CN102607628A - Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology - Google Patents
Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology Download PDFInfo
- Publication number
- CN102607628A CN102607628A CN2012100652152A CN201210065215A CN102607628A CN 102607628 A CN102607628 A CN 102607628A CN 2012100652152 A CN2012100652152 A CN 2012100652152A CN 201210065215 A CN201210065215 A CN 201210065215A CN 102607628 A CN102607628 A CN 102607628A
- Authority
- CN
- China
- Prior art keywords
- aligning
- inclines
- platform
- accent
- air
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention concretely relates to a wide-range tilt-adjusting and aligning workbench based on an aerostatic bearing technology, which belongs to the field of technology of precision measurement. The wide-range tilt-adjusting and aligning workbench based on the aerostatic bearing technology comprises a tilt-adjusting platform, a tilt-adjusting platform seat, an aligning platform, an X-direction micrometric displacement generator, a Y-direction micrometric displacement generator, Z-direction micrometric displacement generators, X-direction guiding devices, Y-direction guiding devices and a plurality of return springs; wherein the connection relation is that: the tilt-adjusting platform seat is placed on the aligning platform, and the tilt-adjusting platform seat and the aligning platform are tightly bonded when low pressure air is not connected; and the tilt-adjusting platform is placed on the tilt-adjusting platform seat, a lower surface of the tilt-adjusting platform and an upper surface of the tilt-adjusting platform seat are surfaces with complementary section shapes, and the tilt-adjusting platform and the tilt-adjusting platform seat are tightly bonded when low pressure air is not connected. The wide-range tilt-adjusting and aligning workbench based on the aerostatic bearing technology can be used for enlarging aligning and tilt-adjusting range and improving aligning and tilt-adjusting accuracy, and requirements of high-accuracy measurement on geometrical parameters and optical parameters of a measured piece are met.
Description
Technical field
The present invention is specifically related to a kind of accent on a large scale based on aerostatic bearing technology aligning worktable that inclines, and belongs to the Technology of Precision Measurement field.
Background technology
The accent aligning worktable that inclines is the important device in precision measurement field, and this type worktable need satisfy that the adjustment precision is high, scope is big, carry requirements such as heavy, that load-bearing rigidity is good, is widely used in the accurate adjustment of measured piece inclination, off-centre etc. on the micro swivel.
The existing accent aligning worktable that inclines generally adopts rolling element or Liquid Static-Press Technique as loading bearing.The bearing of rolling element is not only made difficulty, is cost an arm and a leg, and machining precision is difficult to guarantee, is easy to generate under the low speed and creeps.Therefore, the restriction that accent inclines, the aligning precision receives the rolling bearing component precision of adjustment worktable is difficult to bring up to micron order, if bearing clearance adjustment is improper, and worktable even situation such as vibrations and heavy wear can occur.Static pressure and main shaft etc. all need the exigent lubricating oil of service property (quality) as the rigidity bearing medium in the fluid pressure worktable; The static pressure place heating of worktable is higher; Influence mission life, and the self structure of worktable is complicated, needs special-purpose oil supply system; Quality requirements to lubricating oil is very high, difficult in maintenance.
The above method all can't satisfy in optical quantities and the geometric sense precision measurement high precision, high resolution, no friction, be easy to drive, the requirement of high-mechanic rigidity.
Summary of the invention
The objective of the invention is in order to overcome the incline deficiency of aligning system of above-mentioned accent; Increase aligning, transfer the scope of inclining; Improve aligning, transfer the precision of inclining; Satisfy the demands such as high-acruracy survey of measured piece geometric parameter and optical parametric, proposed a kind of large scale and high accuracy and transferred the aligning device that inclines based on the aerostatic bearing technology.
The present invention realizes through following technical scheme.
A kind of large scale and high accuracy based on aerostatic bearing technology of the present invention is transferred the aligning device that inclines, comprise transfer the platform that inclines, transfer the platform base that inclines, aligning platform, X to micrometric displacement generator, Y to micrometric displacement generator, Z to micrometric displacement generator, X to guiding device, Y to guiding device, several returning springs;
Its annexation is: the accent platform base that inclines is placed on the aligning platform, and the two fits tightly during the access failure low-pressure air.Accent inclines to placing on the platform base and transfers the platform that inclines, and transferring the lower surface of the platform that inclines and the upper surface of transferring the platform base that inclines is the complementary surface of cross sectional shape, and the two fits tightly during the access failure low-pressure air.X to micrometric displacement generator, Y to micrometric displacement generator and three Z to the micrometric displacement generator, be placed on respectively around the worktable, be used for table inclination and eccentric adjustment, wherein X to the micrometric displacement generator along X to acting on the aligning platform; Y transfers incline platform base along Y to acting on to the micrometric displacement generator; When accent inclines platform around the X axle, when the Y axle is done lift-over or pitching; A Z is installed to the micrometric displacement generator on X axle that guarantees at coordinate system or the Y axle; Two Z are installed to the micrometric displacement generator in X axle or Y axle symmetria bilateralis again, three Z to the acting in conjunction of micrometric displacement generator in the accent platform that inclines.X to the guiding device be placed in the aligning platform along X to both sides, be used to limit aligning platform moving along directions X.Y to the guiding device be placed in transfer incline platform base along Y to both sides, be used to limit aligning platform moving along the Y direction.Aligning platform edges projection highly is not higher than and transfers the platform base that inclines, and is used to limit the setting range of transferring the platform base that inclines.
Placing the returning spring to path position of X to the micrometric displacement generator, is the restoring force that is used to provide the eccentric adjustment of directions X.Placing the returning spring to path position of Y to the micrometric displacement generator, is the restoring force that is used to provide the eccentric adjustment of Y direction.Placing near the returning spring of three Z micrometric displacement generator, is to be used to provide transfer the restoring force that inclines, and limits setting range, and the rollover that prevents to topple guarantees to transfer platform and accent the stablizing of relative position between the platform base that incline that incline.
Wherein, transfer the platform base that inclines to comprise and transfer incline air film air vent and inner air path; Some accent air film air vent that inclines is set around accent inclines the upper surface of platform base, transfers the air film air vent that inclines to be connected through inner air path and the accent platform base air supply pipe that inclines; The aligning platform comprise Y to aligning air film air vent, X to aligning air film air vent, inner air path, Y is placed in the inner air path both sides to aligning air film air vent and X respectively to aligning air film air vent, and is connected with aligning platform air supply pipe through inner air path.
Accent platform and the accent platform base that inclines that inclines constitutes and transfers the unit that inclines; Incline platform base and aligning platform of accent constitutes the aligning unit.
Its course of work is:
The accent cell operation process of inclining: during the access failure low-pressure air, transfer the platform that inclines to be pressed together on and transfer on the platform base that inclines, transfer the lower surface of the platform that inclines and the upper surface of transferring the platform base that inclines to fit tightly by the self gravitation effect.When work; Low-pressure air is connected; Supply with and transfer the unit that inclines through inner air path and the accent air film air vent that inclines by the accent platform base air supply pipe that inclines; The vent port of air film air vent is minimum because each accent inclines, and low-pressure air is converted into pressure-air discharges, and promptly transfers the air film that inclines at accent formation one deck gas lubrication film as thin as a wafer that inclines between lower surface and the upper surface of transferring the platform base that inclines of platform.At this moment; Three Z that along the circumferential direction arrange to the micrometric displacement generator and near the returning spring of each Z micrometric displacement generator just can join together to drive transfer incline platform in accent inclines platform base almost friction free do around the lift-over of X axle and around the luffing of Y axle along the contour curve of upper and lower surfaces, and then accomplish the accent function of inclining.
Aligning cell operation process: during the access failure low-pressure air, transfer the platform base that inclines to be combined into integral body by self gravitation effect and aligning platform, the incline lower surface of platform base and the upper surface of aligning platform of accent fits tightly.When work, low-pressure air is switched to aligning platform air supply pipe, and low-pressure air is delivered to respectively perpendicular to the Y of inner air path both sides to aligning air film air vent and X to aligning air film air vent via inner air path; Because each aligning air film air vent is minimum; Can low-pressure air be converted into pressure-air and discharge, so just between the upper surface of aligning platform and accent incline the lower surface of platform base, to form one deck gas lubrication film as thin as a wafer between the lower surface of aligning platform and stationary platform face respectively be Y to aligning air film and X to the aligning air film.At this moment, X just can cooperate driving aligning platform to do eccentric adjustment along directions X to the returning spring of micrometric displacement generator and diameter layout; The returning spring that Y arranges to micrometric displacement generator and diameter just can cooperate to drive to be transferred the platform base that inclines almost not have along the Y direction frictionally to do eccentric adjustment, thus the aligning function of completion X, Y direction.
Beneficial effect:
1, a kind of accent on a large scale based on aerostatic bearing technology of the present invention inclines in the aligning worktable; All adopt the aerostatic bearing technology as lubricated and guiding; Almost do not have friction in the adjustment process between moving component, eliminated sluggish, creep and the influence of factor such as backhaul, cooperate micrometric displacement generator with high resolution; Make the accent of apparatus of the present invention incline, aligning resolution improves greatly, possesses high adjustment precision.
2, a kind of accent on a large scale based on aerostatic bearing technology of the present invention aligning worktable that inclines adopts the particular structure form, and each displacement mechanism is easy to spacing, cooperates the micrometric displacement generator of selecting big stroke for use again, can significantly improve transfer incline, the aligning scope.
3, a kind of accent on a large scale of the present invention aligning worktable that inclines based on aerostatic bearing technology; Adopted the aerostatic bearing technology as supporting; The incline self gravitation of platform and aligning platform of accent is cancelled basically; Make to be in course of adjustment, each micrometric displacement generator only need provide very little driving force to accomplish and transfer incline, the aligning action.
4, especially have clean environment again, be easy to safeguard, static pressure gas mould good rigidly, advantage such as load-bearing capacity is strong compared to oil pressure bearing.
5, a kind of accent on a large scale of the present invention aligning worktable that inclines based on aerostatic bearing technology; The design of patent novelty of the present invention multilayer architecture, utilize multi-layer air static pressure air film as support, guiding and lubricated, accent is inclined and the aligning function is integrated as a whole; Optimized the structure of transferring the aligning worktable that inclines; And transfer the aligning that inclines easy and simple to handle, functional strong, be easy to realize that the aligning accent of control automatically inclines.
Description of drawings
Fig. 1 is a kind of front view of transferring the aligning Working table structure that inclines on a large scale based on the aerostatic bearing technology of the present invention;
Fig. 2 is a kind of vertical view of transferring the aligning Working table structure that inclines on a large scale based on the aerostatic bearing technology of the present invention;
Fig. 3 is a kind of accent of transferring the aligning worktable that inclines on a large scale based on aerostatic bearing technology of the present invention fundamental diagram that inclines;
Fig. 4 is a kind of aligning fundamental diagram of transferring the aligning worktable that inclines on a large scale based on the aerostatic bearing technology of the present invention;
Fig. 5 is a kind of embodiment 1 front view of transferring the aligning worktable that inclines on a large scale based on the aerostatic bearing technology of the present invention;
Fig. 6 is a kind of embodiment 1 vertical view of transferring the aligning worktable that inclines on a large scale based on the aerostatic bearing technology of the present invention;
Fig. 7 is a kind of embodiment 2 front views of transferring the aligning worktable that inclines on a large scale based on the aerostatic bearing technology of the present invention;
Fig. 8 is a kind of embodiment 2 vertical views of transferring the aligning worktable that inclines on a large scale based on the aerostatic bearing technology of the present invention;
Among the figure; 1-workpiece for measurement, 2-transfer the platform that inclines, 3-Y to micrometric displacement generator, 4-transfer the platform base that inclines, 5-aligning platform, 6-X to micrometric displacement generator, 7-X to aligning air film, 8-Y to aligning air film, 9-Z to micrometric displacement generator, 10-transfer the air film that inclines, 11-transfer the platform base air supply pipe that inclines, 12-aligning platform air supply pipe, 13-transfer the air film air vent that inclines, 14-Y to aligning air film air vent, 15-X to aligning air film air vent, 16-X to guiding device, 17-Y to guiding device, 18-returning spring.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further specified.
A kind of large scale and high accuracy based on aerostatic bearing technology of the present invention is transferred the aligning device that inclines, comprise transfer the platform 2 that inclines, transfer the platform base 4 that inclines, aligning platform 5, X to micrometric displacement generator 6, Y to micrometric displacement generator 3, Z to micrometric displacement generator 9, X to guiding device 16, Y to guiding device 17, several returning springs 18; Like Fig. 5, shown in Figure 6.
Accent platform 2 and the accent platform base 4 that inclines that inclines constitutes and transfers the unit that inclines; Incline platform base 4 of accent constitutes the aligning unit with aligning platform 5.
Transfer the aligning device that inclines to be positioned on the micro swivel a kind of large scale and high accuracy of the present invention based on the aerostatic bearing technology.
Accent inclines in the functional unit; The incline upper surface of platform base 4 of accent is set to have the concave spherical surface of suitable radian; Some accent air film air vent 13 that inclines is set around the circumference on concave spherical surface, transfers the air film air vent 13 that inclines to be connected by inner air path and the accent platform base air supply pipe 11 that inclines.Simultaneously, transfer the lower surface of the platform 2 that inclines accurately to be processed into the protruding sphere identical, make it complementary, be placed in again and transfer on the platform base 4 that inclines with the concave spherical surface radian of transferring the platform base 4 that inclines, as shown in Figure 5.Three Z to 9 actings in conjunction of micrometric displacement generator in the accent platform 2 that inclines; One of them Z is placed on 1 a on the Y axle to the micrometric displacement generator; And the distance of this point and true origin O is d; Two other micrometric displacement generator along the circumferential direction is arranged symmetrically in the b point and the c point of Y axle both sides with what equate apart from d respectively, and is as shown in Figure 6; Be used to adjust and incline platform around the lift-over of X axle with around the pitching of Y axle.Near micrometric displacement generator 9, dispose three returning springs again as the pretightning force generation device at each Z, be used to provide and transfer the restoring force that inclines, limit setting range, rollover prevents to topple.Returning spring also can guarantee to transfer platform 2 and transfer the stable of relative position between the platform base 4 that incline that incline.
During the access failure low-pressure air, transfer the platform 2 that inclines to be pressed together on and transfer on the platform base 4 that inclines, transfer the protruding sphere of the platform 2 that inclines and the concave spherical surface of transferring the platform base 4 that inclines to fit tightly by the self gravitation effect.When work; Low-pressure air is connected; Supplied with and transferred the unit that inclines by incline platform base air supply pipe 11 of accent, deliver to via inner air path that each transfers the air film air vent 13 that inclines on the circumference again, the vent port of air film air vent 13 is minimum because each accent inclines; Low-pressure air is converted into pressure-air discharges, promptly transfer the air film 10 that inclines at accent formation one deck gas lubrication film as thin as a wafer that inclines between protruding sphere and the concave spherical surface of transferring the platform base 4 that inclines of platform 2.At this moment; Three Z that along the circumferential direction arrange to micrometric displacement generator 9 and returning spring just can join together to drive transfer incline platform 2 in accent inclines platform base 4 almost the lift-over done around the X axle along the contour curve of concave spherical surface (or protruding sphere) of friction free reach luffing around the Y axle; And then accomplish and transfer the function of inclining, as shown in Figure 3.
In the aligning functional unit, aligning platform 5 bead highly are not higher than and transfer the platform base 4 that inclines, and are used to limit the setting range of transferring the platform base 4 that inclines.Aligning platform 5 is transferred and is inclined platform base 4 as the performance element of Y to aligning as the performance element of X to aligning.The lower surface of aligning platform 5 is provided with some X to aligning air film air vent 15 on circumference; The upper surface of aligning platform 5 is provided with some Y to aligning air film air vent 14 at circumference equally, and each aligning air film air vent is connected with aligning platform air supply pipe 12 by inner air path.The accent platform base 4 that inclines is placed on the aligning platform 5 again.X along the circumferential direction is arranged to as shown in Figure 6 form with Y to micrometric displacement generator 3 to micrometric displacement generator 6, and wherein, X cooperates the returning spring of arranging with its diameter to act on aligning platform 5 to micrometric displacement generator 6, is used to adjust the off-centre along directions X; Y acts on to the returning spring that micrometric displacement generator 3 cooperates and its diameter is arranged and transfers the platform base 4 that inclines, and is used to adjust the off-centre along the Y direction.Each returning spring is used to limit setting range, and the adjustment restoring force is provided, and guarantees stablizing of relative position between aligning platform 5 and the aligning platform base 4.
During the access failure low-pressure air, transfer the platform base 4 that inclines to be combined into integral body by self gravitation effect and aligning platform 5, the incline lower surface of platform base 4 and the upper surface of aligning platform 5 of accent fits tightly.When work; Low-pressure air is switched to aligning platform air supply pipe 12; Low-pressure air is delivered to each Y each X on aligning air film air vent 14 and aligning platform 5 lower surface circumference on the aligning platform 5 upper surface circumference respectively to aligning air film air vent 15 via inner air path; Because each aligning air film air vent is minimum; Can low-pressure air be converted into pressure-air and discharge, so just between the upper surface of aligning platform 5 and accent incline the lower surface of platform base 4, to form one deck gas lubrication film as thin as a wafer between the lower surface of aligning platform 5 and stationary platform face respectively be Y to aligning air film 8 and X to aligning air film 7.At this moment, X just can cooperate driving aligning platform 5 almost not have the off-centre frictionally done adjustment along directions X to micrometric displacement generator 6 and returning spring; Y just can cooperate to drive to micrometric displacement generator 3 and returning spring and transfers the platform base 4 that inclines almost not have along the Y direction frictionally to do eccentric adjustment, thereby accomplishes the aligning function of X, Y direction, and is as shown in Figure 4.
The above two functional unit is combined, low-pressure air source of the gas input is provided respectively, can accomplish simultaneously to transfer and incline, transfer around the pitching of Y axle and incline and along the aligning function of X, Y direction around the lift-over of X axle.
A kind of large scale and high accuracy based on aerostatic bearing technology of the present invention is transferred the aligning device that inclines, comprise transfer the platform 2 that inclines, transfer the platform base 4 that inclines, aligning platform 5, X to micrometric displacement generator 6, Y to micrometric displacement generator 3, Z to micrometric displacement generator 9, X to guiding device 16, Y to guiding device 17, several returning springs 18; Like Fig. 7, shown in Figure 8.
Accent platform 2 and the accent platform base 4 that inclines that inclines constitutes and transfers the unit that inclines; Incline platform base 4 of accent constitutes the aligning unit with aligning platform 5.
Transfer the aligning device that inclines to be positioned on the micro swivel a kind of large scale and high accuracy of the present invention based on the aerostatic bearing technology.
Accent inclines in the functional unit; The incline upper surface of platform base 4 of accent is set to the recessed cylinder of suitable radius-of-curvature; And transfer the lower surface of the platform 2 that inclines accurately to be processed into the projection face identical with the recessed cylindrical curvature of transferring the platform base 4 that inclines; On accent inclines the recessed cylinder of platform base 4, two row are set again and transfer the air film air vent 13 that inclines, transfer the air film air vent 13 that inclines to be connected by inner air path and the accent platform base air supply pipe 11 that inclines by certain distance.Simultaneously, transfer the lower surface of the platform 2 that inclines accurately to be processed into and the identical projection face of recessed cylinder radian of transferring the platform base 4 that inclines, make it complementary, be placed in again and transfer on the platform base 4 that inclines, as shown in Figure 7.Three Z to 9 actings in conjunction of micrometric displacement generator in the accent platform 2 that inclines; One of them Z is placed on 1 a ' on the Y axle to the micrometric displacement generator; And the distance of this point and true origin O is d '; Two other micrometric displacement generator along the circumferential direction is arranged symmetrically in and c ' point of Y axle both sides with what equate at b ' apart from d ' respectively, and is as shown in Figure 8; Be used to adjust and incline platform around the lift-over of X axle with around the pitching of Y axle.Near micrometric displacement generator 9, dispose three returning springs again as the pretightning force generation device at each Z, be used to provide and transfer the restoring force that inclines, limit setting range, rollover prevents to topple.Returning spring also can guarantee to transfer platform 2 and transfer the stable of relative position between the platform base 4 that incline that incline.
During the access failure low-pressure air, transfer the platform 2 that inclines to be pressed together on and transfer on the platform base 4 that inclines, transfer the projection face of the platform 2 that inclines and the recessed cylinder of transferring the platform base 4 that inclines to fit tightly by the self gravitation effect.When work, low-pressure air is inclined after platform base air supply pipe 11 connects by accent, is supplied with and is transferred the unit that inclines by the accent platform base air supply pipe 11 that inclines; Deliver to via inner air path again and respectively transfer the air film air vent 13 that inclines on the circumference; The vent port of air film air vent 13 is minimum because each accent inclines, and low-pressure air is converted into pressure-air discharges, be the projection face owing to transfer the lower surface of the platform 2 that inclines; And transfer the upper surface of the platform base 4 that inclines is recessed cylinder, thereby the accent that the forms air film 10 that inclines is one deck semi-cylindrical air film as thin as a wafer.At this moment; Three Z that along the circumferential direction arrange to micrometric displacement generator 9 and returning spring just can join together to drive transfer incline platform 2 in accent inclines platform base 4 almost the lift-over done around the X axle along the contour curve of recessed cylinder (or projection face) of friction free reach luffing around the Y axle; And then accomplish and transfer the function of inclining, as shown in Figure 3.
In the aligning functional unit, aligning platform 5 bead highly are not higher than and transfer the platform base 4 that inclines, and are used to limit the setting range of transferring the platform base 4 that inclines.Aligning platform 5 is transferred and is inclined platform base 4 as the performance element of Y to aligning as the performance element of X to aligning.The lower surface of aligning platform 5 is provided with some X to aligning air film air vent 15 on circumference; The upper surface of aligning platform 5 is provided with some Y to aligning air film air vent 14 at circumference equally, and each aligning air film air vent is connected with aligning platform air supply pipe 12 by inner air path.The accent platform base 4 that inclines is placed on the aligning platform 5 again.X along the circumferential direction is arranged to as shown in Figure 8 form with Y to micrometric displacement generator 3 to micrometric displacement generator 6, and wherein, X cooperates the returning spring of arranging with its diameter to act on aligning platform 5 to micrometric displacement generator 6, is used to adjust the off-centre along directions X; Y acts on to the returning spring that micrometric displacement generator 3 cooperates and its diameter is arranged and transfers the platform base 4 that inclines, and is used to adjust the off-centre along the Y direction.Each returning spring is used to limit setting range, and the adjustment restoring force is provided, and guarantees stablizing of relative position between aligning platform 5 and the aligning platform base 4.
During the access failure low-pressure air, transfer the platform base 4 that inclines to be combined into integral body by self gravitation effect and aligning platform 5, the incline lower surface of platform base 4 and the upper surface of aligning platform 5 of accent fits tightly.When work; Low-pressure air is switched to aligning platform air supply pipe 12; Low-pressure air is delivered to each Y each X on aligning air film air vent 14 and aligning platform 5 lower surface circumference on the aligning platform 5 upper surface circumference respectively to aligning air film air vent 15 via inner air path; Because each aligning air film air vent is minimum; Can low-pressure air be converted into pressure-air and discharge, so just between the upper surface of aligning platform 5 and accent incline the lower surface of platform base 4, to form one deck gas lubrication film as thin as a wafer between the lower surface of aligning platform 5 and stationary platform face respectively be Y to aligning air film 8 and X to aligning air film 7.At this moment, X just can cooperate driving aligning platform 5 almost not have the off-centre frictionally done adjustment along directions X to micrometric displacement generator 6 and returning spring; Y just can cooperate to drive to micrometric displacement generator 3 and returning spring and transfers the platform base 4 that inclines almost not have along the Y direction frictionally to do eccentric adjustment, thereby accomplishes the aligning function of X, Y direction, and is as shown in Figure 5.
The above two functional unit is combined, low-pressure air source of the gas input is provided respectively, can accomplish simultaneously to transfer and incline and along the aligning function of X, Y direction around the corner of X axle.
More than combine the accompanying drawing specific embodiments of the invention to be described; But these explanations can not be understood that to have limited scope of the present invention; Protection scope of the present invention is limited the claims of enclosing, and any change on claim of the present invention basis all is protection scope of the present invention.
Claims (8)
1. the large scale and high accuracy based on aerostatic bearing technology is transferred the aligning device that inclines, and it is characterized in that: comprise transfer the platform (2) that inclines, transfer the platform base (4) that inclines, aligning platform (5), X to micrometric displacement generator (6), Y to micrometric displacement generator (3), Z to micrometric displacement generator (9), X to guiding device (16), Y to guiding device (17), several returning springs (18); Its annexation is: the accent platform base (4) that inclines is placed on the aligning platform (5), and the two fits tightly during the access failure low-pressure air; The accent platform base (4) that inclines go up to place is transferred the platform (2) that inclines, and the incline upper surface of platform base (4) of the lower surface of transferring the platform (2) that inclines and accent is the surface of cross sectional shape complementation, and the two fits tightly during the access failure low-pressure air; X to micrometric displacement generator (6), Y to micrometric displacement generator (3) and three Z to micrometric displacement generator (9), be placed on respectively around the worktable, be used for table inclination and eccentric adjustment, wherein X to micrometric displacement generator (6) along X to acting on aligning platform (5); Y transfers incline platform base (4) along Y to acting on to micrometric displacement generator (3); When accent inclines platform (2) around the X axle, when the Y axle is done lift-over or pitching; A Z is installed to micrometric displacement generator (9) on X axle that guarantees at coordinate system or the Y axle; Two Z are installed to micrometric displacement generator (9) in X axle or Y axle symmetria bilateralis again, three Z to micrometric displacement generator (9) acting in conjunction in the accent platform (2) that inclines; X to the guiding device (16) be placed in aligning platform (5) along X to both sides, be used to limit aligning platform (5) moving along directions X; Y to guiding device (17) be placed in transfer incline platform base (4) along Y to both sides, be used to limit aligning platform (5) moving along the Y direction; Placing the returning spring to path position of X to micrometric displacement generator (6), is the restoring force that is used to provide the eccentric adjustment of directions X; Placing the returning spring to path position of Y to micrometric displacement generator (3), is the restoring force that is used to provide the eccentric adjustment of Y direction; Placing near the returning spring of three Z micrometric displacement generator (9), is to be used to provide transfer the restoring force that inclines, and limits setting range, and the rollover that prevents to topple guarantees to transfer platform (2) and accent the stablizing of relative position between the platform base (4) that incline that incline.
2. a kind of accent on a large scale based on aerostatic bearing technology as claimed in claim 1 aligning worktable that inclines is characterized in that: the said accent platform base (4) that inclines comprises and transfers incline air film air vent (13) and inner air path; Some accent air film air vent (13) that inclines is set around accent inclines the upper surface of platform base (4), transfers the air film air vent (13) that inclines to be connected through inner air path and the accent platform base air supply pipe (11) that inclines.
3. a kind of accent on a large scale as claimed in claim 1 aligning worktable that inclines based on aerostatic bearing technology; It is characterized in that: said aligning platform (5) comprise Y to aligning air film air vent (14), X to aligning air film air vent (15), inner air path; Y respectively is placed in inner air path both sides with X to aligning air film air vent (15) to aligning air film air vent (14), and is connected with aligning platform air supply pipe (12) through inner air path.
4. a kind of accent on a large scale based on aerostatic bearing technology as claimed in claim 1 aligning worktable that inclines, it is characterized in that: aligning platform (5) bead highly is not higher than and transfers the platform base (4) that inclines.
5. a kind of accent on a large scale based on aerostatic bearing technology as claimed in claim 1 aligning worktable that inclines is characterized in that: transfer the shape of platform base (4) upper surface that inclines to be preferably hemisphere face or semi-cylindrical etc.
6. a kind of accent on a large scale as claimed in claim 1 aligning worktable that inclines based on aerostatic bearing technology; It is characterized in that: when work; Low-pressure air is connected, and incline lower surface and the accent of platform (2) of described accent inclines and form the accent air film (10) that inclines between the upper surface of platform base (4).
7. a kind of accent on a large scale based on aerostatic bearing technology as claimed in claim 1 aligning worktable that inclines, it is characterized in that: when work, low-pressure air is connected, and forms X between described aligning platform (5) and the rotary table to aligning air film (7).
8. a kind of accent on a large scale as claimed in claim 1 aligning worktable that inclines based on aerostatic bearing technology, it is characterized in that: when work, low-pressure air is connected, and incline platform (2) and accent of described accent inclines between the platform base (4) formation Y to aligning air film (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210065215.2A CN102607628B (en) | 2012-01-13 | 2012-01-13 | Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201210065215.2A CN102607628B (en) | 2012-01-13 | 2012-01-13 | Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102607628A true CN102607628A (en) | 2012-07-25 |
| CN102607628B CN102607628B (en) | 2014-04-09 |
Family
ID=46525219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201210065215.2A Active CN102607628B (en) | 2012-01-13 | 2012-01-13 | Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN102607628B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108036808A (en) * | 2017-12-04 | 2018-05-15 | 兰州空间技术物理研究所 | A kind of high-precision tilt angle Control experiment platform |
| CN111571544A (en) * | 2020-05-07 | 2020-08-25 | 宁波大学 | Three-axis aligning leveling type rotary table |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5383751A (en) * | 1993-08-05 | 1995-01-24 | Vought Aircraft Company | Manually positioned computer controlled drilling machine |
| EP1537978A1 (en) * | 2003-12-04 | 2005-06-08 | ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) | Low pressure thermoforming of thin, optical carriers |
| CN101070879A (en) * | 2007-06-15 | 2007-11-14 | 辽宁科技大学 | Static-pressure supporting spherical self-aligning bearing seat |
| CN202420527U (en) * | 2012-01-13 | 2012-09-05 | 北京理工大学 | Aerostatic bearing technology-based wide-range inclination regulation and aligning workbench |
-
2012
- 2012-01-13 CN CN201210065215.2A patent/CN102607628B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5383751A (en) * | 1993-08-05 | 1995-01-24 | Vought Aircraft Company | Manually positioned computer controlled drilling machine |
| EP1537978A1 (en) * | 2003-12-04 | 2005-06-08 | ESSILOR INTERNATIONAL (Compagnie Générale d'Optique) | Low pressure thermoforming of thin, optical carriers |
| CN101070879A (en) * | 2007-06-15 | 2007-11-14 | 辽宁科技大学 | Static-pressure supporting spherical self-aligning bearing seat |
| CN202420527U (en) * | 2012-01-13 | 2012-09-05 | 北京理工大学 | Aerostatic bearing technology-based wide-range inclination regulation and aligning workbench |
Non-Patent Citations (2)
| Title |
|---|
| 赵维谦等: "《基于两步法超精密圆度仪误差分离系统》", 《中国机械工程》, vol. 11, no. 11, 30 November 2000 (2000-11-30) * |
| 赵维谦等: "《高准确度、高稳定性、宽范围回转体自动定心系统的研究》", 《仪器仪表学报》, vol. 20, no. 5, 31 October 1999 (1999-10-31) * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108036808A (en) * | 2017-12-04 | 2018-05-15 | 兰州空间技术物理研究所 | A kind of high-precision tilt angle Control experiment platform |
| CN111571544A (en) * | 2020-05-07 | 2020-08-25 | 宁波大学 | Three-axis aligning leveling type rotary table |
| CN111571544B (en) * | 2020-05-07 | 2022-02-11 | 宁波大学 | Three-axis aligning leveling type rotary table |
Also Published As
| Publication number | Publication date |
|---|---|
| CN102607628B (en) | 2014-04-09 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US9423000B2 (en) | Magnetically suspended vibration isolator with zero stiffness whose angle degree of freedom is decoupled with a joint ball bearing | |
| KR101795160B1 (en) | Hydrostatic pressure guide mechanism and machine tool | |
| CN101586626B (en) | Ultraprecise electrohydraulic servo-controlled dynamic-static pressure bearing and feed mechanism | |
| US9429208B2 (en) | Vibration isolator with zero stiffness whose angle degree of freedom is decoupled with spherical air bearing | |
| CN104981891B (en) | Table device and conveying device | |
| US9316472B2 (en) | Slide guide device | |
| CN104303282B (en) | Table device and conveyance device | |
| CN202420527U (en) | Aerostatic bearing technology-based wide-range inclination regulation and aligning workbench | |
| CN104396000A (en) | Table device and carrier device | |
| CN102607628A (en) | Wide-range tilt-adjusting and aligning workbench based on aerostatic bearing technology | |
| CN103487212A (en) | Axis adjustable vertical type mechanical seal test stand | |
| CN103123256A (en) | Air flotation type detection immobilization device | |
| CN201521556U (en) | Hybrid spindle structure adopting electro-hydraulic servo valve for control | |
| CN1768392A (en) | Supporting unit, and moving table device and linear-motion guiding device using the supporting unit | |
| CN110230642B (en) | Novel hydrostatic thrust bearing device | |
| CN106573353A (en) | Automatic workpiece centering apparatus and automatic centering method | |
| CN203432801U (en) | Performance test experiment table for static-pressure gas antithrust bearing | |
| CN112815847B (en) | Microgravity environment simulation driving mechanism | |
| CN103465258A (en) | Three-degree-of-freedom precision adjustment device based on flexible hinges | |
| CN104070518B (en) | A kind of Three-degree-of-freeprecision precision adjustment device based on eccentric structure | |
| CN101234471B (en) | Roll machining apparatus | |
| CN101070879A (en) | Static-pressure supporting spherical self-aligning bearing seat | |
| CN103234667A (en) | Test method of air-suspending frictionless cylinder | |
| CN114179425A (en) | Movable beam leveling structure and hydraulic press | |
| CN107228127A (en) | A kind of air-bearing |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |