CN104180844B - Solenoid drive type angular vibration table - Google Patents
Solenoid drive type angular vibration table Download PDFInfo
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- CN104180844B CN104180844B CN201410442973.0A CN201410442973A CN104180844B CN 104180844 B CN104180844 B CN 104180844B CN 201410442973 A CN201410442973 A CN 201410442973A CN 104180844 B CN104180844 B CN 104180844B
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Abstract
A solenoid drive type angular vibration table comprises a shell, a working table top, a main shaft driving the working table top to rotate, a moving coil assembly, a magnetic circuit assembly, an electro-viscous elastic feedback control assembly, an air bearing and an angular displacement sensor, wherein the main shaft is fixedly connected with the moving coil assembly, the moving coil assembly comprises a moving coil matrix and a coil, the moving coil matrix is fixed to the main shaft, the magnetic circuit assembly comprises a magnetism conduction ring, a central magnetic pole and magnetic steel, a close magnetic loop is formed by the magnetism conduction ring, the central magnetic pole, the magnetic steel and an air gap, the central magnetic pole is located in the magnetism conduction ring, the magnetism conduction ring is coaxial with the central magnetic pole, the magnetic steel is located between the magnetism conduction ring and the central magnetic pole, the magnetic steel is attracted to the central magnetic pole, the moving coil assembly is located between the magnetic steel and the magnetism conduction ring, the moving coil assembly is coaxial with the magnetism conduction ring, the magnetic circuit assembly is fixed to a magnetic circuit supporting part, the magnetic circuit supporting part is fixed to a base, an annular groove is formed in the magnetic circuit supporting part, the moving coil assembly stretches into the annular groove, and a gap exists between the moving coil assembly and the groove wall of the annular groove. The solenoid drive type angular vibration table has the advantage of being low in degree of output wave form distorsion.
Description
Technical field
The present invention relates to a kind of electromagnetic drive type angle vibration table, particularly a kind of electromagnetism for angular oscillation transducer calibration
Drive-type angle vibration table.
Technical background
Angle vibration table is not only widely used for demarcating various angular oscillation (angular displacement, angular velocity, angular acceleration) sensor
Dynamic characteristic, it may also be used for angular oscillation environmental test is carried out to various products.
At present, angle vibration table is typically using the structure based on motor-driven.Peng Jun, He Qun, Xue Jingfeng and Sun Haoyu
The 6th phase of volume 25 in 2005《Measurement technology》The paper of entitled Low Frequency Standard Angular Exciter has been delivered in magazine.Low frequency angle shakes
Dynamic platform is mainly by mechanical system, control system, measuring system and signal processing system.Mechanical system is mainly by main shaft, table top, sky
Gas bearing, grating and motor composition.Corrected sensor is installed on table top, and the driving element that motor is rotated as drive shaft is empty
The leveling effect that gas bearing is produced using air film, reaches raising rotating accuracy, reduces the purpose of frictional force.Control system mainly by
Torque motor, controller, amplifying circuit composition.It is provided with current loop, conversing circuits, speed loop and position in the controller to return
Road is improving control performance.The voltage signal that different frequency and amplitude are produced using computer controls DAC gives control system, drives
Dynamic angle vibration table produces the sinusoidal angular movement of certain frequency and amplitude.The moment of momentum that measuring system is measured using Circular gratings is used as entering
The feedback quantity of row control, is used for gathering the signal of telecommunication of grating and corrected sensor using multi-channel data acquisition module.Finally believe
Number processing system calculates the sensitivity and phase shift for obtaining corrected sensor according to the moment of momentum that Circular gratings are measured.
The shortcoming of this low frequency angle vibration table is：This angle vibration table is due to being affected to lead by motor slot effect itself
Torque ripple is caused, even if also can have a negative impact to the output waveform of angle vibration table using brushless D. C. torque motor.If adopting
Brushed DC torque motor is used, the impact of motor frictional force itself is added, is more deteriorated the waveform of angle vibration table output.
The content of the invention
For the shortcoming for overcoming existing motor-driven angle vibration table output waveform distortion big, the invention provides a kind of
The low electromagnetic drive type angle vibration table of the output waveform distortion factor.
A kind of electromagnetic drive type angle vibration table, including shell, work top, the main shaft for driving work top rotation, moving-coil
Component, magnetic circuit component, electric viscoelasticity feedback control component, air bearing and angular displacement sensor；
It is characterized in that：Main shaft is fixedly connected with moving coil component, moving coil component include the moving-coil matrix being connected with main shaft and
The coil being wrapped on moving-coil matrix, moving-coil matrix are fixedly connected with main shaft；
Magnetic circuit component includes magnetic guiding loop, central magnetic pole and magnet steel, and magnetic guiding loop, central magnetic pole, magnet steel and air gap are formed
Closed magnetic loop；Central magnetic pole is located in magnetic guiding loop, and magnetic guiding loop is coaxial with central magnetic pole, and magnet steel is located at magnetic guiding loop and central magnetic pole
Between, magnet steel is adsorbed in central magnetic pole；Moving coil component is located between magnet steel and magnetic guiding loop, and moving coil component is coaxial with magnetic guiding loop；
Magnetic circuit component is fixed on magnetic circuit support member, and magnetic circuit support member is fixed on base, and magnetic circuit support member is provided with ring
Shape groove, moving coil component are stretched in cannelure, have gap between moving coil component and the cell wall of cannelure, and moving coil component can be in annular
Freely rotate in groove.
When angle vibration table works, alternating current is passed through into coil, coil produces Ampere force under the influence of a magnetic field, so as to
Moving coil component is made to be vibrated around equilbrium position back and forth under the influence of a magnetic field.The angular displacement of work top output（Peak-to-peak value）With it is dynamic
Angle sum shared by circle active wires is less than or equal to magnet steel segment angle, and active wires refer to ampere is produced in magnetic field
The conducting line segment of power.
The electric viscoelasticity feedback component of angle vibration table includes angular displacement sensor, feedback unit, signal generator, subtraction
Device, PID controller, power amplifier, angle vibration table；Angular displacement sensor is made up of read head and Circular gratings two parts, circle light
Grid are arranged on work top, and read head is fixed on the bearing block of air bearing by installing rack.
Angular displacement sensor is used for the angular displacement signal for detecting moving coil component and work top output, and the angular displacement signal is defeated
Enter to feedback unit, feedback unit is by signal amplification the first output signal of acquisition being input into and by the signal elder generation differential of input
Amplify the second output signal of acquisition after reason again, the first output signal is superimposed into acquisition feedback unit output with the second output signal again
Signal；The standard signal Jing subtractors that feedback unit output signal is exported with signal generator ask poor, obtain deviation signal, then
Deviation signal is exported to power amplifier after PID regulator process, drives angle vibration table motion, so as to realize angle vibration table
The electric viscoelasticity feedback control of rotatable parts.Electric viscoelasticity feedback component is instead of existing as the elastomeric element of angle vibration table
The mechanical spring of vibration table, realize rotatable parts automatically reply zero-bit function.
As mechanical spring is in Angular Displacement, there is nonlinear problem, had a strong impact on the angle fortune of angle vibration table output
The distortion factor of momentum waveform, and electric viscoelasticity feedback control component is equivalent to a rigidity and the linear adjustable bullet of damped coefficient
Spring, therefore can improve and reduce the distortion factor of angle vibration table output campaign amount waveform.
Further, air bearing includes bearing block and bearing body, and main shaft is socketed in bearing body, bearing body socket
In bearing block, bearing block is fixed with bearing body, and main shaft bottom is provided with the step coordinated with bearing body；
The outer surface of bearing body is provided with the air inlet groove of annular, and bearing block is provided with the air inlet connected with air inlet groove
Hole, bearing body are provided with the radial direction gas port between gas guide bearing body and main shaft, by gas guide bearing body
Upper axial gas port between work top and by the lower axle between gas guide bearing body and the step of main shaft to inducing QI
Hole, radial direction gas port, upper axial gas port and lower axle are respectively equipped with throttle orifice to the outlet side of gas port, and along the circumferential direction equal
Even distribution.
Air inlet, air inlet groove, radial direction gas port, upper axial gas port and lower axle constitute inlet channel to gas port, enter
Pore is connected with high-pressure air source.
Upper axial gas port connects to form upper T-shaped air flue with the first radial direction gas port, and lower axle is to gas port and the second radial direction
Gas port connects to form down T-shaped air flue, and upper T-shaped air flue T-shaped air flue with is symmetrical arranged, and the first radial direction gas port and second is radially
Gas port is connected with air inlet groove.
Air film is formed between the upper surface of bearing body and the lower surface of work top, the referred to as upper push stopping part gas of the air film
Film；Air film is formed between the upper surface of the lower surface of bearing body and the step of main shaft, the referred to as lower push stopping part air film of the air film；Axle
Air film is formed between the outer surface of the inner surface and main shaft that hold body, the air film is referred to as collar air film；Upper push stopping part air film, under
Push stopping part air film and collar air film make to be not directly contacted between main shaft and bearing body, so as to reduce frictional force, reduce
The distortion factor of output waveform.
In order to optimize the exhaust performance of air bearing, the uniform and stable of air film is kept, is further limited：The hollow formation of main shaft
Discharge chamber, the upper end of main shaft are provided with the first exhaust passage that the gas between bearing body and work top is introduced discharge chamber,
Bearing body is provided with the second exhaust passage for discharging the gas between main shaft and bearing body, second exhaust passage
Air vent is located at outside the step of main shaft, and second exhaust passage is uniformly distributed on bearing body, second exhaust passage and air inlet
Groove is mutually isolated.
First exhaust passage includes the circumferential groove for being arranged at main shaft upper surface, by the gas between bearing body and work top
Body enters the pore of circumferential groove and the gas in circumferential groove is entered the axial hole of discharge chamber；Pore has multiple, pore
Circumferentially groove is uniformly distributed；Axial hole has multiple, and circumferentially groove is uniformly distributed in axial hole；Radial direction of the pore along main shaft upper surface
Open up, axial hole is axially opened up along main shaft.
Second exhaust passage includes rod radial air vent and axial vent holes, rod radial air vent one end and bearing body and main shaft
Between air film connection, the other end connected with axial vent holes；Row of the gas outlet of axial vent holes as second exhaust passage
QI KOU；The gas of collar air film is introduced axial vent holes by rod radial air vent, then is discharged gas by axial vent holes.
Rod radial air vent runs through bearing body, and one end that rod radial air vent is connected with air inlet groove is provided with plug, so as to keep away
The gas for exempting from second exhaust passage is entered in air inlet groove, is made second exhaust passage separate with air inlet groove, and is facilitated footpath
To the processing of steam vent.
Further, shell includes the cylinder fixed with base and the snubber block with the bearing block fixation of air bearing；Aerofluxuss
Space between chamber and moving coil component and central magnetic pole, magnet steel connects, between second exhaust passage and snubber block and moving coil component
Space connection；The gas of upper push stopping part air film is entered aerofluxuss intracavity by first exhaust passage, and gas is entered center by discharge chamber
Between magnetic pole, magnet steel and moving coil component, play a part of to cool down moving coil component；Second exhaust passage is by the gas of collar air film
Enter between moving coil component and snubber block, also function to cool down the effect of moving coil component；First exhaust passage and second exhaust passage
Gas in addition to flowing through moving coil component, finally by central magnetic pole, magnetic circuit support member, the centre bore of base and base end face
On air discharge duct composition exhaust passage gas is entered in air.
Further, the coil of moving coil component is covered in the lateral surface of moving-coil matrix, and coil includes coil windings and insulating barrier,
Coil windings and insulating barrier interval setting, coil windings at least have one layer, and insulating barrier is made up of epoxide-resin glue and glass cloth,
Insulating barrier is completely covered the coil windings in which；
Each coil windings includes first coil and the second coil, first coil from inside to outside coiling counterclockwise, the second line
Circle coiling from outside to inside clockwise, first coil and the second coil are in same layer, first coil and the difference coiling of the second coil
Multiturn, is made up of active wires section and connecting wire section respectively per circle, and the active wires section of energization produces Ampere force in magnetic field,
Connecting wire section is outside magnetic field；
The active wires section that is spacedly distributed constitutes an Ampere force generating unit, the quantity of Ampere force generating unit be coil around
The twice of group number, the active wires quantity that each Ampere force generating unit is included are identical, fill out between every circle wire of coil windings
It is filled with epoxide-resin glue, connected in series or in parallel between coil windings.
When making coil windings, the plane copper coin that can surround just moving-coil matrix lateral surface is first made, then in plane copper coin
On walk wire shaped and cabling mode with what the mode of wire cutting or engraving processed coil windings, then by plane copper board coil
It is fastened on the lateral surface of moving-coil matrix, while in the lateral surface and middle area of knockout winding glass cloth of coil windings,
And infusion epoxy resin glue, winding, while perfusion, after waiting curable epoxide, is processed using turning process and causes current layer
Coil windings form new smooth cylinder moving-coil matrix with moving-coil matrix.When making next layer of coil windings, with new
The lateral surface of moving-coil matrix is, with reference to preparation plane copper coin, to newly increase the coil windings of layer and the winding side of ground floor coil windings
Formula is identical, and guarantees that the Ampere force generating unit position of each coil windings is mutually aligned overlap, when making other layer of coil windings,
Rule the like.
The corner of active wires section and connecting wire section in coil windings passes through round-corner transition, it is to avoid coil windings add
Work and stress concentration and damage when fixing.
As the sense of current around trig loop phase neighbour's Ampere force generating unit wire is conversely, in order to be able to be stacked Ampere force
Plus, defined below is done to magnet steel：Magnet steel is distributed along the even circumferential of central magnetic pole；The magnetizing direction of magnet steel is radial direction, adjacent
Magnet steel magnetizing direction is conversely, magnet steel is fixed in central magnetic pole.
It is an advantage of the current invention that：
1st, the present invention adopts magneto magnetic structure, eliminates magnet exciting coil, reduces the loss of excitation system, improves energy
Conversion efficiency, magnetic structure are simple, compact, reliable.
2nd, the coil windings of moving coil component pass through wire cutting or engraving is formed, and wiring is uniform, uniform force, while reducing
The coiling difficulty of coil windings, simplifies wire winding.
3rd, the present invention adopts air bearings support, and the upper push stopping part air film of formation, lower push stopping part air film, collar air film are complete
The axially and radially support of moving-coil rotatable parts in pairs, rotatable parts and stationary components realize contactless support, nothing by air film
Friction or frictional force it is little, operate steadily, improve rotatable parts rotating accuracy, improve the angle vibration table output waveform distortion factor and
Reduce the advantage of teeter amount.
4th, equilbrium position of the present invention using electric viscoelastic spring feedback control rotatable parts, traditional mechanical spring have non-thread
Property, the defect such as time-varying, sluggishness, affect the distortion factor of angle vibration table output campaign amount waveform, and electric viscoelastic spring feedback control be controllable
Property it is good, there is linear, non-time-varying, without sluggish, reduce the distortion factor of output campaign amount waveform.
Description of the drawings
Fig. 1 is the general structure schematic diagram of angle vibration table.
Fig. 2 is the schematic diagram of magnetic circuit component.
Fig. 3 is the schematic diagram of electric viscoelasticity feedback control component.
Fig. 4 is the schematic diagram of air bearing.
Fig. 5 is the schematic perspective view of moving coil component.
Fig. 6 is the distribution schematic diagram of coil windings and insulating barrier.
Fig. 7 is the two-dimentional winding diagram of coil windings.
Specific embodiment
Embodiment 1
As shown in figure 1, a kind of electromagnetic drive type angle vibration table, including shell, work top B-1, drive work top B-1
The main shaft B-2 of rotation, moving coil component, magnetic circuit component, electric viscoelasticity feedback control component, air bearing and angular displacement sensor；
Main shaft B-2 is fixedly connected with moving coil component, and moving coil component is included the moving-coil matrix B-3 being connected with main shaft B-2 and twined
The coil B-4 being wound on moving-coil matrix B-3, moving-coil matrix B-3 are fixedly connected with main shaft B-2；
As shown in Fig. 2 magnetic circuit component includes magnetic guiding loop E-1, central magnetic pole E-2 and magnet steel E-3, and by magnetic guiding loop E-1, in
The closed magnetic loop that heart magnetic pole E-2, magnet steel E-3 and air gap are formed；Central magnetic pole E-2 is located in magnetic guiding loop E-1, magnetic guiding loop E-1
Coaxial with central magnetic pole E-2, magnet steel E-3 is located between magnetic guiding loop E-1 and central magnetic pole E-2, and magnet steel E-3 is adsorbed in central magnetic pole
On E-2；Moving coil component is located between magnet steel E-3 and magnetic guiding loop E-1, and moving coil component is coaxial with magnetic guiding loop E-1；Moving coil component can be
Freely rotate in region between magnet steel E-3 and magnetic guiding loop E-1；When alternating current is passed through in the coil to moving coil component,
In the presence of magnetic field, moving coil component will be vibrated back and forth around equilbrium position.
Magnetic circuit component is fixed on magnetic circuit support member E-4, and magnetic circuit support member E-4 is fixed on base F-2, magnetic circuit support member
E-4 is provided with cannelure E-4-1, and moving coil component is stretched in cannelure E-4-1, the cell wall of moving coil component and cannelure E-4-1 it
Between have gap, moving coil component can be freely rotated in cannelure E-4-1.
The electric viscoelasticity feedback component of angle vibration table includes angular displacement sensor, feedback unit, signal generator, subtraction
Device, PID controller, power amplifier, angle vibration table；Angular displacement sensor is by read head A-2 and Circular gratings A-1 two parts groups
Into on work top B-1, read head A-2 is fixed on the bearing block of air bearing to Circular gratings A-1 by installing rack A-3
On C-1.
Angular displacement sensor is used for the angular displacement signal for detecting moving coil component and work top B-1 outputs, and the angular displacement is believed
Number be input to feedback unit, feedback unit the signal being input into is amplified obtain the first output signal and will input signal it is first micro-
Amplify the second output signal of acquisition after the reason of office again, the first output signal is superimposed into acquisition feedback unit with the second output signal again
Output signal；The standard signal Jing subtractors that feedback unit output signal is exported with signal generator ask poor, obtain deviation signal,
Then deviation signal is exported to power amplifier after PID regulator process, drives angle vibration table motion, so as to realize that angle shakes
The electric viscoelasticity feedback control of dynamic platform rotatable parts, as shown in Figure 3.
As mechanical spring is in Angular Displacement, there is nonlinear problem, had a strong impact on the angle fortune of angle vibration table output
The distortion factor of momentum waveform, and electric viscoelasticity feedback control component is equivalent to a rigidity and the linear adjustable bullet of damped coefficient
Spring, therefore can improve and reduce the distortion factor of angle vibration table output campaign amount waveform.
Shell includes the cylinder F-3 fixed with the base F-2 and snubber block F-1 with the bearing block C-1 fixations of air bearing.
Advantage of this embodiment is that：
1st, the present invention adopts magneto magnetic structure, eliminates magnet exciting coil, reduces the loss of excitation system, improves energy
Conversion efficiency, magnetic structure are simple, compact, reliable.
2nd, equilbrium position of the present invention using electric viscoelastic spring feedback control rotatable parts, traditional mechanical spring have non-thread
Property, the defect such as time-varying, sluggishness, affect the distortion factor of angle vibration table output campaign amount waveform, and electric viscoelastic spring feedback control be controllable
Property it is good, there is linear, non-time-varying, without sluggish, reduce the distortion factor of output campaign amount waveform.
Embodiment 2
The difference of the present embodiment and embodiment one is the concrete structure of air bearing, other groups in addition to air bearing
Part structure is same as Example 1.
Specifically：As shown in figure 4, air bearing includes that bearing block C-1 and bearing body C-2, main shaft B-2 are socketed on axle
Hold in body C-2, bearing body C-2 is socketed in bearing block C-1, bearing block C-1 is fixed with bearing body C-2, main shaft B-2 bottoms
Portion is provided with the step coordinated with bearing body C-2；
The outer surface of bearing body C-2 is provided with the air inlet groove C-21 of annular, and bearing block C-1 is provided with and air inlet groove
The air inlet C-11 of C-21 connections, bearing body C-2 are provided with the footpath between gas guide bearing body C-2 and main shaft B-2
To gas port, by the upper axial gas port between gas guide bearing body C-2 and work top B-1 and by gas guide bearing
, to gas port, radial direction gas port, upper axial gas port and lower axle are to inducing QI for lower axle between the step of body C-2 and main shaft B-2
The outlet side in hole is respectively equipped with throttle orifice C-3, and is distributed uniformly and circumferentially.
Air inlet C-11, air inlet groove C-21, radial direction gas port, upper axial gas port and lower axle constitute air inlet to gas port
Passage, air inlet C-11 are connected with high-pressure air source.
Upper axial gas port connects to form upper T-shaped air flue C-22 with the first radial direction gas port, and lower axle is to gas port and second
Radial direction gas port connects to form down T-shaped air flue C-23, and upper T-shaped air flue C-22 T-shaped air flue C-23 with are symmetrical arranged, and first radially
Gas port and the second radial direction gas port are connected with air inlet groove C-21.
Air film is formed between the upper surface of bearing body C-2 and the lower surface of work top B-1, the referred to as upper thrust of the air film
Portion's air film；Air film is formed between the upper surface of the lower surface of bearing body C-2 and the step of main shaft B-2, the air film is referred to as lower to be stopped
Pushed section air film；Air film is formed between the outer surface of the inner surface and main shaft B-2 of bearing body C-2, the air film is referred to as collar gas
Film；Upper push stopping part air film, lower push stopping part air film and collar air film make to be not directly contacted between main shaft and bearing body, so as to drop
Low frictional force, reduces the distortion factor of output waveform.
In order to optimize the exhaust performance of air bearing, the uniform and stable of air film is kept, limited：The hollow rows of being formed of main shaft B-2
Air cavity B-24, discharge chamber B-24 are in communication with the outside；The upper end of main shaft B-2 is provided between bearing body C-2 and work top B-1
Gas introduce the first exhaust passage of discharge chamber, bearing body C-2 is provided between main shaft B-2 and bearing body C-2
The second exhaust passage that gas is discharged, the air vent of second exhaust passage are located at outside the step of main shaft B-2, second exhaust
Passage is uniformly distributed on bearing body C-2, and second exhaust passage is mutually isolated with air inlet groove C-21.
First exhaust passage includes the circumferential groove B-22 for being arranged at main shaft B-2 upper surfaces, by bearing body C-2 and workbench
Gas between the B-1 of face enters the pore B-21 of circumferential groove B-22 and the gas in circumferential groove B-22 is entered the axle of discharge chamber
To hole B-23；Pore B-21 has multiple, and circumferentially groove B-22 is uniformly distributed pore B-21；Axial hole B-23 has multiple, axle
To hole B-23, circumferentially groove B-22 is uniformly distributed；Radial directions of the pore B-21 along main shaft B-2 upper surfaces is opened up, axial hole B-23 edges
Main shaft B-2 is axially opened up.
Second exhaust passage includes rod radial air vent C-26 and axial vent holes C-27, rod radial air vent C-26 one end and axle
The air film connection between body C-2 and main shaft B-2 is held, the other end is connected with axial vent holes C-27；Axial vent holes C-27
Air vent of the gas outlet as second exhaust passage；The gas of collar air film is introduced axial vent holes by rod radial air vent C-26
C-27, then gas is discharged by axial vent holes C-27.
Rod radial air vent C-26 runs through bearing body C-2, one end that rod radial air vent C-26 is connected with air inlet groove C-21
Plug C-4 is provided with, so as to avoid the gas of second exhaust passage in air inlet groove C-21, second exhaust passage and air inlet is made
Groove C-21 is separate, and facilitates the processing of rod radial air vent C-26.
Shell includes the cylinder F-3 fixed with the base F-2 and snubber block F-1 with the bearing block C-1 fixations of air bearing；
Space between discharge chamber B-24 and moving coil component and central magnetic pole E-2, magnet steel E-3 connects, second exhaust passage and snubber block
Space between F-1 and moving coil component connects；The gas of upper push stopping part air film is entered aerofluxuss intracavity, aerofluxuss by first exhaust passage
Chamber B-24 enters gas between central magnetic pole E-2, magnet steel E-3 and moving coil component, plays a part of to cool down moving coil component；Second
Exhaust passage enters the gas of collar air film between moving coil component and snubber block F-1, also functions to cool down the work of moving coil component
With；The gas of first exhaust passage and second exhaust passage in addition to flowing through moving coil component, finally by central magnetic pole E-2, magnetic
The exhaust passage of the air discharge duct F-21 compositions on road support member E-4, the centre bore of base F-2 and base F-2 bottom surfaces is by gas
Enter in air.
Advantage of this embodiment is that：Using air bearings support, the upper push stopping part air film of formation, lower push stopping part air film,
Collar air film completes the axially and radially support to moving-coil rotatable parts, and rotatable parts and stationary components realize nothing by air film
Contact is supported, little without friction or frictional force, is operated steadily, and is improved the rotating accuracy of rotatable parts, is improved angle vibration table output wave
The advantage of the shape distortion factor and reduction teeter amount.Also, the gas overflowed in the air film of air bearing may also operate as cold
But the effect of moving coil component.
Embodiment 3
It is the coil of moving coil component in place of the difference of the present embodiment and embodiment 1, the other assemblies knot in addition to coil
Structure is same as Example 1.
As shown in figure 5, the coil B-4 of moving coil component is covered in the lateral surface of moving-coil matrix B-3.As shown in fig. 6, coil bag
Include coil windings B-4-1 and insulating barrier B-4-3, coil windings B-4-1 and insulating barrier B-4-3 interval settings, coil windings B-4-1
There is one layer at least, insulating barrier B-4-3 is made up of epoxide-resin glue and glass cloth, and insulating barrier is completely covered the coil windings in which
B-4-1.As shown in fig. 7, coil windings include first coil B-4-1-1 and the second coil B-4-1-2, first coil B-4-1-1
From inside to outside coiling counterclockwise, the second coil B-4-1-2 coilings from outside to inside clockwise, first coil B-4-1-1 and the second line
Circle B-4-1-2 is in same layer, first coil B-4-1-1 and the second coil B-4-1-2 difference coiling multiturns, per circle respectively by having
Effect conducting line segment B-4-11 and connecting wire section B-4-12 composition, active wires section B-4-11 of energization produce ampere in magnetic field
Power, connecting wire section B-4-12 is outside magnetic field；
Active wires section B-4-11 being spacedly distributed constitutes Ampere force generating unit B-4-1-3, Ampere force generating unit
The quantity of B-4-1-3 is the twice of coil windings B-4-1 number, the active wires that each Ampere force generating unit B-4-1-3 is included
Section B-4-11 quantity is identical, filled with epoxide-resin glue between every circle wire of coil windings B-4-1, coil windings B-4-1 it
Between it is connected in series or in parallel.
When making coil windings B-4-1, first make and can surround just the plane copper coin of moving-coil matrix B-3 lateral surface, then
Wire shaped and cabling side are walked such as Fig. 7 with what the mode of wire cutting or engraving processed coil windings B-4-1 on plane copper coin
Then plane copper board coil is fixed and is wrapped on the lateral surface of moving-coil matrix B-3 by formula, while in the outer of coil windings B-4-1
Side and middle area of knockout winding glass cloth, and infusion epoxy resin glue, winding, while perfusion, after waiting curable epoxide,
Processed using turning process and cause coil windings B-4-1 and moving-coil matrix B-3 of current layer to form new smooth cylinder
Moving-coil matrix B-3.When making next layer of coil windings B-4-1, the lateral surface with new moving-coil matrix B-3 is with reference to preparation plane
Copper coin, coil windings B-4-1 for newly increasing layer are identical with the canoe of ground floor coil windings B-4-1, and ensure each line
The Ampere force generating unit position of circle winding B-4-1 is mutually aligned overlap, and when making other layer of coil windings B-4-1, rule is successively
Analogize.
The corner of active wires section B-4-11 and connecting wire section B-4-12 in coil windings B-4-1 passes through fillet mistake
Cross, it is to avoid stress concentration and damage when coil windings B-4-1 are processed and be fixed.
As the sense of current around trig loop phase neighbour's Ampere force generating unit wire is conversely, in order to be able to be stacked Ampere force
Plus, defined below is done to magnet steel E-3：Magnet steel E-3 is distributed along the even circumferential of central magnetic pole E-2；The magnetizing direction of magnet steel E-3 is
Radially, adjacent magnet steel E-3 magnetizing directions are conversely, magnet steel E-3 is fixed in central magnetic pole E-2.
Advantage of this embodiment is that：Coil windings pass through wire cutting or engraving is formed, and wiring is uniform, uniform force, together
When reduce the coiling difficulty of coil windings, simplify wire winding.
Content described in this specification embodiment is only enumerating to the way of realization of inventive concept, the protection of the present invention
Scope is not construed as being only limitted to the concrete form stated by embodiment, and protection scope of the present invention is also and in art technology
Personnel according to present inventive concept it is conceivable that equivalent technologies mean.
Claims (7)
1. a kind of electromagnetic drive type angle vibration table, including shell, work top, the main shaft for driving work top rotation, moving-coil group
Part, magnetic circuit component, electric viscoelasticity feedback control component and air bearing；
It is characterized in that：Main shaft is fixedly connected with moving coil component, and moving coil component includes the moving-coil matrix being connected with main shaft and winding
Coil on moving-coil matrix, moving-coil matrix are fixedly connected with main shaft；
Magnetic circuit component includes magnetic guiding loop, central magnetic pole and magnet steel, and magnetic guiding loop, central magnetic pole, magnet steel and air gap form closed magnetic
Loop；Central magnetic pole is located in magnetic guiding loop, and magnetic guiding loop is coaxial with central magnetic pole, and magnet steel is located between magnetic guiding loop and central magnetic pole,
Magnet steel is adsorbed in central magnetic pole；Moving coil component is located between magnet steel and magnetic guiding loop, and moving coil component is coaxial with magnetic guiding loop；
Magnetic circuit component is fixed on magnetic circuit support member, and magnetic circuit support member is fixed on base, and magnetic circuit support member is provided with cannelure,
Moving coil component is stretched in cannelure, has gap between moving coil component and the cell wall of cannelure.
2. electromagnetic drive type angle vibration table as claimed in claim 1, it is characterised in that：Electric viscoelasticity feedback control component includes
Angular displacement sensor, feedback unit, signal generator, subtractor, PID controller and power amplifier；Angular displacement sensor by
Read head and Circular gratings two parts composition, Circular gratings are arranged on work top, and read head is fixed on air axle by installing rack
On the bearing block for holding；
Angular displacement sensor is used for the angular displacement signal for detecting moving coil component and work top output, and the angular displacement signal is input to
The signal being input into is amplified the first output signal of acquisition and by after the signal of input first differential process by feedback unit, feedback unit
Amplify the second output signal of acquisition again, the first output signal is superimposed into acquisition feedback unit output letter with the second output signal again
Number；The standard signal Jing subtractors that feedback unit output signal is exported with signal generator ask poor, obtain deviation signal, deviation letter
Number export to power amplifier after PID regulator process, drive angle vibration table motion.
3. electromagnetic drive type angle vibration table as claimed in claim 1 or 2, it is characterised in that：Air bearing include bearing block and
Bearing body, main shaft are socketed in bearing body, and bearing body is socketed in bearing block, and bearing block is fixed with bearing body, main
Axle bottom is provided with the step coordinated with bearing body；
The outer surface of bearing body is provided with the air inlet groove of annular, and bearing block is provided with the air inlet connected with air inlet groove,
Bearing body is provided with the radial direction gas port between gas guide bearing body and main shaft, by gas guide bearing body and work
Make upper axial gas port between table top and by the lower axle between gas guide bearing body and the step of main shaft to gas port, footpath
Throttle orifice is respectively equipped with to the outlet side of gas port to gas port, upper axial gas port and lower axle, throttle orifice is along the circumferential direction equal
Even distribution.
4. electromagnetic drive type angle vibration table as claimed in claim 3, it is characterised in that：The hollow formation discharge chamber of main shaft, main shaft
Upper end be provided with by between bearing body and work top gas introduce discharge chamber first exhaust passage, set on bearing body
The air vent for having the second exhaust passage for discharging the gas between main shaft and bearing body, second exhaust passage is located at master
Outside the step of axle, second exhaust passage is uniformly distributed on bearing body, and second exhaust passage is mutually isolated with air inlet groove.
5. electromagnetic drive type angle vibration table as claimed in claim 4, it is characterised in that：First exhaust passage includes being arranged at master
Gas between bearing body and work top is entered the pore of circumferential groove and by circumferential groove by the circumferential groove of axle upper surface
Gas enter the axial hole of discharge chamber；Pore has multiple, and circumferentially groove is uniformly distributed pore；Axial hole has multiple, axle
To hole, circumferentially groove is uniformly distributed；Radial direction of the pore along main shaft upper surface is opened up, and axial hole is axially opened up along main shaft；
Second exhaust passage includes rod radial air vent and axial vent holes, between rod radial air vent one end and bearing body and main shaft
Air film connection, the other end connected with axial vent holes；Air vent of the gas outlet of axial vent holes as second exhaust passage；
Rod radial air vent runs through bearing body, and one end that rod radial air vent is connected with air inlet groove is provided with plug.
6. electromagnetic drive type angle vibration table as claimed in claim 5, it is characterised in that：Shell includes the cylinder fixed with base
And the snubber block with the bearing block fixation of air bearing；Space between discharge chamber and moving coil component and central magnetic pole, magnet steel connects
Logical, the space between second exhaust passage and snubber block and moving coil component connects.
7. electromagnetic drive type angle vibration table as claimed in claim 6, it is characterised in that：The coil of moving coil component is covered in moving-coil
The lateral surface of matrix, coil include coil windings and insulating barrier, coil windings and insulating barrier interval setting, and coil windings at least have
There is one layer, insulating barrier is made up of epoxide-resin glue and glass cloth, insulating barrier is completely covered the coil windings in which；
Each coil windings includes first coil and the second coil, and first coil from inside to outside coiling counterclockwise, the second coil are suitable
Hour hands coiling from outside to inside, first coil and the second coil are in same layer, first coil and the second coil difference coiling multiturn,
It is made up of active wires section and connecting wire section per circle respectively, the active wires section of energization produces Ampere force in magnetic field, connection
Conducting line segment is outside magnetic field；
The active wires section being spacedly distributed constitutes an Ampere force generating unit, and the quantity of Ampere force generating unit is coil windings
Several twices, the active wires quantity that each Ampere force generating unit is included are identical, are filled between every circle wire of coil windings
Epoxide-resin glue, it is connected in series or in parallel between coil windings.
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| CN201410442973.0A CN104180844B (en) | 2014-09-02 | 2014-09-02 | Solenoid drive type angular vibration table |
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| CN201410442973.0A CN104180844B (en) | 2014-09-02 | 2014-09-02 | Solenoid drive type angular vibration table |
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| CN106644343B (en) * | 2017-03-01 | 2023-04-18 | 中国地震局工程力学研究所 | Rotary vibration table and system thereof |
| CN109406082A (en) * | 2018-11-09 | 2019-03-01 | 西人马（厦门）科技有限公司 | A kind of shake table |
| CN112317222A (en) * | 2020-10-27 | 2021-02-05 | 浙江大学 | Droplet generator with feedback control function and feedback control method thereof |
| CN113514083B (en) * | 2021-08-18 | 2022-10-04 | 中国计量大学 | Electromagnetic linear-angular vibration exciting device |
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