CN102607628B - Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology - Google Patents
Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology Download PDFInfo
- Publication number
- CN102607628B CN102607628B CN201210065215.2A CN201210065215A CN102607628B CN 102607628 B CN102607628 B CN 102607628B CN 201210065215 A CN201210065215 A CN 201210065215A CN 102607628 B CN102607628 B CN 102607628B
- Authority
- CN
- China
- Prior art keywords
- platform
- aligning
- inclines
- tune
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention concretely relates to a wide-range tilt-adjusting and aligning workbench based on an aerostatic bearing technology, which belongs to the field of technology of precision measurement. The wide-range tilt-adjusting and aligning workbench based on the aerostatic bearing technology comprises a tilt-adjusting platform, a tilt-adjusting platform seat, an aligning platform, an X-direction micrometric displacement generator, a Y-direction micrometric displacement generator, Z-direction micrometric displacement generators, X-direction guiding devices, Y-direction guiding devices and a plurality of return springs; wherein the connection relation is that: the tilt-adjusting platform seat is placed on the aligning platform, and the tilt-adjusting platform seat and the aligning platform are tightly bonded when low pressure air is not connected; and the tilt-adjusting platform is placed on the tilt-adjusting platform seat, a lower surface of the tilt-adjusting platform and an upper surface of the tilt-adjusting platform seat are surfaces with complementary section shapes, and the tilt-adjusting platform and the tilt-adjusting platform seat are tightly bonded when low pressure air is not connected. The wide-range tilt-adjusting and aligning workbench based on the aerostatic bearing technology can be used for enlarging aligning and tilt-adjusting range and improving aligning and tilt-adjusting accuracy, and requirements of high-accuracy measurement on geometrical parameters and optical parameters of a measured piece are met.
Description
Technical field
The present invention is specifically related to a kind of tune on a large scale based on aerostatic bearing technology aligning worktable that inclines, and belongs to Technology of Precision Measurement field.
Background technology
The tune aligning worktable that inclines is the important device in precision measurement field, and this class worktable need meet adjusts the requirements such as precision is high, scope large, carrying is heavy, load-bearing rigidity is good, is widely used in that measured piece on micro swivel tilts, the accurate adjustment of bias etc.
The existing tune aligning worktable that inclines generally adopts rolling element or Liquid Static-Press Technique as loading bearing.The bearing of rolling element is not only manufactured difficulty, expensive, and machining precision is difficult to guarantee, under low speed, easily produces and creeps.Therefore, adjust the restriction that tune inclines, aligning precision is subject to rolling bearing component precision of worktable, be difficult to bring up to micron order, improper if bearing clearance is adjusted, worktable even there will be the situations such as vibrations and heavy wear.In fluid pressure worktable, static pressure and main shaft etc. all need the exigent lubricating oil of service property (quality) as rigidity bearing medium, the static pressure place heating of worktable is higher, affect mission life, and the self structure of worktable is complicated, need special-purpose oil supply system, very high to the quality requirements of lubricating oil, difficult in maintenance.
The above method all cannot meet the requirement that in optical quantities and geometric sense precision measurement, high precision, high resolution, nothing is rubbed, is easy to driving, high-mechanic rigidity.
Summary of the invention
The object of the invention is in order to overcome the incline deficiency of aligning system of above-mentioned tune, increase aligning, adjust the scope of inclining, improve aligning, adjust the precision of inclining, meet the demands such as high-acruracy survey of measured piece geometric parameter and optical parametric, proposed a kind of large scale and high accuracy based on aerostatic bearing technology and adjusted the aligning device that inclines.
The present invention is achieved by the following technical solutions.
A kind of large scale and high accuracy based on aerostatic bearing technology of the present invention is adjusted the aligning device that inclines, and comprises adjusting the platform that inclines, adjusting incline platform base, aligning platform, X-direction micro displacement generator, Y-direction micro displacement generator, Z-direction micro displacement generator, X-direction guide piece, Y-direction guide piece, several returning springs;
Its annexation is: the tune platform base that inclines is placed on aligning platform, and during access failure low-pressure air, the two fits tightly.Tune inclines and places and adjust the platform that inclines on platform base, and adjusting the lower surface of the platform that inclines is the surface of cross sectional shape complementation with adjusting the upper surface of the platform base that inclines, and during access failure low-pressure air, the two fits tightly.X-direction micro displacement generator, Y-direction micro displacement generator and three Z-direction micro displacement generators, be placed on respectively around worktable, for worktable, tilts and eccentric adjustment, and wherein X-direction micro displacement generator acts on aligning platform along X-direction; Y-direction micro displacement generator acts on and adjusts the platform base that inclines along Y-direction; When tune inclines platform when X-axis, Y-axis are done rolling or pitching, guarantee, in the X-axis of coordinate system or Y-axis, a Z-direction micro displacement generator is installed, in X-axis or Y-axis symmetria bilateralis, two Z-direction micro displacement generators are installed again, the acting in conjunction of three Z-direction micro displacement generators is in the tune platform that inclines.X-direction guide piece is placed in aligning platform along the both sides of X-direction, for limiting aligning platform moving along directions X.Y-direction guide piece is placed in adjusts the platform base that inclines along the both sides of Y-direction, for limiting aligning platform moving along Y-direction.Aligning platform edges projection, highly higher than the tune platform base that inclines, for limiting the setting range of adjusting the platform base that inclines.
Being placed in the returning spring to path position of X-direction micro displacement generator, is for providing directions X the eccentric restoring force of adjusting.Being placed in the returning spring to path position of Y-direction micro displacement generator, is for providing Y-direction the eccentric restoring force of adjusting.Being placed near the returning spring three Z-direction micro displacement generators, is to adjust for providing the restoring force that inclines, and limits setting range, and the rollover that prevents from toppling guarantees to adjust platform and tune the stablizing of relative position between platform base that incline that incline.
Wherein, adjust the platform base that inclines to comprise and adjust incline air film air vent and inner air path; At the incline upper surface of platform base of tune, some tune air film air vent that inclines is around set, adjusts the air film air vent that inclines to be connected by inner air path and the tune platform base air supply pipe that inclines; Aligning platform comprises Y-direction aligning air film air vent, X-direction aligning air film air vent, inner air path, and Y-direction aligning air film air vent and X-direction aligning air film air vent are placed in respectively inner air path both sides, and are connected with aligning platform air supply pipe by inner air path.
Tune platform and the tune platform base that inclines that inclines forms and adjusts the unit that inclines; Incline platform base and aligning platform of tune forms aligning unit.
Its course of work is:
The tune cell operation process of inclining: during access failure low-pressure air, adjust the platform that inclines to be pressed together on to adjust by self gravitation effect and incline on platform base, adjust the lower surface of the platform that inclines to fit tightly with adjusting the upper surface of the platform base that inclines.When work, low-pressure air is connected, by the tune platform base air supply pipe that inclines, through inner air path and the tune air film air vent that inclines, supply with and adjust the unit that inclines, because the incline vent port of air film air vent of each tune is minimum, low-pressure air is converted into pressure-air and discharges, at incline lower surface and the tune of platform of tune, incline and between the upper surface of platform base, form one deck gas lubrication film as thin as a wafer and adjust the air film that inclines.At this moment, three Z-direction micro displacement generators of along the circumferential direction arranging and near the returning spring each Z-direction micro displacement generator just can join together to drive adjust incline platform in tune inclines platform base almost friction free along the contour curve of upper and lower surface, do around the rolling of X-axis and around the luffing of Y-axis, and then complete the tune function of inclining.
Aligning cell operation process: during access failure low-pressure air, adjust the platform base that inclines to be combined into integral body by self gravitation effect and aligning platform, the incline lower surface of platform base and the upper surface of aligning platform of tune fits tightly.When work, low-pressure air is switched to aligning platform air supply pipe, and low-pressure air is delivered to respectively Y-direction aligning air film air vent and the X-direction aligning air film air vent perpendicular to inner air path both sides via inner air path; Because each aligning air film air vent is minimum, low-pressure air can be converted into pressure-air and discharge, so just between the upper surface of aligning platform and tune incline the lower surface of platform base, to form respectively one deck gas lubrication film as thin as a wafer between the lower surface of aligning platform and stationary platform face be Y-direction aligning air film and X-direction aligning air film.At this moment, the returning spring that X-direction micro displacement generator and diameter are arranged just can coordinate driving aligning platform to do eccentric adjustment along directions X; The returning spring that Y-direction micro displacement generator and diameter are arranged just can coordinate drive adjust the platform base that inclines along Y-direction almost without frictionally doing bias adjustment, thereby complete the aligning function of X, Y-direction.
Beneficial effect:
1, a kind of tune on a large scale based on aerostatic bearing technology of the present invention inclines in aligning worktable, all adopt aerostatic bearing technology as lubricated and guiding, in adjustment process between moving component almost without friction, eliminated sluggish, creep and the impact of the factor such as backhaul, cooperation is with the micro displacement generator of high resolution, the tune of apparatus of the present invention is inclined, aligning resolution improves greatly, possesses high adjustment precision.
2, a kind of aligning worktable that inclines of adjusting on a large scale based on aerostatic bearing technology of the present invention adopts unique version, and each displacement mechanism is easy to spacing, then coordinates the micro displacement generator of selecting large stroke, can significantly improve adjust incline, aligning scope.
3, a kind of tune on a large scale based on aerostatic bearing technology of the present invention aligning worktable that inclines, adopted aerostatic bearing technology as support, the incline self gravitation of platform and aligning platform of tune is cancelled substantially, make to be in course of adjustment, each micro displacement generator only need to provide very little driving force to complete and adjust incline, aligning action.
4, especially compared to oil pressure bearing, there is again clean environment, be easy to safeguard, static pressure gas mould good rigidly, the advantage such as load-bearing capacity is strong.
5, a kind of tune on a large scale based on aerostatic bearing technology of the present invention aligning worktable that inclines, the design of patent innovation of the present invention multilayer architecture, utilize multi-layer air static pressure air film as supporting, lead and lubricating, tune is inclined and integrates as a whole with aligning function, optimized the structure of adjusting the aligning worktable that inclines, and adjust the aligning that inclines easy and simple to handle, functional strong, the aligning that is easy to realize automatic control is adjusted and is inclined.
Accompanying drawing explanation
Fig. 1 is a kind of front view of adjusting the aligning Working table structure that inclines on a large scale based on aerostatic bearing technology of the present invention;
Fig. 2 is a kind of vertical view of adjusting the aligning Working table structure that inclines on a large scale based on aerostatic bearing technology of the present invention;
Fig. 3 is a kind of tune of adjusting the aligning worktable that inclines on a large scale based on aerostatic bearing technology of the present invention fundamental diagram that inclines;
Fig. 4 is a kind of aligning fundamental diagram of adjusting the aligning worktable that inclines on a large scale based on aerostatic bearing technology of the present invention;
Fig. 5 is a kind of embodiment 1 front view of adjusting the aligning worktable that inclines on a large scale based on aerostatic bearing technology of the present invention;
Fig. 6 is a kind of embodiment 1 vertical view of adjusting the aligning worktable that inclines on a large scale based on aerostatic bearing technology of the present invention;
Fig. 7 is a kind of embodiment 2 front views of adjusting the aligning worktable that inclines on a large scale based on aerostatic bearing technology of the present invention;
Fig. 8 is a kind of embodiment 2 vertical views of adjusting the aligning worktable that inclines on a large scale based on aerostatic bearing technology of the present invention;
In figure, 1-workpiece for measurement, 2-adjusts the platform that inclines, 3-Y to adjust the platform base that inclines, 5-aligning platform, 6-X to aligning air film, 8-Y, to aligning air film, 9-Z, to micro displacement generator, 10-, to adjust the air film that inclines, 11-to adjust the platform base air supply pipe that inclines, 12-aligning platform air supply pipe, 13-tune to incline air film air vent, 14-Y to aligning air film air vent, 15-X to aligning air film air vent, 16-X to guide piece, 17-Y to guide piece, 18-returning spring to micro displacement generator, 7-X to micro displacement generator, 4-.
Embodiment
Below in conjunction with drawings and Examples, the present invention will be further described.
A kind of large scale and high accuracy based on aerostatic bearing technology of the present invention is adjusted the aligning device that inclines, and comprises adjusting the platform 2 that inclines, adjusting incline platform base 4, aligning platform 5, X-direction micro displacement generator 6, Y-direction micro displacement generator 3, Z-direction micro displacement generator 9, X-direction guide piece 16, Y-direction guide piece 17, several returning springs 18; As shown in Figure 5, Figure 6.
Adjust the aligning device that inclines to be positioned on micro swivel a kind of large scale and high accuracy based on aerostatic bearing technology of the present invention.
Tune inclines in functional unit, the incline upper surface of platform base 4 of tune is set to have the concave spherical surface of suitable radian, on concave spherical surface, circumference around arranges some tune air film air vent 13 that inclines, and adjusts the air film air vent 13 that inclines to be connected by inner air path and the tune platform base air supply pipe 11 that inclines.Meanwhile, adjust the lower surface of the platform 2 that inclines to be accurately processed into the protruding sphere identical with the concave spherical surface radian of adjusting the platform base 4 that inclines, make it complementary, then be placed in to adjust and incline on platform base 4, as shown in Figure 5.Three Z-direction micro displacement generator 9 actings in conjunction are in the tune platform 2 that inclines, one of them Z-direction micro displacement generator is placed on 1 a in Y-axis, and the distance of this point and true origin O is d, two other micro displacement generator is along the circumferential direction arranged symmetrically in respectively b point and the c point of Y-axis both sides with the distance d equating, as shown in Figure 6; For adjusting the platform that inclines around the rolling of X-axis with around the pitching of Y-axis.Near each Z-direction micro displacement generator 9, then configure three returning springs as pretightning force generation device, for providing, adjust the restoring force that inclines, limit setting range, rollover prevents from toppling.Returning spring also can guarantee to adjust incline platform 2 with adjust stablizing of the relative position between platform base 4 of inclining.
During access failure low-pressure air, adjust the platform 2 that inclines to be pressed together on to adjust by self gravitation effect and incline on platform base 4, adjust the protruding sphere of the platform 2 that inclines to fit tightly with adjusting the concave spherical surface of the platform base 4 that inclines.When work, low-pressure air is connected, by incline platform base air supply pipe 11 of tune, supply with and adjust the unit that inclines, via inner air path, deliver on circumference each again and adjust the air film air vent 13 that inclines, because the incline vent port of air film air vent 13 of each tune is minimum, low-pressure air is converted into pressure-air and discharges, at incline protruding sphere and the tune of platform 2 of tune, incline and between the concave spherical surface of platform base 4, form one deck gas lubrication film as thin as a wafer and adjust the air film 10 that inclines.At this moment, three Z-direction micro displacement generators 9 of along the circumferential direction arranging and returning spring just can join together to drive tune incline platform 2 in tune inclines platform base 4 almost friction free along the contour curve of concave spherical surface (or protruding sphere), do around the rolling of X-axis and around the luffing of Y-axis, and then complete and adjust the function of inclining, as shown in Figure 3.
In aligning function unit, aligning platform 5 edge projections, highly higher than the tune platform base 4 that inclines, for limiting the setting range of adjusting the platform base 4 that inclines.Aligning platform 5, as the performance element of X-direction aligning, is adjusted the performance element of platform base 4 as Y-direction aligning that incline.The lower surface of aligning platform 5 arranges some X-direction aligning air film air vents 15 on circumference, the upper surface of aligning platform 5 arranges some Y-direction aligning air film air vents 14 at circumference equally, and each aligning air film air vent is connected with aligning platform air supply pipe 12 by inner air path.The tune platform base 4 that inclines is placed on aligning platform 5 again.X-direction micro displacement generator 6 and Y-direction micro displacement generator 3 are along the circumferential direction arranged to form as shown in Figure 6, and wherein, X-direction micro displacement generator 6 coordinates the returning spring of arranging with its diameter to act on aligning platform 5, for adjusting the bias along directions X; The returning spring that Y-direction micro displacement generator 3 coordinates and its diameter is arranged acts on adjusts the platform base 4 that inclines, for adjusting the bias along Y-direction.Each returning spring is used for limiting setting range, and adjustment restoring force is provided, and guarantees the stable of relative position between aligning platform 5 and aligning platform base 4.
During access failure low-pressure air, adjust the platform base 4 that inclines to be combined into integral body by self gravitation effect and aligning platform 5, the incline lower surface of platform base 4 and the upper surface of aligning platform 5 of tune fits tightly.When work, low-pressure air is switched to aligning platform air supply pipe 12, low-pressure air is delivered to respectively each Y-direction aligning air film air vent 14 on aligning platform 5 upper surface circumference and each X-direction aligning air film air vent 15 on aligning platform 5 lower surface circumference via inner air path, because each aligning air film air vent is minimum, low-pressure air can be converted into pressure-air discharges, so just at the upper surface of aligning platform 5 and adjust between the lower surface of the platform base 4 that inclines, between the lower surface of aligning platform 5 and stationary platform face, forming respectively one deck gas lubrication film is as thin as a wafer Y-direction aligning air film 8 and X-direction aligning air film 7.At this moment, X-direction micro displacement generator 6 and returning spring just can coordinate drive aligning platform 5 along directions X almost without frictionally doing eccentric adjustment; Y-direction micro displacement generator 3 and returning spring just can coordinate drive to adjust the platform base 4 that inclines along Y-direction almost without frictionally doing eccentric adjustment, thereby complete the aligning function of X, Y-direction, as shown in Figure 4.
The above two functional unit is combined, low-pressure air source of the gas input is provided respectively, can complete around the rolling of X-axis simultaneously and adjust and incline, around the pitching of Y-axis, adjust and incline and along the aligning function of X, Y-direction.
A kind of large scale and high accuracy based on aerostatic bearing technology of the present invention is adjusted the aligning device that inclines, and comprises adjusting the platform 2 that inclines, adjusting incline platform base 4, aligning platform 5, X-direction micro displacement generator 6, Y-direction micro displacement generator 3, Z-direction micro displacement generator 9, X-direction guide piece 16, Y-direction guide piece 17, several returning springs 18; As shown in Figure 7, Figure 8.
Adjust the aligning device that inclines to be positioned on micro swivel a kind of large scale and high accuracy based on aerostatic bearing technology of the present invention.
Tune inclines in functional unit, the incline upper surface of platform base 4 of tune is set to the recessed cylinder of suitable radius-of-curvature, and adjust the lower surface of the platform 2 that inclines to be accurately processed into the projection face identical with the recessed cylindrical curvature of adjusting the platform base 4 that inclines, on tune inclines the recessed cylinder of platform base 4, two row are set at a certain distance again and adjust the air film air vent 13 that inclines, adjust the air film air vent 13 that inclines to be connected by inner air path and the tune platform base air supply pipe 11 that inclines.Meanwhile, adjust the lower surface of the platform 2 that inclines to be accurately processed into the projection face identical with the recessed cylinder radian of adjusting the platform base 4 that inclines, make it complementary, then be placed in to adjust and incline on platform base 4, as shown in Figure 7.Three Z-direction micro displacement generator 9 actings in conjunction are in the tune platform 2 that inclines, one of them Z-direction micro displacement generator is placed on 1 a ' in Y-axis, and the distance of this point and true origin O is d ', two other micro displacement generator is along the circumferential direction arranged symmetrically in respectively and c ' point of Y-axis both sides at b ' with the distance d ' equating, as shown in Figure 8; For adjusting the platform that inclines around the rolling of X-axis with around the pitching of Y-axis.Near each Z-direction micro displacement generator 9, then configure three returning springs as pretightning force generation device, for providing, adjust the restoring force that inclines, limit setting range, rollover prevents from toppling.Returning spring also can guarantee to adjust incline platform 2 with adjust stablizing of the relative position between platform base 4 of inclining.
During access failure low-pressure air, adjust the platform 2 that inclines to be pressed together on to adjust by self gravitation effect and incline on platform base 4, adjust the projection face of the platform 2 that inclines to fit tightly with adjusting the recessed cylinder of the platform base 4 that inclines.When work, low-pressure air is inclined after 11 connections of platform base air supply pipe by tune, by incline platform base air supply pipe 11 of tune, supply with and adjust the unit that inclines, via inner air path, deliver on circumference each again and adjust the air film air vent 13 that inclines, because the incline vent port of air film air vent 13 of each tune is minimum, low-pressure air is converted into pressure-air and discharges, because the incline lower surface of platform 2 of tune is projection face, and adjust the upper surface of the platform base 4 that inclines, be recessed cylinder, thereby the tune forming incline air film 10 for one deck semi-cylindrical air film as thin as a wafer.At this moment, three Z-direction micro displacement generators 9 of along the circumferential direction arranging and returning spring just can join together to drive tune incline platform 2 in tune inclines platform base 4 almost friction free along the contour curve of recessed cylinder (or projection face), do around the rolling of X-axis and around the luffing of Y-axis, and then complete and adjust the function of inclining, as shown in Figure 3.
In aligning function unit, aligning platform 5 edge projections, highly higher than the tune platform base 4 that inclines, for limiting the setting range of adjusting the platform base 4 that inclines.Aligning platform 5, as the performance element of X-direction aligning, is adjusted the performance element of platform base 4 as Y-direction aligning that incline.The lower surface of aligning platform 5 arranges some X-direction aligning air film air vents 15 on circumference, the upper surface of aligning platform 5 arranges some Y-direction aligning air film air vents 14 at circumference equally, and each aligning air film air vent is connected with aligning platform air supply pipe 12 by inner air path.The tune platform base 4 that inclines is placed on aligning platform 5 again.X-direction micro displacement generator 6 and Y-direction micro displacement generator 3 are along the circumferential direction arranged to form as shown in Figure 8, and wherein, X-direction micro displacement generator 6 coordinates the returning spring of arranging with its diameter to act on aligning platform 5, for adjusting the bias along directions X; The returning spring that Y-direction micro displacement generator 3 coordinates and its diameter is arranged acts on adjusts the platform base 4 that inclines, for adjusting the bias along Y-direction.Each returning spring is used for limiting setting range, and adjustment restoring force is provided, and guarantees the stable of relative position between aligning platform 5 and aligning platform base 4.
During access failure low-pressure air, adjust the platform base 4 that inclines to be combined into integral body by self gravitation effect and aligning platform 5, the incline lower surface of platform base 4 and the upper surface of aligning platform 5 of tune fits tightly.When work, low-pressure air is switched to aligning platform air supply pipe 12, low-pressure air is delivered to respectively each Y-direction aligning air film air vent 14 on aligning platform 5 upper surface circumference and each X-direction aligning air film air vent 15 on aligning platform 5 lower surface circumference via inner air path, because each aligning air film air vent is minimum, low-pressure air can be converted into pressure-air discharges, so just at the upper surface of aligning platform 5 and adjust between the lower surface of the platform base 4 that inclines, between the lower surface of aligning platform 5 and stationary platform face, forming respectively one deck gas lubrication film is as thin as a wafer Y-direction aligning air film 8 and X-direction aligning air film 7.At this moment, X-direction micro displacement generator 6 and returning spring just can coordinate drive aligning platform 5 along directions X almost without frictionally doing eccentric adjustment; Y-direction micro displacement generator 3 and returning spring just can coordinate drive to adjust the platform base 4 that inclines along Y-direction almost without frictionally doing eccentric adjustment, thereby complete the aligning function of X, Y-direction, as shown in Figure 5.
The above two functional unit is combined, low-pressure air source of the gas input is provided respectively, can complete around the corner of X-axis simultaneously and adjust and incline and along the aligning function of X, Y-direction.
Below by reference to the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood to limit scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on the claims in the present invention basis is all protection scope of the present invention.
Claims (8)
1. the large scale and high accuracy based on aerostatic bearing technology is adjusted the aligning device that inclines, and it is characterized in that: comprise and adjust the platform (2) that inclines, adjust incline platform base (4), aligning platform (5), X-direction micro displacement generator (6), Y-direction micro displacement generator (3), Z-direction micro displacement generator (9), X-direction guide piece (16), Y-direction guide piece (17), several returning springs (18); Its annexation is: tune is inclined, and to be placed on aligning platform (5) upper for platform base (4), and during access failure low-pressure air, the two fits tightly; Tune upper placement of platform base (4) of inclining adjusted the platform (2) that inclines, and adjusting the incline upper surface of platform base (4) of the lower surface of the platform (2) that inclines and tune is the surface of cross sectional shape complementation, and during access failure low-pressure air, the two fits tightly; X-direction micro displacement generator (6), Y-direction micro displacement generator (3) and three Z-direction micro displacement generators (9), be placed on respectively around worktable, for worktable, tilt and eccentric adjustment, wherein X-direction micro displacement generator (6) acts on aligning platform (5) along X-direction; Y-direction micro displacement generator (3) acts on and adjusts the platform base (4) that inclines along Y-direction; When tune inclines platform (2) when X-axis, Y-axis are done rolling or pitching, guarantee, in the X-axis of coordinate system or Y-axis, a Z-direction micro displacement generator (9) is installed, in X-axis or Y-axis symmetria bilateralis, two Z-direction micro displacement generators (9) are installed again, three Z-direction micro displacement generators (9) acting in conjunction is in the tune platform (2) that inclines; X-direction guide piece (16) is placed in aligning platform (5) along the both sides of X-direction, for limiting aligning platform (5) moving along directions X; Y-direction guide piece (17) is placed in adjusts the platform base (4) that inclines along the both sides of Y-direction, for limiting aligning platform (5) moving along Y-direction; Being placed in the returning spring to path position of X-direction micro displacement generator (6), is for providing directions X the eccentric restoring force of adjusting; Being placed in the returning spring to path position of Y-direction micro displacement generator (3), is for providing Y-direction the eccentric restoring force of adjusting; Being placed near the returning spring three Z-direction micro displacement generators (9), is to adjust for providing the restoring force that inclines, and limits setting range, and the rollover that prevents from toppling guarantees to adjust platform (2) and tune the stablizing of relative position between platform base (4) that incline that incline.
2. a kind of large scale and high accuracy based on aerostatic bearing technology as claimed in claim 1 is adjusted the aligning device that inclines, and it is characterized in that: the described tune platform base (4) that inclines comprises and adjusts incline air film air vent (13) and inner air path; At the incline upper surface of platform base (4) of tune, some tune air film air vent (13) that inclines is around set, adjusts the air film air vent (13) that inclines to be connected by inner air path and the tune platform base air supply pipe (11) that inclines.
3. a kind of large scale and high accuracy based on aerostatic bearing technology as claimed in claim 1 is adjusted the aligning device that inclines, it is characterized in that: described aligning platform (5) comprises Y-direction aligning air film air vent (14), X-direction aligning air film air vent (15), inner air path, Y-direction aligning air film air vent (14) is placed in respectively inner air path both sides with X-direction aligning air film air vent (15), and is connected with aligning platform air supply pipe (12) by inner air path.
4. a kind of large scale and high accuracy based on aerostatic bearing technology as claimed in claim 1 is adjusted the aligning device that inclines, and it is characterized in that: aligning platform (5) edge projection, and highly not higher than the tune platform base (4) that inclines.
5. a kind of large scale and high accuracy based on aerostatic bearing technology as claimed in claim 1 is adjusted the aligning device that inclines, and it is characterized in that: adjust the shape of platform base (4) upper surface that inclines to be preferably hemisphere face or semi-cylindrical.
6. a kind of large scale and high accuracy based on aerostatic bearing technology as claimed in claim 1 is adjusted the aligning device that inclines, it is characterized in that: when work, low-pressure air is connected, and incline lower surface and the tune of platform (2) of described tune inclines and between the upper surface of platform base (4), form the tune air film (10) that inclines.
7. a kind of large scale and high accuracy based on aerostatic bearing technology as claimed in claim 1 is adjusted the aligning device that inclines, it is characterized in that: when work, low-pressure air is connected, and between described aligning platform (5) and rotary table, forms X-direction aligning air film (7).
8. a kind of large scale and high accuracy based on aerostatic bearing technology as claimed in claim 1 is adjusted the aligning device that inclines, it is characterized in that: when work, low-pressure air is connected, and incline platform (2) and tune of described tune inclines and between platform base (4), form Y-direction aligning air film (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210065215.2A CN102607628B (en) | 2012-01-13 | 2012-01-13 | Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210065215.2A CN102607628B (en) | 2012-01-13 | 2012-01-13 | Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102607628A CN102607628A (en) | 2012-07-25 |
| CN102607628B true CN102607628B (en) | 2014-04-09 |
Family
ID=46525219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210065215.2A Active CN102607628B (en) | 2012-01-13 | 2012-01-13 | Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102607628B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108036808A (en) * | 2017-12-04 | 2018-05-15 | 兰州空间技术物理研究所 | A kind of high-precision tilt angle Control experiment platform |
| CN111571544B (en) * | 2020-05-07 | 2022-02-11 | 宁波大学 | Three-axis aligning leveling type rotary table |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5383751A (en) * | 1993-08-05 | 1995-01-24 | Vought Aircraft Company | Manually positioned computer controlled drilling machine |
| US7459120B2 (en) * | 2003-12-04 | 2008-12-02 | Essilor International | Low pressure thermoforming of thin, optical carriers |
| CN101070879A (en) * | 2007-06-15 | 2007-11-14 | 辽宁科技大学 | Static-pressure supporting spherical self-aligning bearing seat |
| CN202420527U (en) * | 2012-01-13 | 2012-09-05 | 北京理工大学 | Aerostatic bearing technology-based wide-range inclination regulation and aligning workbench |
-
2012
- 2012-01-13 CN CN201210065215.2A patent/CN102607628B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN102607628A (en) | 2012-07-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2881363B2 (en) | Parallel moving device and lens moving device | |
| JP5674149B2 (en) | Cumulative lead error measuring device and measuring method for ball screw shaft | |
| CN104396000B (en) | Table device and carrier device | |
| CN102175177A (en) | Five-axis optical aspheric surface detection device driven by linear motor | |
| US9316472B2 (en) | Slide guide device | |
| KR20080058159A (en) | Three-dimensional measurement probe | |
| CN103770044B (en) | Six degree of freedom adjustment installing mechanism | |
| CN104303282B (en) | Table device and conveyance device | |
| CN101386141A (en) | Mixed straight line gyration quick cutter servo device | |
| CN102607628B (en) | Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology | |
| US20160369938A1 (en) | Table device and conveyance device | |
| CN202420527U (en) | Aerostatic bearing technology-based wide-range inclination regulation and aligning workbench | |
| CN102589467B (en) | Convex aspheric optical element surface type detection device | |
| TW201304126A (en) | Optical alignment structures and associated methods | |
| CN103465258A (en) | Three-degree-of-freedom precision adjustment device based on flexible hinges | |
| CN104070518B (en) | A kind of Three-degree-of-freeprecision precision adjustment device based on eccentric structure | |
| CN104400375B (en) | Turn stator alignment measurement tune to incline device based on the sphere slidably supported aero-engine that leads | |
| US20200025248A1 (en) | Planar rotary air bearing stage | |
| JP6993800B2 (en) | Gate type mobile device and coordinate measuring machine | |
| CN104968470B (en) | Table device and conveying device | |
| CN103558419A (en) | Scanning near-field optical detecting table | |
| CN107851599B (en) | Stage device, positioning device, flat panel display manufacturing device, and precision machine | |
| CN208744232U (en) | A kind of fixture for the processing of rocker arm shaft oil groove | |
| JP6610083B2 (en) | Table device, positioning device, flat panel display manufacturing device, and precision machine | |
| CN110500984B (en) | Aligning and leveling precision rotary table |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |