CN103499977A - Angle adjusting platform with active-and-passive vibration control function - Google Patents

Angle adjusting platform with active-and-passive vibration control function Download PDF

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Publication number
CN103499977A
CN103499977A CN201310285391.1A CN201310285391A CN103499977A CN 103499977 A CN103499977 A CN 103499977A CN 201310285391 A CN201310285391 A CN 201310285391A CN 103499977 A CN103499977 A CN 103499977A
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voice coil
coil motor
active
passive vibration
base
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CN103499977B (en
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陈杰
徐明龙
韦娟芳
于新战
翟崇朴
李亮
何少泽
张舒文
安增勇
张丰
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Xian Jiaotong University
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Abstract

一种带有主被动振动控制的角度调节平台,包括底座,和底座连接的上平台,连接在底座和上平台间的球副柔性铰链,上平台通过其四个角上的直梁型柔性铰链与底座四周支架连接,还包括固定在底座和上平台间的两个音圈电机驱动器和两个主被动振动控制器以及固定在底座上且和上平台留有预设间隙的2~4个限位机构,两个音圈电机驱动器和两个主被动振动控制器关于球副柔性铰链对称设置成正方形分布,且音圈电机驱动器和主被动振动控制器两两相对,限位机构设置在音圈电机驱动器和主被动振动控制器间,在直梁型柔性铰链表面上贴有应变片,应变片分别和其位置靠近的音圈电机驱动器或主被动振动控制器电连接;本发明能够实现精确、稳定的角度调节。

Figure 201310285391

An angle adjustment platform with active and passive vibration control, including a base, an upper platform connected to the base, a ball joint flexible hinge connected between the base and the upper platform, and the upper platform through straight beam flexible hinges at its four corners It is connected with the brackets around the base, and also includes two voice coil motor drivers fixed between the base and the upper platform, two active and passive vibration controllers, and 2 to 4 limiters fixed on the base and leaving a preset gap with the upper platform. Position mechanism, two voice coil motor drivers and two active and passive vibration controllers are symmetrically arranged in a square distribution with respect to the flexible hinge of the ball pair, and the voice coil motor driver and the active and passive vibration controllers are opposite to each other, and the limit mechanism is set on the voice coil Between the motor driver and the active and passive vibration controller, strain gauges are pasted on the surface of the straight beam type flexible hinge, and the strain gauges are respectively electrically connected to the voice coil motor driver or the active and passive vibration controller which are located close to them; the present invention can realize accurate, Stable angle adjustment.

Figure 201310285391

Description

A kind of angular adjustment platform with the moving vibration control of main quilt
Technical field
The present invention relates to the moving vibration control technology of angular adjustment and main quilt field, be specifically related to a kind of angular adjustment platform with the moving vibration control of main quilt.
Background technology
The angular adjustment system is widely used in optical engineering, and microelectronics is made, MEMS (micro electro mechanical system), space flight and aviation, the fields such as ultraprecise machine-building and biomedicine.What traditional angular adjustment adopted is drive and control of electric machine, and conventional motors driving control is carried out angular adjustment and generally is comprised of electric machine controller, motor and controlled plant.Conventional motors drives control to carry out angular adjustment and has following defect: one, this tradition angular adjustment is by motor output displacement and power, and general stroke and force rate are larger, but precision is not high; Two, by motor output displacement and power, response speed is slow; Three, the phenomenon of vibration easily appears in motor operation course, causes being difficult to stable angular adjustment; Four,, in actual research work, conventional motors drives to control carries out the angular adjustment inefficiency.
Summary of the invention
The problem existed in order to solve above-mentioned prior art, the object of the present invention is to provide a kind of angular adjustment platform with the moving vibration control of main quilt, and platform of the present invention can be realized accurate, stable angular adjustment.
For reaching above purpose, the present invention adopts following technical scheme:
A kind of angular adjustment platform with the moving vibration control of main quilt, comprise base 6, the upper mounting plate 1 be connected with base 6 surrounding cantilever tip, be connected to the secondary flexible hinge 2 of ball of 1 of base 6 and upper mounting plate, described upper mounting plate 1 is connected with base 6 surrounding supports by the straight beam type flexible hinge 3 on its four angles, also comprise two voice coil motor driver 5 and two moving vibrating controllers 8 of main quilt that are fixed on 1 of base 6 and upper mounting plate and be fixed on base 6 and and upper mounting plate 1 leave 2~4 position-limit mechanisms 7 of prepsetting gap, described two voice coil motor driver 5 and two moving vibrating controllers 8 of main quilt are symmetrical arranged quadrate about the secondary flexible hinge 2 of ball and distribute, and voice coil motor driver 5 is relative in twos with the moving vibrating controller 8 of main quilt, described position-limit mechanism 7 is arranged on voice coil motor driver 5 and main quilt is moved 8 of vibrating controllers, post foil gauge 4 on described straight beam type flexible hinge 3 surfaces, described foil gauge 4 is electrically connected to close voice coil motor driver 5 or the moving vibrating controller 8 of main quilt in its position respectively.
Described voice coil motor driver 5 comprises hollow barrel voice coil motor shell 5-3, be embedded in the voice coil motor permanent magnet 5-5 of hollow barrel voice coil motor shell 5-3 inner bottom part central authorities, described voice coil motor permanent magnet 5-5 top is embedded in voice coil motor permeability magnetic material 5-4 bottom, voice coil motor epoxy resin cylinder 5-1 inserts in the gap of hollow barrel voice coil motor shell 5-3 madial wall and voice coil motor permeability magnetic material 5-4, at the outer wall of described voice coil motor epoxy resin cylinder 5-1, is wound with voice coil motor coil 5-2.
The moving vibrating controller 8 of described main quilt comprises hollow barrel shell 8-3, be embedded in the permanent magnet 8-5 of hollow barrel shell 8-3 inner bottom part central authorities, described permanent magnet 8-5 top is embedded in permeability magnetic material 8-4 bottom, aluminum cylinder 8-1 inserts in the gap of hollow barrel shell 8-3 madial wall and permeability magnetic material 8-4, at the outer wall of described aluminum cylinder 8-1, is wound with coil 8-2.
The secondary flexible hinge 2 of described ball, voice coil motor driver 5, the moving vibrating controller 8 of main quilt are all with bolts with being connected of 6 of bases with upper mounting plate 1 and straight beam type flexible hinge 3.
Compared to the prior art the present invention, has following advantage:
1) the present invention selects voice coil motor driver, utilizes foil gauge to gather displacement signal, the adjusting of angle is carried out to closed-loop control, thereby can realize high-resolution, and high-precision angle is pointed to and regulated, and fast response time.
2) the present invention is with the moving vibrating controller of main quilt, when the voice coil motor driver start and while being subject to external disturbance platform vibration-generating, utilize main quilt to move vibrating controller, not only can realize passive vibration control, and the signal that can utilize the foil gauge on flexible hinge to feed back, platform is carried out to Active Vibration Control, make vibration decay rapidly.
3) supporting mechanism has adopted flexible hinge (the secondary flexible hinge of ball and straight beam type flexible hinge), the characteristic that flexible hinge has utilized resilient material microdeformation and certainly replied, eliminate idle running and the mechanical friction in the transmission process, obtained the displacement resolution of superelevation, reduced the error of mechanism.
The accompanying drawing explanation
Fig. 1 is one-piece construction figure of the present invention.
Fig. 2 is the voice coil motor driver sectional view.
Fig. 3 is the moving vibrating controller sectional view of main quilt.
Fig. 4 is that angular adjustment platform of the present invention is regulated schematic diagram.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail.
As shown in Figure 1; a kind of angular adjustment platform with the moving vibration control of main quilt of the present invention; comprise base 6; the upper mounting plate 1 be connected with base 6 surrounding cantilever tip; be connected to the secondary flexible hinge 2 of ball of 1 of base 6 and upper mounting plate; described upper mounting plate 1 is connected with base 6 surrounding supports by the straight beam type flexible hinge 3 on its four angles; straight beam type flexible hinge 3 has effectively improved the torsional rigidity of upper mounting plate 1 around vertical direction; prevent that it from unnecessary torsion occurring, and the secondary flexible hinge 2 of ball is had to certain protective effect.Also comprise two voice coil motor driver 5 and two moving vibrating controllers 8 of main quilt that are fixed on 1 of base 6 and upper mounting plate and be fixed on base 6 and and upper mounting plate 1 leave 2~4 position-limit mechanisms 7 of prepsetting gap; be subject to excessive bending and damage for fear of the secondary flexible hinge 2 of the ball at platform center; the present embodiment is provided with 3 position-limit mechanisms 7; angle of regulation range that can limiting mechanism by regulation position limiting mechanism 7; and idle the time, can utilize position-limit mechanism 7 that upper mounting plate 1 is clamped, therefore reach the purpose of the secondary flexible hinge 2 of protective device ball.Described two voice coil motor driver 5 and two moving vibrating controllers 8 of main quilt are symmetrical arranged quadrate about the secondary flexible hinge 2 of ball and distribute, and voice coil motor driver 5 is relative in twos with the moving vibrating controller 8 of main quilt, described position-limit mechanism 7 is arranged on voice coil motor driver 5 and main quilt is moved 8 of vibrating controllers, post foil gauge 4 on described straight beam type flexible hinge 3 surfaces, described foil gauge 4 is electrically connected to close voice coil motor driver 5 or the moving vibrating controller 8 of main quilt in its position respectively.Foil gauge 4 and voice coil motor driver 5 are electrically connected to, and utilize closed-loop control can obtain exactly the sensing angle of platform; The moving vibrating controller 8 of foil gauge 4 and main quilt is electrically connected to, and the ACTIVE CONTROL of moving vibrating controller 8 by main quilt can make the vibration of mechanism decay soon.Meanwhile, the passive vibration control of the moving vibrating controller 8 of main quilt can suppress vibration in real time.
As shown in Figure 2, described voice coil motor driver 5 comprises hollow barrel voice coil motor shell 5-3, be embedded in the voice coil motor permanent magnet 5-5 of hollow barrel voice coil motor shell 5-3 inner bottom part central authorities, described voice coil motor permanent magnet 5-5 top is embedded in voice coil motor permeability magnetic material 5-4 bottom, voice coil motor epoxy resin cylinder 5-1 inserts in the gap of hollow barrel voice coil motor shell 5-3 madial wall and voice coil motor permeability magnetic material 5-4, at the outer wall of described voice coil motor epoxy resin cylinder 5-1, is wound with voice coil motor coil 5-2.
As shown in Figure 3, the moving vibrating controller 8 of described main quilt comprises hollow barrel shell 8-3, be embedded in the permanent magnet 8-5 of hollow barrel shell 8-3 inner bottom part central authorities, described permanent magnet 8-5 top is embedded in permeability magnetic material 8-4 bottom, epoxy resin cylinder 8-1 inserts in the gap of hollow barrel shell 8-3 madial wall and permeability magnetic material 8-4, at the outer wall of described epoxy resin cylinder 8-1, is wound with coil 8-2.
As the preferred embodiment of the present invention, the secondary flexible hinge 2 of described ball, voice coil motor driver 5, the moving vibrating controller 8 of main quilt are all with bolts with being connected of 6 of bases with upper mounting plate 1 and straight beam type flexible hinge 3.
Principle of work of the present invention is: when the specific current signal of voice coil motor driver 5 input, the voice coil motor coil 5-2 of energising is in the uniform magnetic field of voice coil motor permeability magnetic material 5-4 and voice coil motor shell 5-3 formation, can make it produce linear driving force, the certain start displacement of voice coil motor driver 5 output, upper mounting plate 1 can have the deflection of an angle thereupon.The strain signal of foil gauge 4 outputs by straight beam type flexible hinge 3, feed back to the voice coil motor driver 5 with its electrical connection after treatment, utilizes closed-loop control to realize accurate angular adjustment.The start displacement that can produce micron dimension due to voice coil motor driver 5, so the angular adjustment resolution of angular adjustment platform of the present invention can reach differential of the arc level.Two voice coil motor driver 5 push-and-pull starts in phase, can realize two rotary freedoms, and its platform points to the angle range of adjustment as shown in Figure 4.During voice coil motor driver 5 start and be subject to extraneous disturbance, all can make angular adjustment platform of the present invention produce vibration, if rely on the damping of platform own to reach vibration damping to stable, often need the time of growing, so vibration control be very important.Foil gauge 4 on straight beam type flexible hinge 3 can be exported the signal of a vibration, signal is processed with controlled signal feedback to the moving vibrating controller 8 of main quilt, a power contrary with direction of vibration (resistance Buddhist nun) can be produced in the uniform magnetic field that current signal forms by permeability magnetic material 8-4 and shell 8-3 at permanent magnet 8-5 by coil 8-2, vibration decay rapidly can be made.Meanwhile, the moving vibrating controller 8 of main quilt can produce eddy current while adopting aluminum cylinder 8-1 to vibrate in magnetic field, thereby has played the passive vibration control effect.

Claims (4)

1.一种带有主被动振动控制的角度调节平台,包括底座(6),和底座(6)四周支架顶端连接的上平台(1),连接在底座(6)和上平台(1)间的球副柔性铰链(2),其特征在于:所述上平台(1)通过其四个角上的直梁型柔性铰链(3)与底座(6)四周支架连接,还包括固定在底座(6)和上平台(1)间的两个音圈电机驱动器(5)和两个主被动振动控制器(8)以及固定在底座(6)上且和上平台(1)留有预设间隙的2~4个限位机构(7),所述两个音圈电机驱动器(5)和两个主被动振动控制器(8)关于球副柔性铰链(2)对称设置成正方形分布,且音圈电机驱动器(5)和主被动振动控制器(8)两两相对,所述限位机构(7)设置在音圈电机驱动器(5)和主被动振动控制器(8)间,在所述直梁型柔性铰链(3)表面上贴有应变片(4),所述应变片(4)分别和其位置靠近的音圈电机驱动器(5)或主被动振动控制器(8)电连接。1. An angle adjustment platform with active and passive vibration control, including a base (6), and an upper platform (1) connected to the top of the support around the base (6), connected between the base (6) and the upper platform (1) The ball joint flexible hinge (2) is characterized in that: the upper platform (1) is connected with the surrounding brackets of the base (6) through the straight beam type flexible hinges (3) on its four corners, and also includes a bracket fixed on the base ( 6) Two voice coil motor drivers (5) and two active and passive vibration controllers (8) between the upper platform (1) and fixed on the base (6) with a preset gap with the upper platform (1) The 2 to 4 limit mechanisms (7), the two voice coil motor drivers (5) and the two active and passive vibration controllers (8) are symmetrically arranged in a square distribution with respect to the ball joint flexible hinge (2), and the sound The coil motor driver (5) and the active and passive vibration controllers (8) face each other, and the limit mechanism (7) is arranged between the voice coil motor driver (5) and the active and passive vibration controllers (8). Straight beam type flexible hinges (3) are attached with strain gauges (4) on the surface, and the strain gauges (4) are respectively electrically connected to voice coil motor drivers (5) or active and passive vibration controllers (8) located close to them. 2.根据权利要求1所述的一种带有主被动振动控制的角度调节平台,其特征在于:所述音圈电机驱动器(5)包括中空桶状音圈电机外壳(5-3),嵌于中空桶状音圈电机外壳(5-3)内底部中央的音圈电机永磁铁(5-5),所述音圈电机永磁铁(5-5)顶部嵌于音圈电机导磁材料(5-4)底部,音圈电机环氧树脂圆筒(5-1)插入中空桶状音圈电机外壳(5-3)内侧壁和音圈电机导磁材料(5-4)的间隙中,在所述音圈电机环氧树脂圆筒(5-1)的外壁缠绕有音圈电机线圈(5-2)。2. An angle adjustment platform with active and passive vibration control according to claim 1, characterized in that: the voice coil motor driver (5) includes a hollow barrel-shaped voice coil motor housing (5-3), embedded The voice coil motor permanent magnet (5-5) in the bottom center of the hollow barrel-shaped voice coil motor housing (5-3), the top of the voice coil motor permanent magnet (5-5) is embedded in the voice coil motor magnetic material ( 5-4) At the bottom, the epoxy resin cylinder (5-1) of the voice coil motor is inserted into the gap between the inner wall of the hollow barrel-shaped voice coil motor housing (5-3) and the magnetic material of the voice coil motor (5-4). The outer wall of the voice coil motor epoxy resin cylinder (5-1) is wound with a voice coil motor coil (5-2). 3.根据权利要求1所述的一种带有主被动振动控制的角度调节平台,其特征在于:所述主被动振动控制器(8)包括中空桶状外壳(8-3),嵌于中空桶状外壳(8-3)内底部中央的永磁铁(8-5),所述永磁铁(8-5)顶部嵌于导磁材料(8-4)底部,铝制圆筒(8-1)插入中空桶状外壳(8-3)内侧壁和导磁材料(8-4)的间隙中,在所述铝制圆筒(8-1)的外壁缠绕有线圈(8-2)。3. The angle adjustment platform with active and passive vibration control according to claim 1, characterized in that: the active and passive vibration controller (8) comprises a hollow barrel-shaped shell (8-3), embedded in the hollow The permanent magnet (8-5) in the center of the inner bottom of the barrel-shaped casing (8-3), the top of the permanent magnet (8-5) is embedded in the bottom of the magnetic material (8-4), and the aluminum cylinder (8-1 ) is inserted into the gap between the inner wall of the hollow barrel-shaped casing (8-3) and the magnetically permeable material (8-4), and a coil (8-2) is wound on the outer wall of the aluminum cylinder (8-1). 4.根据权利要求1所述的一种带有主被动振动控制的角度调节平台,其特征在于:所述球副柔性铰链(2)、音圈电机驱动器(5)、主被动振动控制器(8)与上平台(1)以及直梁型柔性铰链(3)与底座(6)间的连接均采用螺栓连接。4. An angle adjustment platform with active and passive vibration control according to claim 1, characterized in that: the ball joint flexible hinge (2), voice coil motor driver (5), active and passive vibration controller ( 8) The connections between the upper platform (1) and the straight beam type flexible hinge (3) and the base (6) are bolted.
CN201310285391.1A 2013-07-08 2013-07-08 Angle adjusting platform with active-and-passive vibration control function Expired - Fee Related CN103499977B (en)

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Cited By (12)

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CN104074904A (en) * 2014-06-19 2014-10-01 西安交通大学 Active vibration control system and method of flexible structure based on voice coil motor
CN104589147A (en) * 2015-01-08 2015-05-06 华中科技大学 Multi-mechanical-arm follow-up restraining device for milling vibration of thin-walled workpiece
CN105680719A (en) * 2016-03-24 2016-06-15 西安交通大学 Actuating platform with functions of slight swing prevention and pointing regulation and actuating method
CN106826722A (en) * 2017-03-06 2017-06-13 天津大学 A kind of flexible adjust automatically lower platform mechanism for ultrasonic machining unit
CN107339563A (en) * 2017-08-30 2017-11-10 武汉科技大学 A kind of reverse-engineering scanning bracket
CN107966995A (en) * 2017-12-01 2018-04-27 西安交通大学 A kind of the angular adjustment platform and adjusting method of the driving of normal direction electromagnetic stress
CN108146647A (en) * 2017-12-25 2018-06-12 北京航空航天大学 Photoelectric nacelle based on opposing torque is surely as control device and control method
CN109732439A (en) * 2019-03-04 2019-05-10 中国工程物理研究院激光聚变研究中心 A kind of optical element rim of the mouth diameter polishing clamp
CN110017959A (en) * 2019-04-11 2019-07-16 上海卫星工程研究所 The method for carrying out micro-vibration simulation using voice coil-type linear motor
CN111076054A (en) * 2020-01-13 2020-04-28 四川道通达工程技术有限公司 Automatically-adjusted leveling platform
CN113059537A (en) * 2021-02-26 2021-07-02 佛山市华道超精科技有限公司 Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench
CN115949853A (en) * 2022-12-23 2023-04-11 西安交通大学 A Two-Dimensional Pointing Mechanism with Bearing and Vibration Isolation Capabilities

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Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104074904A (en) * 2014-06-19 2014-10-01 西安交通大学 Active vibration control system and method of flexible structure based on voice coil motor
CN104074904B (en) * 2014-06-19 2016-02-24 西安交通大学 A kind of Vibration Active Control of Flexible Structure system and method based on voice coil motor
CN104589147A (en) * 2015-01-08 2015-05-06 华中科技大学 Multi-mechanical-arm follow-up restraining device for milling vibration of thin-walled workpiece
CN105680719A (en) * 2016-03-24 2016-06-15 西安交通大学 Actuating platform with functions of slight swing prevention and pointing regulation and actuating method
CN105680719B (en) * 2016-03-24 2017-11-28 西安交通大学 Suppress and point to regulatory function with micro- swing and make moving platform and start method
CN106826722A (en) * 2017-03-06 2017-06-13 天津大学 A kind of flexible adjust automatically lower platform mechanism for ultrasonic machining unit
CN107339563A (en) * 2017-08-30 2017-11-10 武汉科技大学 A kind of reverse-engineering scanning bracket
CN107966995A (en) * 2017-12-01 2018-04-27 西安交通大学 A kind of the angular adjustment platform and adjusting method of the driving of normal direction electromagnetic stress
CN108146647A (en) * 2017-12-25 2018-06-12 北京航空航天大学 Photoelectric nacelle based on opposing torque is surely as control device and control method
CN108146647B (en) * 2017-12-25 2019-02-01 北京航空航天大学 Photoelectric nacelle based on opposing torque is surely as control device and control method
CN109732439A (en) * 2019-03-04 2019-05-10 中国工程物理研究院激光聚变研究中心 A kind of optical element rim of the mouth diameter polishing clamp
CN110017959A (en) * 2019-04-11 2019-07-16 上海卫星工程研究所 The method for carrying out micro-vibration simulation using voice coil-type linear motor
CN111076054A (en) * 2020-01-13 2020-04-28 四川道通达工程技术有限公司 Automatically-adjusted leveling platform
CN113059537A (en) * 2021-02-26 2021-07-02 佛山市华道超精科技有限公司 Flexible hinge mechanism, ultra-precise linear motion platform and double-workpiece workbench
CN115949853A (en) * 2022-12-23 2023-04-11 西安交通大学 A Two-Dimensional Pointing Mechanism with Bearing and Vibration Isolation Capabilities
CN115949853B (en) * 2022-12-23 2025-06-20 西安交通大学 A two-dimensional pointing mechanism with both load-bearing and vibration isolation capabilities

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