
And, can absorb and remove the light beyond the light from reflection type optical path transformation component to spectrophotometric reflection by light absorption unit.
And, in the time there is not whole surveyed area in detection range, can, by changing the position of lens section or detected object, make automatically to comprise whole surveyed areas, thereby improve detection efficiency.
Brief description of the drawings
Fig. 1 is the schematic diagram that schematically represents the thickness detection apparatus that utilizes digit optical technology of the first embodiment of the present invention.
Fig. 2 is the schematic diagram that schematically changes the angle of reflection of reflection type optical path transformation component in the thickness detection apparatus that utilizes digit optical technology shown in presentation graphs 1.
Fig. 3 be schematically change in the thickness detection apparatus that utilizes digit optical technology shown in presentation graphs 1 reflection type optical path transformation component subregion angle of reflection and detect the figure of the reflectance in two different surveyed areas of membrane structure, wherein Fig. 3 a is the schematic diagram that is schematically illustrated in the appearance that in digital micro-mirror, light reflects to three devices simultaneously, Fig. 3 b is the top view that schematically represents the appearance of detected object, Fig. 3 c is the cutaway view that schematically represents the membrane structure of the first surveyed area and the second surveyed area, Fig. 3 d is schematically illustrated in the upward view of controlling respectively each regional reflex degree in digital micro-mirror, Fig. 3 e is the chart that represents simultaneously to detect two different regions of membrane structure reflectance curve afterwards.
Fig. 4 is the schematic diagram that schematically represents the thickness detection apparatus that utilizes digit optical technology of the second embodiment of the present invention.
Fig. 5 is the precedence diagram that schematically represents the thickness detecting method that utilizes digit optical technology of the first embodiment of the present invention.
Fig. 6 is the precedence diagram that schematically mates step in the thickness detecting method that utilizes digit optical technology shown in presentation graphs 5.
Fig. 7 is the schematic diagram of the direction in searching and detecting region in the surveyed area search step shown in presentation graphs 6 schematically.
Description of reference numerals
100: thickness detection apparatus
110: light source
120: beam splitter
130: lens section
140: reflection type optical path transformation component
150: optical splitter
160: display part
200: thickness detection apparatus
225: fill-in light beam splitter
270: light absorption unit
S100: thickness detecting method
S110: image storage step
S120: coupling step
S121: centering step
S122: surveyed area search step
S130: angle of reflection regulating step
S140: thickness detecting step
S141: reflectance detecting step
S142: reflectance comparison step
S143: thickness output step
Detailed description of the invention
Before describing, it should be explicitly made clear at this point, in many embodiment, use identical Reference numeral and in the first embodiment, carry out representational explanation for the structural element with same structure, the structure that is different from the first embodiment is only described in other embodiments.
Below, the thickness detection apparatus that utilizes digit optical technology and the method thereof of the first embodiment that present invention will be described in detail with reference to the accompanying.
Fig. 1 is the schematic diagram that schematically represents the thickness detection apparatus that utilizes digit optical technology of the first embodiment of the present invention.
As shown in Figure 1, the thickness detection apparatus that utilizes digit optical technology of the first embodiment of the present invention comprises light source 110, beam splitter 120, lens section 130, reflection type optical path transformation component 140, optical splitter 150 and display part 160.
Described light source 110 is thickness in order to measure detected object 105 and beamy, can use the lamp of the various light sources that comprise Halogen lamp LED. But also can arrange as white light source, but be not limited thereto.
Described beam splitter 120 guides light path, makes it to incide lens section 130 described later to reflect from the light of light source 110 incidents, or the light that transmission is reflected from detected object 105 makes it to incide reflection type optical path transformation component 140 described later.
The light reflecting from beam splitter 120 is converged to detected object 105 by described lens section 130. The concrete structure of lens section 130 is the known technology of people, in this detailed.
Described reflection type optical path transformation component 140 reflects from the light of the thickness information with detected object 105 of beam splitter 120 transmissions, and guides light path to incide optical splitter 150 described later or display part 160. The surface that occurs reflection at reflection type optical path transformation component 140 is made up of the minimum mirror that can control respectively, angle of reflection that therefore can light regulating. According to the first embodiment of the present invention 100, reflection type optical path transformation component 140 is made up of digital micromirror elements (DigitalMicromirrorDevice:DMD), but is not limited thereto. Also can comprise all devices that light reflection can be become have in different regions different angles.
Fig. 2 is the schematic diagram that schematically changes the angle of reflection of reflection type optical path transformation component in the thickness detection apparatus that utilizes digit optical technology shown in presentation graphs 1. Fig. 3 be schematically change in the thickness detection apparatus that utilizes digit optical technology shown in presentation graphs 1 reflection type optical path transformation component subregion angle of reflection and detect the figure of the reflectance in two different surveyed areas of membrane structure, wherein (a) is the schematic diagram that is schematically illustrated in the appearance that in digital micro-mirror, light reflects to three devices simultaneously, (b) be the top view that schematically represents the appearance of detected object, (c) be the cutaway view that schematically represents the membrane structure of the first surveyed area and the second surveyed area, (d) be to be schematically illustrated in the upward view of controlling respectively each regional reflex degree in digital micro-mirror, (e) be the chart that represents simultaneously to measure two different regions of membrane structure reflectance curve afterwards.
In other words, the angle of reflection of the mirror of adjustable reflection type optical path transformation component 140 is all identical, and also each mirror of adjustable reflection type optical path transformation component 140 all has different angles of reflection. Particularly, be adjusted to and there is different angle of reflection, even if so that there are the different multiple regions that will detect on detected object 105, also can regulate the mirror corresponding to the reflection type optical path transformation component 140 of respective regions, make light incide each optical splitter 150. Thus, even if the membrane structure of the multiple zoness of different that exist on detected object 105 is different, also can utilize independent optical splitter 150 to analyze the light in regional reflection, can detect simultaneously.
Described optical splitter 150 is the devices for detection of the spectrum of the light reflecting from detected object 105. According to the first embodiment of the present invention 100, comprise the first optical splitter 151 and the second optical splitter 152, but be not limited thereto, but also can arrange more than three according to user's needs.
As shown in Figure 3 a, the first optical splitter 151 is arranged on light and forms the angle of reflection of 100 ° and the light path that reflects from reflection type optical path transformation component 140, and the second optical splitter 152 is arranged on light and forms the angle of reflection of 80 ° and the light path that reflects from reflection type optical path transformation component 140. But be not limited to this angle, as long as each optical splitter 150 is arranged on the light path from reflection type optical path transformation component 140 with different angles of reflection.
For example, as shown in Figure 3 b, if measure the first surveyed area 106 and the second surveyed area 107 that exist on detected object 105 simultaneously, as shown in Figure 3 d, control and there are 100 ° of angles of reflection corresponding to the first reflecting part 141 on the reflection type optical path transformation component 140 of the first surveyed area 106, the second reflecting part 142 corresponding to the second surveyed area 107 has 80 ° of angles of reflection, thereby make the light reflecting from the first surveyed area 106 and the first reflecting part 141 incide the first optical splitter 151, the light reflecting from the second surveyed area 107 and the second reflecting part 142 incides the second optical splitter 152. thus, as shown in Figure 3 c, even if the first surveyed area 106 is different from the membrane structure of the second surveyed area 107, due to as shown in Figure 3 e, on the first optical splitter 151 and the second optical splitter 152, can detect the spectrum of light simultaneously, therefore also can detect the thickness in two regions simultaneously.
Described display part 160 is the shape of shot detection object 105 device that image is provided to outside. The region of being taken by display part 160 is identical with the surveyed area that will detect thickness in the first embodiment of the present invention 100. In coupling step S120 described later to photographing the region of display part 160 and the image of stored detected object 105 compares, to judge whether surveyed area is included in the detection range of the first embodiment of the present invention 100.
Being as the criterion with the light path of the light that radiates from light source 110, to describe the configuration of the first embodiment of the present invention 100 in detail as follows: light, from light source 110 radiation, is reflected and scioptics portion 130 by beam splitter 120. The light of scioptics portion 130 is reflected and transmitted light beam splitter 120 after inciding detected object 105. After the light of beam splitter 120 transmissions incides reflection type optical path transformation component 140, be reflected and incide optical splitter 150 or display part 160.
In addition, between beam splitter 120 and reflection type optical path transformation component 140, can be provided with condenser, for converging from the light of beam splitter 120 transmissions and making it to incide reflection type optical path transformation component 140 sides, but be not limited thereto.
And, between reflection type optical path transformation component 140 and optical splitter 150, can be provided with the optical fiber of guiding light path or converge the condenser that incides each optical splitter 150, but being not limited thereto.
Describe the How It Works S100 of the first embodiment of the thickness detection apparatus that utilizes above-mentioned digit optical technology below, in detail.
Fig. 5 is the precedence diagram that schematically represents the thickness detecting method that utilizes digit optical technology of the first embodiment of the present invention, Fig. 6 is the precedence diagram of the coupling step in the thickness detecting method that utilizes digit optical technology shown in presentation graphs 5 schematically, and Fig. 7 is the schematic diagram that is schematically illustrated in the direction in searching and detecting region in the surveyed area search step shown in Fig. 6.
As shown in Figure 5, the method for measuring thickness S100 that utilizes digit optical technology of the first embodiment of the present invention comprises image storage step S110, coupling step S120, angle of reflection regulating step S130 and thickness detecting step S140, can detect the thickness of detected object 105 by carrying out these processes.
Described image storage step S110 is the step that stored the image of detected object 105 for recognition detection region before carrying out thickness detection. , comprise that with optical system shot detection object 105 image itself that the region of surveyed area obtains saves as master pattern, and apply in coupling step S120 described later.
Described coupling step S120 is the master pattern that stores in movement images storing step S110 and photograph the image on display part 160, to judge whether surveyed area is included in the step in the detection range of the first embodiment of the present invention 100.
As shown in Figure 6, till coupling step S120 preferably repeatedly proceeds to surveyed area and is all presented on display part 160, when only showing a part for surveyed area or do not show completely on display part 160, carry out centering step (centeringprocess) S121 or surveyed area search step S122.
Described centering step S121 is the step of carrying out only show surveyed area a part of on display part 160 time, is the displacement that makes detected object 105 or lens section 130, makes surveyed area all be presented at the step on display part 160.
According to the first embodiment of the present invention 100, the master pattern storing in movement images storing step S110 in centering step S121 be presented at the image on display part 160, calculate the position of detecting at present, utilize the positional value calculating to calculate the alternate position spike between itself and surveyed area and make detected object 105 or lens section 130 moves.
As shown in Figure 7, described surveyed area search step S122 is the step of carrying out in the time that surveyed area is not presented at display part 160 at all, is because the master pattern that is difficult to store in application image storing step S110 just carries out this step.
Thereby surveyed area search step S122 is shifted detected object 105 or lens section 130 and the step of searching for the searching and detecting region, immediate region from the region that is presented at display part along the hand of spiral. According to the first embodiment of the present invention 100, if do not show surveyed area in display part 160, along counterclockwise detected object 105 or lens section 130 being moved and filmed image.
At this, a whole or part that repeatedly proceeds to surveyed area is presented at display part 160, in the time all showing, carries out angle of reflection regulating step S130, carries out centering step S121 in the time that a part shows.
In addition, be that above-mentioned coupling step S120 is carried out in two regions when above too at surveyed area. If multiple surveyed areas all can be included in detection range, mate step S120 until multiple surveyed area is all included in detection range. If multiple surveyed areas cannot all be included in detection range, mate respectively step S120 at each surveyed area.
As shown in Figure 2, the angle of reflection of described angle of reflection regulating step S130 accommodation reflex type light chopper portion 140 makes from the light reflection of surveyed area reflection to optical splitter 150. That is, if the angle of reflection of reflection type optical path transformation component 140 is adjusted to 100 °, light incides the first optical splitter 151, if angle of reflection is adjusted to 80 °, light incides the second optical splitter 152.
And as shown in Figure 3, surveyed area is two regions, is also identical with two optical splitters 150 while making light incident simultaneously. As mentioned above, the reflecting surface of reflection type optical path transformation component 140 comprises numerous minimum mirror, and each mirror can be controlled respectively. Utilize this mirror, if the angle of reflection of the first reflecting part 141 is adjusted to 100 °, the angle of reflection of the second reflecting part 142 is adjusted to 80 °, and the light reflecting from the first surveyed area 106 incides the first optical splitter 151, and the light reflecting from the second surveyed area 107 incides the second optical splitter 152. Certainly, when surveyed area is not only two, more than three time, also can increase optical splitter 150 by further, and make the part angle of reflection of reflection type optical path transformation component 140 there is the angle of reflection different from the angle of reflection of the first reflecting surface 141 and the second reflecting surface, thereby can carry out thickness detection simultaneously.
Described thickness detecting step S140 is the spectrum that is irradiated into the light that is mapped to optical splitter 150, and detects reflection of light degree and measure based on this step of the thickness of detected object 105. According to first embodiment of the present invention S100, thickness detecting step S140 comprises reflectance detecting step S141, reflectance comparison step S142 and thickness output step S143. But thickness detecting step S140 is not limited to above-mentioned steps.
Described reflectance detecting step S141 incides the spectrum of the light of optical splitter by analysis, utilize the light quantity data of each wavelength of light to calculate the reflectance of surveyed area.
Described reflectance comparison step S142 is by the reflectance and the reflectance obtaining with theoretical modeling of the surveyed area that obtains in reflectance detecting step S141 relatively, and when identical or while thering is no same model, search has the step of the model of similar reflectance.
Described thickness output step S143 is the step that output is equivalent to the value of the thickness of the model searching in reflectance comparison step S142.
The thickness detecting method S100 of the first embodiment of the present invention mates step S120 is included in detection range surveyed area, and the degree of accuracy detecting to improve thickness especially more can improve its effect in the time making it automation.
And, the angle of reflection of the adjustable whole minimum mirrors that are included in reflection type optical path transformation component 140 or only regulate the angle of reflection of part mirror, particularly, in the time only regulating the angle of reflection of part mirror, can detect the thickness of multiple surveyed areas simultaneously, therefore can shorten detection time.
Secondly, describe the thickness detection apparatus that utilizes digit optical technology and the method thereof of the second embodiment of the present invention in detail.
Fig. 4 is the schematic diagram that schematically represents the thickness detection apparatus that utilizes digit optical technology of the second embodiment of the present invention.
As shown in Figure 4, the thickness detection apparatus that utilizes digit optical technology 200 of the second embodiment of the present invention comprises light source 110, beam splitter 120, lens section 130, reflection type optical path transformation component (DigitalMicromirrorDevice calls " reflection type optical path transformation component " in the following text) 140, optical splitter 150, display part 160, fill-in light beam splitter 225 and light absorption unit 270.
Described fill-in light beam splitter 225 is arranged in the light path between beam splitter 120 and reflection type optical path transformation component 140, for by the light from beam splitter 120 transmissions to display part 160 lateral reflections, or to the 140 side transmissions of reflection type optical path transformation component.
That is, be different from the first embodiment, be provided with fill-in light beam splitter 225, be not by the light reflecting from reflection type optical path transformation component 140 to display part 160 side incidents, but by fill-in light beam splitter 225, the light from beam splitter transmission is reflected to display part 160.
Described display part 160 is arranged to have same structure with the display part 160 of the first embodiment 100, but its position is disposed in the position of the light incident of reflecting from reflection type optical path transformation component 140 unlike the first embodiment 100, but is disposed in the position of the light incident of reflecting from fill-in light beam splitter 225. By such setting, display part 160 is not subject to the impact of the angle of reflection of reflection type optical path transformation component 140, can always show the image for detection range.
Described light absorption unit 270 is absorb and remove the device that reflexes to the light outside the light of optical splitter 150 from reflection type optical path transformation component 140. In the time that reflection type optical path transformation component 140 forms the first reflecting part 141 and the second reflecting part 142 and reflect with the first optical splitter 151 or the second optical splitter 152 light reflecting from the first surveyed area 106 or the second surveyed area 107, the light reflection reflecting on the face in reflection type optical path transformation component 140 except the first reflecting part 141 or the second reflecting part 142 is to light absorption unit and be removed.
The How It Works S200 of the second embodiment of the above-mentioned thickness detection apparatus that utilizes digit optical technology is identical with the How It Works S100 of the first embodiment, therefore detailed. ; the second embodiment 200 has changed from inciding the position of reflection type optical path transformation component 140 light before to detected object 105; and increase and absorbed and remove from the light absorption unit 270 of the light of surveyed area external reflectance; the just configuration difference of each structure; there is identical function with the first embodiment 100, and the method for the thickness of measurement detected object 105 is identical.
The present invention is not limited to above-described embodiment, but in the scope of claims, can be implemented as the embodiment of various ways. Therefore not departing from the scope of claims the present invention for required protection spirit, the various changes that those of ordinary skill in the art carry out and modify and all belong to protection scope of the present invention within.
Claims (6)
1. a thickness detection apparatus that utilizes digit optical technology, is characterized in that, comprising:
Light source, for ray;
Beam splitter, for reflecting from the light of described light source radiation or the light that reflects by detected object;
Lens section, for converging to detected object by the light being reflected by described beam splitter;
Reflection type optical path transformation component, for receiving from the light of described beam splitter transmission, and will be right from described detectionThe light of the different surveyed area reflection of elephant, along different light path reflections, makes the multiple regions at described detected objectCan detect thickness; And
Multiple optical splitters, obtain described detected object for analyzing from the light of described reflection type optical path transformation component reflectionThickness information; And
Display part, is benchmark for the light taking from described beam splitter transmission, receives the reflection from described light chopper portionLight and show the image of described detected object,
Described display part is by comparing the image of detected object and being presented at the image on described display part, described in judgingWhether the surveyed area in detected object is shown in described display part,
Described reflection type optical path transformation component is by regulating the angle of reflection of described reflection type optical path transformation component, so that from described inspectionThe light of surveying different multiple surveyed area reflections of object reflexes to respectively in each optical splitter.
2. the thickness detection apparatus that utilizes digit optical technology according to claim 1, is characterized in that,
Further comprise fill-in light beam splitter, be configured between described beam splitter and described reflection type optical path transformation componentIn light path, for reflect or transmission from the light of described beam splitter transmission,
Described display part receives from the light of described fill-in light beam splitter reflection to show the image of described detected object.
3. the thickness detection apparatus that utilizes digit optical technology according to claim 1, is characterized in that,
Further comprise light absorption unit, for absorbing and removing from described reflection type optical path transformation component to described spectrophotometric reflectionLight beyond light.
4. a thickness detecting method, is characterized in that,
Utilize according to the thickness detection apparatus that utilizes digit optical technology described in any one in claims 1 to 3, instituteThe method of stating comprises:
Storing step, for storing the image of described detected object;
Coupling step, for comparing the image of storing at described image storing step and being presented on described display partImage, to judge whether the surveyed area in described detected object is shown in described display part;
Angle of reflection regulating step, for regulating the angle of reflection of described reflection type optical path transformation component, so that from different multipleThe light of described surveyed area reflection reflexes to respectively multiple described optical splitters; With
Thickness detecting step, as basis, measures the thick of described detected object for the light to obtain from described optical splitterDegree.
5. thickness detecting method according to claim 4, is characterized in that,
Described coupling step repeatedly proceeds to described surveyed area and is all presented at described display part, and comprises:
Centering step, in the time only having a part for described surveyed area to be shown in described display part, makes described detected objectOr described lens section moves, described surveyed area is all shown in the image that is presented at display part, enter again afterwardsRow coupling step; With
Search step, in the time that described surveyed area is not shown in described display part, make described detected object or described inLens section moves to and on described display part, shows the some or all of of described surveyed area along the hand of spiral, afterwardsMate again step.
6. thickness detecting method according to claim 4, is characterized in that,
Described thickness detecting step comprises:
Reflectance detecting step, according to the reflectance of the spectral detection light of the light obtaining from described optical splitter;
Reflectance comparison step, the described reflectance relatively measuring and the reflectance arranging with theoretical model are to search forSimilarly model; With
Thickness output step, output is equivalent to the one-tenth-value thickness 1/10 of the model searching in described reflectance comparison step.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2012-0080475 | 2012-07-24 | ||
| KR1020120080475A KR101388424B1 (en) | 2012-07-24 | 2012-07-24 | Apparatus for measuring a thickness using digital light processing and method using the same |
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| CN103579037A CN103579037A (en) | 2014-02-12 |
| CN103579037B true CN103579037B (en) | 2016-05-25 |
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| CN201310311671.5A Expired - Fee Related CN103579037B (en) | 2012-07-24 | 2013-07-23 | Utilize thickness detection apparatus and the method for digit optical technology |
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| Country | Link |
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| JP (1) | JP5733846B2 (en) |
| KR (1) | KR101388424B1 (en) |
| CN (1) | CN103579037B (en) |
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| CN107742285B (en) * | 2017-09-26 | 2020-11-10 | 内江金鸿曲轴有限公司 | Method for detecting thickness of grinding layer of grinding wheel on machine |
| JP6487579B1 (en) * | 2018-01-09 | 2019-03-20 | 浜松ホトニクス株式会社 | Film thickness measuring apparatus, film thickness measuring method, film thickness measuring program, and recording medium for recording film thickness measuring program |
| KR102421732B1 (en) * | 2018-04-20 | 2022-07-18 | 삼성전자주식회사 | Semiconductor substrate measuring apparatus and plasma treatment apparatus using the same |
| CN111430257B (en) * | 2020-04-02 | 2023-04-07 | 长江存储科技有限责任公司 | Measuring device and method |
Citations (2)
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| CN1821748A (en) * | 2006-03-30 | 2006-08-23 | 西安电子科技大学 | Optical sensor for thin film detection |
| CN101981406A (en) * | 2008-07-30 | 2011-02-23 | 株式会社尼利可 | Film thickness measuring device and film thickness measuring method |
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| JP3361682B2 (en) * | 1995-02-07 | 2003-01-07 | 茂樹 小林 | Imaging target region positioning imaging device, inspection device, shape measurement device, and product manufacturing method |
| JP2001141563A (en) * | 1999-11-17 | 2001-05-25 | Toshiba Corp | Spectrometry, its device, temperature measuring device, and film pressure measurement device |
| JP3585469B2 (en) * | 2002-03-08 | 2004-11-04 | 株式会社半導体先端テクノロジーズ | Coverage inspection method |
| JP2004101466A (en) * | 2002-09-12 | 2004-04-02 | Fuji Photo Optical Co Ltd | Interferometer device comprising unnecessary light eliminator |
| JP2005315742A (en) * | 2004-04-28 | 2005-11-10 | Sony Corp | Measuring apparatus and measuring method |
| US7161667B2 (en) * | 2005-05-06 | 2007-01-09 | Kla-Tencor Technologies Corporation | Wafer edge inspection |
| JP4963544B2 (en) | 2005-10-11 | 2012-06-27 | 株式会社ブイ・テクノロジー | Minute height measuring device |
| JP4725967B2 (en) * | 2006-02-09 | 2011-07-13 | 株式会社ブイ・テクノロジー | Minute height measuring device and displacement meter unit |
| KR100947464B1 (en) * | 2008-02-13 | 2010-03-17 | 에스엔유 프리시젼 주식회사 | Apparatus for measuring thickness |
-
2012
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2013
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1821748A (en) * | 2006-03-30 | 2006-08-23 | 西安电子科技大学 | Optical sensor for thin film detection |
| CN101981406A (en) * | 2008-07-30 | 2011-02-23 | 株式会社尼利可 | Film thickness measuring device and film thickness measuring method |
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| KR101388424B1 (en) | 2014-04-23 |
| JP5733846B2 (en) | 2015-06-10 |
| CN103579037A (en) | 2014-02-12 |
| KR20140014466A (en) | 2014-02-06 |
| JP2014025929A (en) | 2014-02-06 |
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