CN103465258A - Three-degree-of-freedom precision adjustment device based on flexible hinges - Google Patents
Three-degree-of-freedom precision adjustment device based on flexible hinges Download PDFInfo
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- CN103465258A CN103465258A CN2013104161864A CN201310416186A CN103465258A CN 103465258 A CN103465258 A CN 103465258A CN 2013104161864 A CN2013104161864 A CN 2013104161864A CN 201310416186 A CN201310416186 A CN 201310416186A CN 103465258 A CN103465258 A CN 103465258A
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Abstract
The invention discloses a three-degree-of-freedom precision adjustment device based on flexible hinges. The device is mounted between a main frame of an immersed photoetching machine and an immersion unit, and three sets of identical motion side chains are connected in parallel between a mounting substrate and a motion platform. Each set of motion side chains comprises a vertical linear motion module, a connecting bar fixing block, a fastening bolt and a connecting bolt. The vertical linear motion module comprises a linear motion pair, a joint bearing, a compression spring, a joint bearing end cap, an end cap bolt and a connecting bar. One set of flexible hinges connected in parallel is respectively arranged at a position of the motion platform corresponding to each set of motion side chains. By the aid of the precision adjustment device, mounting and fixing and space position adjustment of the immersion unit of the immersed photoetching machine are achieved, and submicron level positioning of the immersion unit is achieved. The device is free of motion clearance, high in rigidity, large in stroke, and can be used for three-degree-of-freedom precision adjustment on other occasions besides the immersed photoetching machine with a modular design.
Description
Technical field
The present invention relates to the three-freedom degree precision adjusting device, especially relate to a kind of three-freedom degree precision adjusting device based on flexible hinge.
Background technology
In immersed photoetching machine, require in the end to fill between a slice projection objective and silicon chip one deck immersion flow field.Immersion flow field is produced by the submergence unit, and in order to prevent that immersion flow field from leaking, and requires gap between submergence unit and silicon chip in 1mm, there is to strict depth of parallelism requirement in this gap simultaneously; And can a series of operation be arranged to the submergence unit in the immersed photoetching machine course of work, after these operations, still require the immersion flow field gap between submergence unit and silicon chip to meet the demands.This just need to have a kind of accurate pose adjusting device to regulate the pose of submergence unit to meet the requirement of immersed photoetching machine.
In addition, litho machine is the integrated equipment of a kind of mechanism height, in limited space, complicated optical system and corresponding match mechanism to be grouped together, so its all parts is had to strict installing space restriction, therefore for the pose governor motion of submergence unit, the requirements of installation space harshness.
Pose governor motion commonly used has much now, by frame for movement, divides substantially and can be divided into tandem, parallel and hybrid three classes.Parallel pose governor motion than other two kinds of governor motions have that rigidity is high, working space is little, load capacity is strong, inertia is little, Dynamics, low cost and other advantages.But traditional pose adjustment structure employing conventional motion pair in parallel forms the side chain of parallel institution, and such governor motion has three shortcomings, that is: the secondary institute of conventional motion takes up space greatly, and there is gap in kinematic pair, and in the micrometric displacement scope, there is creeping phenomenon in mechanism.The pose governor motion in parallel that adopts flexible hinge to realize is also arranged, but its wall scroll movement branched chain adopts single flexible hinge side chain, system stiffness is little like this, carries little.
Summary of the invention
In order to realize the fine adjustment of submergence unit pose in immersed photoetching machine, the object of the present invention is to provide a kind of three-freedom degree precision adjusting device based on flexible hinge, there is the advantages such as installing space is little, rigidity is high, gapless, realize the fine adjustment of motion platform [TZ, RX, RY] Three Degree Of Freedom, free degree TZ means along the translation of installation base plate centre bore axis Z-direction, free degree RX and RY mean respectively the rotation around X and Y-axis, and wherein X-axis is perpendicular to Z axis, and Y-axis is perpendicular to X-axis and Z axis.
The technical solution used in the present invention is as follows:
Three-freedom degree precision adjusting device based on flexible hinge of the present invention is arranged between immersed photoetching machine main frame and submergence unit, three-freedom degree precision adjusting device based on flexible hinge is installed on the immersed photoetching machine main frame by the installation base plate installing hole, and the submergence unit is installed on the motion platform lower surface by submergence cellular installation hole; Between installation base plate and motion platform, by three groups of identical movement branched chain of structure, with parallel way, be connected; Three groups of movement branched chain circle distribution centered by the installation base plate centre bore, be embedded in the installation base plate outside.
Described three groups of movement branched chain that structure is identical: include vertical Linear Moving Module, connecting rod fixed block, clamping screw and two connecting bolts; Wherein vertically Linear Moving Module comprises oscillating bearing, Compress Spring, oscillating bearing end cap, bolt of cover and the connecting rod that the rectilinear motion consisted of the secondary fixed part of rectilinear motion and rectilinear motion secondary motion parts is secondary, consist of oscillating bearing outer ring and oscillating bearing inner ring; Vertically Linear Moving Module construction opening circle distribution is on installation base plate, and the secondary fixed part of rectilinear motion is arranged on the bottom surface of vertical Linear Moving Module construction opening; There is bearing mounting hole lower end at rectilinear motion secondary motion parts lateral surface, and oscillating bearing is installed in bearing mounting hole, oscillating bearing end cap axial compression oscillating bearing outer ring; Connecting rod becomes bolt shape, the one end is screw thread, the other end is the major diameter step, the connecting rod end of thread is through the oscillating bearing inner ring, Compress Spring one side pressure is on the connecting-rod big end end face, the Compress Spring other end is pressed on oscillating bearing end cap inner face, and the oscillating bearing end cap is connected on rectilinear motion secondary motion parts by bolt of cover; In connecting rod end of thread precession connecting rod fixed block screwed hole, by clamping screw, the connecting rod end of thread is locked in connecting rod fixed block screwed hole, the connecting rod fixed block is installed on motion platform flexible hinge end face by two connecting bolts; There is respectively one group of identical parallel flexible hinge position corresponding with every group of vertical Linear Moving Module on motion platform, every group of parallel flexible hinge composed in parallel by the secondary flexible hinge side chain of main motion and redundant parallel flexible hinge side chain, the parallel flexible hinge outside is the flexible hinge end face, the secondary flexible hinge side chain of main motion is comprised of single hinge joint, and redundant parallel flexible hinge side chain is comprised of three hinge joints that become the U font to arrange.
In the identical movement branched chain of described three groups of structures, every group of movement branched chain cathetus kinematic pair moving component moves along installation base plate centre bore axis direction under the external world drives; Compress Spring makes oscillating bearing to motion platform centre bore direction unbalance loading; The freedom of motion of parallel flexible hinge is to rotate along the hinge joint in the secondary flexible hinge side chain of its main motion; In range of movement, every group of movement branched chain can independently drive the motion platform motion.
The beneficial effect that the present invention has is:
1. in the present invention, three groups of movement branched chain move up and down, the corresponding pin of drive motion platform in diverse location, is determined planes in Z-direction at 3, therefore after three groups of movement branched chain motions stop, just can determine the spatial pose of motion platform, the motion of three groups of movement branched chain can realize the fine adjustment of motion platform [TZ, RX, RY] Three Degree Of Freedom, can realize being fixed on like this [the TZ of submergence unit on motion platform, RX, RY] the three-freedom degree precision adjusting, can realize the submicron order precision positioning of submergence unit.
In the present invention the Compress Spring force transmission to oscillating bearing, eliminated the gap on it, adopt the flexible hinge structure as revolute pair simultaneously, without friction and gap, the motion transfer chain of whole system is coherent compact like this, solved the problem that has gap between kinematic pair, made the whole system precision secure.
3. the present invention adopts parallel-connection structure, has thickeied the flexible hinge segment thickness, and flexible hinge part also is designed to parallel-connection structure, makes like this system have higher rigidity, can carry larger load simultaneously.
4. motion platform and flexible hinge integrated design in the present invention, simplified greatly the structure of pose adjusting device, dwindled the bulk of device, can meet the strict restriction of litho machine to size, simple structure also makes the three-freedom degree precision adjusting device based on flexible hinge be easy to manufacture, and cost is low.
5. the present invention adopts modular mentality of designing, in three-freedom degree precision adjusting device based on flexible hinge and immersed photoetching machine, other device does not have the coupling on function, except regulating for the pose of immersed photoetching machine submergence unit, also can regulate occasion for other pose that identical requirement is arranged.
The accompanying drawing explanation
Fig. 1 is the rough schematic view of the present invention present position in immersed photoetching machine.
Fig. 2 is three-dimensional view of the present invention.
Fig. 3 is explosive view of the present invention.
Fig. 4 is the full sectional view of the vertical Linear Moving Module in the present invention.
Fig. 5 is the three-dimensional view of motion platform in the present invention.
In figure: S1, the immersed photoetching machine optical system, S2, three-freedom degree precision adjusting device based on flexible hinge, S3, the submergence unit, 1, the immersed photoetching machine main frame, 2, immersion flow field, 3, silicon chip, 4, installation base plate, 4A, the installation base plate installing hole, 4B, vertical Linear Moving Module construction opening, 4C, the installation base plate centre bore, 5, vertical Linear Moving Module, 5A1, the secondary fixed part of rectilinear motion, 5A2, rectilinear motion secondary motion parts, 5A, the rectilinear motion pair, 5B1, the oscillating bearing outer ring, 5B2, the oscillating bearing inner ring, 5B, oscillating bearing, 5C, connecting rod, 5D, the oscillating bearing end cap, 5E, Compress Spring, 5F, bolt of cover, 6, the connecting rod fixed block, 7, clamping screw, 8, connecting bolt, 9, motion platform, 9A, submergence cellular installation hole, 9B, the flexible hinge end face, 9C, the motion platform centre bore, 9D, hinge joint, 9E, the secondary flexible hinge side chain of main motion, 9F, redundant parallel flexible hinge side chain.
The specific embodiment
Below in conjunction with drawings and Examples, the present invention is described further.
As shown in Figure 1 and Figure 2, three-freedom degree precision adjusting device S2 based on flexible hinge of the present invention is arranged between immersed photoetching machine main frame 1 and submergence cell S 3, three-freedom degree precision adjusting device S2 based on flexible hinge is installed on immersed photoetching machine main frame 1 by installation base plate installing hole 4A, and submergence cell S 3 is installed on motion platform 9 lower surfaces by submergence cellular installation hole 9A; Between installation base plate 4 and motion platform 9, by three groups of identical movement branched chain of structure, with parallel way, be connected, three groups of movement branched chain circle distribution centered by installation base plate centre bore 4C, be embedded in installation base plate 4 outsides.Immersed photoetching machine optical system S1 runs through immersed photoetching machine main frame 1, the three-freedom degree precision adjusting device S2 based on flexible hinge and submergence cell S 3, sees through 2 pairs of immersion flow fields and is exposed in the silicon chip 3 of below;
As shown in Figure 1, Figure 2, shown in Fig. 3, Fig. 4 and Fig. 5, described three groups of movement branched chain that structure is identical: include vertical Linear Moving Module 5, connecting rod fixed block 6, clamping screw 7 and two connecting bolts 8; Wherein vertically Linear Moving Module 5 comprises secondary 5A of rectilinear motion, the oscillating bearing 5B, the Compress Spring 5E that consist of oscillating bearing outer ring 5B1 and oscillating bearing inner ring 5B2, oscillating bearing end cap 5D, bolt of cover 5F and the connecting rod 5C consisted of the secondary fixed part 5A1 of rectilinear motion and rectilinear motion secondary motion parts 5A2; Vertically Linear Moving Module construction opening 4B circle distribution is on installation base plate 4, and the secondary fixed part 5A1 of rectilinear motion is arranged on the bottom surface of vertical Linear Moving Module construction opening 4B; There is bearing mounting hole lower end at rectilinear motion secondary motion parts 5A2 lateral surface, and oscillating bearing 5B, oscillating bearing end cap 5D axial compression oscillating bearing outer ring 5B1 are installed in bearing mounting hole; Connecting rod 5C becomes bolt shape, the one end is screw thread, the other end is the major diameter step, the connecting rod 5C end of thread is through oscillating bearing inner ring 5B2, Compress Spring 5E mono-side pressure is on the large end end face of connecting rod 5C, the Compress Spring 5E other end is pressed on oscillating bearing end cap 5D inner face, and oscillating bearing end cap 5D is connected on rectilinear motion secondary motion parts 5A2 by bolt of cover 5F; In connecting rod 5C end of thread precession connecting rod fixed block 6 screwed holes, by clamping screw 7, the connecting rod 5C end of thread is locked in connecting rod fixed block 6 screwed holes, connecting rod fixed block 6 is installed on motion platform flexible hinge end face 9B by two connecting bolts 8; There is respectively one group of identical parallel flexible hinge position corresponding with every group of vertical Linear Moving Module 5 on motion platform 9, every group of parallel flexible hinge composed in parallel by the secondary flexible hinge side chain 9E of main motion and redundant parallel flexible hinge side chain 9F, the parallel flexible hinge outside is flexible hinge end face 9B, the secondary flexible hinge side chain of main motion 9E is comprised of single hinge joint 9D, and redundant parallel flexible hinge side chain 9F is comprised of three hinge joint 9D that become the U font to arrange.
As shown in Figure 5, three groups of parallel flexible hinge thickness that distribute on motion platform 9 are thick than other parts of motion platform, and hinge fraction adopts parallel-connection structure, improved like this Z-direction rigidity of whole device, wherein hinge joint 9D is single axle rotation type flexible hinge, is distributed with 12 hinge joint 9D in whole motion platform.
As shown in Fig. 2, Fig. 4 and Fig. 5, in the identical movement branched chain of described three groups of structures, every group of movement branched chain cathetus kinematic pair moving component 5A2 moves along installation base plate centre bore 4C axis direction under the external world drives; Compress Spring 5E makes oscillating bearing 5B to motion platform centre bore 9C direction unbalance loading; The freedom of motion of parallel flexible hinge is to rotate along the hinge joint 9D in the secondary flexible hinge side chain of its main motion 9E; In range of movement, every group of movement branched chain can independently drive motion platform 9 motions.
Operation principle of the present invention is as follows:
As shown in Figure 1, Figure 2 and Figure 4, Compress Spring 5E makes oscillating bearing 5B to motion platform centre bore 9C direction unbalance loading, to eliminate the oscillating bearing gap, every group of movement branched chain cathetus kinematic pair moving component 5A2 moves along installation base plate centre bore 4C axis Z-direction under the external world drives, the Z-direction motion of rectilinear motion secondary motion parts 5A2 drives the corresponding flexible hinge end face of motion platform 9B motion, parallel flexible hinge rotates to compensate the flexible hinge end face 9B variation of produced end face to motion platform centre bore 9C distance of moving along the hinge joint 9D of the secondary flexible hinge side chain of main motion 9E, like this in range of movement, every group of movement branched chain can independently drive the corresponding pin motion of motion platform 9, three groups of movement branched chain are the position of three flexible hinge end face 9B of capable of regulating, determine a plane at 3, determined the pose of motion platform by this principle, and then determined the pose of the submergence cell S 3 be connected on motion platform 9, the motion of regulating three groups of movement branched chain can realize that motion platform 9 is at [TZ, RX, RY] fine adjustment of Three Degree Of Freedom, the positioning precision of every group of movement branched chain can reach submicron order, therefore whole device can be realized [the TZ of motion platform 9, RX, RY] three submicron order pose adjustings freely.
Claims (3)
1. the three-freedom degree precision adjusting device based on flexible hinge, it is characterized in that: the three-freedom degree precision adjusting device (S2) based on flexible hinge is arranged between immersed photoetching machine main frame (1) and submergence unit (S3), three-freedom degree precision adjusting device (S2) based on flexible hinge is installed to immersed photoetching machine main frame (1) above by installation base plate installing hole (4A), and submergence unit (S3) is installed on motion platform (9) lower surface by submergence cellular installation hole (9A); Between installation base plate (4) and motion platform (9), by three groups of identical movement branched chain of structure, with parallel way, be connected; Three groups of movement branched chain circle distribution centered by installation base plate centre bore (4C), be embedded in installation base plate (4) outside.
2. a kind of three-freedom degree precision adjusting device based on flexible hinge according to claim 1, is characterized in that: described three groups of movement branched chain that structure is identical: include vertical Linear Moving Module (5), connecting rod fixed block (6), clamping screw (7) and two connecting bolts (8); Wherein vertically Linear Moving Module (5) comprises the rectilinear motion secondary (5A) consisted of the secondary fixed part (5A1) of rectilinear motion and rectilinear motion secondary motion parts (5A2), oscillating bearing (5B), Compress Spring (5E), oscillating bearing end cap (5D), bolt of cover (5F) and the connecting rod (5C) consisted of oscillating bearing outer ring (5B1) and oscillating bearing inner ring (5B2); Vertically Linear Moving Module construction opening (4B) circle distribution is upper at installation base plate (4), and the secondary fixed part of rectilinear motion (5A1) is arranged on the bottom surface of vertical Linear Moving Module construction opening (4B); There is bearing mounting hole lower end at rectilinear motion secondary motion parts (5A2) lateral surface, and oscillating bearing (5B) is installed in bearing mounting hole, oscillating bearing end cap (5D) axial compression oscillating bearing outer ring (5B1); Connecting rod (5C) becomes bolt shape, the one end is screw thread, the other end is the major diameter step, connecting rod (5C) end of thread is through oscillating bearing inner ring (5B2), Compress Spring (5E) side pressure is at connecting rod (5C) greatly on end face, Compress Spring (5E) other end is pressed on oscillating bearing end cap (5D) inner face, and oscillating bearing end cap (5D) is connected on rectilinear motion secondary motion parts (5A2) by bolt of cover (5F); In connecting rod (5C) end of thread precession connecting rod fixed block (6) screwed hole, by clamping screw (7), connecting rod (5C) end of thread is locked in connecting rod fixed block (6) screwed hole, connecting rod fixed block (6) is installed on motion platform flexible hinge end face (9B) by two connecting bolts (8); In the upper position corresponding with every group of vertical Linear Moving Module (5) of motion platform (9), one group of identical parallel flexible hinge is arranged respectively, every group of parallel flexible hinge composed in parallel by the secondary flexible hinge side chain (9E) of main motion and redundant parallel flexible hinge side chain (9F), the parallel flexible hinge outside is flexible hinge end face (9B), the secondary flexible hinge side chain of main motion (9E) is comprised of single hinge joint (9D), and redundant parallel flexible hinge side chain (9F) is comprised of three hinge joints (9D) that become the U font to arrange.
3. a kind of three-freedom degree precision adjusting device based on flexible hinge according to claim 1, it is characterized in that: in the identical movement branched chain of described three groups of structures, every group of movement branched chain cathetus kinematic pair moving component (5A2) moves along installation base plate centre bore (4C) axis direction under the external world drives; Compress Spring (5E) makes oscillating bearing (5B) to motion platform centre bore (9C) direction unbalance loading; The freedom of motion of parallel flexible hinge is to rotate along the hinge joint (9D) in the secondary flexible hinge side chain of its main motion (9E); In range of movement, every group of movement branched chain can independently drive motion platform (9) motion.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104070518A (en) * | 2014-06-20 | 2014-10-01 | 浙江大学 | Three freedom precision control apparatus based on eccentric structure |
| CN105945904A (en) * | 2016-05-09 | 2016-09-21 | 北京空间飞行器总体设计部 | Three-freedom-degree platform based on flexible mechanism |
| CN107689248A (en) * | 2017-09-19 | 2018-02-13 | 苏州迈客荣自动化技术有限公司 | A kind of micromotion platform |
| CN107942622A (en) * | 2017-12-14 | 2018-04-20 | 浙江启尔机电技术有限公司 | A kind of three-freedom degree precision based on double-flexibility pair adjusts parallel institution |
| CN110625580A (en) * | 2019-09-30 | 2019-12-31 | 上海工程技术大学 | Fulcrum dynamic combination parallel mechanism for realizing high-precision positioning of circular ring track platform |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6724466B2 (en) * | 2002-03-26 | 2004-04-20 | Nikon Corporation | Stage assembly including a damping assembly |
| CN101021693A (en) * | 2007-03-15 | 2007-08-22 | 浙江大学 | Liquid supply and recovery seal controller in immersion type photoetching system |
| CN102291040A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN202615114U (en) * | 2012-05-30 | 2012-12-19 | 浙江大学 | Gas-tight sealing and gas-liquid separation recovery device for immersion photoetching machine |
| CN102854751A (en) * | 2011-06-30 | 2013-01-02 | 中国科学院深圳先进技术研究院 | Focusing adjustment leveling mechanism of photolithographic machine and leveling mechanism of photolithographic machine |
| CN103176368A (en) * | 2013-03-06 | 2013-06-26 | 浙江大学 | Gas-seal and gas-liquid vibration damping recovery device used in immersion lithographic machine |
| CN103279013A (en) * | 2013-05-20 | 2013-09-04 | 浙江大学 | Three-freedom-degree precise regulating device based on ball location |
-
2013
- 2013-09-13 CN CN201310416186.4A patent/CN103465258B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6724466B2 (en) * | 2002-03-26 | 2004-04-20 | Nikon Corporation | Stage assembly including a damping assembly |
| CN101021693A (en) * | 2007-03-15 | 2007-08-22 | 浙江大学 | Liquid supply and recovery seal controller in immersion type photoetching system |
| CN102854751A (en) * | 2011-06-30 | 2013-01-02 | 中国科学院深圳先进技术研究院 | Focusing adjustment leveling mechanism of photolithographic machine and leveling mechanism of photolithographic machine |
| CN102291040A (en) * | 2011-07-22 | 2011-12-21 | 吉林大学 | Multi-degree-of-freedom micronano-level bionic precision rotary driver |
| CN202615114U (en) * | 2012-05-30 | 2012-12-19 | 浙江大学 | Gas-tight sealing and gas-liquid separation recovery device for immersion photoetching machine |
| CN103176368A (en) * | 2013-03-06 | 2013-06-26 | 浙江大学 | Gas-seal and gas-liquid vibration damping recovery device used in immersion lithographic machine |
| CN103279013A (en) * | 2013-05-20 | 2013-09-04 | 浙江大学 | Three-freedom-degree precise regulating device based on ball location |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104070518A (en) * | 2014-06-20 | 2014-10-01 | 浙江大学 | Three freedom precision control apparatus based on eccentric structure |
| CN104070518B (en) * | 2014-06-20 | 2015-09-02 | 浙江大学 | A kind of Three-degree-of-freeprecision precision adjustment device based on eccentric structure |
| CN105945904A (en) * | 2016-05-09 | 2016-09-21 | 北京空间飞行器总体设计部 | Three-freedom-degree platform based on flexible mechanism |
| CN105945904B (en) * | 2016-05-09 | 2018-08-24 | 北京空间飞行器总体设计部 | A kind of 3-dimensional freedom platform based on compliant mechanism |
| CN107689248A (en) * | 2017-09-19 | 2018-02-13 | 苏州迈客荣自动化技术有限公司 | A kind of micromotion platform |
| CN107942622A (en) * | 2017-12-14 | 2018-04-20 | 浙江启尔机电技术有限公司 | A kind of three-freedom degree precision based on double-flexibility pair adjusts parallel institution |
| CN107942622B (en) * | 2017-12-14 | 2023-09-12 | 浙江启尔机电技术有限公司 | Three-degree-of-freedom precise adjustment parallel mechanism based on double flexible pairs |
| CN110625580A (en) * | 2019-09-30 | 2019-12-31 | 上海工程技术大学 | Fulcrum dynamic combination parallel mechanism for realizing high-precision positioning of circular ring track platform |
| CN110625580B (en) * | 2019-09-30 | 2022-08-02 | 上海工程技术大学 | Fulcrum dynamic combination parallel mechanism for realizing high-precision positioning of circular ring track platform |
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