CN103488052B - Exposure device - Google Patents
Exposure device Download PDFInfo
- Publication number
- CN103488052B CN103488052B CN201310193949.3A CN201310193949A CN103488052B CN 103488052 B CN103488052 B CN 103488052B CN 201310193949 A CN201310193949 A CN 201310193949A CN 103488052 B CN103488052 B CN 103488052B
- Authority
- CN
- China
- Prior art keywords
- surface side
- circuit board
- printed circuit
- exposure
- exposure portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2002—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image
- G03F7/201—Exposure; Apparatus therefor with visible light or UV light, through an original having an opaque pattern on a transparent support, e.g. film printing, projection printing; by reflection of visible or UV light from an original such as a printed image characterised by an oblique exposure; characterised by the use of plural sources; characterised by the rotation of the optical device; characterised by a relative movement of the optical device, the light source, the sensitive system or the mask
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
- G03F7/2055—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser for the production of printing plates; Exposure of liquid photohardening compositions
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The present invention provides a kind of exposure device, and it need not carry out pre-calibration after printed circuit board upset.The exposure device has：Carry out a surface side exposure portion of the exposure of a surface side of printed circuit board（1）；Junction（2）；And carry out another surface side exposure portion of the exposure of another surface side（3）, exposure portion（1、3）Possesses suction hand respectively（5）, suction hand（6）, it is being set in exposure portion（1）And exposure portion（3）Between junction（2）, utilize suction hand（5）Carry out printed circuit board（99）Upset, and be directly handover to suction hand（6）.
Description
Technical field
The present invention relates to the exposure device of printed circuit board.
Background technology
For manufacturing in the exposure device that substrate two sides is formed with the printed circuit board of circuit, two exposures are arranged with
Electro-optical device, is provided with the turning device of substrate, to carry out the exposure on substrate two sides between the exposure device.In addition, defeated utilizing
When sending the device to transport printed circuit board from exposure device to turning device and when being overturn using turning device, printing
Circuit board is offset from reference position, therefore in order to carry out the position correction, pre-calibration is provided with the outlet side of turning device
Device.
Therefore, in such exposure device, when causing device complication, elongated production line, cost increase and manufacture
Between increase, productivity ratio is the problems such as reduce.
Therefore, various trials have been carried out all the time, for example, propose following scheme in following patent documents 1：Pass through
Printed circuit board fixation is overturn, so that the pre-calibration for preventing position from offseting and removing the outlet side of turning device is filled
Put.
Patent document 1：Japanese Unexamined Patent Publication 7-251921 publications
But, in above-mentioned conventional structure, though pre-calibration device can be removed, need to be used for from exposure device to turning over
Rotary device transports the carrying devices such as the conveyance conveyer of printed circuit board from turning device to exposure device, therefore exists
The problem of device is overall still complicated.
The content of the invention
It is an object of the invention to solve above-mentioned problem of the prior art.
In order to reach above-mentioned purpose, the exposure device of printed circuit board of the invention is characterised by, the exposure dress
Put and possess：One surface side exposure portion, its surface side to printed circuit board is exposed；Another surface side exposure portion, it is to the print
Another surface side of brush circuit board is exposed；Junction, it is located between the exposure portion and exposure portion, in order that at one
The printed circuit board that exposure portion completes after exposure is exposed and joined in another exposure portion；Adsorb hand in one surface side
Portion, it adsorbs a surface side of the fixed printed circuit board, and is moved between surface side exposure portion and the junction
Send printed circuit board；Another surface side suction hand, it adsorbs another surface side of the fixed printed circuit board, and described
Printed circuit board is transferred between another surface side exposure portion and the junction；And hand rotating mechanism, it is installed on described
At least one party in one surface side suction hand and another surface side suction hand, by rotating the suction hand, to make printing
Circuit board overturns 180 degree, in the junction, suction hand is rotated and turnover stamping brushing using the hand rotating mechanism
Line substrate, so as to carry out the handing-over of printed circuit board between surface side suction hand and another surface side suction hand.
In the present invention, in addition, the exposure device can also be configured to, and be also equipped with：Carry-in/carry-away device, it is located at institute
State the side opposite with junction side of a surface side exposure portion and one opposite with junction side of another surface side exposure portion
Side, for moving into or taking out of printed circuit board from the exposure portion；And the pre-calibration device of printed circuit board, it is located at should
Carrying-in/carrying-out portion, the exposure device can enter to exercise printed circuit board and shift to another surface side exposure from surface side exposure portion
The process in light portion and the process for making printed circuit board shift to a surface side exposure portion from another surface side exposure portion on the contrary.
According to the exposure device of the present invention, the handing-over of printed circuit board is directly carried out using suction hand in junction,
And without using conventional turning device, therefore the skew of the reference position of printed circuit board will not be produced, therefore need not be
The entrance side of the exposure portion in downstream sets pre-calibration portion.In addition, being printed by the hand rotating mechanism located at suction hand
The upset of brush circuit board, therefore also without turning device.Moreover, also having following and other effects：From an exposure portion to another
One exposure portion, the transfer of printed circuit board is carried out all of suction hand, therefore, there is no need to separately set between them
Put carrying device.In addition, with the effect that can flexibly tackle production line, not need improvement cost etc..
Brief description of the drawings
Fig. 1 is the schematic top view for showing an embodiment of the invention.
Fig. 2 is the summary front view for showing an embodiment of the invention.
Fig. 3 is a surface side and the front view of another surface side suction hand 5 of an embodiment of the invention.
Fig. 4 is a surface side and the top view of another surface side suction hand 5 of an embodiment of the invention.
Label declaration
1：Exposure portion；2：Junction；3：Exposure portion；5：Suction hand；6：Suction hand；7：Hand rotating mechanism；10：Remove
Enter moving section；11：Roller conveyor；15：Pedestal；30：Carrying-in/carrying-out portion；31：Roller conveyor；35：Pedestal；50：Walking is led
Rail；51：Walking pedestal；52：Z axis；53：Y-axis；54：Adsorbing mechanism；60：Walking guide rail；61：Walking pedestal；62：Z axis；63：Y
Axle；64：Adsorbing mechanism；70：Rotation motor；99：Printed circuit board.
Embodiment
Below, embodiments of the present invention are illustrated based on accompanying drawing.
Fig. 1 is the top view for being used to manufacture the exposure device of printed circuit board of the present invention, and Fig. 2 is front view.
The exposure device has a surface side exposure portion 1, junction 2 and another surface side of progress for the exposure for carrying out a surface side
Exposure another surface side exposure portion 3, they are linearly configured at substantially equal intervals successively.Exposure portion 1 possesses carrying-in/carrying-out
Portion 10, exposure portion 3 possesses carrying-in/carrying-out portion 30, and carrying-in/carrying-out portion 10 and carrying-in/carrying-out portion 30 move into printed wiring from a upper process
Substrate 99 takes out of printed wiring board 99 to subsequent processing.
That is, the printed circuit board 99 after photoresist processing is implemented from carrying-in/carrying-out portion 10 via exposure in a upper process
Portion 1, junction 2, exposure portion 3, are exposed, and be sent to from carrying-in/carrying-out portion 30 at the table back side of a surface side and another surface side
Subsequent processing.In addition, as described later, opposite streamline can also be tackled, in this case, from carrying-in/carrying-out portion 30 through overexposure
Light portion 3, junction 2, exposure portion 1, and deliver to subsequent processing from carrying-in/carrying-out portion 10.
Exposure portion 1,3 is configured to, and possesses pedestal 15, pedestal 35 respectively, printed circuit board 99 is loaded herein, and utilize
Alignment device（It is not shown）After being aligned, from exposure light source（It is not shown）Exposure light is sent, will be in mask（It is not shown）On
The pattern burn-back of description is on printed circuit board 99.
Junction 2 is set between exposure portion 1 and exposure portion 3, the upset and friendship of printed circuit board 99 are carried out herein
Connect.
In the exposure device, inhaled provided with the surface side for adsorbing a surface side of printed circuit board 99 and being transported
Attached hand 5 and another surface side suction hand 6 for adsorbing another surface side of printed circuit board 99 and being transported.Absorption
Scope of the hand 5 in carrying-in/carrying-out portion 10, exposure portion 1, junction 2 possesses the walking guide rail 50 that extends in X direction, will can print
Brush circuit board 99 is transported from carrying-in/carrying-out portion 10 to exposure portion 1, and is transported from exposure portion 1 to junction 2.Also, adsorb hand
Portion 5 is configured to, and can be transported in reverse direction from junction 2 to exposure portion 1, and transported from exposure portion 1 to carrying-in/carrying-out portion 10.
Scope of the suction hand 6 in carrying-in/carrying-out portion 30, exposure portion 3, junction 2 possesses the walking that extends in X direction and led
Rail 60, can transport printed circuit board 99 from junction 2 to exposure portion 3, and be transported from exposure portion 3 to carrying-in/carrying-out portion
30.Also, suction hand 6 is configured to, it can be transported in reverse direction from carrying-in/carrying-out portion 30 to exposure portion 3, and removed from exposure portion 3
Deliver to junction 2.
In addition, in this embodiment, walking guide rail 60 is configured at the top of walking guide rail 50, and at junction 2
The interval not come in contact when printed circuit board 99 is rotated as described later is vacated.
As shown in figure 3, suction hand 5 possess walking guide rail 50 walk walking pedestal 51 and from the walking pedestal 51 to
The extended Z axis 52 in top.The Z axis 52 be provided with along pedestal 15 width be Y-direction extension Y-axis 53, Y-axis 53 with
The mode that can be lifted along the vertical direction is installed on Z axis 52.Using the structure, Y-axis 53 is configured to rise along above and below Z-direction
Drop and can walk in X direction.
Adsorbing mechanism 54 is installed in Y-axis 53, is configured to using the adsorbing mechanism 54 absorption fixing printing circuit board 99,
And transport printed circuit board 99.
Adsorbing mechanism 54 is formed as the rectangular shape of tabular, as shown in figure 4, place is installed on Y-axis 53 at the center line.
In this embodiment, suction hand 5 possesses hand rotating mechanism 7, and Y-axis 53 is configured to utilize hand rotation
The rotation motor 70 of mechanism 7 is rotated by 360 °.Using the structure, suction hand 5, which is configured to place at the center line, makes printing cloth
Line substrate 99 rotates 180 degree and overturn.
As shown in figure 3, suction hand 6 similarly possesses the walking pedestal 61 walked in walking guide rail 60 and from the walking
The extended Z axis 62 of the upward direction of pedestal 61.In the Z axis 62 provided with the Y-axis that the width along pedestal 35 is Y-direction extension
63, and Y-axis 63 is installed in the way of it can lift along the vertical direction on Z axis 62.Using the structure, Y-axis 63 is configured to
It is enough to lift and walk in X direction along the vertical direction.
Adsorbing mechanism 64 is installed in Y-axis 63, is configured to using the adsorbing mechanism 64 absorption fixing printing circuit board 99,
And transport printed circuit board 99.
Adsorbing mechanism 64 is formed as the rectangular shape of tabular, as shown in figure 4, place is installed on Y-axis 63 at the center line.
Carrying-in/carrying-out portion 10 possesses roller conveyor 11, and roller conveyor 11 is configured to, with the roll-type from a upper process
Conveyer 11 ' continuously, to move into the printed circuit board 99 from a upper process.And it is configured to, is conveyed on the contrary from roll-type
Device 11 takes out of printed circuit board 99 to roller conveyor 11 '.
Carrying-in/carrying-out portion 30 similarly possesses roller conveyor 31, and roller conveyor 31 is configured to, and from next work
The roller conveyor 31 ' of sequence continuously, to take out of printed circuit board 99 to subsequent processing.And it is configured to, on the contrary from roll-type
Printed circuit board 99 is moved into roller conveyor 11 by conveyer 11 '.
Carrying-in/carrying-out portion 10 and carrying-in/carrying-out portion 30 possess the calibration plate as pre-calibration device respectively（It is not shown）, and
Backstop is provided with calibration plate（It is not shown）With the alignment pin that can be moved（It is not shown）.In addition, calibration plate possesses the fixed print of absorption
The adsorbent equipment of brush circuit board 99.
Calibration plate is configured to lifting, and is configured to take positioned at the roller conveyor 11, roller conveyor
The state of 31 downside and the state positioned at the roller conveyor 11, the upside of roller conveyor 31.
And be configured to, when receiving printed circuit board 99 using roller conveyor 11, roller conveyor 31, make calibration
Plate rises and roller conveyor 11 and roller conveyor 31 is accommodated in into lower section, and the row of printed circuit board 99 is limited using backstop
Enter direction position and adjust width position using alignment pin, to carry out pre-calibration., will using adsorbent equipment after pre-calibration
The position that printed circuit board 99 is fixed on after pre-calibration.
Then, action is illustrated.To in fig. 1 and 2, the action of situation about being flowed from left to right to production line is entered
Row explanation.
When printed circuit board 99 is transported to roller conveyor 11 via roller conveyor 11 ' from a upper process,
Here pre-calibration is carried out, and the absorption of printed circuit board 99 is held in calibration plate.
Suction hand 5 is moved to the top of the printed circuit board 99, and adsorbing mechanism 54 declines and adsorbs fixing printing cloth
The upper surface of line substrate 99 and transported to exposure portion 1, printed circuit board 99 is placed on pedestal 15 and decontroled, then
Suction hand 5 retreats to predetermined position.
In exposure portion 1, in addition to carrying out the calibration of printed circuit board 99, also one surface side is exposed.
After the completion of exposure, a surface side of printed circuit board 99 is adsorbed again using adsorbing mechanism 54, and by printed wiring
Substrate 99 is transported to junction 2.The rotation motor 70 of hand rotating mechanism 7 is driven in junction 2, printing is made as illustrated in fig. 3
Circuit board 99 rotates 180 degree, so as to overturn printed circuit board 99.Thus, printed circuit board 99 is unexposed another
Surface side is upward.
Then, as shown in Fig. 2 suction hand 6 is moved to junction 2, its adsorbing mechanism 64 declines and adsorbs fixed through turning over
Then become another surface side of printed circuit board 99 upward.The fixation of mechanism 54, suction hand 6 are desorbed simultaneously
Printed circuit board 99 is transported to exposure portion 3, printed circuit board 99 is placed in pedestal 35, and releases fixation, is then inhaled
Attached hand 6 retreats to predetermined position.Printed circuit board 99 is calibrated on pedestal 35 and its another surface side is exposed.
After the completion of exposure, another surface side of fixing printing circuit board 99 is adsorbed using adsorbing mechanism 64, and transport to removing
Enter moving section 30.Moreover, printed circuit board 99 is transferred to roller conveyor 31 ' from roller conveyor 31, so as to deliver to down
One process.
In the above, the situation of the production line to flowing from left to right is illustrated, but the life flowed from right to left
The action of producing line is also roughly the same, in this case, and pre-calibration is carried out in carrying-in/carrying-out portion 30.In addition, utilizing suction in junction 2
Attached hand 6 transports the printed circuit board 99 after the exposure for completing another surface side, and utilizes the suction for having overturn 180 degree herein
Random structure 54 adsorbs the downside of printed circuit board 99（One surface side）, 180 degree is rotated by adsorbing mechanism 54 and returned as former state
To overturn printed circuit board 99.Due to others action with above-mentioned action on the contrary, so eliminating explanation.
As described above, according to the exposure device of the present invention, printed circuit board 99 is carried out using suction hand 5
Conveyance, upset, and printed circuit board 99 is directly handover to suction hand 6, therefore printed circuit board 99 will not be produced
Position skew.In addition, also utilizing suction hand 6 to carry out printed circuit board in the case of from right side production line to the left
99 conveyance, and suction hand 5 is directly handover to, printed circuit board 99 is overturn using suction hand 5, therefore similarly will not
Produce the position skew of printed circuit board 99.It therefore, there is no need to the pre-calibration device after turning device and upset, dress can be made
Put simplification.In addition, being the upset of the progress by axle of the center line of printed circuit board 99 in the upset that junction 2 is carried out, therefore
The space of of junction 2 itself is also minimum.
Moreover, between exposure portion 1 and exposure portion 3, without using roller conveyor etc., therefore having suppressed ash.
Claims (2)
1. a kind of exposure device, it is the exposure device of printed circuit board,
The exposure device possesses：
One surface side exposure portion, its surface side to printed circuit board is exposed；
Another surface side exposure portion, its another surface side to the printed circuit board is exposed；
Junction, it is located between surface side exposure portion and another surface side exposure portion, in order that in an exposure portion
The printed circuit board after exposure is completed to be exposed and joined in another exposure portion；
One surface side suction hand, it adsorbs a surface side of the fixed printed circuit board, and in surface side exposure portion and
Printed circuit board is transferred between the junction；And
Another surface side suction hand, it adsorbs another surface side of the fixed printed circuit board, and is exposed in another surface side
Printed circuit board is transferred between light portion and the junction, the exposure device is characterised by,
Hand rotating mechanism is also equipped with, it is installed at least one in surface side suction hand and another surface side suction hand
Side, by rotating the suction hand, to make printed circuit board overturn 180 degree,
In the junction, rotate suction hand using the hand rotating mechanism and overturn printed circuit board, so that
The handing-over of printed circuit board is carried out between one surface side suction hand and another surface side suction hand.
2. exposure device according to claim 1, it is characterised in that
The exposure device is also equipped with：
Carry-in/carry-away device, it exposes located at the side opposite with junction side of surface side exposure portion and another surface side
The side opposite with junction side in light portion, for moving into or taking out of printed circuit board from the exposure portion；And
The pre-calibration device of printed circuit board, it is located at the carry-in/carry-away device,
The exposure device can enter to exercise printed circuit board and shift to another surface side exposure portion from surface side exposure portion
Process and the process for making printed circuit board shift to a surface side exposure portion from another surface side exposure portion on the contrary.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012132235A JP5752088B2 (en) | 2012-06-11 | 2012-06-11 | Exposure equipment |
| JP2012-132235 | 2012-06-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103488052A CN103488052A (en) | 2014-01-01 |
| CN103488052B true CN103488052B (en) | 2017-10-24 |
Family
ID=49828380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310193949.3A Active CN103488052B (en) | 2012-06-11 | 2013-05-22 | Exposure device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP5752088B2 (en) |
| KR (1) | KR102058252B1 (en) |
| CN (1) | CN103488052B (en) |
| TW (1) | TWI575331B (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106550610B (en) * | 2015-07-23 | 2019-03-12 | 大和股份有限公司 | The method for shifting and shifting apparatus of printing distributing board to be exposed |
| CN105278259A (en) * | 2015-07-27 | 2016-01-27 | 江苏影速光电技术有限公司 | Stand-alone double-table and multi-station automatic printed circuit board (PCB) exposure equipment and exposure method |
| JP6865609B2 (en) * | 2017-03-26 | 2021-04-28 | 株式会社アドテックエンジニアリング | Exposure device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101470357A (en) * | 2007-12-27 | 2009-07-01 | 株式会社Orc制作所 | Exposure apparatus |
| CN102472978A (en) * | 2009-07-17 | 2012-05-23 | 株式会社尼康 | Pattern formation apparatus, pattern formation method, and device manufacturing method |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07251921A (en) * | 1994-03-11 | 1995-10-03 | Ono Sokki Co Ltd | Reversing device and exposure system |
| JP2002175972A (en) * | 2000-12-08 | 2002-06-21 | Orc Mfg Co Ltd | Automated aligner |
| JP4922071B2 (en) * | 2007-05-28 | 2012-04-25 | 株式会社オーク製作所 | Exposure drawing device |
-
2012
- 2012-06-11 JP JP2012132235A patent/JP5752088B2/en active Active
-
2013
- 2013-02-20 KR KR1020130017929A patent/KR102058252B1/en active IP Right Grant
- 2013-02-21 TW TW102105950A patent/TWI575331B/en active
- 2013-05-22 CN CN201310193949.3A patent/CN103488052B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101470357A (en) * | 2007-12-27 | 2009-07-01 | 株式会社Orc制作所 | Exposure apparatus |
| CN102472978A (en) * | 2009-07-17 | 2012-05-23 | 株式会社尼康 | Pattern formation apparatus, pattern formation method, and device manufacturing method |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201351054A (en) | 2013-12-16 |
| JP5752088B2 (en) | 2015-07-22 |
| KR102058252B1 (en) | 2019-12-20 |
| TWI575331B (en) | 2017-03-21 |
| KR20130138663A (en) | 2013-12-19 |
| JP2013257389A (en) | 2013-12-26 |
| CN103488052A (en) | 2014-01-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| TWI571419B (en) | Vertical transport of the substrate | |
| CN103488052B (en) | Exposure device | |
| KR20100042587A (en) | Substrate transportation and processing apparatus | |
| TW201528349A (en) | Electrode forming device, electrode forming system and electrode forming method | |
| CN103515274A (en) | Solder ball printing and mounting apparatus | |
| JP2016178185A (en) | Substrate processing apparatus, substrate processing method and storage medium | |
| KR101296736B1 (en) | Thin plate conveying apparatus | |
| TWI489581B (en) | Apparatus for delivering semiconductor components to a substrate during semiconductor package manufacturing | |
| JP2007214426A (en) | Surface mounting device | |
| JP4485853B2 (en) | Substrate transfer apparatus and transfer method | |
| JP6166903B2 (en) | Electronic component mounting equipment | |
| JP2010041059A5 (en) | ||
| JP2004094142A (en) | Wide width exposing device | |
| WO2016114178A1 (en) | Exposure device | |
| TWI694315B (en) | Double stage exposure machine | |
| CN219780552U (en) | Dotting device for printed circuit board | |
| JP5523300B2 (en) | Substrate production line and inspection machine data generation method | |
| JP2004307115A (en) | Processing system | |
| JP2010034566A5 (en) | ||
| CN106550610B (en) | The method for shifting and shifting apparatus of printing distributing board to be exposed | |
| JP6773435B2 (en) | Exposure device | |
| TWI651252B (en) | Method and device for spacing apart electronic components arranged in a matrix structure | |
| JP2010132460A (en) | Carrying device of plate-like member and carrying method of plate-like member | |
| JPH09237967A (en) | Conveying method and equipment of board in reflow automatic soldering equipment | |
| JP2011176040A (en) | Exposure system unit and substrate exchange method of the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |