CN103560171B - 一种太阳能电池片石墨舟饱和的方法 - Google Patents

一种太阳能电池片石墨舟饱和的方法 Download PDF

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CN103560171B
CN103560171B CN201310524344.8A CN201310524344A CN103560171B CN 103560171 B CN103560171 B CN 103560171B CN 201310524344 A CN201310524344 A CN 201310524344A CN 103560171 B CN103560171 B CN 103560171B
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谢余才
陈刚刚
李昕洁
许莉
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NINGXIA YINXING ENERGY SOURCES CO Ltd
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Abstract

本发明涉及一种太阳能电池片石墨舟饱和的方法。其特点是，包括如下步骤：（1）将21片石墨舟送进炉管；（2）抽真空，时间3600s；（3）通入氨气，温度控制在425℃，放电功率7200w，持续240秒；（4）抽真空，通入氮气7500sccm，时间20秒，再抽真空，重复两次后恢复；（5）抽真空，通入氨气7500sccm，温度控制在420‑430℃，预沉积120秒，再通入硅烷，持续放电9000‑10000秒；（6）停止通气，抽真空，至压力达到35毫托时，通入氮气6000sccm，再抽真空，重复两次后恢复；（7）卸料即可。采用本发明的方法后，可以避免石墨舟饱和不充分，导致工艺过程中产生色差片的缺陷。

Description

一种太阳能电池片石墨舟饱和的方法
技术领域
本发明涉及一种太阳能电池片石墨舟饱和的方法。
背景技术
太阳能是一种重要的清洁能源，太阳能电池片是把太阳能转化成电能的装置，太阳能电池片生产工艺比较复杂，为了减少太阳光的反射，通常采取的方法是在太阳能电池片上镀减反射膜。通过PECVD（PlasmaEnhanced Chemical Vapor Deposition，等离子体增强化学气相沉积法）技术在太阳能电池片的表面表面沉积一层氮化硅膜，工作原理是高频电流使含有薄膜组成原子的气体电离，在局部形成等离子体，化学活性很强的等离子很容易发生反应，在基片上形成所需要的薄膜。能够很好的减少太阳光在硅片表面的反射，降低反射率。工艺之前要对石墨舟进行饱和，其作用是在石墨舟内壁上沉积一层氮化硅膜，从而使得内壁各处均呈氮化硅状态，这样会使石墨舟内部各处的氮化硅沉积速率趋于一致，石墨舟内壁平坦度一致。饱和工艺的作用就是在石墨舟内壁上沉积一层氮化硅膜，从而使得内壁各处均呈氮化硅状态，这样会使石墨舟内部各处的氮化硅沉积速率趋于一致，石墨舟内壁平坦度一致，平坦度不同会使电场分布不均匀，理论上会使镀膜不均匀，平坦度不同会引起内壁表面积变化，会引起饱和程度不够的现象，出现色差片。
石墨舟使用周期镀膜均匀性的变化：石墨舟使用前期，由于舟的饱和程度不够易引起色差，石墨舟使用中期，舟的饱和程度足够且内壁上沉积的氮化硅膜不是很厚，使得镀膜的均匀性表现良好，石墨舟使用后期，由于内壁上沉积的氮化硅膜很厚，会导致以下两个现象：局部氮化硅膜的脱落，引起舟的表面状态发生变化，氮化硅膜很厚会引起舟的导热性能发生变化，局部过厚会引起色差片的产生。
石墨舟不同饱和方式：饱和时使用假片，这种饱和比较充分，生产成本高；饱和环境和实际镀膜环境相同：硅片的存在会形成更大面积的电场，产生更多等离子体，石墨舟内壁上沉积的氮化硅膜更充分。饱和时不使用假片，饱和不够充分，生产成本低；饱和程度不充分，前期镀膜均匀性较差，色差片较多。经过长期生产实践发现，但是现有的工艺不能够满足21片石墨舟的饱和要求，饱和后进行工艺，会出现色差、在炉口表现的尤为严重，最终会影响电池的转化效率，产品合格率下降。
发明内容
本发明的目的是提供一种太阳能电池片石墨舟饱和的方法，采用该方法饱和石墨舟能够产生更多等离子体，从而使石墨舟内壁上沉积的氮化硅膜更充分。
一种太阳能电池片石墨舟饱和的方法，其特别之处在于，包括如下步骤：
（1）将21片石墨舟送进炉管；
（2）抽真空，时间3600s；
（3）通入氨气，使炉管内压力达到1700毫托，温度控制在425℃，放电功率7200w，持续240秒；
（4）抽真空，至压力达到35毫托时，通入氮气7500sccm，时间20秒，再抽真空，重复两次后恢复常压；
（5）抽真空，至压力达到35毫托时，通入氨气7500sccm，使得炉管内压力达到1600毫托-1800毫托，温度控制在420-430℃，预沉积120秒，再通入硅烷，硅烷流量控制在800sccm-900sccm，至压力稳定在1600毫托-1800毫托，持续放电9000-10000秒；
（6）停止通气，抽真空，至压力达到35毫托时，通入氮气6000sccm，时间20秒，再抽真空，重复两次后恢复常压；
（7）卸料即可。
步骤（5）中硅烷氨气比为800:7500。
步骤（5）中放电功率调整到7000-7500w，脉冲开关比例调整为3:45-48。
步骤（1）中炉管直径380mm、长2100mm。
经过试用证明，采用本发明的方法后，可以很好的避免石墨舟饱和不充分，导致工艺过程中产生色差片的缺陷。
具体实施方式
实施例1：
（1）将清洗完并且烘干后的21片石墨舟送进炉管，炉管直径380mm，长2100mm；
（2）抽真空，时间3600s，充分抽掉石墨舟表面残留的水分；
（3）通入氨气，使炉管内压力达到1700毫托，温度控制在425℃，放电功率7200w，持续240秒；
（4）抽真空，至压力达到35毫托时，通入氮气7500sccm，时间20秒，再抽真空，重复两次后恢复常压；
（5）抽真空，至压力达到35毫托时，通入氨气7500sccm，使得炉管内压力达到1600毫托，温度控制在425℃，预沉积120秒，再通入硅烷，硅烷流量控制在800sccm，至压力稳定在1600-1800毫托，放电功率7200w，持续放电9000-10000秒；
上述过程中控制硅烷氨气比为800:7500，脉冲开关比例调整为3:45-48；
（6）停止通气，抽真空，至压力达到35毫托时，通入氮气6000sccm，时间20秒，再抽真空，重复两次后恢复常压；
（7）卸料即可。
此方法使石墨舟内壁上沉积的氮化硅膜更充分，运行工艺不会出现色差片。
采用上述工艺饱和石墨舟后，进行镀膜工艺，对前几次色差片进行统计，统计结果如下：
石墨舟的总片数为280片，与背景技术相比色差片比例显著降低。

Claims (2)

1.一种太阳能电池片石墨舟饱和的方法，其特征在于，包括如下步骤：
（1）将21片石墨舟送进炉管；
（2）抽真空，时间3600s；
（3）通入氨气，使炉管内压力达到1700毫托，温度控制在425℃，放电功率7200w，持续240秒；
（4）抽真空，至压力达到35毫托时，通入氮气7500sccm，时间20秒，再抽真空，重复两次后恢复常压；
（5）抽真空，至压力达到35毫托时，通入氨气7500sccm，使得炉管内压力达到1600毫托-1800毫托，温度控制在420-430℃，预沉积120秒，再通入硅烷，硅烷流量控制在800sccm-900sccm，至压力稳定在1600毫托-1800毫托，持续放电9000-10000秒；
（6）停止通气，抽真空，至压力达到35毫托时，通入氮气6000sccm，时间20秒，再抽真空，重复两次后恢复常压；
（7）卸料即可；
步骤（5）中硅烷氨气比为800:7500；
步骤（5）中放电功率调整到7200w，脉冲开关比例调整为3:45-48。
2.如权利要求1所述的一种太阳能电池片石墨舟饱和的方法，其特征在于：步骤（1）中炉管直径380mm、长2100mm。
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CN105112888B (zh) * 2015-08-27 2017-12-08 常州天合光能有限公司 一种石墨舟的饱和方法
CN105355722B (zh) * 2015-12-11 2018-02-27 江阴鑫辉太阳能有限公司 一种太阳能电池组件的制造方法
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