CN113514083B - Electromagnetic linear-angular vibration exciting device - Google Patents
Electromagnetic linear-angular vibration exciting device Download PDFInfo
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- CN113514083B CN113514083B CN202110947415.XA CN202110947415A CN113514083B CN 113514083 B CN113514083 B CN 113514083B CN 202110947415 A CN202110947415 A CN 202110947415A CN 113514083 B CN113514083 B CN 113514083B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C25/00—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass
- G01C25/005—Manufacturing, calibrating, cleaning, or repairing instruments or devices referred to in the other groups of this subclass initial alignment, calibration or starting-up of inertial devices
Abstract
The invention discloses an electromagnetic linear-angular vibration exciting device which comprises a moving part, a magnetic circuit assembly, a coil assembly and a reset assembly. The moving part is in a cylinder shape with a cover and without a bottom, and the top of the moving part is provided with a workbench. The magnetic circuit assembly comprises a base, a supporting seat, an outer magnetic ring, an inner magnetic core, a first permanent magnet and a second permanent magnet. The inner magnetic core is inserted into the outer magnetic ring, and the inner magnetic core is concentric with the outer magnetic ring. The first permanent magnets and the second permanent magnets are alternately arranged at the circumferential quartering positions of the inner magnetic core; in the axial direction of the inner magnetic core, the second permanent magnets are flush with the upper end surface and the lower end surface of the inner magnetic core, and the first permanent magnet is positioned between the two second permanent magnets. The coil assembly is wound around the moving part. The moving part is inserted between the outer magnetic ring and the inner magnetic core, and the coil is led with sine alternating current to make the moving part output sine-changed linear-angular vibration. The moving part is acted by ampere force to generate sine type torsion moment or up-down acting force, so that the moving part is driven to generate linear vibration and angular vibration.
Description
Technical Field
The invention relates to linear vibration angular vibration excitation, in particular to an electromagnetic linear-angular vibration excitation device.
Background
The MEMS inertial sensor is widely applied to the fields of aerospace, rail transit, intelligent automobile, bridge monitoring and the like, the dynamic characteristic of the MEMS inertial sensor needs to be calibrated in order to ensure the accuracy and reliability of the quantity value, the vibration calibration device is an important component for measuring and calibrating the sensitivity, the linearity and the dynamic characteristic of the MEMS inertial sensor, the vibration excitation device is a vibration source of a calibration system of the MEMS inertial sensor, and the output vibration quantity and the waveform distortion degree of the vibration excitation device determine the calibration precision of the MEMS inertial sensor to a great extent.
A calibration specification (JJF 1427-2013) of a micro-electro-mechanical system (MEMS) linear accelerometer and a calibration specification (JJF-1535-2015) of a micro-electro-mechanical system (MEMS) gyroscope respectively specify calibration items and calibration methods of a micro-electromechanical wire accelerometer and a micro-electromechanical gyroscope, frequency response characteristic tests of the micro-electromechanical wire accelerometer and the micro-electromechanical gyroscope respectively adopt a linear vibration exciter and an angular vibration exciter to carry out sinusoidal motion excitation with different frequencies and amplitudes, and a sensor output signal is compared with a standard vibration quantity signal to obtain the frequency response characteristic of the MEMS inertial sensor in the sensitive axis direction. For the requirements of MEMS inertial measurement unit dynamic characteristic calibration appearing in recent years, no calibration method and calibration device are provided for the requirements of the existing calibration standard, but the traditional single-axial vibration calibration technology can only reproduce one-dimensional linear vibration or angular vibration in an ideal environment, can not reproduce line vibration-angular vibration coupled spatial motion, and seriously restricts the development of the MEMS inertial measurement unit sensor technology in China. Therefore, the excitation device capable of synchronously outputting line vibration-angular vibration has important scientific value and engineering significance.
Disclosure of Invention
It is an object of the present invention to provide an electromagnetic linear-angular vibration excitation device that solves one or more of the above mentioned problems.
In order to achieve the purpose, the technical scheme provided by the invention is as follows:
an electromagnetic linear-angular vibration exciting device comprises a moving part, a magnetic circuit assembly, a coil assembly and a reset assembly.
The moving part is in a cylinder shape with a cover and without a bottom, and the top of the moving part is provided with a workbench;
the magnetic circuit assembly comprises a base, a supporting seat, an outer magnetic ring, an inner magnetic core, a first permanent magnet and a second permanent magnet;
the outer magnetic ring is fixed on the base, the inner magnetic core is inserted into the outer magnetic ring, the inner magnetic core is concentric with the outer magnetic ring, the inner magnetic core is fixed on the supporting seat,
the first permanent magnets and the second permanent magnets are alternately arranged at the circumferential quartering position of the inner magnetic core;
in the axial direction of the inner magnetic core, the second permanent magnets are flush with the upper end surface and the lower end surface of the inner magnetic core, and the first permanent magnet is positioned between the two second permanent magnets;
the first permanent magnet, the inner magnetic core, the outer magnetic ring and the air gap form an angular vibration closed magnetic loop,
the second permanent magnet, the inner magnetic core, the outer magnetic ring and the air gap form a linear vibration closed magnetic loop;
the coil assembly is wound on the surface of the moving part;
the moving part is inserted between the outer magnetic ring and the inner magnetic core, and the coil assembly is led with sine alternating current to enable the moving part to output sine-changed linear-angular vibration;
the reset assembly balances the moving component relative to the magnetic circuit assembly.
In the invention, a magnetic field is formed between the permanent magnet and the coil, the moving part is stressed to generate linear-angular vibration by electrifying the coil, and the reset assembly always ensures that the coil and the corresponding permanent magnet are in the correct position.
And further: the coil assembly includes a first coil and a second coil, the first coil including two portions, a first circumferential portion and a first axial portion. The second coil includes two portions, a second circumferential portion and a second axial portion. The first coil and the second coil are connected in series; the winding directions of the first coil and the second coil are opposite, wherein the first axial portion and the second axial portion are adjacent end to end, and the first circumferential portion and the second circumferential portion are radially symmetrical.
The first permanent magnet and the second permanent magnet are adsorbed on the inner magnetic core and are magnetized in the radial direction; based on ampere's law, in combination with the need for the moving part to produce angular and linear vibrations, an angular vibrating air-gap magnetic field and a linear vibrating air-gap magnetic field are formed.
When the coil assembly is electrified with sine alternating current, and the axial parts (the first axial part and the second axial part) of the coil assembly are positioned in the angular vibration air gap magnetic field, the moving component can output sine-changed angular vibration.
When the coil assembly is supplied with a sinusoidal alternating current, and the circumferential portions (the first circumferential portion and the second circumferential portion) of the coil assembly are located in the linear vibration air gap magnetic field, the moving member can output a sinusoidal variation of the linear vibration.
Further: the reset assembly comprises a bracket and an elastic rope; the bracket is fixed on the upper end face of the outer magnetic ring, one end of the elastic rope is fixed on the bracket, and the other end of the elastic rope is fixed on the moving part.
Further: the number of the reset components is a plurality, and the reset components are arranged at equal intervals in the circumferential direction of the moving part.
Further: two ends of the elastic rope are fixed on swing bolts, the swing bolts are in threaded connection with the moving parts, and the middle of the elastic rope is sleeved on the support.
Further: and radial throttle holes are respectively formed in the inner side surface of the upper end and the inner side surface of the lower end of the outer magnetic ring, the throttle holes are uniformly distributed along the circumferential direction, and the throttle holes are opposite to the outer wall of the moving part.
Because the distance between the moving part and the outer magnetic ring is small, collision or friction is easy to occur between the moving part and the outer magnetic ring in the actual moving process of the moving part, and the output result is inaccurate or cannot be obtained.
Therefore, the upper end and the lower end of the moving part are respectively provided with the throttling holes which are externally connected with compressed air flow; an air film is formed between the moving part and the outer magnetic ring, the radial supporting effect is achieved due to mutual change of the air film pressure and the air film thickness, and when the moving part vibrates linearly and angularly, the radial air floatation supporting part has a lubricating effect, so that the friction force of the moving part is greatly reduced, and the waveform distortion degree of the output motion amount is reduced.
And further: and a groove is arranged on the outer surface of the moving part, and the coil assembly is embedded in the groove.
The invention has the technical effects that:
when the coil assembly is electrified with sine alternating current, the electrified coil is mutually coupled with the air gap magnetic field of the magnetic circuit assembly, and the moving part is acted by ampere force to generate sine type torsional moment or up-down acting force, so that the moving part is driven to generate linear vibration and angular vibration.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention.
In the drawings:
fig. 1 is a schematic view of the overall structure of the present invention.
Fig. 2 is a schematic view of the moving part structure of the present invention.
Fig. 3 is a schematic diagram of the coil assembly structure of the present invention.
Fig. 4 is a schematic structural view of the magnetic circuit component of the present invention.
Fig. 5 is a schematic view of the structure of the angular vibration closed magnetic circuit of the present invention.
Fig. 6 is a schematic view of the structure of the linear vibration closed magnetic circuit of the present invention.
FIG. 7 is a structural diagram of the radial air bearing support member of the present invention (with the coil omitted).
Fig. 8 is a partially enlarged schematic view of fig. 7.
Wherein the figures include the following reference numerals:
the MEMS inertial measurement unit comprises a sensor 1, a moving part 2, a working table surface 21 and an upper ring surface 22;
the coil assembly 23, the first coil 231, the first circumferential portion 2311, the first axial portion 2312;
a second coil 232, a second circumferential portion 2321, a second axial portion 2322;
a recess 24; a lower annulus 25;
an outer magnetic ring 41, an inner magnetic core 42, a first permanent magnet 43, a second permanent magnet 44;
a base 51, a support 52;
an orifice 61, an outer magnet ring partial annulus 62, and a moving member partial annulus 63.
Detailed Description
The present invention will now be described in detail with reference to the drawings and specific embodiments, wherein the exemplary embodiments and descriptions are provided only for the purpose of illustrating the present invention and are not to be construed as unduly limiting the invention.
It should be noted that, in the present application, the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the accompanying drawings in conjunction with embodiments.
It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular forms "a", "an" and "the" are intended to include the plural forms as well, and it should be understood that when the terms "comprises" and/or "comprising" are used in this specification, they specify the presence of stated features, steps, operations, devices, components, and/or combinations thereof, unless the context clearly indicates otherwise.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the accompanying drawings are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are, for example, capable of operation in sequences other than those illustrated or otherwise described herein. Moreover, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
For ease of description, spatially relative terms such as "over 8230 \ 8230;,"' over 8230;, \8230; upper surface "," above ", etc. may be used herein to describe the spatial relationship of one device or feature to another device or feature as shown in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations of the device in use or operation in addition to the orientation depicted in the figures. For example, if a device in the figures is turned over, devices described as "above" or "on" other devices or configurations would then be oriented "below" or "under" the other devices or configurations. Thus, the exemplary terms "at 8230; \8230; above" may include both orientations "at 8230; \8230; above" and "at 8230; \8230; below". The device may be otherwise variously oriented (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.
As shown in fig. 1 to 8, an electromagnetic linear-angular vibration excitation device includes a moving member 2, a magnetic circuit assembly, a coil assembly, and a reset assembly.
The moving part is in a cylinder shape with a cover and without a bottom, and a workbench 21 is arranged at the top of the moving part. The MEMS inertial measurement unit sensor 1 is mounted on the table top 21 of the moving part.
As shown in fig. 4, the magnetic circuit assembly includes a base 51, a supporting seat 52, an outer magnetic ring 41, an inner magnetic core 42, a first permanent magnet 43, and a second permanent magnet 44. The outer magnetic ring 41 is fixed on the base 51, the inner magnetic core 42 is inserted into the outer magnetic ring 41, the inner magnetic core 42 is concentric with the outer magnetic ring 41, and the inner magnetic core 42 is fixed on the supporting seat 52. The first permanent magnets 43 and the second permanent magnets 44 are alternately arranged at the circumferential quartering positions of the inner magnetic core 42; in the axial direction of the inner magnetic core 42, the second permanent magnets 44 are flush with the upper and lower end faces of the inner magnetic core 42, and the first permanent magnet 43 is located between the two second permanent magnets 44.
The first permanent magnet 43, the inner magnetic core 42, the outer magnetic ring 41 and the air gap form an angular vibration closed magnetic loop,
the second permanent magnet 44, the inner magnetic core 42, the outer magnetic ring 41 and the air gap form a linear vibration closed magnetic loop;
as shown in fig. 2 and 3, the coil assembly is wound around the moving part. A recess 24 is provided in the outer surface of the moving part, into which recess the coil assembly is inserted. The coil assembly is flush with the moving part outer wall.
The coil assembly 23 includes a first coil 231 and a second coil 232.
The first coil 231 includes a first circumferential portion 2311 and a first axial portion 2312.
The second coil 232 includes two portions, a second circumferential portion 2321 and a second axial portion 2322.
The first coil 231 and the second coil 232 are connected in series; the first coil 231 and the second coil 232 are wound in opposite directions, wherein the first axial portion 2312 is adjacent to the second axial portion 2322 end to end, and the first circumferential portion 2311 and the second circumferential portion 2321 are radially symmetrical.
The moving element 2 is inserted between the outer magnetic ring 41 and the inner magnetic core 42, and a sinusoidal alternating current is supplied to the coil assembly 23, so that the moving element 2 outputs a sinusoidal line-angle vibration.
The reset assembly balances the moving component relative to the magnetic circuit assembly.
The first permanent magnet 43 and the second permanent magnet 44 are adsorbed on the inner magnetic core 42 and magnetized in the radial direction; based on ampere's law, in combination with the need for the moving part to produce angular and linear vibrations, an angular vibrating air-gap magnetic field and a linear vibrating air-gap magnetic field are formed.
When the coil assembly 23 is energized with a sinusoidal alternating current and the axial portions (first axial portion 2312 and second axial portion 2322) of the coil assembly 23 are within the angular oscillatory motion air gap magnetic field, the moving component may output a sinusoidal varying angular vibration.
When the coil assembly 23 is energized with a sinusoidal alternating current and the circumferential portions (the first circumferential portion 2311 and the second circumferential portion 2321) of the coil assembly 23 are located within the linear vibration air gap magnetic field, the moving member may output a sinusoidally varying linear vibration.
Two independent angular and linear vibrating air-gap magnetic fields, as shown in fig. 5 and 6, interact with the axial and circumferential portions of the coil assembly, respectively, and the moving parts are capable of simultaneously producing a spatial motion of angular-linear vibration complexes, according to ampere's law.
As shown in fig. 5, the axial portions of the coil assembly (first axial portion 2312 and second axial portion 2322) are located within an angularly vibrating air-gap magnetic field comprising the outer magnetic ring 41, the inner magnetic core 42, the first permanent magnet set 43 and the air-gap.
The current direction of the coil assembly is an axial direction, the axial current direction of the first coil 231 on the left side is opposite to the axial current direction of the second coil 232 on the right side, the large-diameter position of the first permanent magnet 43 on the left side is an N pole and the small-diameter position is an S pole, the large-diameter position of the first permanent magnet 43 on the right side is an S pole and the small-diameter position is an N pole, the first permanent magnet 43 is located in the middle position of the axial portion of the coil assembly, when the coil assembly is connected with sinusoidal alternating current, the magnetic induction intensity of an angular vibration air gap magnetic field is perpendicular to the current direction, according to the left-hand rule, the axial portions (the first axial portion 2312 and the second axial portion 2322) of the coil assembly are acted by ampere forces, and the force directions of the first axial portion 2312 on the left side and the second axial portion 2322 on the right side are opposite, so that the angular vibration of the moving part is caused.
As shown in fig. 6, the circumferential portions (first circumferential portion 2311 and second circumferential portion 2321) of the coil assembly are located within a linear vibrating air-gap magnetic circuit comprising the outer magnetic ring 41, the inner magnetic core 42, the second permanent magnet 44 and the air gap.
Here, the current direction of the coil assembly is a circumferential direction, the current directions of the first left circumferential portion 2311 and the second right circumferential portion 2321 are opposite, the current directions of the second permanent magnet 44 on the left side are an N pole and an S pole at a large diameter, the current directions of the second permanent magnet 44 on the right side are an S pole and an N pole at a small diameter, and the second permanent magnet 44 is located at a middle position of the circumferential portions (the first circumferential portion 2311 and the second circumferential portion 2321) of the coil assembly, when the coil assembly is supplied with a sinusoidal alternating current, the magnetic induction intensity of the linear vibration air gap magnetic field is perpendicular to the current direction, according to the left-hand rule, the circumferential portions (the first circumferential portion 2311 and the second circumferential portion 2321) of the coil assembly are subjected to an ampere force, and the force directions are the same for the first left circumferential portion 2311 and the second right circumferential portion 2321, thereby causing the moving member to vibrate.
In certain embodiments: the reset component comprises a bracket and an elastic rope 33; the bracket is fixed on the upper end face of the outer magnetic ring, one end of the elastic rope 33 is fixed on the bracket, and the other end of the elastic rope is fixed on the moving part.
The support comprises a vertical rod 31 and a cross rod 32, the vertical rod is fixed on the upper end surface of the external magnetic ring 41, and the cross rod is fixed on the top of the vertical rod; an elastic cord (latex or rubber tubing is used here) is looped over the cross-bar 32. Two movable ends of the elastic rope are fixed on the swing bolt, the swing bolt is spirally connected to the moving part (preferably the upper end surface), and the pretightening force of the elastic rope is adjusted through the height of the swing bolt.
Further: the number of the reset components is a plurality, and the reset components are arranged at equal intervals in the circumferential direction of the moving part 2.
Further: two ends of the elastic rope 33 are fixed on swing bolts, the swing bolts are in threaded connection with the moving parts, and the middle of the elastic rope 33 is sleeved on the support.
The tightness state of the elastic rope 33 is adjusted through the swing bolt 34, the pretightening force of the elastic rope is balanced with the gravity of the moving part, and when the moving part vibrates up and down or rotates at a rotating angle, the newly increased deformation of the elastic rope 33 in the tension state can provide the restoring force of linear vibration and angular vibration for the moving part to be in a balance position again. The triangular topological structure is adopted to solve the problem of the restoration of the balance position of the compound vibration, not only can overcome the self gravity of the moving part, but also can provide the elastic restoring force of the moving part during linear vibration and angular vibration.
Further: radial throttle holes 61 are respectively arranged on the inner side surface (partial ring surface 62) at the upper end and the inner side surface at the lower end of the outer magnetic ring 41, the throttle holes 61 are uniformly distributed along the circumferential direction, and the throttle holes 61 are opposite to the outer wall of the moving part 2. The throttling hole 61 is connected with an external high-pressure air source through a blind hole in the outer magnetic ring 41.
An air film layer is formed between a local ring surface 63 (as shown in fig. 2, the ring surfaces at the upper end and the lower end of the moving component 2 are respectively an upper ring surface 22 and a lower ring surface 25) of the moving component and a local ring surface 62 of the outer magnetic ring under the action of air flow of the throttling hole 61, the air film pressure and the air film thickness are changed mutually so as to play a role of radial support, and when the moving component generates linear vibration-angular vibration, the radial air-float support component plays a role of lubrication, so that the friction force of the moving component is greatly reduced, and the waveform distortion degree of the output motion quantity is reduced.
The invention adopts a novel magnetic circuit topological structure to solve the problem of compound vibration decoupling, can provide an air gap magnetic field of linear vibration-angular vibration of a moving part, and realizes the synchronous output of the linear vibration-angular vibration of the moving part; the reset assembly adopts a triangular latex tube topological structure to solve the problem of the restoration of the composite vibration balance position, and not only can overcome the self gravity of the moving part, but also can provide the elastic restoring force of the moving part during linear vibration and angular vibration. Meanwhile, each part adopts a modular structure design, and the structure is simple and the installation is convenient.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. An electromagnetic linear-angular vibration excitation device, characterized in that: comprises a moving component (2), a magnetic circuit component, a coil component and a reset component;
the moving part is in a cylinder shape with a cover and without a bottom, and the top of the moving part is provided with a workbench (21);
the magnetic circuit assembly comprises a base (51), a supporting seat (52), an outer magnetic ring (41), an inner magnetic core (42), a first permanent magnet (43) and a second permanent magnet (44);
the outer magnetic ring (41) is fixed on a base (51), the inner magnetic core (42) is inserted into the outer magnetic ring (41), the inner magnetic core (42) is concentric with the outer magnetic ring (41), the inner magnetic core (42) is fixed on the supporting seat (52),
the first permanent magnets (43) and the second permanent magnets (44) are alternately arranged at the circumferential quartering position of the inner magnetic core (42);
in the axial direction of the inner magnetic core (42), the second permanent magnets (44) are flush with the upper end surface and the lower end surface of the inner magnetic core (42), and the first permanent magnet (43) is positioned between the two second permanent magnets (44);
the first permanent magnet (43), the inner magnetic core (42), the outer magnetic ring (41) and the air gap form an angular vibration closed magnetic loop,
the second permanent magnet (44), the inner magnetic core (42), the outer magnetic ring (41) and an air gap form a linear vibration closed magnetic loop;
the coil assembly (23) is wound on the surface of the moving part (2);
the moving part (2) is inserted between the outer magnetic ring (41) and the inner magnetic core (42), and the coil assembly (23) is led with sine alternating current to enable the moving part (2) to output sine-changed linear-angular vibration;
the reset assembly balances the moving part (2) relative to the magnetic circuit assembly.
2. The electromagnetic linear-angular vibration excitation device according to claim 1, characterized in that: the coil assembly (23) comprises a first coil (231) and a second coil (232),
said first coil (231) comprising a first circumferential portion (2311) and a first axial portion (2312);
the second coil (232) comprises a second circumferential portion (2321) and a second axial portion (2322);
the first coil (231) and the second coil (232) are connected in series; the first coil (231) and the second coil (232) have opposite winding directions, wherein the first axial portion (2312) is adjacent to the second axial portion (2322) end to end, and the first circumferential portion (2311) and the second circumferential portion (2321) are radially symmetrical.
3. The electromagnetic linear-angular vibration excitation device according to claim 1, characterized in that: the reset assembly comprises a support and an elastic rope (33), the support is fixed on the upper end face of the outer magnetic ring (41), one end of the elastic rope (33) is fixed on the support, and the other end of the elastic rope (33) is fixed on the moving part (2).
4. An electromagnetic linear-angular vibration excitation device according to claim 3, characterized in that: the number of the reset components is a plurality, and the reset components are arranged on the moving part (2) in a circumferential and equal division mode.
5. An electromagnetic linear-angular vibration excitation device according to claim 3, characterized in that: two ends of the elastic rope (33) are fixed on swing bolts (34), the swing bolts (34) are connected to the moving part (2) in a spiral mode, and the middle of the elastic rope (33) is sleeved on the support.
6. The electromagnetic linear-angular vibration excitation device according to claim 1, characterized in that: radial throttle holes (61) are respectively formed in the inner side face of the upper end and the inner side face of the lower end of the outer magnetic ring (41), the throttle holes (61) are uniformly distributed along the circumferential direction, and the throttle holes (61) are opposite to the outer wall of the moving component (2).
7. An electromagnetic linear-angular vibration excitation device according to claim 1, characterized in that: a groove (24) is arranged on the outer surface of the moving part (2), and the coil assembly (23) is embedded in the groove (24).
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