CN106324789A - Universal large-aperture rigid bearing-type quick reflecting mirror - Google Patents
Universal large-aperture rigid bearing-type quick reflecting mirror Download PDFInfo
- Publication number
- CN106324789A CN106324789A CN201610943211.8A CN201610943211A CN106324789A CN 106324789 A CN106324789 A CN 106324789A CN 201610943211 A CN201610943211 A CN 201610943211A CN 106324789 A CN106324789 A CN 106324789A
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- Prior art keywords
- pedestal
- voice coil
- mirror
- coil motor
- reflecting mirror
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/181—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Telescopes (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The invention discloses a universal large-aperture rigid bearing-type quick reflecting mirror, and relates to the technical field of precise optical mechanical structure design. The problems that an existing rigid bearing-type quick reflecting mirror cannot limit the Z-direction rotation freedom degree, miniaturization is difficult to achieve, and the universality is poor are solved. By means of the structural design that a universal ball bearing is combined with a flexible ring, rigid supporting can be provided for the large-aperture reflecting mirror, the two-dimensional rotation freedom degrees around the X axis and the Y axis can be provided, and the freedom degrees in the other directions are limited; a planar reflecting mirror is bonded with a reflecting mirror base through an optical epoxy adhesive, and therefore influences of the temperature, vibration and the like on the shape and the position of the reflecting mirror can be reduced; the reflecting mirror is driven in the mode that four linear voice coil motors conduct pushing and pulling two by two, the rotation moment is increased, and angle calculation is convenient; differential measuring is conducted by adopting four electric vortex sensors, the angle adjusting precision of a control system is improved; a driving assembly and a sensor assembly are symmetrically arranged in a staggered mode, and therefore the structural size of the system is decreased; an upper cover is universally installed, and therefore the quick reflecting mirror can be conveniently installed and used in various fields.
Description
Technical field
The present invention relates to precision optics Design of Mechanical Structure technical field, be specifically related to the carrying of a kind of general heavy caliber rigidity
Formula fast mirror, its center uses multi-directional ball bearing, and surrounding uses flexible ring to be attached supporting, and uses current vortex sensor
Carry out angle feed-back.
Background technology
Fast mirror is to carry out optical axis adjustment and stable vitals between light source and receptor, is correlated with both at home and abroad
Institute and unit have carried out substantial amounts of research to fast mirror, and are successfully applied to Aero-Space, sea and roadbed
Optoelectronic device in.
At present, the version of fast mirror is broadly divided into flexible shaft type and rigid bearing formula two kinds.Flexible shaft type knot
Structure bearing capacity is limited, and rigid bearing formula structure can provide for heavy-calibre planar reflecting mirror and support well, but the most firm
Property bearing-type fast mirror cannot limit Z-direction rotational freedom, and miniaturization difficult, it is impossible to realize general installation so that it is should
Limited with field.
Summary of the invention
The present invention solves that existing rigidity bearing-type fast mirror cannot limit Z-direction rotational freedom, miniaturization difficult
And the problem such as poor universality, it is provided that a kind of general heavy caliber rigidity bearing-type fast mirror.
General heavy caliber rigidity bearing-type fast mirror, including eddy current displacement sensor, mirror unit, flexible ring,
Orthoscopic voice coil motor, pedestal, installation upper cover, base plate, bearing adapter and multi-directional ball bearing, plane mirror passes through optics ring
Oxygen glue bonds with mirror unit upper surface；The lower surface of described mirror unit is connected with multi-directional ball bearing centrally through screw thread, and
Round nut is used to carry out locking；
Described multi-directional ball bearing is installed on base central by bearing adapter；Described mirror unit center and base central
It is positioned on Z axis axis；The flexible ring that described flexible ring is fixed on pedestal is installed on column, and is fixed on reflection by installing hole
Between microscope base and orthoscopic voice coil motor；Described current vortex sensor and orthoscopic voice coil motor become 45 degree of intervals to be fixed on pedestal
(8), on, described installation upper cover is connected with pedestal by screw respectively with base plate.
Beneficial effects of the present invention: rigidity bearing-type fast mirror of the present invention is at photoelectricity airborne, vehicle-mounted, carrier-borne
Application on equipment, the invention provides one and is driven mirror unit, mirror unit central rigid to prop up by orthoscopic voice coil motor
Support surrounding flexible support, 4 current vortex sensor X, Y-axis lines are arranged symmetrically with the general heavy caliber rigidity carrying carrying out angular surveying
Formula fast mirror.
One, according to reflecting mirror two-dimensional directional angle adjustment in quick reflex mirror system and the requirement of mobile decoupling, devise
The frame mode that a kind of rigid bearing combines with flexible ring.
Two, the rigid bearing unitary construction in the present invention, can effectively support heavy-calibre planar reflecting mirror, flexible ring energy
Enough provide around X, Y bidimensional rotary freedom the degree of freedom that limits other directions for reflecting mirror, it is achieved that the decoupling of two-dimensional motion.
Three, the plane mirror in the present invention uses gluing connected mode with mirror unit, it is possible to effectively reduce vibration
With the temperature impact on mirror surface.
Four, the present invention uses four identical voice coil motors to be arranged symmetrically with the type of drive of push-and-pull two-by-two, had both added and has driven
Kinetic moment, is easy to again control system and carries out the resolving of rotational angle.
Five, four sensors in the present invention and four voice coil motor symmetry interlaced arrangement, reduce fast mirror knot
Structure size, the mode of sensor variate improves the precision of control system.
Six, the present invention uses the structure installing upper cover design, fast mirror internal precision structure, again side can be protected
Just install with optoelectronic device and be connected.
Accompanying drawing explanation
Fig. 1 is the external structure schematic diagram of general heavy caliber rigidity bearing-type fast mirror of the present invention；
Fig. 2 is the composition structural representation of general heavy caliber rigidity bearing-type fast mirror of the present invention；
Fig. 3 is that the A-A of Fig. 2 is to sectional view.
Fig. 4 is that in general heavy caliber rigidity bearing-type fast mirror of the present invention, the structure of pedestal and flexible ring is shown
It is intended to.
Reference in figure is expressed as: 1, plane mirror；2, round nut；3, eddy current displacement sensor；4, reflection
Microscope base；5, flexible ring；6, upper cover is installed；7, orthoscopic voice coil motor；8, pedestal；9, bearing adapter；10, multi-directional ball bearing；
11, base plate；71, moving winding；72, fixed magnet；81, flexible ring installs column；82, voice coil motor installing hole；83, sensor peace
Dress hole；84, bearing adapter installing hole；85, voice coil motor cable hole；3a, the first current vortex sensor；3b, the second current vortex
Sensor；3c, the 3rd current vortex sensor；3d, the 4th current vortex sensor；7a, the first voice coil motor；7b, the second voice coil loudspeaker voice coil electricity
Machine；7c, the 3rd voice coil motor；7d, the 4th voice coil motor；First line of symmetry of mm, XY axle；Second line of symmetry of nn, XY axle.
Detailed description of the invention
Detailed description of the invention one, general heavy caliber rigidity bearing-type fast mirror, including plane mirror 1, round nut
2, eddy current displacement sensor 3, mirror unit 4, flexible ring 5, installation upper cover 6, orthoscopic voice coil motor 7, pedestal 8, bearing turn
Joint chair 9, multi-directional ball bearing 10 and base plate 11.
Plane mirror 1 is bonded together with mirror unit 4 by optical epoxy glue.Mirror unit 4 is centrally through screw thread
It is connected with multi-directional ball bearing 10, uses round nut 2 to carry out locking；Mirror unit 4 surrounding is by uniform lug and voice coil loudspeaker voice coil electricity
Moving winding 71 and the flexible ring 5 of machine 7 are connected.Flexible ring 5 is soft by four installing holes therein be fixed on pedestal 8 four
Property ring install on column 81.
Multi-directional ball bearing 10 is installed on the central point of pedestal 8 by bearing adapter 9.Four orthoscopic voice coil motors 7
Fixed magnet 72 90 degree is distributed on pedestal 8, and on X-axis line and Y-axis line each two, and it is fixed on pedestal 8 by screw
In four voice coil motor installing holes 82.
4 biographies that four current vortex sensors 3 become 45 degree of angular spacings to be distributed in pedestal 8 with four orthoscopic voice coil motors 7
In sensor installing hole 83；And be positioned on the first line of symmetry m-m and the second line of symmetry n-n of X-axis Y-axis, each current vortex sensor 3
By becoming 120 degree of angular distribution two holding screws to be fixed.
In present embodiment, upper cover 6 is installed and is linked together with pedestal 8 by screw respectively with base plate 11, by installing
The mounting flange of upper cover 6, in that context it may be convenient to fast mirror is installed in various optoelectronic device.Complete to assemble back plane reflection
Mirror 1 center and pedestal 8 are centrally located at Z axis axis.
In present embodiment, be installed on mirror unit 4 four voice coil motors 7 moving winding 71 be installed on pedestal 8
The fixed magnet one_to_one corresponding of four voice coil motors, drives one by one.Mirror unit 4 lower plane and flexible ring mounting post on pedestal 8
On 81, plane is in same plane, and now flexible ring 5 does not occur elastic deformation.Four current vortex sensors 3 are fixed on pedestal 8
On, 4 displacements of differential measurement mirror unit 4 lower surface, indirectly measure the angle that mirror unit 4 rotates around X-axis, Y-axis,
Realize the closed loop control to plane mirror corner.
In present embodiment, plane mirror 1, mirror unit 4, multi-directional ball bearing 10 internal ring, four orthoscopic voice coil loudspeaker voice coil electricity
The moving winding of machine 7 constitutes the motion parts of fast mirror.Pedestal 8, the outer shroud of multi-directional ball bearing 10, bearing adapter 9, four
The fixed magnet of individual voice coil motor, four current vortex sensors 3, installation upper cover 6, base plates 11 constitute the fixing of fast mirror
Part.Owing to flexible ring 5 is connected with motion parts and the standing part of fast mirror respectively, can either provide around X-axis, Y
The Two Dimensional Rotating degree of freedom of axle, can limit again plane mirror Z-direction rotational freedom and other direction degree of freedom.
Detailed description of the invention two, combining Fig. 1 to Fig. 4 present embodiment is described, present embodiment is detailed description of the invention one
The instantiation of described general heavy caliber rigidity bearing-type fast mirror:
Including: plane mirror 1, round nut the 2, first eddy current displacement sensor 3a, the second eddy current displacement sensor
3b, the 3rd eddy current displacement sensor 3c, the 4th eddy current displacement sensor 3d, mirror unit 4, flexible ring 5, install upper cover 6,
First orthoscopic voice coil motor 7a, the second orthoscopic voice coil motor 7b, the 3rd orthoscopic voice coil motor 7c, the 4th orthoscopic voice coil loudspeaker voice coil
Motor 7d, pedestal 8, bearing adapter 9, multi-directional ball bearing 10, base plate 11.Described orthoscopic voice coil motor 7 is by moving winding 71 He
Fixed magnet 72 two parts form；
Pedestal 8 includes that flexible ring installs column 81, voice coil motor installing hole 82, sensor mounting hole 83, bearing adapter
Installing hole 84,；Voice coil motor cable hole 85.Wherein, four voice coil motor installing holes 82 are uniform for symmetrical centre with pedestal initial point O
In the X-axis and Y-axis of pedestal, four current vortex sensor installing holes 83 and four flexible ring install column 81 and four voice coil loudspeaker voice coil electricity
Machine installing hole 82 is intervally arranged, and is distributed on the first line of symmetry mm and the second line of symmetry nn of pedestal X-axis and Y-axis.
Plane mirror 1 passes through the optical epoxy glue bond upper surface at mirror unit 4, four orthoscopic voice coil motors 7
Moving winding 71 centered by initial point O, become 90 degree of lower surfaces being uniformly connected in mirror unit 4 lug, on X, Y-axis line each 2.
Mirror unit 4 lower surface is connected with universal bearing 10 centrally through screw thread, uses round nut 2 to carry out locking.Universal bearing 10
Outer shroud be fixed in the installing hole 84 of pedestal 8 by bearing adapter 9.The fixed magnet 72 of four orthoscopic voice coil motors 7
Become in 90 degree of four voice coil motor installing holes 82 being uniformly installed on pedestal 8 centered by initial point O, on X-axis line, Y-axis line each 2
Individual, and the distance of distance initial point O is equal apart from the distance of initial point O with four flexible ring installation columns 81.Four peaces of flexible ring 5
Dress hole is installed between mirror unit 4 lug and voice coil motor 7 moving winding 71, and the four additional installing hole of flexible ring 5 is installed on
Four flexible ring of pedestal 8 are installed on columns 81, and install each installing hole of flexible ring 5 and be in same plane, flexible ring 5
There is not elastic deformation.
Four current vortex sensors 3 are installed in four sensor mounting hole 83 of pedestal 8, and each current vortex sensor leads to
Cross into 120 degree of angular distribution 2 holding screws to be fixed, indirectly measure the angle that mirror unit 4 rotates around X-axis, Y-axis, real
The now closed loop control to plane mirror 1 corner.Four voice coil motor cable holes 85 are for by the control of voice coil motor moving winding 71
Wire processed is drawn out to the bottom of pedestal 8.Upper cover 6 is installed linked together with pedestal 8 by screw respectively with base plate 11, by peace
Load onto the mounting flange of lid 6, in that context it may be convenient to be installed in various optoelectronic device by fast mirror.
The operation principle of the reflecting mirror described in present embodiment: when starting working, controls the first voice coil loudspeaker voice coil electricity being positioned in Y-axis
Machine 7a, the 3rd voice coil motor 7c do push-and-pull campaign, can realize the plane mirror 1 rotation around X-axis.Meanwhile, by the first electricity whirlpool
The measured value of flow sensor 3a and the 4th current vortex sensor 3d is averaged, and the second current vortex sensor 3b and the 3rd electricity
The average value measured of eddy current sensor 3c, common feedback, to servo-control system, can realize turning plane mirror 1 around X-axis
The accurate closed loop control of dynamic angle.The accurate closed loop control that in like manner can rotate around Y-axis.
Obviously, above-described embodiment is only by clearly demonstrating made distance, and not restriction to embodiment.Right
For those skilled in the art, change or the change of other multi-forms can also be made on the basis of the above description
Dynamic.Here without also cannot all of embodiment be given exhaustive.And the obvious change thus amplified out or
Change among still in the protection domain of the invention.
Claims (8)
- The most general heavy caliber rigidity bearing-type fast mirror, including eddy current displacement sensor (3), mirror unit (4), flexibility Ring (5), orthoscopic voice coil motor (7), pedestal (8), installation upper cover (6), base plate (11), bearing adapter (9) and multi-directional ball axle Holding (10), plane mirror (1) is bondd with mirror unit (4) upper surface by optical epoxy glue, it is characterized in that；The lower surface of described mirror unit (4) is connected with multi-directional ball bearing (10) centrally through screw thread, and uses round nut to carry out Locking；Described multi-directional ball bearing (10) is installed on pedestal (8) center by bearing adapter (9)；Described mirror unit (4) center It is positioned on Z axis axis with base central；The flexible ring that described flexible ring (5) is fixed on pedestal (8) is installed on column (81), and is fixed on reflection by installing hole Between microscope base (4) and orthoscopic voice coil motor (7)；Described current vortex sensor (3) and orthoscopic voice coil motor (7) become 45 degree of intervals to be fixed on pedestal (8), described installation Upper cover (6) is connected with pedestal (8) by screw respectively with base plate (11).
- General heavy caliber rigidity bearing-type fast mirror the most according to claim 1, it is characterised in that described orthoscopic Voice coil motor (7) includes moving winding (71) and fixed magnet (72)；Described fixed magnet (72) is distributed in the voice coil loudspeaker voice coil electricity of pedestal (8) In machine installing hole (82)；Moving winding (71) is distributed on mirror unit (4), described fixed magnet (72) and the peace of moving winding (71) Holding position is corresponding.
- General heavy caliber rigidity bearing-type fast mirror the most according to claim 2, it is characterised in that described reflecting mirror The excircle of seat (4) is evenly equipped with four identical lugs of structure；Mirror unit (4) is by lug and orthoscopic voice coil motor (7) Moving winding (71) and flexible ring (5) be connected.
- General heavy caliber rigidity bearing-type fast mirror the most according to claim 3, it is characterised in that described reflecting mirror The seat lower surface of (4) is in same plane with installation column (81) upper surface of pedestal (8).
- General heavy caliber rigidity bearing-type fast mirror the most according to claim 4, it is characterised in that described orthoscopic Voice coil motor (7) and each four of current vortex sensor (3), described orthoscopic voice coil motor (7) fixed magnet becomes 90 degree to be distributed in In four voice coil motor installing holes of pedestal (8), on X-axis line, Y-axis line each two；Current vortex sensor (3) becomes 45 degree of angular spacings to be distributed on pedestal (8) with orthoscopic voice coil motor, current vortex sensor (3) it is positioned on the first line of symmetry m-m and the second line of symmetry n-n of X-axis line, Y-axis line each two, and is installed on pedestal (8) In four sensor mounting hole.
- General heavy caliber rigidity bearing-type fast mirror the most according to claim 5, it is characterised in that described pedestal (8) upper four orthoscopic voice coil motor installing hole (82) install column (81) to the distance at pedestal (8) center with four flexible ring Equal to the distance at pedestal (8) center.
- General heavy caliber rigidity bearing-type fast mirror the most according to claim 5, it is characterised in that each current vortex Sensor (3) is fixed in the sensor mounting hole of pedestal by becoming two holding screws of 120 degree of distributions.
- General heavy caliber rigidity bearing-type fast mirror the most according to claim 1, it is characterised in that by installing The mounting flange of lid (6), is installed on plane mirror (1) in optoelectronic device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610943211.8A CN106324789A (en) | 2016-10-26 | 2016-10-26 | Universal large-aperture rigid bearing-type quick reflecting mirror |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610943211.8A CN106324789A (en) | 2016-10-26 | 2016-10-26 | Universal large-aperture rigid bearing-type quick reflecting mirror |
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| CN106324789A true CN106324789A (en) | 2017-01-11 |
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| CN201610943211.8A Pending CN106324789A (en) | 2016-10-26 | 2016-10-26 | Universal large-aperture rigid bearing-type quick reflecting mirror |
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Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107526159A (en) * | 2017-07-27 | 2017-12-29 | 中国科学院长春光学精密机械与物理研究所 | A kind of heavy caliber beat mirror |
| CN108088373A (en) * | 2017-12-25 | 2018-05-29 | 北京航空航天大学 | Photoelectric nacelle is surely as flyback integrated control unit and measuring method |
| CN108614353A (en) * | 2018-05-10 | 2018-10-02 | 西安交通大学 | Two-dimensional deflection decoupling mechanism and its deflection method based on ion-exchange polymer metal material |
| CN108693623A (en) * | 2018-07-18 | 2018-10-23 | 星禾环保科技有限公司 | A kind of mirror assembly |
| CN109239911A (en) * | 2018-07-12 | 2019-01-18 | 中国科学院国家天文台南京天文光学技术研究所 | Adaptive subaperture based on electric eddy current measurement controls equipment |
| CN109343195A (en) * | 2018-11-19 | 2019-02-15 | 北京瑞控信科技有限公司 | A kind of two dimension moving-magnetic type quick reflex lens device |
| CN110221426A (en) * | 2019-06-25 | 2019-09-10 | 中国科学院长春光学精密机械与物理研究所 | Deflecting reflection lens device |
| CN110531481A (en) * | 2019-10-10 | 2019-12-03 | 北京遥感设备研究所 | A kind of high imaging quality reflecting mirror and axis bonded structure |
| CN110707898A (en) * | 2019-09-30 | 2020-01-17 | 北京瑞控信科技有限公司 | Quick reflector |
| CN110955014A (en) * | 2019-12-19 | 2020-04-03 | 上海无线电设备研究所 | High-precision large-caliber quick reflecting mirror system |
| CN109739010B (en) * | 2018-12-06 | 2020-11-27 | 同济大学 | Self-cleaning off-axis three-reflector device |
| CN115097594A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | Large-caliber large-corner high-bandwidth voice coil motor fast-reflection mirror device |
| CN116719145A (en) * | 2023-08-09 | 2023-09-08 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
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Cited By (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107526159A (en) * | 2017-07-27 | 2017-12-29 | 中国科学院长春光学精密机械与物理研究所 | A kind of heavy caliber beat mirror |
| CN107526159B (en) * | 2017-07-27 | 2019-09-10 | 中国科学院长春光学精密机械与物理研究所 | A kind of heavy caliber beat mirror |
| CN108088373A (en) * | 2017-12-25 | 2018-05-29 | 北京航空航天大学 | Photoelectric nacelle is surely as flyback integrated control unit and measuring method |
| CN108088373B (en) * | 2017-12-25 | 2019-03-08 | 北京航空航天大学 | Photoelectric nacelle is surely as flyback integrated control unit and measurement method |
| CN108614353A (en) * | 2018-05-10 | 2018-10-02 | 西安交通大学 | Two-dimensional deflection decoupling mechanism and its deflection method based on ion-exchange polymer metal material |
| CN109239911A (en) * | 2018-07-12 | 2019-01-18 | 中国科学院国家天文台南京天文光学技术研究所 | Adaptive subaperture based on electric eddy current measurement controls equipment |
| CN108693623A (en) * | 2018-07-18 | 2018-10-23 | 星禾环保科技有限公司 | A kind of mirror assembly |
| CN109343195A (en) * | 2018-11-19 | 2019-02-15 | 北京瑞控信科技有限公司 | A kind of two dimension moving-magnetic type quick reflex lens device |
| CN109343195B (en) * | 2018-11-19 | 2024-03-15 | 安徽瑞控信光电技术股份有限公司 | Two-dimensional moving-magnet type quick reflector device |
| CN109739010B (en) * | 2018-12-06 | 2020-11-27 | 同济大学 | Self-cleaning off-axis three-reflector device |
| CN110221426A (en) * | 2019-06-25 | 2019-09-10 | 中国科学院长春光学精密机械与物理研究所 | Deflecting reflection lens device |
| CN110707898A (en) * | 2019-09-30 | 2020-01-17 | 北京瑞控信科技有限公司 | Quick reflector |
| CN110531481A (en) * | 2019-10-10 | 2019-12-03 | 北京遥感设备研究所 | A kind of high imaging quality reflecting mirror and axis bonded structure |
| CN110955014A (en) * | 2019-12-19 | 2020-04-03 | 上海无线电设备研究所 | High-precision large-caliber quick reflecting mirror system |
| CN110955014B (en) * | 2019-12-19 | 2022-03-29 | 上海无线电设备研究所 | High-precision large-caliber quick reflecting mirror system |
| CN115097594A (en) * | 2022-08-26 | 2022-09-23 | 北京瑞控信科技股份有限公司 | Large-caliber large-corner high-bandwidth voice coil motor fast-reflection mirror device |
| CN115097594B (en) * | 2022-08-26 | 2023-01-31 | 北京瑞控信科技股份有限公司 | Large-caliber large-corner high-bandwidth voice coil motor fast-reflection mirror device |
| CN116719145A (en) * | 2023-08-09 | 2023-09-08 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
| CN116719145B (en) * | 2023-08-09 | 2023-12-29 | 北京瑞控信科技股份有限公司 | Two-dimensional non-frame large-angle quick reflector |
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