CN103575737B - Defect detecting method and flaw detection apparatus - Google Patents
Defect detecting method and flaw detection apparatus Download PDFInfo
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- CN103575737B CN103575737B CN201310303081.8A CN201310303081A CN103575737B CN 103575737 B CN103575737 B CN 103575737B CN 201310303081 A CN201310303081 A CN 201310303081A CN 103575737 B CN103575737 B CN 103575737B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/8901—Optical details; Scanning details
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
- G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
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Abstract
The invention provides a kind of defect detecting method and flaw detection apparatus, its problem is the accuracy of detection improving defect.Defect detecting method comprises: irradiation process, irradiates visible ray and invisible light from light source to checked property; Data genaration operation, receives respectively and to be reflected by checked property or through the visible ray of checked property and invisible light, and generate photographed data respectively according to each light income; Judge operation, when compare under visible ray and invisible light, in the change degree of this photographed data of the variable domain of photographed data, the result that obtains belongs in the scope becoming defect that prestores time, be judged to be defect.
Description
Technical field
The present invention relates to a kind of method and apparatus for checking checked property defect.
Background technology
The RGB image obtained by video camera shooting sheet article can be used to judge the defect of sheet article.And, known following technology: according to by the rgb image data of the sheet article on inspection plate, obtain the composograph having synthesized R component image, G component image, B component image, wherein inspection plate has multiple different colour gamut, and then the setup parameter scope of the defect classification whether being belonged to pre-stored by the color of the transition interval judging this composograph judges that the technology of defect classification is (for example, referring to patent documentation 1.）。According to this technology, have in the defect inspection such as spot, breakage, shape defect of the sheet article of difference (deviation, form and aspect inequality and/or fade) in the repeatability of color, pattern can not be judged to be defect, and can differentiate black spot, non-?spot and breakage.
But, owing to using the rgb image data of visible region to judge defect, be therefore difficult to detect the defect close with sheet material color, transparent defect.Such as, be attached to the detection of the metal powder on dark-coloured paper, the detection of water or wet goods transparency liquid is very difficult.
In addition, if judge defect with the rgb image data of visible region, be then difficult to the close defect of distinct color.Such as, be difficult to differentiate the ferrous metal powder such as iron and dark oil.In addition, be also difficult to differentiate the light tone metal powders such as aluminium and light oil.And then, be also difficult to differentiate water and transparent oil.
On the other hand, also there is following situation, even if that is, outward appearance is similar, but different on the impact of checked property function.Such as the dividing plate used in secondary cell, even if there is a spot also can not form problem a little, if but be mixed into metal, may conduct electricity.Therefore, although there is no need to judge that spot is as defect, be necessary to judge that metal is as defect.Thus, need to differentiate the close metal powder of color and spot.In addition, although as long as would not the debatable situation of structure for checked property being attached with water evaporates afterwards, even if be attached with water also need not be judged to be defect.But, when checked property is attached be difficult to evaporate oily time, be just necessary to be judged to be defect.Thus, also need to differentiate the close water of color and clean oil.
Like this, also exist by the situation of allowing according to the defect kind of checked property, therefore preferably can differentiate the kind of defect.But, be only be difficult to carry out this differentiation with the rgb image data of visible region.Therefore, likely also defect is detected as when defect need not be detected as.
Prior art document
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Publication 2008-256402 publication
Summary of the invention
Invent problem to be solved
The present invention puts in view of the above problems and proposes, and its object is to the accuracy of detection improving defect.
Solve the means of problem
For reaching above-mentioned problem, defect detecting method of the present invention comprises:
Irradiation process, irradiates visible ray and invisible light from light source to checked property;
Data genaration operation, receives respectively and to be reflected by checked property or through the visible ray of checked property and invisible light, and generate photographed data respectively according to each light income;
Judge operation, when compare under visible ray and invisible light, in the change degree of this photographed data of the variable domain of described photographed data, the result that obtains belongs in the scope becoming defect that prestores time, be judged to be defect.
Herein, the absorptivity of each wavelength light when irradiating visible region wavelength light and invisible light region wavelength light to material is different on often kind of material.Therefore, reflected light when irradiating visible region wavelength light and invisible light region wavelength light to material or the intensity through light are different on often kind of material and in often kind of optical wavelength.That is, with regard to checked property irradiate visible region wavelength light and invisible light region wavelength light time reflected light or through light intensity with regard to, when existing defects, become the intensity corresponding with this defect.Therefore, on checked property not existing defects time photographed data and checked property on existing defects time photographed data between there are differences.That is, if existing defects on checked property, then photographed data will change.Further, the degree of this photographed data variation is different on often kind of material and often kind of optical wavelength.Therefore, with regard to the result of the photographed data change degree of the photographed data change degree and invisible light region wavelength light that compare visible region wavelength light, change according to the presence or absence of defect and defect kind.Therefore, if prestore the result of the photographed data change degree comparing each wavelength light according to defect kind, then presence or absence and the defect kind of defect can be differentiated.In addition, such as can by and differentiate color and the kind of that only with visible ray cannot differentiate defect close with checked property color with invisible light.Thus, even if existing defects but when belonging to the situation by the defect of allowing, not existing defects can be judged to be.
In addition, in the present invention, described invisible light also can be at least one in infrared ray or ultraviolet.If use the light of these wavelength, then according to substance classes, photographed data produces significant variation, cannot from the defect judged in appearance therefore, it is possible to more correctly detect.
In addition, in the present invention, under visible ray and invisible light, obtain specific quotient be respectively used as described photographed data change degree, described specific quotient refers to, the photographed data generated in described data genaration operation does not have the photographed data of defective checked property and the value obtained divided by what take in advance
In described judgement operation, by by the difference of the described quotient of visible ray and the described quotient of invisible light compared with the value of each defect kind prestored, differentiate defect kind.
So, each than (quotient) by what compare not have defective photographed data to try to achieve for benchmark, the error caused by the difference of the variation of light source light quantity, the transmitance of often kind of defect or the difference of reflectivity, the transmitance of checked property or reflectivity can be reduced.Thus, be difficult to the impact caused by change of impact and defect or the checked property be interfered, therefore, it is possible to improve the judgement precision of defect.
In addition, in described irradiation process of the present invention, in the described ultrared situation of irradiation, compared to long wavelength, irradiate the visible ray of short wavelength.
In addition, in described irradiation process of the present invention, in the described ultraviolet situation of irradiation, compared to short wavelength, irradiate the visible ray of long wavelength.
That is, if use the larger light of wavelength difference, then can make poorly relative to the photographed data change degree of defect to manifest more remarkable, therefore, it is possible to improve the judgement precision of defect.In addition, the so-called visible ray compared to the short wavelength of long wavelength, can be the short visible ray of the centre wavelength of wavelength ratio visible region, also can be the B component in visible ray.In addition, the so-called visible ray compared to the long wavelength of short wavelength, can be the visible ray that the centre wavelength of wavelength ratio visible region is long, also can be the R component in visible ray.
In addition, in the present invention, when the difference of the described quotient of visible ray and the described quotient of invisible light is below threshold value, the defect containing metal is judged to be.
Herein, even if the light irradiated is the light of the wavelength in visible region or invisible light region, as long as metal, there is same variation in photographed data.That is, photographed data change degree difference is little.Therefore, when photographed data change degree difference is below threshold value, the defect containing metal can be just judged to be.This threshold value is the higher limit of the photographed data change degree difference when judgement defect contains metal.In addition, according to metal species, photographed data change degree is different, therefore according to photographed data change degree, can differentiate the kind of metal.
In addition, in the present invention, visible ray and invisible light can be received respectively with Si based semiconductor photo detector.If use Si based semiconductor photo detector, just can receiving infrared-ray, visible ray, ultraviolet.In addition, due to many pixelations can be carried out at an easy rate, therefore, it is possible to carry out large-range measuring or Quick Measurement.
In addition, in the present invention, on a video camera, also can possess the element receiving visible ray and invisible light respectively.In this way, can miniaturization of the apparatus.
In addition, in the present invention, also can carry out light splitting with beam splitter to visible ray and invisible light, receive visible ray and invisible light respectively.In this way, without the need to carrying out the contraposition of the camera site difference for revising each wavelength light, therefore can simplify processes.
In addition, in the present invention, described light source also can be the restricted light source of wavelength region may.
In addition, in the present invention, can also to make from the light of described light source irradiation, by wave filter, to come wavelength-limited region.
Like this, by wavelength-limited region, can use and the more significant wavelength light of interaction between material, therefore, it is possible to improve the judgement precision of defect.
In addition, for reaching above-mentioned problem, flaw detection apparatus of the present invention, possesses:
Irradiation portion, irradiates visible ray and invisible light from light source to checked property;
Data generating section, receives respectively and to be reflected by checked property or through the visible ray of checked property and invisible light, and generate photographed data respectively according to each light income;
Detection unit, when compare under visible ray and invisible light, in the change degree of this photographed data of the variable domain of described photographed data and the result obtained belongs in the scope becoming defect that prestores time, be judged to be defect.
The effect of invention
The accuracy of detection of defect can be improved according to the present invention.
Accompanying drawing explanation
Fig. 1 is the block scheme of the flaw detection apparatus of embodiment 1.
Fig. 2 is the figure of the relation represented between the pixel after by each signal processing part process and reflectance.
Fig. 3 is by each signal overlap figure together shown in Fig. 2.
Fig. 4 is the figure of pixel when representing that defect is water and the relation between reflectance.
Fig. 5 is the figure of pixel when representing that defect is metal and the relation between reflectance.
Fig. 6 is the process flow diagram of the flow process of the defect kind represented for differentiating embodiment 1.
Fig. 7 is the block scheme of the flaw detection apparatus of embodiment 2.
Fig. 8 is the block scheme of the flaw detection apparatus of embodiment 3.
Fig. 9 is the figure of the sensor configuration representing embodiment 3.
Figure 10 is the block scheme of the flaw detection apparatus of embodiment 4.
Figure 11 is the figure of the video camera inner structure representing embodiment 4.
Wherein, description of reference numerals is as follows:
1 flaw detection apparatus
2 checked properties
5 treating apparatus
31 visible light sources
32IR/UV light source
41 visible light cameras
42IR/UV light video camera
43 beam splitters
51R signal processing part
52G signal processing part
53B signal processing part
54IR/UV signal processing part
55 contraposition handling parts
56 defects detection portions
56A detection threshold storage part
57 detection units
57A decision threshold storage part
58 efferents
Embodiment
Below, with reference to accompanying drawing, and the scheme for implementing this invention is described illustratively in detail based on embodiment.But about the size, material, shape, its relative configuration etc. of the component parts described in the present embodiment, when not special record, this scope of invention is not limited in these.
(embodiment 1)
Fig. 1 is the block scheme of the flaw detection apparatus 1 of the present embodiment.Flaw detection apparatus 1 possesses: to checked property 2 irradiate visible ray visible light source 31, at least one in checked property 2 irradiation ultraviolet radiation or infrared ray IR/UV light source 32, receive the visible ray reflected by checked property 2 visible light camera 41, receive light that the ultraviolet that reflected by checked property 2 or ultrared IR/UV light video camera 42, process visible light camera 41 and IR/UV light video camera 42 receive thus detect defect and differentiate the treating apparatus 5 of the kind of defect.
Checked property 2 is such as formed as sheet, and is transported by Fig. 1 direction of arrow.In addition, checked property 2 is not one be decided to be sheet.As checked property 2, paper, film, resin, cellulose etc. can be illustrated.In addition, checked property 2 also can be for the dividing plate in secondary cell, optical sheet etc. for liquid crystal.In addition, in the present embodiment, by light source 3 and the fixing and mobile checked property 2 of video camera 4, but checked property 2 can also be fixed and mobile light source 3 and video camera 4, and instead.
Flaw detection apparatus 1 extracts defect based on the image obtained as follows, that is: receive with visible light camera 41 and IR/UV light video camera 42 and be irradiated to the reflected light of the light of checked property 2 and the image obtained from visible light source 31 and IR/UV light source 32.The kind of further differentiation defect.Flaw detection apparatus 1 can using foreign matter, hole, fold, unequally to detect as defect.
In addition, when not distinguishing visible light source 31 and IR/UV light source 32 referred to as " light source 3 ".In addition, when not distinguishing visible light camera 41 and IR/UV light video camera 42 referred to as " video camera 4 ".Light source 3 can use the confined light source in LED equiwavelength region or limit the light source of wavelength region may with wave filter.Further, the detection of defect and the judgement precision of defect classification is improved by the more significant wavelength of interaction between use and material.In addition, in the present embodiment, visible light source 31 and IR/UV light source 32 are equivalent to irradiation portion of the present invention.In addition, in the present embodiment, the process of irradiating light by visible light source 31 and IR/UV light source 32 to checked property 2 is equivalent to irradiation process of the present invention.
Video camera 4 such as possesses ccd image sensor, and this ccd image sensor is formed by arranged in series 4096 photo detectors.Each photo detector converts light to electric charge according to light income.Therefore, the photo detector of the part of the light imaging of defect reflection, the quantity of electric charge diminishes compared with other photo detectors.In addition, in the present embodiment, visible light camera 41 possesses 3 ccd image sensors of each composition of R, G, B.In addition, IR/UV light video camera 42 possesses the ccd image sensor for detecting at least one in infrared ray or ultraviolet.The electric charge exported from each photo detector is input into treating apparatus 5 by as photographed data.And in the present embodiment, visible light camera 41, IR/UV light video camera 42 are equivalent to data generating section of the present invention.In addition, in the present embodiment, by visible light camera 41, IR/UV light the video camera 42 and process generating photographed data is equivalent to data genaration operation of the present invention.
In addition, in the present embodiment, in order to take the whole width of checked property 2 with video camera 4, according to the width of checked property 2, the Width of checked property 2 can possess multiple video camera 4.In addition, visible light camera 41 and IR/UV light video camera 42 are in staggered configuration in conveyance direction.
In addition, treating apparatus 5 possesses: the R signal handling part 51 processed respectively by each for the RGB of the photographed data exported from visible light camera 41 composition, G-signal handling part 52, B signal processing part 53, process the IR/UV signal processing part 54 of the photographed data exported from IR/UV light video camera 42.R signal handling part 51 processes R component signal (R signal), G-signal handling part 52 processes G component signal (G-signal), B signal processing part 53 treatments B twocomponent signal (B signal), IR/UV signal processing part 54 processes infrared ray or ultraviolet signal (IR/UV light signal).By this process, obtain the reflectance of each photo detector (pixel).
Herein, reflectance refers to, the electric charge (photographed data) of each photo detector divided by obtain in advance there is no a defect time electric charge (photographed data) of each photo detector and the value obtained.That is, obtain the photographed data not having defective checked property 2 in advance, and using photographed data during determining defects relative to the ratio of this value as reflectance." obtain in advance there is no a defect time the electric charge of each photo detector " can also be the mean value of each photo detector electric charge when repeatedly taking.The minimizing degree of light income is larger, and this reflectance in less value, and has correlationship with the change degree of photographed data.And do not having in defective situation, reflectance is the value close to 1.Respectively to R signal, G-signal, B signal, IR/UV light signal computational reflect ratio.In addition, the reflectance in the present embodiment is equivalent to quotient of the present invention.
Herein, Fig. 2 is the figure representing the pixel after being processed by each signal processing part 51,52,53,54 and the relation between reflectance.Transverse axis is pixel, and the longitudinal axis is reflectance.In the pixel of the part of defect imaging, reflectance declines.And its decline degree is different respectively on R signal, G-signal, B signal, IR/UV light signal.In addition, even if not existing defects on checked property 2, but also because the concavo-convex of checked property 2 surface waits impact, reflectance is a little difference in each pixel.
In addition, treating apparatus 5 possesses contraposition handling part 55, the reflectance that this contraposition handling part 55 carries out obtaining from visible light camera 41, contraposition with the reflectance obtained from IR/UV light video camera 42.Herein, visible light camera 41 and IR/UV light video camera 42 are in staggered configuration in the conveyance direction of checked property 2, and therefore by the part that visible light camera 41 photographs, the position that arrive by IR/UV light video camera 42 is taken needs the time.In order to compare the reflectance of the same section obtained from visible light camera 41 and IR/UV light video camera 42, contraposition handling part 55 carries out the contraposition of the reflectance of visible light camera 41 and the reflectance of IR/UV light video camera 42.
Herein, the conveyance speed of checked property 2, to be set in advance from the distance of visible light camera 41 to IR/UV light video camera 42, therefore based on these values, the time delay till being taken by IR/UV light video camera 42 by the part that visible light camera 41 photographs can be calculated.That is, by by the time suitable with this time delay for data shifts, contraposition can be carried out.In the same manner, taking the situation of different piece respectively with R signal, G-signal, B signal and take the situation of different piece with ultraviolet and infrared ray respectively, these contrapositions are carried out.
In addition, treating apparatus 5 possesses the defects detection portion 56 for detecting defect and the detection threshold storage part 56A for storage defect size threshold value.This threshold value is previously stored as the lower limit being necessary the size being detected as defect.This threshold value determines according to the kind of checked property 2 or user's request etc.
Herein, though sometimes existing defects but defect less time, can be allowed.Defect size when exceeding this permissible range is set as threshold value.Namely, when defect size is more than threshold value, defects detection portion 56 it is determined that the presence of defect, and when defect size is less than threshold value, defects detection portion 56 judges not existing defects.The size of defect represents with the pixel count that slippage or the reflectance of reflectance have dropped.Such as, based on the waveform shown in Fig. 2, the size of defect can be obtained.In addition, when certain reflectance is below threshold value, also can as defects detection.In addition, when the pixel of certain reflectance below threshold value is more than threshold value, also can as defects detection.
In addition, treating apparatus 5 possesses: detection unit 57, when detecting defect for differentiating defect kind; Decision threshold storage part 57A, stores the threshold value for differentiating defect kind.Detection unit 57, based on the relation between the pixel processed at each signal processing part 51,52,53,54 and reflectance, differentiates the kind of defect.Then, the kind having nil case and defect of defect is exported from efferent 58.In addition, in the present embodiment, differentiate that the process of defect kind is equivalent to judgement operation of the present invention by detection unit 57.
Herein, Fig. 3 is by each signal overlap figure together shown in Fig. 2.So, the reflectance decline degree of each signal is different respectively.And the reflectance decline degree of each signal becomes the distinctive value of each material.Herein, the combination of such as ultraviolet wavelength and molecule or atom can be close, is therefore easily subsequently absorbed in the material.In addition, ultraviolet wavelength ratio is shorter, therefore easily scattering.On the other hand, Infrared wavelength is close with molecular vibrational energy, is therefore easily subsequently absorbed in the material.In addition, ultrared wavelength is long, is therefore difficult to scattering.By utilizing the interaction between the light of these each wavelength and material, the kind of defect can be differentiated.
Such as, Fig. 4 is the figure of pixel when representing that defect is water and the relation between reflectance.Reflectance step-down compared with the reflectance of other pixels of the pixel of defect imaging, this slippage (use rate of descent also can) visible ray and infrared ray or ultraviolet (hereinafter referred to as IR/UV light) upper different.Therefore, in the pixel of water imaging, the reflectance of the reflectance of visible ray and infrared ray (IR light) there are differences.
The difference of the reflectance of this visible ray and the reflectance of IR/UV light is that material is distinctive.That is, irradiate visible ray and IR/UV light time respectively to material, because each material is different to the absorptivity of often kind of light, therefore the ratio of the ratio that reflects on material of often kind of light and often kind of light transmission material is different on each material.Therefore, the visible ray in the pixel of defect imaging and the reflectance of IR/UV light are the values corresponding with the material forming defect.
Therefore, if in advance by experiment or calculating etc. obtain each material that may be mixed into, the difference of visible light reflectance and IR/UV luminous reflectance, just based on the difference of this reflectance, the kind of defect can be differentiated.
In addition, Fig. 5 is the figure of pixel when representing that defect is metal and the relation between reflectance.When defect is metal, the reflectance of visible ray is almost identical with the reflectance of IR/UV light, and therefore two reflection ratios are less.Therefore, when the difference of visible light reflectance and IR/UV luminous reflectance (uses the absolute value of difference also can.) below threshold value time, just can differentiate that defect is metal.This threshold value can be tried to achieve by experiment etc. in advance.In addition, reflectance is different according to metal species, therefore, it is possible to differentiate the kind of metal based on reflectance.Such as, when checked property 2 is electric insulation sheet, even if just do not have problems as long as have spot to cut off to conduct, but then makes to conduct as chankings being mixed into metal, thus can problem be become.Therefore, if defect can be judged whether as metal, just can allow spot and only metal be detected as defect.
Like this, the kind of defect can be differentiated according to the difference of visible light reflectance and IR/UV luminous reflectance.Herein, reflection ratio can be utilized to change to the impact reducing checked property 2 or defect state and cause or light quantity the impact caused.Such as, the light income of photo detector changes according to the color of checked property 2 and the color of defect.In addition, if light quantity produces variation, the light income of photo detector also changes, and therefore even without defect, reflectance also can change.Like this, even if not existing defects, the reflectance of visible ray and IR/UV light also can change.To this, by utilizing the difference of visible light reflectance and IR/UV luminous reflectance, the variable quantity of the light income of each photo detector caused because of light quantity variation etc. can be offset.That is, impact that the color of checked property 2 or surface state cause can be reduced and light quantity changes the impact caused, therefore, it is possible to improve the accuracy of detection of defect and the discrimination precision of defect classification.
In addition, the differentiation that the ratio of visible light reflectance and IR/UV luminous reflectance also can be utilized to replace the difference of visible light reflectance and IR/UV luminous reflectance to carry out defect kind also can.
In addition, with regard to visible ray, any one or any two in R component, G component, B component also can be only utilized to differentiate defect kind.In addition, one or both in infrared ray or ultraviolet also can be used to differentiate defect kind.In addition, during a kind of when selecting R component, G component, in B component in any one and infrared ray or ultraviolet, select the combination that wavelength difference is large just passable.Such as, as the composition that the ultraviolet short with wavelength is combined, select the R component that visible ray medium wavelength is long, as the composition that the infrared ray long with wavelength is combined, select the B component of visible ray medium wave length.Thus, the difference of the reflectance of defect is more remarkable, judges precision therefore, it is possible to improve.
In addition, preferably on the photo detector of video camera 4, Si(silicon is used) based semiconductor.If use Si based semiconductor photo detector, just ultraviolet, visible ray, infrared ray all can be detected.In addition, many pixelations can be realized, thus can large-range measuring or Quick Measurement be carried out, and then can reduce costs.
Secondly, Fig. 6 is the process flow diagram of the flow process of the defect kind represented for differentiating the present embodiment.
In step S101, checked property 2 camera 4 being shot is taken, and these data are input into treating apparatus 5.
In step s 102, the signal exported from video camera 4 is processed by R signal handling part 51, G-signal handling part 52, B signal processing part 53, IR/UV signal processing part 54 respectively.And each signal processing part calculates the reflectance of each pixel.
In step s 103, carry out by the contraposition of the data of each signal processing part process.Contraposition handling part 55 carries out contraposition based on the conveyance speed of checked property 2, the distance of each video camera 4.
In step S104, detect defect by defects detection portion 56.Such as, when defect size is more than the threshold value stored by detection threshold storage part 56A, defects detection portion 56 is detected as defect.In addition, such as, when a certain reflectance is below the threshold value stored by detection threshold storage part 56A, just defect is detected as.
In step S105, in determination step S104, whether detect defect.When result of determination is "Yes" in step S105, enter step S106.On the other hand, when result of determination is "No" in step S105, just terminate this program as not having defective checked property.
In step s 106, the kind of defect is differentiated by detection unit 57.The difference of visible light reflectance and IR/UV luminous reflectance compares with the threshold value being stored in decision threshold storage part 57A by detection unit 57, classifies thus to defect.Such as, when the difference of visible light reflectance and IR/UV luminous reflectance is below threshold value, just judge that defect is as metal.Then, the reflectance based on often kind of metal of pre-stored differentiates metal species.In addition, such as, with oil phase ratio, water more easily absorbs infrared ray, therefore, it is possible to utilize the reflectance of the B component of visible ray and infrared reflection than the larger characteristic of difference to differentiate oil and water.In addition, prestore the relation between the reflection ratio of visible ray and IR/UV light and material at decision threshold storage part 57A, and also can according to this relation determination material.
In step s 107, export for representing information and defect kind that defect detected from efferent 58.Now, the image such as exporting defect also can.In addition, also the position of existing defects and defect kind can be stored, or make marks on the position of existing defects.Further, can give the alarm when existing defects, maybe the information or defect kind that represent existing defects be shown over the display.In addition, if the defect kind differentiated in step s 106 is permissible material, then export as there is no defect.
As above as illustrating, according to the present embodiment, the defect that can detect checked property 2 also can differentiate the kind of defect.And, utilize the interaction of ultraviolet or infrared ray and material can detect the defect that only cannot detect with visible ray.In addition, and the kind of defect that is close with checked property 2 color and that only cannot differentiate with visible ray can be differentiated with invisible light.Further, by using Si based semiconductor photo detector, ultraviolet, visible ray, infrared ray all can be detected.In addition, also can realize many pixelations, therefore, it is possible to carry out large-range measuring or Quick Measurement, thus can also reduce costs.In addition, take normal segments as benchmark reflectance, and compare this reflectance under visible ray and IR/UV light, can reduce thus because of light quantity variation or often kind of defect reflectance difference caused by error.Thus, be difficult to be interfered or defect state changes the impact caused.
(embodiment 2)
Fig. 7 is the block scheme of the flaw detection apparatus 1 of the present embodiment.The present embodiment is different from embodiment 1 in the following areas: relative camera 4, and light source 3 is positioned at the opposition side of checked property 2.Other devices etc. are identical with embodiment 1, therefore omit the description.
In the present embodiment, based on the visible ray of checked property 2, ultraviolet or ultrared tranmittance, the judgement of defects detection and defect classification is implemented.Herein, tranmittance refers to, the electric charge (photographed data) of each photo detector divided by obtain in advance there is no a defect time the electric charge (photographed data) of each photo detector and the value obtained.That is, obtain the photographed data not having defective checked property 2 in advance, using photographed data during determining defects relative to the ratio of this value as tranmittance." obtain in advance there is no a defect time the electric charge of each photo detector " can also be the mean value of the electric charge of each photo detector when repeatedly taking.It is larger that light income reduces degree, and this tranmittance, in less value, has correlationship with the change degree of photographed data.And do not having in defective situation, tranmittance is the value close to 1.Respectively tranmittance is calculated to R signal, G-signal, B signal, IR/UV light signal.In addition, the tranmittance in the present embodiment is equivalent to quotient of the present invention.
The same with the reflectance illustrated in embodiment 1, visible ray, ultraviolet, ultrared tranmittance are different on often kind of material.Therefore, the tranmittance of pixel under visible ray and IR/UV light of the part of defect imaging there are differences.This difference becomes the distinctive value of material.That is, irradiate visible ray and IR/UV light time to material, this material is different on each material to the absorptivity of often kind of light, and therefore often kind of light is different on each material through the ratio of material.
Therefore, if in advance by experiment or calculating etc. obtain each material that may be mixed into, visible light-transmissive than and IR/UV light transmission than difference, just can based on the difference of this tranmittance, the kind of differentiation defect.
In addition, also can according to the kind of checked property 2 and the substance classes that may be mixed into decide to adopt in tranmittance or reflectance which differentiate defect kind.Such as, also by experiment etc. judge to adopt in tranmittance and reflectance which can be more suitable for just now.In addition, also can select according to the thickness of checked property 2, such as, time checked property 2 is thin, adopt tranmittance, time thick, adopt reflectance.In addition, both use through light and reflected light and also can.
(embodiment 3)
Fig. 8 is the block scheme of the flaw detection apparatus 1 of the present embodiment.Only there is a video camera 4 in the present embodiment.With double visible light camera 41 and the IR/UV light video camera 42 doing embodiment 1 of this video camera 4.That is, the video camera 4 of the present embodiment possesses for measuring the photo detector of at least one composition in R, G, B and the photo detector for measuring at least one in infrared ray or ultraviolet.And visible light source 31 and IR/UV light source 32 are to same partial illumination light.Other devices etc. are identical with embodiment 1, therefore omit the description.
Herein, Fig. 9 is the figure representing that sensor configures.R is the sensor for detecting the R component in visible ray, and G is the sensor for detecting the G component in visible ray, and B is the sensor for detecting the B component in visible ray, and IR/UV is for detecting infrared ray or ultraviolet sensor.The each sensor of R, G, B, IR/UV is in staggered configuration in conveyance direction.Therefore, in the same manner as in Example 1, the contraposition carrying out each sensor output signal is necessary.By using such video camera 4, can miniaturization of the apparatus.
(embodiment 4)
Figure 10 is the block scheme of the flaw detection apparatus 1 of the present embodiment.In addition, Figure 11 is the figure of the inner structure representing video camera 4.R is the sensor for detecting the R component in visible ray, and G is the sensor for detecting the G component in visible ray, and B is the sensor for detecting the B component in visible ray, and IR/UV is for detecting infrared ray or ultraviolet sensor.The present embodiment only possess a video camera 4 on identical with embodiment 3, but, go up different from embodiment 3 in the following areas: adopt beam splitter 43 by after visible ray and the light splitting of IR/UV light, measure with each photo detector.
That is, in the present embodiment, with beam splitter 43 light splitting is carried out to same directional light and by each sensor light, therefore, it is possible to take the visible ray and IR/UV light that reflect from the same position of checked property 2 with a video camera 4.And, the data of same position can be obtained simultaneously, therefore do not need to carry out contraposition.So, do not need essential contraposition handling part 55 in described embodiment 1-3.Other devices etc. are identical with embodiment 3, therefore omit the description.
By using such video camera 4, due to without the need to carrying out contraposition, therefore can simplify processes.In addition, not by the impact of aligning accuracy.
Claims (12)
1. a defect detecting method, checks the defect of checked property, comprising as checked property using the sheet article of conveyance:
Irradiation process, irradiates visible ray and infrared ray from light source to checked property;
Data genaration operation, receives the visible ray and infrared ray that are reflected by checked property respectively, and generates photographed data respectively according to each light income;
At least any one region detection comparing to that flawless state there occurs variation of the described photographed data of visible ray and ultrared described photographed data is defect by defects detection operation; And
Judge operation, in the defect that described defects detection operation detects, when the change degree of the described photographed data of visible ray is identical with the change degree of ultrared described photographed data, the kind of this defect is judged to be the defect adhering to or be mixed into metal.
2. defect detecting method according to claim 1, wherein, in described judgement operation, when the difference of the change degree of the described photographed data of visible ray and the change degree of ultrared described photographed data is below decision threshold, be judged to be that the change degree of the described photographed data of visible ray is identical with the change degree of ultrared described photographed data.
3. defect detecting method according to claim 1 and 2, wherein,
In described defects detection operation, when the size of the change degree of described photographed data is more than set-point, be judged to be that described photographed data compares to flawless state and there occurs variation.
4. defect detecting method according to claim 1 and 2, wherein, in described judgement operation, according to the size of the change degree of described photographed data, differentiates the kind of the metal adhering to or be mixed into.
5. defect detecting method according to claim 1 and 2, wherein, use quotient as the change degree of described photographed data, this quotient is that the photographed data generated in described data genaration operation is not had the photographed data of defective checked property and the value that obtains divided by what take in advance.
6. defect detecting method according to claim 1 and 2, wherein, described checked property be paper, film, resin, cellulose, for the dividing plate in secondary cell or optical sheet.
7. defect detecting method according to claim 1 and 2, wherein, receives visible ray and infrared ray respectively with Si based semiconductor photo detector.
8. defect detecting method according to claim 1 and 2, wherein, a video camera possesses respectively for receiving visible ray and ultrared element.
9. defect detecting method according to claim 1 and 2, wherein, carries out light splitting with beam splitter to visible ray and infrared ray, receives visible ray and infrared ray respectively.
10. defect detecting method according to claim 1 and 2, wherein, described light source is the restricted light source of wavelength region may.
11. defect detecting methods according to claim 1 and 2, wherein, to make from the light of described light source irradiation, by wave filter, to come wavelength-limited region.
12. 1 kinds of flaw detection apparatus, check the defect of checked property, possess as checked property using the sheet article of conveyance:
Irradiation portion, irradiates visible ray and infrared ray from light source to checked property;
Data generating section, receives the visible ray and infrared ray that are reflected by checked property respectively, and generates photographed data respectively according to each light income;
At least any one region detection comparing to that flawless state there occurs variation of the described photographed data of visible ray and ultrared described photographed data is defect by defects detection portion; And
Detection unit, in the defect that described defects detection portion detects, when the change degree of the described photographed data of visible ray is identical with the change degree of ultrared described photographed data, the kind of this defect is judged to be the defect adhering to or be mixed into metal.
Applications Claiming Priority (2)
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| JP2012159613A JP5673621B2 (en) | 2012-07-18 | 2012-07-18 | Defect inspection method and defect inspection apparatus |
| JP2012-159613 | 2012-07-18 |
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| CN103575737A CN103575737A (en) | 2014-02-12 |
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| KR (1) | KR20140011258A (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| JP5673621B2 (en) | 2015-02-18 |
| CN103575737A (en) | 2014-02-12 |
| JP2014020910A (en) | 2014-02-03 |
| TWI498544B (en) | 2015-09-01 |
| TW201411120A (en) | 2014-03-16 |
| KR20140011258A (en) | 2014-01-28 |
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