CN103476716B - The manufacture method of glass substrate and glass substrate manufacture device - Google Patents
The manufacture method of glass substrate and glass substrate manufacture device Download PDFInfo
- Publication number
- CN103476716B CN103476716B CN201380000308.XA CN201380000308A CN103476716B CN 103476716 B CN103476716 B CN 103476716B CN 201380000308 A CN201380000308 A CN 201380000308A CN 103476716 B CN103476716 B CN 103476716B
- Authority
- CN
- China
- Prior art keywords
- main body
- defecator
- glass substrate
- described defecator
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/225—Refining
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/167—Means for preventing damage to equipment, e.g. by molten glass, hot gases, batches
- C03B5/1672—Use of materials therefor
- C03B5/1675—Platinum group metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/42—Details of construction of furnace walls, e.g. to prevent corrosion; Use of materials for furnace walls
- C03B5/425—Preventing corrosion or erosion
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B5/00—Melting in furnaces; Furnaces so far as specially adapted for glass manufacture
- C03B5/16—Special features of the melting process; Auxiliary means specially adapted for glass-melting furnaces
- C03B5/42—Details of construction of furnace walls, e.g. to prevent corrosion; Use of materials for furnace walls
- C03B5/43—Use of materials for furnace walls, e.g. fire-bricks
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B7/00—Distributors for the molten glass; Means for taking-off charges of molten glass; Producing the gob, e.g. controlling the gob shape, weight or delivery tact
- C03B7/02—Forehearths, i.e. feeder channels
- C03B7/06—Means for thermal conditioning or controlling the temperature of the glass
- C03B7/07—Electric means
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Glass Melting And Manufacturing (AREA)
- Glass Compositions (AREA)
- Surface Treatment Of Glass (AREA)
Abstract
The manufacture method of glass substrate and glass substrate manufacture device, in the manufacture method of glass substrate, heat melten glass in the inside of the defecator main body being made up of platinum group metal and carry out deaeration.Inside in described defecator main body, it is provided with gas-phase space between interior surface and the liquid level of melten glass of described defecator main body, described defecator main body be provided with defecator shape keep component, described defecator shape keep component for prevent the part contacted with described gas-phase space in described defecator main body because of thermally-induced deformation.Be provided with fire resistance protective layer in the way of covering described defecator main body in the outside of described defecator main body, described defecator shape keeps component to be configured to closely keep the outside of described defecator main body and described fire resistance protective layer.
Description
Technical field
The melten glass that the present invention relates to generate by making molten raw shapes the glass manufacturing glass substrate
The manufacture method of substrate.
Background technology
In general, after being generated melten glass by frit, through making melten glass be configured to the work of glass substrate
Sequence produces glass substrate.In above-mentioned operation, including removing the small gas that melten glass includes as required
The operation (hereinafter, referred to clarification) of bubble.Clarification is carried out as follows: main body same of the defecator of tubular
Time, make the melten glass mixed with the clarifier such as As2O3 by this defecator main body (below, the most simply referred to as main body),
Thus the bubble in melten glass is removed by the redox reaction of clarifier.For more specifically, make thick melting
The temperature of the melten glass solved is further up and makes clarifier play a role and makes bubble float and after deaeration, by reducing
Temperature makes completely deaeration and remaining smaller bubble is melted glass and absorbs.That is, clarification include making bubble float and
The process of deaeration (below, also referred to as deaeration process or bubble removal step) and make vesicle be melted the process of glass absorption
(below, also referred to as absorption processes or absorbs operation).Clarifier was usually As in the past2O3But, from recent years
Carrying capacity of environment from the viewpoint of, gradually begin with SnO2、Fe2O3Deng.
In order to be gone out, by the melten glass volume production of high temperature, the glass substrate that grade is high, it is desirable in view of manufacturing glass substrate
Arbitrary device does not the most have the field trash etc. of the defect causing glass substrate to be mixed into melten glass.Therefore, at glass
The parts contacted with melten glass in the manufacture process of glass substrate, according to the temperature with the melten glass of described component contact
Degree, the quality etc. of required glass substrate, the inwall of described parts needs to be made up of suitable material.Such as,
Know that the material constituting above-mentioned defecator main body generally uses the platinum group metal such as platinum or platinum alloy (patent documentation 1).
Although platinum or the high still fusing point of platinum alloy price are the highest, the most excellent to the corrosion resistance of melten glass.
When bubble removal step, the temperature of hot defecation groove body is different according to the composition difference of the glass substrate that should shape,
It is about 1000 DEG C～1650 DEG C.
When making above-mentioned melten glass by defecator main body, need the interior surface making defecator main body and melted glass
There is between the liquid level of glass the gas-phase space of the deaeration of preset range.
Citation
Patent documentation
Patent documentation 1: Japanese Unexamined Patent Application Publication 2006-522001 publication
Summary of the invention
The problem that invention is to be solved
As mentioned above, although platinum or platinum alloy are higher than other melting point substances, but the temperature of defecator main body exceedes such as
If 1600 DEG C, platinum or platinum alloy can soften, and therefore cause the intensity of defecator main body to reduce.
Here, the part contacted with gas-phase space in defecator main body does not contacts with melten glass, therefore defecator master
The part contacted with gas-phase space in body is higher than the portion temperature contacted with melten glass in defecator main body.That is,
The part contacted with gas-phase space in defecator main body is higher than other regional temperatures of defecator main body, and intensity easily drops
Low, accordingly, there exist the problem being susceptible to deformation.As above-mentioned deformation, such as, can list and send out ageingly
The deformation to gravity direction (sagging) of exhibition.It addition, strain aging as described above ground increases.
Or, in above-mentioned defecator main body contact with gas-phase space partly because main body timeliness change and thin
Change, therefore also exist to gas-phase space direction (gravity direction) sagging such problem.
Consider that the sagging of above-mentioned part of defecator main body exists following dual reason.
1) platinum or the platinum alloy of the part contacted with gas-phase space of defecator main body volatilizees, waving of defecator main body
The lower thickness of the part of development.Therefore, the intensity on the top of defecator main body reduces, the top of defecator main body
Sagging because of deadweight relative to gas-phase space direction.
2) due to above-mentioned 1 volatilization, the lower thickness of part of the volatilization development of defecator main body, such as by with master
The density adding the electric current that thermode is supplied of the heating that body connects increases, as a result of which it is, the volatilization of defecator main body
The temperature of the part of development raises.Therefore, the intensity on the top of defecator main body reduces, the top phase of defecator main body
Sagging because of deadweight for gas-phase space direction.
On the other hand, it is adjusted by the temperature of the melten glass of defecator main body and is reduced to and the viscosity being suitable to shaping
Corresponding temperature, therefore, furthermore, it is understood that the melten glass after by defecator main body guides to forming process
There is not gas-phase space in transfer tube, therefore will not occur above-mentioned by thermally-induced deformation or by timeliness in transfer tube
The problem of the thinning that change causes.
When " deformation ", " sagging " of defecator main body as described above occurs, such as, it is being coated with the cladding of fire resistance
In the case of the defecator of the structure of body, gap can be produced between the outer upper and coating body of defecator.If outward
If the air containing oxygen in portion enters into described gap, outside the part contacted with gas-phase space of main body inner wall
Surface also exists the danger of the volatilization promoting platinum or platinum alloy.
And, also due to " deformation ", " sagging ", there is also defecator main body and produce the interior of be full of cracks or main body
The chance that wall contacts with the melten glass of the internal flow in main body and makes field trash be mixed into increases such problem.
The present invention is in view of the above circumstances, it is provided that the manufacture method of a kind of glass substrate and glass substrate manufacture device, energy
Enough prevent by the deformation of thermally-induced defecator main body.
Or, the present invention provides the manufacture method of a kind of glass substrate and glass substrate to manufacture device, at glass substrate
Manufacture process in hot defecation groove body carry out deaeration process time, even if defecator main body is because of the volatilization of its material
Thinning, the part contacted with gas-phase space of main body also will not be sagging to gas-phase space direction.
For solving the scheme of problem
In order to reach above-mentioned purpose, a mode of the present invention is the manufacture method of glass substrate.This manufacture method has
Clarification operation, in described clarification operation, adds melten glass in the inside of the defecator main body being made up of platinum group metal
Heat also carries out deaeration.In the inside of described defecator main body, at interior surface and the melten glass of described defecator main body
Liquid level between be provided with gas-phase space.It is provided with defecator shape in described defecator main body and keeps component, described defecator
Shape keep component for prevent the part contacted with described gas-phase space in described defecator main body by thermally-induced
Deformation.
In order to reach above-mentioned purpose, the another way of the present invention is the manufacture method of glass substrate, described glass substrate
Manufacture method include bubble removal step, in described bubble removal step, the i.e. defecator main body of defecator of tubulose is being heated
While, make the melten glass mixed with clarifier carry out deaeration process by defecator main body, the following structure of which
Become.
Defecator main body is made up of platinum or platinum alloy, makes the melten glass mixed with clarifier by defecator main body
Time, there is the gas-phase space of deaeration, described gas-phase space is located at interior surface and the melten glass of defecator main body
Between liquid level, being provided with defecator shape at defecator and keep component, described defecator shape keeps component to be used for preventing
The part contacted with gas-phase space in the defecator main body stated is sagging to gas-phase space direction because of thinning.
Preferably, described defecator shape keeps component to be arranged in the length direction of described defecator main body extremely
Include that temperature becomes the highest position less.Such as, described defecator shape keeps component to be located at described defecator main body
Multiple positions of length direction.Now, described defecator shape keeps one of multiple positions set by component to be described clear
Temperature in the length direction of clear groove body becomes the highest position.
And, it is preferred that when the cross sectional shape of described defecator main body is round-shaped, described defecator shape
In the circular arc portion contacted with described gas-phase space of the outer surface that holding component is arranged on described defecator main body
, at least include that temperature becomes the highest part.
And, from the viewpoint of energy efficiency, it is preferred that described defecator main body is heated by electrified regulation.
Preferably, at least appearance of the described defecator main body part contacted with gas-phase space in defecator main body
Face is provided with sputtered films of bismuth.
Now, it is preferred that be provided with resistance in the way of covering described defecator main body in the outside of described defecator main body
Fire protective layer,
Described defecator shape keeps component to be configured to closely to keep the outside of described defecator main body and described resistance to
Fire protective layer.
Now, it is preferred that the temperature of the melten glass in described defecator main body is more than 1600 DEG C.
Further it is preferred that be provided with resistance in the way of covering described defecator main body in the outside of described defecator main body
The layer of fire supporting mass, described defecator shape keeps component to be the parts protruding outside to described defecator main body,
Described parts extend into the end section of described parts and are positioned at the layer of described fire resistance supporting mass.
Or, same it is also preferred that described defecator shape keeps component to be made up of such as lower component: structure, its
It is positioned at the top of described defecator main body, and is fixed relative to the relative position of described defecator main body；And suspention
Parts, it is by the top of the described structure described defecator main body of suspention, and one end of described suspension member is clear with described
The upper side of the outer surface of clear groove body connects, and the other end of described suspension member is connected with described structure.
Further it is preferred that described defecator shape keeps component to be one or more reinforcements, described reinforcement is
The shape corresponding with the cross sectional shape of described defecator main body, and be configured at described defecator main body a part or
It is arranged in the gap of the described defecator main body being divided into some.
Preferably, described clarifier is stannum oxide.
And, described melten glass can also be reached 10 by viscosity2.5Temperature during pool composition structure more than 1300 DEG C
Become.
Further, described glass substrate can also be LTPS(low-temperature poly-silicon) show with glass substrate and/or organic LE
Device glass substrate.Now, the strain point of described glass substrate can also be more than 680 DEG C.And, clarify operation
In the maximum temperature of melten glass temperature be preferably 1640 DEG C～1740 DEG C.
And, the another mode of the present invention is that a kind of glass substrate manufactures device, and described glass substrate manufactures device to be had
Defecator main body, described defecator main body is the defecator of tubulose, and for carrying out in the manufacturing process of glass substrate
The deaeration of melten glass processes, and described glass substrate manufactures device composition as described below.
Described defecator main body is made up of platinum group metal,
The inner space of described defecator main body possesses the gas-phase space of deaeration, and described gas-phase space is present in described clear
It is clear between groove body and the liquid level of described melten glass,
Being also equipped with defecator shape and keep component, described defecator shape keeps component to keep the shape of described defecator main body
Shape, sagging for the described defecator main body preventing the position corresponding with described gas-phase space.
Preferably, manufacture method and the described glass substrate of described glass substrate manufactures the described clarification flute profile in device
Shape holding component is the plate member in the outside being projected into described defecator main body from described defecator main body.
Further it is preferred that described plate member is arranged at spaced intervals at the length direction of described defecator main body.This
Time, it is preferred that the normal to a surface direction of described plate member is the length direction of described defecator main body.Preferably
It is that the thickness of described plate member is at more than 1mm.
Invention effect
The manufacture method of the glass substrate according to the present invention and glass substrate manufacture device, it is possible to prevent defecator main body
By thermally-induced deformation.
Or, manufacture method and glass substrate according to another glass substrate of the present invention manufacture device, defecator main body
Even if thinning also will not be sagging to gas-phase space direction because of timeliness change for the part contacted with gas-phase space in.Cause
This, in bubble removal step, it is possible to avoid field trash to be mixed in melten glass, it is possible to obtain the higher glass substrate of purity.
Accompanying drawing explanation
Fig. 1 is the summary of the glass substrate manufacture device of the manufacture method of the glass substrate for embodiment is described
Structure chart.
Fig. 2 is the synoptic diagram of the basic structure illustrating defecator.
Fig. 3 is to use structure and suspension member as the synoptic diagram of defecator during defecator shape holding component.
Fig. 4 is the figure of the example illustrating the shape of suspension member and configuration.
Fig. 5 is to use ring-type reinforcement as the synoptic diagram of defecator during defecator shape holding component.
Detailed description of the invention
Below, referring to the drawings, the manufacture method of the glass substrate of the present invention and glass substrate are manufactured the enforcement of device
Mode illustrates.
Fig. 1 is the synoptic diagram of the manufacture method of the glass substrate for embodiment is described, it diagrammatically illustrates glass
Basic flow process in substrate manufacture.
Glass substrate manufactures device (below, the most simply referred to as device) 100 to be possessed: fusion tank 10, it is to frit
Heating is to generate melten glass；Defecator 30, it is used for fining molten glass；Forming device (not shown), it is used
Shape in making melten glass；And transfer tube 20,40, it is connected between above-mentioned parts.Transfer tube 20 connects molten
Melt groove 10 and defecator 30, for the melten glass derived from fusion tank 10 is supplied to defecator 30.Transfer tube
40 connect defecator 30 and forming device (not shown), for being supplied to by the melten glass derived from defecator 30
Forming device (not shown).It addition, be configured with between defecator 30 and forming device for stir melten glass with
Make the agitator tank of its homogenization.
The frit devoting fusion tank 10 is suitably allocated according to the composition of the glass substrate that should manufacture.As one
Example, enumerates manufacture and is used as TFT(Thin Film Transistor, thin film transistor (TFT)) type LCD(Liquid Crystal
Display, liquid crystal display) with for the situation of the glass substrate of substrate, represent with quality % and constituted glass substrate
If glass component, the preferably alkali-free glass containing following substances:
SiO2: 50%～70%；
Al2O3: 0～25%；
B2O3: 1%～15%；
MgO:0～10%；
CaO:0～20%；
SrO:0～20%；
BaO:0～10%；
Wherein, R is the total amount in Mg, Ca, Sr and Ba contained by glass substrate to RO:5%～30%().
It addition, have employed alkali-free glass in the present embodiment, but glass substrate can also be the alkali gold containing trace
The trace alkali-containing glass belonged to.Containing in the case of alkali-metal, R '2The aggregate value of O more than 0.10% and 0.5% with
Under, preferably more than 0.20% and less than 0.5% (wherein, R' is at least one selected from Li, Na and K,
And it is the total amount contained by glass substrate).Certainly, R '2The aggregate value of O can also be less than 0.10%.
And, in the case of the manufacture method of the glass substrate of the application present invention, it is also possible to frit is deployed into,
If representing with quality %, glass component is in addition to containing above-mentioned each composition, possibly together with SnO2: 0.01%～
1%(is preferably 0.01%～0.5%), Fe2O3: 0～0.2%(is preferably 0.01%～0.08%),
In view of carrying capacity of environment, it is substantially free of As2O3、Sb2O3And PbO.
The melten glass generated in fusion tank 10 is transported to defecator 30 via transfer tube 20.At defecator 30
In, melten glass is maintained at predetermined temperature (in the case of the glass of above-mentioned composition such as more than 1500 DEG C),
And carry out including the clarification of bubble removal step, described bubble removal step carries out the removing to the bubble contained by melten glass.
Further, in defecator 30, clarified melten glass is transported to forming device via transfer tube 40.Melted
Temperature that glass is cooled in the transfer tube 40 when being carried to forming device from defecator 30 to be suitable to shape (
In the case of the glass of above-mentioned composition, in the case of using overflow downdraw as manufacturing process, for example, 1200 DEG C
Left and right).In forming device, molten glass into glass substrate.
Then, Fig. 2～Fig. 5 explanation is used to include the clarification of bubble removal step.Fig. 2 is illustrate defecator 30 basic
The synoptic diagram of structure, it is by the inside perspective representation of defecator 30.
Defecator 30 is mainly by defecator main body (below, also referred to as main body) 1 and the heating that is connected with main body 1
Electrode 1a and 1b is constituted.Main body 1 is the metal tube of the platinum alloy such as platinum or platinum-rhodium alloy, the general shape using cylindrical shape
Shape.Using the pipeline of main body 1 as stream, melten glass MG is in the internal flow of main body 1.Add thermode 1a and
1b makes electric current from the periphery wall surface current of main body 1 to main body 1, uses the Joule heat produced by the resistance of main body 1 to heat
The periphery wall of main body 1 is promoted to predetermined temperature with the temperature by melten glass MG, and uses and melten glass
The clarifier of MG mixing carries out the deaeration of melten glass MG.
Whole at the melten glass MG of internal flow of main body 1 flow path section without flow through main body 1, generally,
Gas-phase space a present above within main body 1, described gas-phase space a are for making the deaeration by melten glass MG
Process and deaeration bubble discharge out.That is, in the inside of main body 1, at interior surface and the melten glass of main body 1
Gas-phase space a it is provided with between the liquid level of MG.Gas-phase space a can flow in the main body 1 of defecator 30 by adjusting
The liquid level of the melten glass MG crossed is to obtain predetermined scope or to keep the scope fixed.It is for instance possible to use increase
Subtract the suitable method such as amount of the glass material put into fusion tank 10.
And, portion is provided with not shown gas discharge outlet on the body 1, and described gas discharge outlet is used for will be empty from gas phase
Between a discharge bubble in gas componant be discharged in air.
In the manufacture method of glass substrate of the present embodiment or the manufacture device of glass substrate, at defecator
30 are provided with defecator shape keeps component 2, and described defecator shape keeps component 2 to be used for preventing defecator main body 1
In the part contacted with gas-phase space a because of heat and deform.
In the manufacture method of glass substrate related at another embodiment or the manufacture device of glass substrate, at defecator
30 are provided with defecator shape keeps component 2, and described defecator shape keeps component 2 to be used for preventing defecator main body 1
In the part contacted with gas-phase space a sagging to gas-phase space a direction because of thinning.
Fig. 3～Fig. 5 is used to keep component to explain defecator shape further.
Fig. 3 is the synoptic diagram of the example illustrating defecator 30, it is shown that include the sectional view of defecator 30.Such as Fig. 3
Shown in, the defecator 30 of present embodiment possesses suspension member 2B and keeps component 2 as defecator shape.Or,
Alternatively, defecator 30 possesses structure 2A and suspension member 2B as defecator shape holding structure
Part 2.Defecator shape keeps component 2 to refer to suspension member 2B, another embodiment party i.e., in the present embodiment
In formula, defecator shape keeps component 2 to be configured to include structure 2A and suspension member 2B.
Top that structure 2A is in defecator main body 1 and the structure fixed relative to the relative position of main body 1
Body.Here, structure 2A (below, is also referred to as gone bail for by the fire resistance protective layer of the surrounding covering defecator main body 1
Sheath) 2Aa and further fire resistance supporting mass (below, the also referred to as supporting mass) 2Ab covering supporting and protecting layer 2Aa
Constitute.
And, suspension member 2B is the suspension member on the top by structure 2A suspention main body 1.Suspension member
2B communicating structure body 2A(protective layer 2Aa and supporting mass 2Ab), one end 2Ba of suspension member and main body 1 appearance
The upper side in face connects, and other end 2Bb is connected with structure 2A.Specifically, other end 2Bb is with along supporting mass
The state of the upper water level land bending of 2Ab outer surface connects (Fig. 3).
The effect of protective layer 2Aa is to prevent from main body 1 applying uneven power and reliably supporting, such as,
Protective layer 2Aa can use unsetting refractory body to be formed.As it is well known, unsetting refractory body refers to make
Used time is configured to the refractory body of intended shape, with mortar and cement as representative, typically as mixing earthy or powder
The production marketing of powder.As the material of unsetting refractory body, as long as the surrounding the most spy of main body 1 can be protected
Not limiting, the alundum cement of plastic cement, particularly fire resistance and excellent corrosion resistance is suitable.
Owing to main body 1 is formed as the thickness of such as about 1mm mostly, therefore to can reliably tolerate by passing through
It is intrinsic pressure that the melten glass of the inside of main body 1 produces, it is desirable to configuration protection layer 2Aa.And, the thickness of protective layer 2Aa
Degree is preferably at more than 2.0mm, particularly preferably at more than 10.0mm.Protective layer 2Aa is blocked up the most particularly to be asked
Topic, but for the viewpoint of the amount reducing the material used, below 50mm is suitable.
On the other hand, supporting mass 2Ab is arranged in the outermost layer of structure 2A, and its effect is supporting main body 1 and is incubated,
And then protection main body 1 is from the physical property power that may be applied by outside, it is preferred to use the setting refractory body such as refractory brick.Close
In refractory brick, it is in most of the cases that multiple refractory brick (brick being made up of refractory body is individual) are overlapped into preboarding
Shape and constitute, in most of the cases, fixed by being coated with the fire-resistant packing material such as mortar between described refractory brick
Multiple bricks constitute.
So-called refractory body is commonly referred to as being resistant to the nonmetallic materials of high temperature herein, refers to specifically to have
The nonmetallic materials of more than 1000 DEG C, preferably refractoriness more than 1500 DEG C.And, as it is well known, refractory body
Typically it is made up of oxides such as silicon oxide, aluminium oxide, zirconium oxides, according to circumstances different by without detriment to fire-resistant
Under the limit of property, various compositions are mixed into and above-mentioned oxide is constituted.
Suspension member 2B is such as made up of material, i.e. platinum or the platinum alloy identical with main body 1.Suspension member 2B
One end 2Ba be connected with main body 1 by the suitable method such as welding.And, other end 2Bb as described above with
The upper side of supporting mass 2Ab outer surface connects.As it is shown on figure 3, other end 2Bb is along supporting mass 2Ab appearance
The shape of the upper water level land bending in face, but other suitable methods can also be used to connect.
As long as suspension member 2B make main body 1 the part contacted with gas-phase space a will not because of thermal deformation or
There is the intensity that the part contacted with gas-phase space a so that main body 1 will not be sagging to gas-phase space a direction.
For example, it is also possible to the length direction at the pipe of main body 1 configures a suspension member 2B every fixing interval.
Here, the length direction of pipe refers to the melted glass that melten glass Mg flows to transfer tube 40 from transfer tube 20
The flow direction of glass MG.The shape of suspension member 2B shown in Fig. 4 and an example of configuration.This suspension member 2B
Shape can be tabular the most like that, as long as but the shape of defecator 30 can be kept, then
It is not limited to this.Suspension member 2B shown in Fig. 3, Fig. 4 is the parts protruding outside to main body 1, preferably
These parts extend to the end section of parts and are positioned at the layer of supporting mass 2Ab.And, suspension member 2B is configured to
Closely keep outside and the fire resistance protective layer 2Aa of main body 1.Here, closely keep referring to so that main body 1
Outside and fire resistance protective layer 2Aa between do not produce the mode in gap and keep.
In the structure shown in Fig. 4, suspension member 2B is plate member, and this plate member is supported by body 2Ab clamping, logical
Cross the frictional force between this plate member and supporting mass 2Ab or by plate member bolt etc. is fixed on supporting mass
2Ab, it is possible to produce the power of tractive defecator main body 1 to the direction contrary with the power of gravity direction such that it is able to suppression
The deformation of defecator 30.So, it is positioned at supporting mass 2Ab owing to parts extend to the end section of suspension member 2B
Layer, therefore, the temperature of the end section of suspension member 2B is lower than the temperature of main body 1.Therefore, suspension member 2B
The softening caused by high temperature can be stoped, it is possible to effectively keep the shape of defecator 30.
Preferably, the position that the plate member at least temperature during i.e. suspension member 2B is arranged on main body 1 is the highest.Such as,
Suspension member 2B is located at multiple positions of the length direction of main body 1.Now, the multiple positions set by suspension member 2B
One of put the position that the temperature in the length direction being main body 1 is the highest.
This is because, the platinum of composition main body 1 or the temperature of platinum alloy are the highest, more soften and cause intensity to reduce, from
And easily produce the thermal deformation caused by deadweight.But, such as in the manufacture of glass substrate for display, due to master
The temperature of body 1 in almost all of part all more than 1600 DEG C, thus while according to position different distortion amount and change
Shape speed is different, but all of part all can occur ageing deformation.Therefore, as shown in Figure 4, preferred plate member
I.e. suspension member 2B is provided spaced apart at the length direction of main body 1.
It addition, in glass substrate for display, particularly at LTPS(low-temperature poly-silicon) glass substrate for display
And/or in the case of organic el display glass substrate, compared with other glass substrate for display, gluing of glass
Degree (high temperature viscometrics) is high, when therefore manufacturing with other glass substrate for display compared with, melten glass temperature during clarification
Degree needs reach a high temperature.Therefore, the intensity that the softening by platinum or platinum alloy of main body 1 causes reduces and becomes notable, holds
Easily there is the deformation of main body 1.That is, at LTPS(low-temperature poly-silicon) manufacture of glass substrate for display and/or organic
In the manufacture of EL glass substrate for display, the defecator shape of the present invention keeps the defecator that prevents of component 2 to deform
Effectiveness comparison notable.It addition, as LTPS(low-temperature poly-silicon) manufacture of glass substrate for display and/or organic
EL glass substrate for display, it is preferred to use strain point glass substrate more than 680 DEG C, more preferably uses strain
Glass substrate o'clock more than 700 DEG C.It is additionally, since that to there is strain point more Gao Ze the highest in mutually synthermal viscosity
Trend, therefore, the glass that strain point is high, in order to carry out deaeration more need improve defecator 30 temperature,
Accordingly, there exist the defecator shape of the present invention keep component 2 prevent that defecator from deforming better significantly become
Gesture.
The setting of above-mentioned suspension member 2B is preferably spaced below 300mm and more than 1mm.More preferably shape
Become the interval of below 150mm, it is further preferred that be formed as the interval of below 50mm.Make interval extreme
In the case of ground constriction, i.e. allow to be reliably prevented by thermally-induced deformation or sagging, owing to there will be application property
With the problem of cost, therefore it is set as optimal interval in view of the length etc. of pipe.Especially, suspension member 2B
The length direction that normal direction is main body 1, this is preferred at the aspect of the shape effectively keeping defecator 30.
And, the thickness of plate member is more than 1mm, and this is preferred at the aspect of the shape effectively keeping defecator 30.
As an example, the thickness of suspension member 2B is 1mm, and width is about 10mm.
Further it is preferred that in the case of section view observes main body 1, suspension member 2B is connected to and gas-phase space
The region at least including central part of the circular arc portion of a contact.In other words, it is preferred that suspension member 2B connects
The region including the part that temperature is the highest in the circular arc portion contacted with gas-phase space a.And, observe in section view
In the case of main body 1, suspension member 2B is connected to the 0.5%～100% of the circular arc portion contacted with gas-phase space a
Region, be preferably attached to the circular arc portion contacted with gas-phase space a 15%～100% region, more preferably connect
Be connected to the circular arc portion contacted with gas-phase space a 25%～100% region, be particularly preferably connected to and gas phase be empty
Between a contact circular arc portion 35%～100% region.Alternatively, it is also possible to arrange two or more in circular arc direction
Suspension member 2B.
Component 2 is kept, in the present embodiment, it is possible to reduce defecator by arranging defecator shape as above
The deformation that main body 1 causes due to thermal conductance.Thereby, it is possible to the portion contacted with gas-phase space that suppression is in defecator main body 1
The gap that air can flow into is produced, therefore, in defecator main body 1 between the outer surface and the fire resistance protective layer that divide
The outer surface of the part contacted with gas-phase space is prevented from the volatilization of platinum or platinum alloy and is promoted.Further, due to energy
Enough volatile quantities of the outer surface of the part contacted with gas-phase space in minimizing defecator main body 1, therefore, it is possible to alleviate institute
State the thinning of part.Thereby, it is possible to suppress the outer surface of the part contacted with gas-phase space in defecator main body 1
The situation that other regions of current density ratio are high and cause temperature unexpectedly to rise, also therefore is able to prevent defecator main body 1
Breakage and the problem that increases further of the volatile quantity of defecator main body 1.
Or, in another embodiment, even if the part that main body 1 contacts with gas-phase space a is because of the volatilization of material
Thinning, the part contacted with gas-phase space of main body also will not be sagging to gas-phase space direction.Therefore, in main body inner wall
The part contacted with gas-phase space at, do not worry that the volatilization that may create the problem that platinum or platinum alloy is promoted,
Or due to sagging and cause defecator main body produce be full of cracks, or the melten glass flow through in the inside of main body because of with
The contact internal walls of main body and be mixed into the chance of field trash and increase such that it is able to obtain the higher glass substrate of purity.
Particularly the temperature of the melten glass in main body 1 is made to reach more than 1600 DEG C in order to carry out deaeration process
In the case of, main body 1 is heated to higher than the temperature of melten glass.Therefore, even the heat-resisting quantity that used of main body 1
High platinum or platinum alloy, also can produce volatilization and intensity reduces.Therefore, by using Fig. 3 or as shown in Figure 4
Suspension member 2B keeps component 2 as defecator shape, it is possible to effectively keep the shape of defecator 30.
It follows that use Fig. 5 to possess reinforcement 2C to defecator 30 keep the example of component 2 as defecator shape
Son illustrates.
Herein, the reinforcement 2C being made up of the material i.e. platinum identical with main body 1 or platinum alloy is formed as being divided into
The gap of the main body 1 of some is configured with multiple.Reinforcement 2C is and the cross sectional shape pair of defecator main body 1
The shape answered, is formed as ring-type in the way of diameter is slightly thick with a diameter of equal extent of main body 1 or thickness, and leads to
Cross welding and link together ((a) and (b) of Fig. 5) with main body 1.
By such reinforcement 2C is configured at main body 1 at regular intervals, the skeleton of reinforcement 2C such as main body 1
Act as the shape for keeping main body 1 like that.
Identically with suspension member 2B, above-mentioned it is preferably spaced below 300mm and more than 1mm.More preferably
The interval of below 150mm.And, as an example, the shape of reinforcement 2C be the width of ring be 1mm, thickness
Hollow disc shape for about 10mm.
In the case of using reinforcement 2C, also identical with the situation using structure 2A and suspension member 2B, energy
The part contacted with gas-phase space a enough preventing main body 1 is sagging to the direction of gas-phase space a.
Keep component as defecator shape, it is also possible to be formed as above-mentioned structure 2A, suspension member 2B and
The form that reinforcement 2C combines.In this case, it is possible to expect more effectively to prevent defecator 30
Main body 1 the part contacted with gas-phase space deformation or sagging.
In the case of combining formation as described above, it is preferred that for arranging position and the use of suspension member 2B
The most overlapping in the position arranging reinforcement 2C, it is considered to the four corner at defecator 30 keeps its shape.
And, form sputtered films of bismuth by the outer surface in defecator main body 1, it is possible to reduce the appearance of defecator main body 1
Volatilization at face.Therefore, from the viewpoint of the deformation preventing defecator and minimizing volatilization, preferably by defecator shape
The spraying plating keeping component 2 and the outer surface of defecator main body 1 combines use.Preferably, sputtered films of bismuth is arranged at
The region that at least temperature of defecator main body 1 is the highest.It is further preferred, that sputtered films of bismuth is configured to such as to contain fire-resistant
Property oxide.As fire resistance oxide, zirconium oxide, zirconium oxide and Mg and/or Y compound can be listed.
Method of spray plating is not particularly limited, and can use plasma spray coating etc..
Additionally, it is known that the temperature effectively playing clarification of glass substrate is not along with the clarifier that used is different
With.Such as, As2O3The ability removing bubble of (arsenious acid) is excellent, clarifying temp (temperature of melten glass)
Also the scope of about 1500 DEG C.But, owing to the carrying capacity of environment of arsenious acid is high, therefore, as it has been described above,
In recent years, SnO was gradually adopted2(stannum oxide) etc. are as the highest clarifier of carrying capacity of environment.But, due to oxidation
The ability that stannum discharges bubble compared with arsenious acid in bubble removal step is more weak, it is therefore desirable to the viscosity reducing glass is de-to improve
Bubble effect, accordingly, it would be desirable to clarify with high-temperature.Such as, in the case of using stannum oxide as clarifier,
The temperature of the melten glass in main body 1 is preferably warming up to more than 1600 DEG C, for example, 1600 DEG C～1700 DEG C, preferably
It it is 1630 DEG C～1710 DEG C, near more preferably 1630 DEG C～1720 DEG C.That is, it needs to by the temperature of defecator 30
Rise to constitute near the platinum of main body 1 or the heat resisting temperature of platinum alloy of defecator 30.
Especially, owing to constituting LTPS glass substrate for display and/or the glass of organic el display glass substrate
The viscosity of glass is high, therefore, in order to be sufficiently carried out clarification, needs to make the highest of melten glass temperature in clarification operation
Temperature reaches 1640 DEG C～1740 DEG C.
And, before being supplied to defecator 30, it is heated to melten glass steeping the viscosity easily floated, is preferably
120poise(moors)～400 pools, in order in defecator 30, promote the discharge reaction of the oxygen of clarifier.Such as,
Total amount containing alkali-free glass and alkali metal oxide only trace alkali-containing glass (high temperature viscometrics glass below 2 mass %
Glass) reach 102.5Temperature during pool is more than 1300 DEG C, preferably more than 1400 DEG C, more preferably more than 1500 DEG C,
Therefore, the temperature of defecator main body 1 is warming up to more than 1700 DEG C, is preferably warming up to more than 1710 DEG C, more preferably rises
Near warm to 1720 DEG C.
That is, it needs to the temperature of defecator 30 to be risen to the platinum of the main body 1 of composition defecator 30 or the resistance to of platinum alloy
Near hot temperature.
Therefore, the present invention is especially suitable for the manufacture of the glass substrate used by stannum oxide as clarifier.And, this
Invention is particularly well-suited to the situation using the glass material that high temperature viscometrics is high to manufacture glass substrate.Specifically, the suitableeest
For melten glass by reaching 102.5The situation that the temperature (melt temperature) of pool glass material more than 1300 DEG C is constituted.
It is further preferred that and then needed the melt temperature of more than 1500 DEG C by above-mentioned melt temperature more than 1400 DEG C
The situation that glass material is constituted.
When implementing the manufacture method of glass substrate of the present invention, it is clear that be not limited to the manufacture method of embodiment.
Such as, for by the frit beyond the exemplified frit of embodiment, used as long as use in the past
General raw material, it becomes possible to the manufacture method of the glass substrate of the application present invention.
And, the shape of the structure 2A of embodiment it is not limited to as defecator holding component, such as structure,
As long as at the top of defecator main body 1 and the structure fixed relative to the relative position of main body 1, then can also
It it is the structure of other shapes.And, for suspension member 2B and the shape of reinforcement 2C, it is also not necessarily limited to implement
The shape of mode, it would however also be possible to employ other suitable shapes.And, as long as possessing protective layer 2Aa and supporting mass 2Ab
In at least any one.Further, the interval of configuration suspension member 2B and reinforcement 2C can also be according to institute
The size and shape of the defecator used is set as suitable configuration space.
It addition, in this manual, " platinum group metal " refers to the golden race being made up of platinum family element, as not only include by
The metal that single platinum group metal is constituted also includes that the term of the alloy of platinum family element uses.That is, " platinum group metal " include
Platinum and platinum alloy.Herein, platinum family element refer to platinum (Pt), palladium (Pd), rhodium (Rh), ruthenium (Ru), osmium (Os),
These six kinds of elements of iridium (Ir).Although platinum group metal price is high but its fusing point is high, to the corrosion resistance of melten glass also
Excellent.
And, as it can be seen, defecator is preferably formed into cylindrical shape, as long as but guarantee melten glass MG
If being accommodated in its internal space, then being not limiting as its shape, such as its profile can also be cuboid etc..
The present invention is applicable to make the manufacture of the glass substrate of forming of glass with overflow downdraw.Overflow downdraw is, makes to melt
Melt glass to flow down along the two sides of wedge-like formed body, by being configured to plate at interflow, the bottom of described wedge-like formed body
Shape glass, by the plate glass annealing shaped, cuts off.Overflow downdraw by make the glass of melting not with any thing
Body the most vertically stretches and cools down it is thus possible to realize smooth surface.Then, cut-off plate glass
Cut into predetermined size according to the demand of client further, carry out end surface grinding, cleaning etc., then shipment.
It is 0.5～0.7mm, a size of 300 × 400mm～2850 × 3050mm that the present invention is such as applicable to thickness
The manufacture of FPD glass substrate.
It addition, liquid crystal indicator glass substrate etc. form semiconductor element on its surface, therefore preferably it is not the most
Alkali metal-containing component, even if or containing the alkali metal component of trace being also the degree not interfering with semiconductor element.
And, for liquid crystal indicator glass substrate etc., owing to display defect can be caused if glass substrate exists bubble,
Reduce bubble the most as far as possible.Due to these situations, in liquid crystal indicator glass substrate etc., as described above
Selecting glass composition, the temperature of melten glass, clarifier etc., therefore, the present invention is applicable to liquid crystal indicator glass
The manufacture of glass substrate etc..
Additionally, in the scope of the purport without departing from invention, it is also possible to it is changed to various other suitable modes.
Label declaration
1: main body (defecator main body)；
2: defecator shape keeps component；
2A: structure；
2Aa: protective layer (fire resistance protective layer)；
2Ab: supporting mass (fire resistance supporting mass)；
2B: suspension member；
2Ba: one end；
2Bb: the other end；
2C: reinforcement (defecator shape keeps component)；
10: fusion tank；
20,40: transfer tube；
30: defecator；
100: glass substrate manufactures device；
MG: melten glass；
A: gas-phase space.
Claims (7)
1. the manufacture method of a glass substrate, it is characterised in that
The manufacture method of described glass substrate includes bubble removal step, in described bubble removal step, at the defecator to tubulose
I.e. while the heating of defecator main body, the melten glass mixed with clarifier is made to be taken off by described defecator main body
Bubble processes,
Described defecator main body is made up of platinum group metal,
When making the melten glass mixed with clarifier by described defecator main body, described defecator main body has deaeration
Gas-phase space, described gas-phase space be located at the interior surface of described defecator main body and melten glass liquid level it
Between,
Being provided with defecator shape at described defecator and keep component, described defecator shape keeps component to suspend described clarification in midair
The top of groove body, for preventing the part contacted with described gas-phase space in described defecator main body thin because of volatilization
Change causes sagging to described gas-phase space direction because of deadweight,
Described defecator shape keeps component to have suspension member, and this suspension member suspends the upper of described defecator main body in midair
Portion, one end of described suspension member is connected with the upper side of the outer surface of described defecator main body, described suspension member
The other end is connected with the structure on the top being positioned at described defecator main body.
The manufacture method of glass substrate the most according to claim 1, wherein,
In the way of covering described defecator main body, it is provided with fire resistance protective layer in the outside of described defecator main body,
Described defecator shape keeps component to be configured to closely to keep the outside of described defecator main body and described resistance to
Fire protective layer.
The manufacture method of glass substrate the most according to claim 1, wherein,
The maximum temperature of the melten glass in described defecator main body is more than 1600 DEG C.
The manufacture method of glass substrate the most according to claim 1, wherein,
In the way of covering described defecator main body, the layer of fire resistance supporting mass it is provided with in the outside of described defecator main body,
Described defecator shape keeps component to be the parts protruding outside to described defecator main body, and described parts extend
The end section becoming described parts is positioned at the layer of described fire resistance supporting mass.
The manufacture method of glass substrate the most according to claim 1, wherein,
Described structure is fixed relative to the relative position of described defecator main body.
The manufacture method of glass substrate the most according to claim 1, wherein,
Described melten glass contains stannum oxide.
7. glass substrate manufactures a device, and described glass substrate manufactures device and has defecator main body, described clarification
Groove body is the defecator of tubulose, and for melten glass being carried out deaeration process in the manufacturing process of glass substrate,
It is characterized in that,
Described defecator main body is made up of platinum group metal,
The inner space of described defecator main body possesses the gas-phase space of deaeration, and described gas-phase space is present in described clear
It is clear between groove body and the liquid level of described melten glass,
Described defecator main body is also equipped with defecator shape and keeps component, and described defecator shape keeps component suspention described
The top of defecator main body and keep the shape of described defecator main body, for preventing the position corresponding with described gas-phase space
Because of volatilization, thinning causes sagging to described gas-phase space direction because of deadweight the described defecator main body put,
Described defecator shape keeps component to have suspension member, and this suspension member suspends the upper of described defecator main body in midair
Portion, one end of described suspension member is connected with the upper side of the outer surface of described defecator main body, described suspension member
The other end is connected with the structure on the top being positioned at described defecator main body.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012086909 | 2012-04-05 | ||
| JP2012-086909 | 2012-04-05 | ||
| PCT/JP2013/058668 WO2013150912A1 (en) | 2012-04-05 | 2013-03-26 | Method for producing glass substrate and device for producing glass substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103476716A CN103476716A (en) | 2013-12-25 |
| CN103476716B true CN103476716B (en) | 2016-11-02 |
Family
ID=49300405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380000308.XA Active CN103476716B (en) | 2012-04-05 | 2013-03-26 | The manufacture method of glass substrate and glass substrate manufacture device |
Country Status (5)
| Country | Link |
|---|---|
| JP (2) | JP5731639B2 (en) |
| KR (1) | KR101493179B1 (en) |
| CN (1) | CN103476716B (en) |
| TW (1) | TWI491575B (en) |
| WO (1) | WO2013150912A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5731639B2 (en) * | 2012-04-05 | 2015-06-10 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
| CN203498243U (en) * | 2012-09-27 | 2014-03-26 | 安瀚视特控股株式会社 | Glass substrate making device |
| JP6281747B2 (en) * | 2014-03-13 | 2018-02-21 | 日本電気硝子株式会社 | Glass article manufacturing apparatus and manufacturing method thereof |
| JP6925583B2 (en) * | 2017-12-20 | 2021-08-25 | 日本電気硝子株式会社 | Manufacturing method and manufacturing equipment for glass articles |
| JP7465864B2 (en) | 2018-09-27 | 2024-04-11 | コーニング インコーポレイテッド | Modular molten glass supply system |
| EP3856690A1 (en) * | 2018-09-27 | 2021-08-04 | Corning Incorporated | Glass forming apparatuses comprising modular glass fining systems |
| JP7382021B2 (en) * | 2019-10-18 | 2023-11-16 | 日本電気硝子株式会社 | Glass article manufacturing equipment and its manufacturing method |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1526035A (en) * | 2000-11-30 | 2004-09-01 | Ф�ز������쳧 | Coated metal element used for producing glass |
| JP2007022862A (en) * | 2005-07-19 | 2007-02-01 | Asahi Glass Co Ltd | Method for energization heating of vacuum degassing tank in vacuum degassing device, method for energization heating of vacuum degassing device, and vacuum degassing device |
| JP2010047462A (en) * | 2009-04-15 | 2010-03-04 | Furuya Kinzoku:Kk | Heating mechanism of molten glass sending part |
| CN101932530A (en) * | 2007-11-08 | 2010-12-29 | 康宁股份有限公司 | Process and system for fining glass |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5018476B2 (en) * | 2005-06-06 | 2012-09-05 | 旭硝子株式会社 | GLASS MANUFACTURING APPARATUS, ITS COMPONENTS, AND METHOD FOR ELECTRIC HEATING THE COMPONENTS |
| JP2008019110A (en) | 2006-07-11 | 2008-01-31 | Asahi Glass Co Ltd | Material for glass flow passage, apparatus for manufacturing glass and method for manufacturing glass articles |
| TW201204664A (en) * | 2010-04-23 | 2012-02-01 | Asahi Glass Co Ltd | Vacuum degassing method for molten glass |
| KR20130084215A (en) * | 2010-05-19 | 2013-07-24 | 아사히 가라스 가부시키가이샤 | Pressure reducing and defoaming device for molten glass, molten glass manufacturing method, and glass product manufacturing method |
| TW201210967A (en) * | 2010-06-29 | 2012-03-16 | Avanstrate Inc | Production device of glass panel and production method using the same |
| JP5731639B2 (en) * | 2012-04-05 | 2015-06-10 | ＡｖａｎＳｔｒａｔｅ株式会社 | Glass substrate manufacturing method and glass substrate manufacturing apparatus |
-
2013
- 2013-03-26 JP JP2013514261A patent/JP5731639B2/en active Active
- 2013-03-26 WO PCT/JP2013/058668 patent/WO2013150912A1/en active Application Filing
- 2013-03-26 KR KR1020137009762A patent/KR101493179B1/en active IP Right Grant
- 2013-03-26 CN CN201380000308.XA patent/CN103476716B/en active Active
- 2013-03-29 TW TW102111586A patent/TWI491575B/en active
-
2015
- 2015-04-09 JP JP2015080342A patent/JP5956009B2/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1526035A (en) * | 2000-11-30 | 2004-09-01 | Ф�ز������쳧 | Coated metal element used for producing glass |
| JP2007022862A (en) * | 2005-07-19 | 2007-02-01 | Asahi Glass Co Ltd | Method for energization heating of vacuum degassing tank in vacuum degassing device, method for energization heating of vacuum degassing device, and vacuum degassing device |
| CN101932530A (en) * | 2007-11-08 | 2010-12-29 | 康宁股份有限公司 | Process and system for fining glass |
| JP2010047462A (en) * | 2009-04-15 | 2010-03-04 | Furuya Kinzoku:Kk | Heating mechanism of molten glass sending part |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103476716A (en) | 2013-12-25 |
| JP5956009B2 (en) | 2016-07-20 |
| KR101493179B1 (en) | 2015-02-12 |
| TW201402489A (en) | 2014-01-16 |
| JP2015147730A (en) | 2015-08-20 |
| JP5731639B2 (en) | 2015-06-10 |
| WO2013150912A1 (en) | 2013-10-10 |
| KR20140000226A (en) | 2014-01-02 |
| JPWO2013150912A1 (en) | 2015-12-17 |
| TWI491575B (en) | 2015-07-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103476716B (en) | The manufacture method of glass substrate and glass substrate manufacture device | |
| CN203173962U (en) | Manufacturing device for glass baseplate | |
| KR101488076B1 (en) | Method and apparatus for making glass sheet | |
| CN102892719B (en) | The manufacture method of sheet glass | |
| JP7153241B2 (en) | Method for manufacturing alkali-free glass substrate and alkali-free glass substrate | |
| JP5616450B2 (en) | Manufacturing method of glass plate | |
| KR100929099B1 (en) | Glass manufacturing method using outgassed frit | |
| KR102169675B1 (en) | High volume production of display quality glass sheets having low zirconia levels | |
| WO2012091133A1 (en) | Clarification tank, glass melting furnace, molten glass production method, glassware production method and glassware production device | |
| CN105377774B (en) | The manufacturing method and glass substrate manufacturing device of glass substrate | |
| KR102483260B1 (en) | Manufacturing method of alkali-free glass substrate | |
| JP7171600B2 (en) | Method for reducing the lifetime of bubbles on the surface of a glass melt | |
| KR101627484B1 (en) | Method for manufacturing glass substrate and apparatus for manufacturing glass substrate | |
| CN203498245U (en) | Glass making device | |
| CN203333457U (en) | Settling tank for manufacturing glass plate, device made of platinum or platinum alloy, and glass plate manufacturing device | |
| JP6665435B2 (en) | Method for manufacturing glass articles | |
| WO2014050825A1 (en) | Method for production of glass substrate | |
| JP4720777B2 (en) | Glass manufacturing apparatus and manufacturing method | |
| JP7421161B2 (en) | Method for manufacturing alkali-free glass substrate and alkali-free glass substrate | |
| JP2019077584A (en) | Glass melting furnace, and production method of glass article | |
| WO2007020887A1 (en) | Heat resistant material for glass melting, glass article producing apparatus, and process for producing glass article | |
| JP2014005180A (en) | Method of inserting electrode, method of manufacturing glass product, method of manufacturing glass melting tank, and glass melting tank | |
| JP2007077004A (en) | Heat resistant material for glass melting, glass article producing apparatus and process for producing glass article | |
| WO2012091130A1 (en) | Clarification tank, glass melting furnace, molten glass production method, glassware production method and glassware production device | |
| JP2021024756A (en) | Method for manufacturing glass article |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |