CN101122456A - Transverse shearing interferometer agglutination checking method - Google Patents
Transverse shearing interferometer agglutination checking method Download PDFInfo
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- CN101122456A CN101122456A CNA2007100185718A CN200710018571A CN101122456A CN 101122456 A CN101122456 A CN 101122456A CN A2007100185718 A CNA2007100185718 A CN A2007100185718A CN 200710018571 A CN200710018571 A CN 200710018571A CN 101122456 A CN101122456 A CN 101122456A
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Abstract
A scuffing detection method for a lateral shearing interferometer is provided. The lateral shearing interferometer to be scuffed is coated evenly with photosensitive glues and is vertically put on a high precision optical plate of a precision adjusting platform. The laser light output by a laser forms into even parallel light on the lateral shearing interferometer to be scuffed. Interference fringes formed on the send out end of the lateral shearing interferometer to be scuffed are received by a digital camera and are displayed in real time on a computer. The CCD pixel number M0 of the digital camera occupied by N0 interference fringes is calculated. Two prisms are moved slightly to read CCD pixel number M of the digital camera occupied by N0 interference fringes. When the CCD pixel number M becomes to be M0, the two prisms are set not to move. The two scuffed prisms are solidified. The invention solves a technical problem in background technology that the lateral shearing amount of the lateral shearing interferometer is hard to be precisely controlled. The error of the lateral shearing amount of the invention can be controlled within 1%.
Description
Technical Field
The invention relates to a gluing and detecting method of a lateral shearing interferometer.
Background
The lateral shearing interferometer is a core component in various spatial modulation type interference spectrometers and interference imaging spectrometers, and the lateral shearing quantity of the lateral shearing interferometer is generated by the semi-transparency and semi-reflectivity of the bonding surfaces of two prisms and incomplete symmetry. Since the lateral shearing magnitude of the lateral shearing interferometer determines the maximum optical path difference OPD of the interferometer max The maximum optical path difference determines the spectral resolution delta sigma,
when the transverse shearing amount of actual gluing and detection is smaller than a design value, the instrument cannot reach the spectral resolution ratio required by the design. When the lateral shearing amount of actual gluing and detection is larger than a designed value, the restored spectrums are mutually aliased due to the fact that the lateral shearing amount is a periodic function. Therefore, the key technology of interferometer gluing is to make the lateral shear amount of actual gluing and detection as close as possible to the design value.
The traditional gluing method of the lateral shearing interferometer mainly depends on the processing precision and the experience of an assembler, and the accuracy control of the lateral shearing amount is difficult.
Disclosure of Invention
The invention aims to provide a gluing detection method of a lateral shearing interferometer, which solves the technical problem that the lateral shearing amount of the lateral shearing interferometer in the background technology is difficult to accurately control.
The technical solution of the invention is as follows:
a gluing detection method of a lateral shearing interferometer comprises the following implementation steps:
(i) Uniformly coating optical cement on the gluing surfaces of an upper prism and a lower prism of a lateral shearing interferometer 401 to be glued, and vertically placing the optical cement on a high-precision optical flat plate 402 on a precision adjusting platform 403;
(ii) Laser output by the laser 1 is scattered by the scattering plate 2 and expanded by the collimator 3 to form uniform parallel light which illuminates the lateral shearing interferometer 401 to be glued;
(iii) Receiving interference fringes formed by the exit end of the lateral shearing interferometer 401 to be glued by using the digital camera 5, and displaying the interference fringes on a display screen of the computer 6 in real time;
(iv) Theoretical calculation of N 0 The interference fringe accounts for the CCD pixel number M of the digital camera 5 0 ：
Wherein, λ is the laser wavelength output by the laser 1, f' is the focal length of the digital camera 5, d is the CCD pixel size, and Δ is the transverse shearing quantity required by the design;
(v) The two glued and uncured prisms are relatively moved in a small amount to read N 0 The interference fringes account for the number M of CCD pixels of the digital camera 5; until the number M of CCD pixels is M 0 When the two prisms move, the two prisms are positioned;
(vi) And curing the glue between the two prisms.
The collimator 3 is preferably a collimator with a cross wire, and the cross wire vertical line and the cross wire horizontal line of the collimator 3 are respectively in a geodetic vertical state and a geodetic horizontal state; the upper surface of the high-precision optical flat plate 402 is in a ground horizontal state; the optical axis of the digital camera 5 is positioned by the standard interferometer and is superposed with the optical axis of the collimator 3 which is folded by the standard interferometer; the column pixels of the digital camera 5 are in a geodetic vertical state, and the row pixels of the digital camera 5 are in a geodetic horizontal state.
The required transverse shearing amount delta, the laser wavelength lambda output by the laser 1, the focal length f' of the digital camera 5 and the CCD pixel size d satisfy the following conditions:
f′·λ＝(5～6)·Δ·d。
n is above 0 The interference fringe accounts for the CCD pixel number M of the digital camera 5 0 Middle, interference fringe number N 0 And the number M of CCD pixels 0 Preferably, the following conditions are satisfied:
M 0 ≥120；M 0 /N 0 is 5 to 6.
The integrated error of the calibration uncertainty delta f of the focal length f' of the digital camera 5, the calibration uncertainty delta lambda of the laser wavelength lambda of the laser 1 and the calibration uncertainty delta d of the CCD pixel size d is controlled within 5 per thousand, the error of the shearing quantity is less than 1 percent, and the fringe signal-to-noise ratio is met.
The laser 1 is preferably a gas laser. By adopting the gas laser with stable wavelength, the interpretation error caused by wavelength change can be reduced.
The optical adhesive is preferably ultraviolet photosensitive adhesive, and the adhesive between the two prisms is cured by ultraviolet irradiation. The ultraviolet photosensitive glue is adopted, so that the glue is ensured not to be thickened in the adjusting process, and can be quickly cured by being irradiated by an ultraviolet lamp after being adjusted.
The fine adjustment stage 403 is preferably a fine adjustment stage with three translational and three rotational degrees of freedom. The device can be precisely adjusted, and is convenient for light path adjustment and calibration.
The invention has the following advantages:
(1) The invention adopts the principle of quasi-monochromatic light beam splitting interference, and improves the control accuracy of the transverse shearing quantity.
(2) The method adopts quasi monochromatic light illumination, digital camera receiving, computer reading, and the error of transverse shearing amount can be controlled within 1% during gluing.
(3) The transverse shearing amount can be calculated theoretically, and the gluing and detecting time is controlled according to theoretical values.
(4) The laser adopts a gas laser with stable wavelength, so that the interpretation error caused by wavelength change can be reduced.
(5) The digital camera is directly connected with the computer, can directly interpret images and is convenient for adjusting the transverse shearing quantity of the interferometer.
(6) The high-precision standard pentagonal prism is used for adjusting and calibrating the light path, so that the accuracy of gluing and curing can be further ensured.
(7) The platform for placing the prism can adopt three translation degrees of freedom and three rotation degrees of freedom, the adjustment is precise, and the light path adjustment and calibration are convenient.
(8) The optical glue is cured and changed into structural part locking, so that the invention is applicable to the assembly of the split type space modulation interferometer.
Drawings
FIG. 1 is a schematic view of the gluing detection device of the present invention.
Fig. 2 is a schematic view of the gluing device of the present invention.
The drawings illustrate:
1-laser, 2-scattering plate, 3-collimator, 401-lateral shearing interferometer to be glued, 402-optical flat plate, 403-fine adjustment platform, 5-digital camera, 6-computer.
Detailed Description
The principle of the invention is as follows: the gas laser has the characteristics of high collimation and high monochromaticity. Laser output by the gas laser enters the transverse shearing interferometer after beam expansion, quasi-monochromatic interference fringes with high contrast can be obtained, and each interference fringe is collected by not less than 5 CCD pixels for facilitating fringe reading.
Setting: the laser wavelength is lambda, the focal length of the digital camera is f', the CCD pixel size is d, and the number of interference fringes is N 0 ，N 0 The number of CCD pixels occupied by each interference fringe is M 0 ；
Then from the shear quantity calculation formula:
the actual amount of lateral shear Δ can be accurately calculated.
1. And estimating the number of interference fringes to be read according to the measurement uncertainty of the shearing quantity.
(1) A determinant of uncertainty in the measurement of the amount of shear.
As can be seen from the shear calculation formula, the uncertainty of measurement of the shear is determined by the following factors:
calibration uncertainty delta of focal length f' of digital camera f (ii) a Calibration uncertainty delta for laser wavelength lambda λ (ii) a Calibration uncertainty delta of CCD pixel dimension d d (ii) a Interpretation uncertainty delta of N interference fringes occupying CCD pixel number M M 。
(2) Calibrating uncertainty delta of focal length f' of digital camera f Laser wavelength lambda calibration uncertainty delta λ And the calibration uncertainty delta of the CCD pixel dimension d d And controlling the content to be 5 per mill.
(3) Interpretation uncertainty delta of N interference fringes occupying CCD pixel number M M The judgment error is controlled to be 1 pixel, namely delta M ＝1/M。
(4) The error of the shearing amount is controlled within 1 percent, N 0 The range of the pixel number occupied by the interference fringe is M 0 Not less than 120, and satisfies the signal-to-noise ratio of interference fringe, M 0 /N 0 Taking 5 to 6, the number of interference fringes is N 0 In the range of N 0 ≥20。
2. Controlling the shearing quantity of the interferometer to be the transverse shearing quantity required by the design, wherein the method comprises the following implementation steps of:
(1) Transverse direction required by designCalculating the shear amount delta to obtain N 0 Number of pixels M to be occupied by each interference fringe 0 。
(2) Displaying interference fringes on the display screen, reading out N 0 The interference fringes account for the number M of CCD pixels of the digital camera.
(3) Making the two glued and uncured prisms do a small amount of relative movement, and simultaneously reading the interference fringes and the pixel number occupied by the interference fringes on the display screen to N 0 The number of pixels occupied by each interference fringe is equal to the theoretical value M 0 And stopping moving to position the two prisms.
Referring to fig. 1, the gluing detection steps of the present invention are as follows:
1. building a gluing detection device:
the laser 1 is selected from a gas laser, and laser output by the gas laser 1 forms uniform scattered light after passing through the scattering plate 2 to illuminate a calibrated reticle of the collimator 3. The projection light of the collimator 3 illuminates the lateral shearing interferometer 401 to be glued, and the lateral shearing interferometer 401 to be glued is vertically placed on a high-precision optical flat plate 402 on a precision adjusting platform 403. The interference fringes of the lateral shearing interferometer 401 to be glued are detected with the digital camera 5. The collimator 3 and the digital camera 5 share an optical axis, and the optical axis is perpendicular to the incident end face of the lateral shearing interferometer 401 to be glued.
2. Calibrating, adjusting and gluing the detection device:
(1) The collimator is adjusted by a level meter to be placed horizontally, and the vertical line and the transverse line of the cross wire of the collimator 3 with the cross wire are adjusted by a 0.2' theodolite to be respectively in the state of being vertical to the ground and horizontal.
(2) A six-degree-of-freedom precision adjustment platform 403 is placed on the vibration isolation platform, and then the high-precision optical flat plate 402 is placed on the precision adjustment platform 403.
(3) The collimator 3 is provided with an auto-collimation eyepiece, and a high-precision standard interferometer is arranged on the adjusting optical flat plate 402, wherein the vertical surface of the interferometer is vertical to the ground, namely the upper surface of the optical flat plate 402 is in a ground horizontal state.
(4) The optical axis of the digital camera 5 is perpendicular to the emergent end face of the standard interferometer, and the height of the optical axis of the collimator 3 is the same as that of the digital camera 5.
(5) The digital camera 5 images the cross-hair of the collimator 3, and adjusts the direction of the digital camera 5 so that the cross-hair image is vertically and horizontally pressed on the column and row pixels of the digital camera 5.
(6) The position relation between the fixed collimator 3 and the lateral shearing interferometer 401 to be glued and the digital camera 5.
In the gluing test of the invention: the gas laser has high collimation and monochromaticity, requires stable wavelength and small full width at half maximum (FWHM) of output laser, and thus needs to calibrate the actual wavelength of the gas laser accurately in advance. Specifically, a 543.5nm or 632.8nm gas laser can be used. The scattered light illumination of the reticle illuminating the collimator 3 is uniform. The diffuser plate 2 is selected according to the illumination requirement on the reticle of the collimator tube 3. The fine adjustment stage 403 is a six-degree-of-freedom fine adjustment stage having three translational and three rotational degrees of freedom, and is used for adjusting the optical axis between the lateral shearing interferometer 401 to be cemented and the collimator 3 and the digital camera 5. The optical flat plate 402 is a high-precision optical flat plate having a high surface flatness and roughness. The aperture of the collimator 3 is larger than the incident end face of the glued interferometer; the pre-calibration is performed so that the collimator 3 outputs a monochromatic plane wave close to the ideal. The focal length f' of the digital camera and the pixel size d of the CCD which determine the instantaneous field angle of the digital camera 5 are precisely calibrated in advance. On the premise of meeting the signal-to-noise ratio of the interference fringes, the instantaneous field angle of the digital camera 5 should be a small value so as to increase the number M of CCD pixels corresponding to one laser wavelength lambda; and simultaneously, the imaging of the interference fringes meets the isoplanatism condition.
Referring to fig. 2, the gluing step of the present invention is as follows:
(1) Gluing and detecting environmental conditions: shock resistance and an ultra-clean environment superior to 10 ten thousand levels. So as to prevent dust from falling into the gluing surface and prevent external vibration interference in gluing and detection.
(2) Inspecting the glued piece: detecting the angle in the main section of the upper prism and the lower prism to be glued, the first optical parallel difference and the second optical parallel difference, the verticality of the edge and the edge surface of the prism to the bottom surface and the cleanliness of the gluing surface.
(3) Gluing the interferometer: and uniformly coating the ultraviolet curing glue on the gluing surfaces of the upper prism and the lower prism to be glued, applying pressure to the upper prism and the lower prism, extruding the redundant ultraviolet curing glue, and removing bubbles on the gluing surfaces.
(4) Detecting and adjusting the transverse shearing amount of the interferometer: calculating N according to the transverse shearing quantity delta required by design 0 The number of pixels M that should be occupied by each interference fringe 0 Wherein M is 0 ≥120，N 0 Not less than 20. The lateral shearing interferometer 401 is replaced by a glued interferometer, the autocollimation eyepiece of the collimator 3 is removed, and laser output by the gas laser 1 is replaced by scattered light illumination of the scattering plate 2. Reading the interference fringes and the pixel number occupied by the interference fringes on the display screen of the computer 6, and making the two glued and uncured prisms do a micro relative movement until N 0 The number of pixels occupied by each interference fringe is equal to the theoretical value M 0 And stopping moving to position the two prisms.
(5) Curing of the interferometer: and irradiating the glued two prisms by using an ultraviolet lamp to quickly solidify the glued two prisms to obtain the glued interferometer.
(6) And (4) rechecking: after the interval of 4 hours and 24 hours, the calculated value of the transverse shearing amount can be further improved by rechecking for 2 to 3 times, but the measurement data which are not operated properly are required to be eliminated.
Claims (7)
1. A gluing detection method of a lateral shearing interferometer comprises the following implementation steps:
(i) Uniformly coating optical cement on the gluing surfaces of an upper prism and a lower prism of a lateral shearing interferometer (401) to be glued, and vertically placing the optical cement on a high-precision optical flat plate (402) on a precision adjusting platform (403);
(ii) Laser output by the laser (1) is scattered by the scattering plate (2) and expanded by the collimator (3) to form uniform parallel light which illuminates the lateral shearing interferometer (401) to be glued;
(iii) Receiving interference fringes formed by the exit end of the lateral shearing interferometer (401) to be glued by using a digital camera (5), and displaying the interference fringes on a display screen of a computer (6) in real time;
(iv) Theoretical calculation of N 0 The interference fringe accounts for the CCD pixel number M of the digital camera (5) 0 ：
Wherein lambda is the laser wavelength output by the laser (1), f' is the focal length of the digital camera (5), d is the CCD pixel size, and delta is the transverse shearing quantity required by the design;
(v) The two glued and uncured prisms are relatively moved in a small amount to read N 0 The interference fringes account for the number M of CCD pixels of the digital camera (5); until the number M of CCD pixels is M 0 When the two prisms move, the two prisms are positioned;
(vi) And curing the glue between the two prisms.
2. The glue detection method of the lateral shearing interferometer of claim 1, wherein: the collimator (3) is a collimator with a cross wire, and the vertical line and the horizontal line of the cross wire of the collimator (3) are respectively in a geodetic vertical state and a geodetic horizontal state; the upper surface of the high-precision optical flat plate (402) is in a ground horizontal state; the optical axis of the digital camera (5) is positioned by the standard interferometer and is superposed with the optical axis of the collimator (3) after being folded by the standard interferometer; the column pixels of the digital camera (5) are in a vertical state with the ground, and the row pixels of the digital camera (5) are in a horizontal state with the ground.
3. The gluing detection method of the lateral shearing interferometer of claim 1 or 2, wherein: the transverse shearing quantity delta required by the design, the laser wavelength lambda output by the laser (1), the focal length f' of the digital camera (5) and the CCD pixel size d meet the following conditions:
f′·λ＝(5～6)·Δ·d。
4. the lateral shearing interferometer gluing detection method as in claim 3, wherein N is 0 The interference fringe accounts for the CCD pixel number M of the digital camera (5) 0 Middle, interference fringe number N 0 And the number M of CCD pixels 0 The following conditions are satisfied:
M 0 ≥120，
M 0 /N 0 is 5 to 6.
5. The gluing detection method of the lateral shearing interferometer of claim 4, wherein: the laser device (1) is a gas laser.
6. The lateral shearing interferometer gluing detection method as recited in claim 5, wherein: the optical adhesive is ultraviolet photosensitive adhesive, and the adhesive between the two solidified prisms is solidified by ultraviolet irradiation.
7. The glue detection method of the lateral shearing interferometer of claim 6, wherein: the fine adjustment platform (403) is a fine adjustment platform with three translational and three rotational degrees of freedom.
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