CN104597054A - OLED (organic light emitting diode) base plate coated film detection device and method as well as film coating equipment - Google Patents
OLED (organic light emitting diode) base plate coated film detection device and method as well as film coating equipment Download PDFInfo
- Publication number
- CN104597054A CN104597054A CN201410799763.7A CN201410799763A CN104597054A CN 104597054 A CN104597054 A CN 104597054A CN 201410799763 A CN201410799763 A CN 201410799763A CN 104597054 A CN104597054 A CN 104597054A
- Authority
- CN
- China
- Prior art keywords
- substrate
- oled substrate
- oled
- light source
- image
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electroluminescent Light Sources (AREA)
Abstract
The invention discloses an OLED (organic light emitting diode) base plate coated film detection device, an OLED base plate coated film detection method and film coating equipment. The equipment comprises a UV light source, a CCD (Charge Coupled Device) imaging device and a display device, wherein the UV light source and the CCD imaging device are arranged at the same side of a to-be-detected OLED base plate, a coated film detection zone of the OLED base plate is illuminated by light rays emitted by the UV light source, the CCD imaging device receives excitation light signals generated by the coated film detection zone and converts the excitation light signals into base plate images, and the display device displays the base plate images. An OLED base plate coated film with defects is judged out intuitively in time by virtue of a CCD, so that the production stability and the qualified rate of OLED products are improved, and the production cost is reduced.
Description
Technical field
The present invention relates to technical field of manufacturing semiconductors, particularly a kind of oled substrate coating film detecting device, method and filming equipment.
Background technology
Organic Light Emitting Diode (Organic Light-Emitting Diode), is called for short OLED, is to realize display by luminous organic material luminescence under the driving of electric current.The principle of luminosity of OLED inserts organic function layer between the anode and cathode, and this organic function layer generally includes electric charge injection layer, charge transport layer and luminescent layer, applies suitable voltage in-between the electrodes, and device just can be luminous.Organic material luminescence has two kinds, and one is electroluminescence, i.e. the principle of luminosity of OLED; One is photoluminescence, is to make it luminous by optical excitation organic material, and light source is generally UV ultraviolet light and royal purple light, and wavelength coverage is about 300nm ~ 500nm.
At present, existing OLED production line, especially in AMOLED production line production run, because substrate is placed in vacuum cavity, institute's film plating layer situation cannot be observed, take out after having needed encapsulation and light detection, defect cannot Timeliness coverage, has very large hysteresis quality, thus causes stability of the production process poor, yield is low, increases manufacturing cost.
Summary of the invention
The present invention proposes a kind of oled substrate coating film detecting device, method and filming equipment, intuitively judges the oled substrate plated film of existing defects by CCD in time, improves OLED production stability and qualification rate, reduces production cost.
For achieving the above object, the present invention adopts following technical scheme:
A kind of oled substrate coating film detecting device, comprise: UV light source, CCD imaging device and display device, the homonymy of oled substrate to be detected is located at by described UV light source and CCD imaging device, emitted beam by described UV light source and irradiate the plated film detection zone of this oled substrate, receive the optical excitation signal of described plated film detection zone generation by described CCD imaging device and convert described optical excitation signal to substrate image, and showing described substrate image by described display device.
Further, in above-mentioned oled substrate coating film detecting device, described plated film detection zone is the part surveyed area of described oled substrate or whole surveyed area.
Further, in above-mentioned oled substrate coating film detecting device, comprise multiple surveyed area in described substrate image, this surveyed area is corresponding with plated film detection zone, comprise multiple display base plate unit in described surveyed area, the plurality of display base plate unit is arranged in order.
Further, in above-mentioned oled substrate coating film detecting device, it is the UV ultraviolet light of 300nm ~ 500nm and the light source of royal purple light that described UV light source comprises wavelength coverage.
Further, in above-mentioned oled substrate coating film detecting device, described UV light source includes but not limited to mercury lamp, LED or Excimer lamp.
Further, in above-mentioned oled substrate coating film detecting device, the direction of illumination of described UV light source and the angle of oled substrate 100 are 0 ° ~ 90 °.
Separately, the present invention also provides a kind of detection method of above-mentioned oled substrate coating film detecting device, comprises the following steps:
Step S101: adjust the range of exposures of described UV light source and the field range of CCD imaging device, makes the range of exposures of described UV light source and the field range of CCD imaging device be the plated film detection zone of described oled substrate;
Step S102: start described UV light source and produce the plated film detection zone that light exposes to described oled substrate, and received the optical excitation signal of described plated film detection zone generation by described CCD imaging device;
Step S103: convert described optical excitation signal to substrate image by described CCD imaging device, and described substrate image is sent to described display device;
Step S104: show this substrate image by described display device, and compared by described substrate image and the standard substrate image preset, to judge described substrate image whether existing defects.
Further, in the detection method of above-mentioned oled substrate coating film detecting device, described step S103 comprises:
When described plated film detection zone is the part surveyed area of described oled substrate, by described CCD imaging device, described optical excitation signal is converted to the image of substrate portion surveyed area, and the image of described substrate portion surveyed area is sent to described display device;
Or, convert the image of the whole surveyed area of substrate after being accumulated by described optical excitation signal by described CCD imaging device to, and the image of whole for described substrate surveyed area sent to described display device.
Separately, the present invention also provides a kind of oled substrate filming equipment, it comprises: rotatable at least one transmission cavity and be located at least one evaporation cavity and the transitional cavity of described biography cavity surrounding, above-mentioned oled substrate coating film detecting device is provided with in described transitional cavity, the sidewall of described transmission cavity is fixed with at least one pivot arm for placing oled substrate, by the rotation of described transmission cavity and pivot arm, oled substrate is driven to turn in described evaporation cavity, to carry out plated film to described oled substrate, and drive oled substrate to turn in described transitional cavity, to detect the oled substrate of plated film.
Further, in above-mentioned oled substrate filming equipment, described at least one transmission cavity is two, and each both sides of transmitting cavity is equipped with an evaporation cavity, described transitional cavity is located at these two and is transmitted between cavity, and each sidewall transmitting cavity is fixed with a pivot arm.
Oled substrate coating film detecting device of the present invention, method and filming equipment intuitively judge the oled substrate plated film of existing defects in time by CCD, improve OLED production stability and qualification rate, reduce production cost.
Accompanying drawing explanation
Fig. 1 is the structural representation of the first embodiment of oled substrate coating film detecting device of the present invention;
Fig. 2 is the structural representation of the second embodiment of oled substrate coating film detecting device of the present invention;
Fig. 3 is the schematic diagram of substrate image in display device in Fig. 1 or Fig. 2;
Fig. 4 is the schematic flow sheet of oled substrate plated film detection method of the present invention;
Fig. 5 is the schematic diagram of oled substrate filming equipment of the present invention.
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
Refer to Fig. 1, the oled substrate coating film detecting device of first embodiment of the invention comprises: UV light source 1, CCD imaging device 2 and display device (not shown), the homonymy of oled substrate 100 to be detected is located at by described UV light source 1 and CCD imaging device 2, emitted beam by described UV light source 1 and irradiate the plated film detection zone 4 of this oled substrate 100, receive the optical excitation signal of described plated film detection zone 4 generation by described CCD imaging device 2 and convert described optical excitation signal to substrate image, and showing described substrate image by described display device.Like this, utilize the principle of photoluminescence, excite the luminous organic material in oled substrate 100 plated film district luminous by the irradiation of UV light, optical excitation signal is received again by CCD imaging device 2, and present oled panel display situation by display device, thus the coating defects of the large plate of place production line OLED can be detected, comprise point defect, line defect, and substrate fragmentation can be detected.
In the present embodiment, described oled substrate 100 size to be detected is larger, namely described plated film detection zone 4 is the part surveyed area of described oled substrate 100, the range of exposures of described UV light source 1 and CCD imaging device 2 are also the part surveyed area of this oled substrate 100, namely by making this oled substrate 100 move relative to UV light source 1 and CCD imaging device 2, the detection to whole oled substrate 100 plated film district is realized.Be appreciated that and can also reach detection to whole oled substrate 100 plated film district by the method for mobile UV light source 1 and CCD imaging device 2, wherein, described UV light source 1 needs with CCD imaging device 2 synchronizing moving that matches.
Described oled substrate 100 is PMOLED backboard, also can be AMOLED backboard.Can evaporation one deck organic luminescent material thin-film on described oled substrate 100, also can evaporation multilayer organic luminescent material thin-film, multilayer organic light emitting film is distinguished by the difference of spectrum.Described luminous organic material comprises hole injection layer material, hole transport layer material, electronic blocking layer material, emitting red light layer material, green emitting layer material, blue-light-emitting layer material, hole barrier layer material, electron transport layer materials, electron injecting layer material, covering layer material.The luminescent spectrum of described luminous organic material and intensity are different because of material, and it comprises visible-range 380nm ~ 780nm.
It is the UV ultraviolet light of 300nm ~ 500nm and the light source of royal purple light that described UV light source 1 comprises wavelength coverage, includes but not limited to the UV light sources such as mercury lamp, LED, Excimer lamp.In the present embodiment, described UV light source 1 is located at the side-lower of oled substrate 100, it is sent organic material that UV light is irradiated to plated film district on oled substrate 100 at a certain angle, wherein, the direction of illumination of described UV light source 1 and the angle of oled substrate 100 are 0 ° ~ 90 °.
Plated film detection zone 4 described in UV ultraviolet light or blue violet exposure is produced by described UV light source 1 in the present invention, described plated film detection zone 4 excites its luminous organic material luminous after being irradiated, the optical excitation signal that this luminous organic material sends is received by described CCD imaging device 2, and convert described optical excitation signal to substrate image, and described substrate image is shown in the display devices such as external display through line transmission.Wherein, a part of plated film detection zone luminescence that described CCD imaging device 2 can receive oled substrate 100 is just transferred to display device, also can receive the optical excitation signal of the organic material of all complete plated film detection zone of oled substrate 100, be transferred to display device after gathering again and show.
Standard substrate image is preset with, the substrate image shown by comparison and standard substrate image (by experienced technician or computer automatic comparison), to judge described substrate image whether existing defects in described display device.Described defect refers to the display defect that the organic material of oled substrate 100 plated film caused by organic material evaporation mechanism and different design cause, and includes but not limited to the point defect, line defect, contraposition deviation, the linearity etc. that cause because area plating is many, area plates less, plated film position deviation, plated film are thin, plated film is thick etc.
Described substrate fragmentation refers to and causes breaking of substrate by improper in evaporation mechanism and transfer structure operational process, viewing area is had influence on if broken, then can be judged by CCD imaging device 2 and display device, to process fragmentation substrate in time, it is avoided to cause larger loss to production equipment and production efficiency.
Refer to Fig. 3, Fig. 3 is the schematic diagram of substrate image in display device.Wherein, substrate image 31 is the image of whole substrate, comprise multiple surveyed area 32(dotted line collimation mark in described substrate image 31 to show), this surveyed area 32 is corresponding with plated film detection zone 4, comprise multiple display base plate unit 33 in described surveyed area 32, the plurality of display base plate unit 33 is arranged in order.In the present embodiment, when described UV light source 1 and CCD imaging device 2 detect the plated film detection zone 4 of oled substrate 100 at every turn, namely in described display device 3, a surveyed area 32 is demonstrated, by image and the standard substrate image of display base plate unit 33 in this surveyed area 32 of comparison, thus judge oled substrate 100 whether existing defects in this surveyed area 32.
Refer to Fig. 2, Fig. 2 is the structural representation of the second embodiment of oled substrate coating film detecting device of the present invention.Compared to described first embodiment, the difference of the present embodiment is only: described oled substrate 100 size to be detected is less, namely described plated film detection zone 4 is whole surveyed areas of described oled substrate 100, and the range of exposures of described UV light source 1 and CCD imaging device 2 are whole surveyed areas of this oled substrate 100.Like this, the substrate image of whole oled substrate 100 can be obtained by described UV light source 1 and the imaging of CCD imaging device 2 one-time detection, and shown by display device.
Refer to Fig. 4, the present invention also provides a kind of detection method of above-mentioned oled substrate coating apparatus, said method comprising the steps of:
Step S101: adjust the range of exposures of described UV light source 1 and the field range of CCD imaging device 2, makes the range of exposures of described UV light source 1 and the field range of CCD imaging device 2 be the plated film detection zone 4 of described oled substrate 100;
Step S102: start described UV light source 1 and produce the plated film detection zone 4 that light exposes to described oled substrate 100, and the optical excitation signal being received the generation of described plated film detection zone 4 by described CCD imaging device 2;
Step S103: convert described optical excitation signal to substrate image by described CCD imaging device 2, and described substrate image is sent to described display device;
Step S104: show this substrate image by described display device, and compared by described substrate image and the standard substrate image preset, to judge described substrate image whether existing defects.
Wherein, described step S102 also comprises: when described plated film detection zone 4 is the part surveyed area of described oled substrate 100, move for more than 2 time relative to UV light source 1 and CCD imaging device by driving described oled substrate 100, or drive described UV light source 1 and CCD imaging device 2 to move for more than 100 time relative to oled substrate, described UV light source 1 and the whole surveyed areas of CCD imaging device 2 to described oled substrate 100 are detected.
Described step S103 comprises: when described plated film detection zone 4 is the part surveyed area of described oled substrate 100, by described CCD imaging device 2, described optical excitation signal is converted to the image of substrate portion surveyed area, and the image of described substrate portion surveyed area is sent to described display device; Or, convert the image of the whole surveyed area of substrate after being accumulated by described optical excitation signal by described CCD imaging device 2 to, and the image of whole for described substrate surveyed area sent to described display device.
Refer to Fig. 5, Fig. 5 is the schematic diagram of oled substrate filming equipment of the present invention.In actual applications, oled substrate filming equipment of the present invention comprises rotatable at least one transmission cavity 10 and is located at least one evaporation cavity 20 and the transitional cavity 30 of described biography cavity 10 surrounding, above-mentioned oled substrate coating film detecting device is provided with in described transitional cavity 30, the sidewall of described transmission cavity 10 is fixed with at least one pivot arm 102 for placing oled substrate (not shown), by the rotation of described transmission cavity 10 and pivot arm 102, oled substrate is driven to turn in described evaporation cavity 20, to carry out plated film to described oled substrate, and drive oled substrate to turn in described transitional cavity 30, to detect the oled substrate of plated film.
Wherein, the plated film of described oled substrate is organic material film, and it can be one deck, also can be two-layer or multilayer.
In the present embodiment, described at least one transmission cavity 10 is two, each both sides of transmitting cavity 10 is equipped with an evaporation cavity 20, described transitional cavity 30 is located at these two and is transmitted between cavity 10, and each sidewall transmitting cavity 10 is fixed with a pivot arm 102, certainly, described pivot arm 102 can also be two or more, to enhance productivity.
During oled substrate filming equipment work of the present invention, first, described pivot arm 102 is positioned at empty wire frame positions, oled substrate to be coated is positioned over this pivot arm 102, namely carries out material loading; Then, by the rotation of described transmission cavity 10 and pivot arm 102, drive oled substrate to turn in described evaporation cavity 20, make described oled substrate carry out plating organic material film in evaporation cavity 20; Finally, be rotated further the rotation by described transmission cavity 10 and pivot arm 102, oled substrate is driven to turn in described transitional cavity 30, detected by the oled substrate of the above-mentioned oled substrate coating film detecting device in described transitional cavity 30 to plated film, with described in detecting the oled substrate of plated film whether there is coating defects, if any then processing in time; If no, then regard as specification product, the oled substrate of described plated film is sent in next process unit.
Compared to prior art, oled substrate coating film detecting device of the present invention, method and filming equipment intuitively judge the oled substrate plated film of existing defects in time by CCD, improve OLED production stability and qualification rate, reduce production cost.
Here description of the invention and application is illustrative, not wants by scope restriction of the present invention in the above-described embodiments.Distortion and the change of embodiment disclosed are here possible, are known for the replacement of embodiment those those of ordinary skill in the art and the various parts of equivalence.Those skilled in the art are noted that when not departing from spirit of the present invention or essential characteristic, the present invention can in other forms, structure, layout, ratio, and to realize with other assembly, material and parts.When not departing from the scope of the invention and spirit, can other distortion be carried out here to disclosed embodiment and change.
Claims (10)
1. an oled substrate coating film detecting device, it is characterized in that, comprise: UV light source, CCD imaging device and display device, the homonymy of oled substrate to be detected is located at by described UV light source and CCD imaging device, emitted beam by described UV light source and irradiate the plated film detection zone of this oled substrate, receive the optical excitation signal of described plated film detection zone generation by described CCD imaging device and convert described optical excitation signal to substrate image, and showing described substrate image by described display device.
2. oled substrate coating film detecting device according to claim 1, is characterized in that, described plated film detection zone is the part surveyed area of described oled substrate or whole surveyed area.
3. oled substrate coating film detecting device according to claim 1, it is characterized in that, comprise multiple surveyed area in described substrate image, this surveyed area is corresponding with plated film detection zone, comprise multiple display base plate unit in described surveyed area, the plurality of display base plate unit is arranged in order.
4. the oled substrate coating film detecting device according to Claims 2 or 3, is characterized in that, it is the UV ultraviolet light of 300nm ~ 500nm and the light source of royal purple light that described UV light source comprises wavelength coverage.
5. oled substrate coating film detecting device according to claim 4, is characterized in that, described UV light source includes but not limited to mercury lamp, LED or Excimer lamp.
6. oled substrate coating film detecting device according to claim 5, is characterized in that, the direction of illumination of described UV light source and the angle of oled substrate 100 are 0 ° ~ 90 °.
7. a detection method for the oled substrate coating film detecting device as described in any one of claim 1 ~ 6, is characterized in that, said method comprising the steps of:
Step S101: adjust the range of exposures of described UV light source and the field range of CCD imaging device, makes the range of exposures of described UV light source and the field range of CCD imaging device be the plated film detection zone of described oled substrate;
Step S102: start described UV light source and produce the plated film detection zone that light exposes to described oled substrate, and received the optical excitation signal of described plated film detection zone generation by described CCD imaging device;
Step S103: convert described optical excitation signal to substrate image by described CCD imaging device, and described substrate image is sent to described display device;
Step S104: show this substrate image by described display device, and compared by described substrate image and the standard substrate image preset, to judge described substrate image whether existing defects.
8. the detection method of oled substrate coating film detecting device according to claim 7, is characterized in that, described step S103 comprises:
When described plated film detection zone is the part surveyed area of described oled substrate, by described CCD imaging device, described optical excitation signal is converted to the image of substrate portion surveyed area, and the image of described substrate portion surveyed area is sent to described display device;
Or, convert the image of the whole surveyed area of substrate after being accumulated by described optical excitation signal by described CCD imaging device to, and the image of whole for described substrate surveyed area sent to described display device.
9. an oled substrate filming equipment, is characterized in that, it comprises:
Rotatable at least one transmission cavity and be located at least one evaporation cavity and the transitional cavity of described biography cavity surrounding, the oled substrate coating film detecting device as described in any one of claim 1 ~ 6 is provided with in described transitional cavity, the sidewall of described transmission cavity is fixed with at least one pivot arm for placing oled substrate, by the rotation of described transmission cavity and pivot arm, oled substrate is driven to turn in described evaporation cavity, to carry out plated film to described oled substrate, and drive oled substrate to turn in described transitional cavity, to detect the oled substrate of plated film.
10. oled substrate filming equipment according to claim 9, it is characterized in that, described at least one transmission cavity is two, each both sides of transmitting cavity is equipped with an evaporation cavity, described transitional cavity is located at these two and is transmitted between cavity, and each sidewall transmitting cavity is fixed with a pivot arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410799763.7A CN104597054A (en) | 2014-12-22 | 2014-12-22 | OLED (organic light emitting diode) base plate coated film detection device and method as well as film coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201410799763.7A CN104597054A (en) | 2014-12-22 | 2014-12-22 | OLED (organic light emitting diode) base plate coated film detection device and method as well as film coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104597054A true CN104597054A (en) | 2015-05-06 |
Family
ID=53122975
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201410799763.7A Pending CN104597054A (en) | 2014-12-22 | 2014-12-22 | OLED (organic light emitting diode) base plate coated film detection device and method as well as film coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104597054A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908454A (en) * | 2015-12-23 | 2017-06-30 | 昆山国显光电有限公司 | The testing equipment and method of substrate |
| CN109562407A (en) * | 2016-08-22 | 2019-04-02 | 住友重机械工业株式会社 | Membrane formation device and film forming method |
| CN109932292A (en) * | 2019-03-29 | 2019-06-25 | 苏州精濑光电有限公司 | A kind of dust fall detection method |
| CN111324007A (en) * | 2020-03-26 | 2020-06-23 | 武汉华星光电半导体显示技术有限公司 | Automatic optical detector for mask plate |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070050803A (en) * | 2006-08-28 | 2007-05-16 | 주식회사 대우일렉트로닉스 | Method for inspecting the surface of substrate |
| CN102051581A (en) * | 2010-12-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | Substrate film-coating processing system |
| CN102253445A (en) * | 2011-07-14 | 2011-11-23 | 北京交通大学 | Single crystal fiber with Bragg structure cladding and manufacturing method thereof |
| CN103226105A (en) * | 2012-01-25 | 2013-07-31 | 东丽工程株式会社 | Device and method for inspecting unevenness of film thickness, and coating device with inspecting device |
| CN103575737A (en) * | 2012-07-18 | 2014-02-12 | 欧姆龙株式会社 | Defect detection method and device |
-
2014
- 2014-12-22 CN CN201410799763.7A patent/CN104597054A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20070050803A (en) * | 2006-08-28 | 2007-05-16 | 주식회사 대우일렉트로닉스 | Method for inspecting the surface of substrate |
| CN102051581A (en) * | 2010-12-30 | 2011-05-11 | 东莞宏威数码机械有限公司 | Substrate film-coating processing system |
| CN102253445A (en) * | 2011-07-14 | 2011-11-23 | 北京交通大学 | Single crystal fiber with Bragg structure cladding and manufacturing method thereof |
| CN103226105A (en) * | 2012-01-25 | 2013-07-31 | 东丽工程株式会社 | Device and method for inspecting unevenness of film thickness, and coating device with inspecting device |
| CN103575737A (en) * | 2012-07-18 | 2014-02-12 | 欧姆龙株式会社 | Defect detection method and device |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106908454A (en) * | 2015-12-23 | 2017-06-30 | 昆山国显光电有限公司 | The testing equipment and method of substrate |
| CN109562407A (en) * | 2016-08-22 | 2019-04-02 | 住友重机械工业株式会社 | Membrane formation device and film forming method |
| CN109562407B (en) * | 2016-08-22 | 2021-09-28 | 住友重机械工业株式会社 | Film forming apparatus and film forming method |
| CN109932292A (en) * | 2019-03-29 | 2019-06-25 | 苏州精濑光电有限公司 | A kind of dust fall detection method |
| CN111324007A (en) * | 2020-03-26 | 2020-06-23 | 武汉华星光电半导体显示技术有限公司 | Automatic optical detector for mask plate |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100705316B1 (en) | Apparatus and method of clamping mask for organic electro luminescence display device | |
| US9704833B2 (en) | Full-color light emitting diode (LED) display panel, method of manufacturing full-color LED display panel, display device | |
| JP6963633B2 (en) | Display panel aging test system | |
| US11276798B2 (en) | Display device | |
| CN104597054A (en) | OLED (organic light emitting diode) base plate coated film detection device and method as well as film coating equipment | |
| KR102015400B1 (en) | Apparatus for ablation of carrier substrate, method for ablation of carrier substrate and method for making display apparatus | |
| KR102307284B1 (en) | Electronic device | |
| US8765494B2 (en) | Method for fabricating organic EL device and method for evaluating organic EL device | |
| TW201944850A (en) | Light-emitting device and camera | |
| KR20130066647A (en) | Organic el display panel correction equipment and method | |
| KR20140006701A (en) | Method of manufacturing organic el device and method of setting laser focusing position | |
| CN109273493B (en) | OLED display substrate, manufacturing method thereof and display device | |
| JP2004172127A (en) | Method of determining defect in oled device | |
| CN109244270A (en) | Bottom emitting oled display substrate and preparation method thereof, display device | |
| US10418571B2 (en) | Lighting apparatus using organic light emitting device and method of fabricating thereof | |
| TWI583940B (en) | A manufacturing method of a display panel, an inspection apparatus, and a inspection method thereof | |
| KR20140012339A (en) | Display panel inspection apparatus | |
| KR20060044265A (en) | Apparatus for fabricating organic electro luminescence display device | |
| US9112187B2 (en) | Organic el device and method of manufacturing organic EL device | |
| JP2010223669A (en) | Mask inspecting device, apparatus of manufacturing organic el device, mask inspecting method, and method of manufacturing organic el device | |
| US20090325450A1 (en) | Inspection method and inspection device, repairing method and repairing device for organic electroluminescence panel | |
| KR100902709B1 (en) | Apparatus for detecting defect on the edge of glass panel in the moving direction | |
| CN109786581B (en) | Display panel and preparation method thereof | |
| KR101234739B1 (en) | Amoled pad pattern repair device | |
| KR20110028737A (en) | Light emitting diode repair method and apparatus using quantum dot coating |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20150506 |
|
| RJ01 | Rejection of invention patent application after publication |