CN104396000B - Table device and carrier device - Google Patents
Table device and carrier device Download PDFInfo
- Publication number
- CN104396000B CN104396000B CN201380003286.2A CN201380003286A CN104396000B CN 104396000 B CN104396000 B CN 104396000B CN 201380003286 A CN201380003286 A CN 201380003286A CN 104396000 B CN104396000 B CN 104396000B
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- workbench
- bearing components
- table device
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- 230000005484 gravity Effects 0.000 description 10
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- 238000010438 heat treatment Methods 0.000 description 8
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- 238000001514 detection method Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 5
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- 230000005489 elastic deformation Effects 0.000 description 4
- 238000005096 rolling process Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 3
- 238000003754 machining Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
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Classifications
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
- A47B13/00—Details of tables or desks
- A47B13/08—Table tops; Rims therefor
- A47B13/081—Movable, extending, sliding table tops
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
- A47B9/00—Tables with tops of variable height
-
- A—HUMAN NECESSITIES
- A47—FURNITURE; DOMESTIC ARTICLES OR APPLIANCES; COFFEE MILLS; SPICE MILLS; SUCTION CLEANERS IN GENERAL
- A47B—TABLES; DESKS; OFFICE FURNITURE; CABINETS; DRAWERS; GENERAL DETAILS OF FURNITURE
- A47B9/00—Tables with tops of variable height
- A47B9/10—Tables with tops of variable height with vertically-acting fluid cylinder
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
- B23Q1/25—Movable or adjustable work or tool supports
- B23Q1/64—Movable or adjustable work or tool supports characterised by the purpose of the movement
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/02—Sliding-contact bearings
- F16C29/025—Hydrostatic or aerostatic
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C29/00—Bearings for parts moving only linearly
- F16C29/04—Ball or roller bearings
- F16C29/06—Ball or roller bearings in which the rolling bodies circulate partly without carrying load
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C32/00—Bearings not otherwise provided for
- F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
- F16C32/0603—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
- F16C32/0614—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70716—Stages
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70816—Bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
- F16C2322/00—Apparatus used in shaping articles
- F16C2322/39—General buildup of machine tools, e.g. spindles, slides, actuators
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Environmental & Geological Engineering (AREA)
- Public Health (AREA)
- Epidemiology (AREA)
- Health & Medical Sciences (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
- Machine Tool Units (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Bearings For Parts Moving Linearly (AREA)
- Details Of Measuring And Other Instruments (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
Abstract
A table device (100) is provided with: a first member (1) which is movable within a predetermined surface; a second member (2) which is relatively movable with respect to the first member; a first guiding device (4) for which at least a portion is disposed on the first member, and which guides the second member so that the second member moves in a direction parallel to a first axis which is orthogonal to the predetermined surface by way of movement of the first member; a table (10) supported by the second member; a third member (3) connected to at least a portion of the table; bearing members (5) which have a first supply opening capable of supplying gas to between the third member and the bearing members, and which form gas bearings between the third member and the bearing members by way of the gas supplied from the first supply opening so as to support the third member so as to be movable in a direction parallel to the first axis; and a supporting device (19) comprising a parallel pin (20) used for supporting the table. The parallel pin (20) is configured to be parallel to the first axis, and is used for connecting the second member and the table. The table is supported by the second member via the supporting device.
Description
Technical field
The present invention relates to table device and conveying device.
Background technology
In conveying device, employ work for example as disclosed in Patent Document 1, that there is the workbench that can move
Table apparatus.
Prior art literature
Patent document
Patent document 1：Japanese Unexamined Patent Publication 2004-195620
Content of the invention
Problems to be solved by the invention
Table device moves on target track although being set to workbench to be made, but if this workbench from
Target track departs from, then the performance of the conveying device of this table device is likely to decrease.For example although being set to work to be made
Platform moves in vertical as the crow flies, but if this workbench does not move as the crow flies, the positioning precision of workbench reduces, and carries
The object being placed in this workbench is possible to not configure in desired position.
It is an object of the invention to provide the work that workbench departs from from target track or positioning precision reduces can be suppressed
Make table apparatus and conveying device.
For solution to problem
The table device of the present invention for achieving the object above includes：1st component, it can move in predetermined surface
Dynamic；2nd component, it can be with respect to above-mentioned 1st component relative movement；1st guide, it is configured at above-mentioned at least partially
1st component, and so that above-mentioned 2nd component is put down along the 1st axis orthogonal with above-mentioned predetermined surface with the movement by above-mentioned 1st component
The mode of the direction movement of row guides above-mentioned 2nd component；Workbench, it is supported on above-mentioned 2nd component；3rd component, its connection
At least a portion in above-mentioned workbench；Bearing components, it is using the gas to supply between this bearing components and above-mentioned 3rd component
Body forms gas bearing between this bearing components and above-mentioned 3 components, can make above-mentioned 3rd component edge and above-mentioned 1st axis
The mode of parallel direction movement supports above-mentioned 3rd component；And supporting arrangement, it includes parallel pin, and is used for supporting above-mentioned
Workbench, this parallel pin is configured to and above-mentioned 1st diameter parallel, and is used for linking above-mentioned 2nd component and above-mentioned workbench, above-mentioned
Workbench is supported on above-mentioned 2nd component by above-mentioned supporting arrangement.
Thus, by the gas bearing being formed between the 3rd component and bearing components, it is connected with the workbench of the 3rd component
Can move on target track.For example, in order that the 3rd component with the direction of the 1st diameter parallel on move as the crow flies, bearing
Component is can make to support in the way of the 3rd component is mobile（Guiding）3rd component, thus be connected with the work of the 3rd component
Platform can with the direction of the 1st diameter parallel on move as the crow flies.That is, utilization can form the bearing components of gas bearing, suppression
Make the linear reduction in the 3rd component and the movement of workbench.That is, by forming gas between the 3rd component and bearing components
Body bearing, makes bearing components support the 3rd component in a non contact fashion.Thus, the 3rd component can swimmingly be put down along with the 1st axis
The direction of row is moved.When bearing components are contacted with the 3rd component it is possible to mobile generation resistance to the 3rd component.Its knot
Fruit is although be set to workbench to be made and the 3rd component moves as the crow flies, but workbench and the 3rd component are possible to not as the crow flies
Mobile.In addition, when bearing components are contacted with the 3rd component it is possible to produce vibration because of the movement of the 3rd component.In the 3rd structure
When part produces vibration, workbench is also carried out vibrating, as a result, the positioning precision of workbench is likely to decrease.In the present invention, by
In bearing components in a non contact fashion and can make to support the 3rd component in the way of the 3rd component is mobile, therefore workbench and the
3 components can move as the crow flies.And, the generation of vibration is inhibited.As a result, the reduction of the positioning precision of workbench obtains
Suppression, by workbench and can be supported on the object configuration of this workbench in target location.In addition, according to the present invention, propping up and take up
Put including parallel pin, the 2nd component is linked together by parallel pin with workbench.Thus, it is ensured that workbench and supporting arrangement
（Parallel pin）Between relative position and the 2nd component and supporting arrangement（Parallel pin）Between relative position it is suppressed that work
Loosening between loosening between platform and supporting arrangement or the 2nd component and supporting arrangement.In addition, according to the present invention, workbench by
Supporting arrangement including parallel pin flexibly supports.Thus, for example, even if the 2nd component carries out undesirable movement（Vibration）,
This undesirable movement can be suppressed using supporting arrangement（Vibration）To workbench transmission.
In the table device of the present invention, above-mentioned bearing components have the side to this bearing components and above-mentioned 3rd component
1st supply mouth of supply gas between face, the moving range on the direction with above-mentioned 1st diameter parallel of above-mentioned 3rd component
Interior, above-mentioned 1st supply mouth continues relative with the side of above-mentioned 3rd component.
Thus, in the moving range of the 3rd component, can persistently form gas axle between the 3rd component and bearing components
Hold, be able to maintain that the contactless state between the 3rd component and bearing components.
In the table device of the present invention, with the direction of above-mentioned 1st diameter parallel on, the size of above-mentioned 3rd component
Size more than above-mentioned bearing components.
Thus, it is possible to the 3rd component that swimmingly upper end by workbench with from bearing components projects couples together.Separately
Outward, the 3rd component also projects from the bottom of bearing components, thus the quality between the upper end side of bearing components and bottom side
（Weight）Balance improve.Thus, the 3rd component can move as the crow flies.
In the table device of the present invention, in the moving range of above-mentioned 3rd component, with above-mentioned 1st diameter parallel
Direction on, the center of above-mentioned 3rd component persistently configures between the one end of above-mentioned bearing components and the other end.
Thus, even if in the movement of the 3rd component, due to the quality between the upper end side of bearing components and bottom side
（Weight）Balance improve, the therefore the 3rd component also can move as the crow flies.
In the table device of the present invention, the profile in the section parallel with above-mentioned predetermined surface of above-mentioned 3rd component is circle
Shape.
Thus, in the manufacture of the 3rd component, higher machining accuracy can be readily available, mesh can be readily available
Mark shape.Therefore, the uneven situation of size being formed at the gap between the side of the 3rd component and bearing components is pressed down
System.Thus, the reduction being formed at the performance of gas bearing between the 3rd component and bearing components is inhibited, and the 3rd component is from mesh
The situation that mark track departs from movement is inhibited.
In the table device of the present invention, above-mentioned 3rd component is at least configured with two, and is connected to above-mentioned work
1st position of platform and 2nd position different from above-mentioned 1st position of above-mentioned workbench.
Thus, suppress the rotation of such as workbench using multiple 3rd components being connected to workbench.Thus, workbench
Positioning precision improves.
In the table device of the present invention, above-mentioned 1st component is along the direction with the 2nd diameter parallel in above-mentioned predetermined surface
Mobile, this table device includes the suppression for suppressing the movement on the direction with above-mentioned 2nd diameter parallel of above-mentioned 2nd component
Component processed.
Thus, even if the 1st component moves along the direction with the 2nd diameter parallel, the 2nd component is along the side with the 2nd diameter parallel
Also it is inhibited to the situation of movement.Thus, the movement on the direction with the 2nd diameter parallel of the 1st component is efficiently changed
For the movement on the direction with the 1st diameter parallel of the 2nd component.
In the table device of the present invention, this table device has the 2nd guide, and the 2nd guide is extremely
A few part is configured at above-mentioned suppression component, and the 2nd guide is used for along the direction guiding with above-mentioned 1st diameter parallel
State the 2nd component.
Thus, the 2nd component moves can by the 2nd guide means guide and along the direction with the 1st diameter parallel.By the 2nd
Component moves along with the direction of the 1st diameter parallel, make to be supported on the workbench of the 2nd component also can together with the 2nd component edge
Move with the direction of the 1st diameter parallel.
In the table device of the present invention, above-mentioned 3rd component has upper and lower surface, and above-mentioned upper surface side is extremely
A few part is connected to above-mentioned workbench, and this table device includes：Actuator, it produces and is used for making above-mentioned 1st component move
Power；And gravity-compensated device, its be configured to the lower surface of above-mentioned 3rd component faced by space facing, and have
There is the 2nd supply mouth for stating space supply gas upwards.
Thus, by from the 2nd supply mouth to the lower surface of the 3rd component faced by space supply gas, workbench
Weight mitigates to the effect of actuator.That is, in order to reduce the power being delivered to actuator under gravity from workbench, gravity
From the 2nd supply mouth to space supply gas, the load therefore putting on actuator reduces compensation device.Therefore, actuator send out
Heat is inhibited, and the thermal deformation of the component of the surrounding of actuator is inhibited.Further, since the heat change of the component of table device
Shape is inhibited, and the reduction of the therefore positioning precision of workbench is inhibited, and the reduction of the performance of table device is inhibited.
In the table device of the present invention, this table device includes supporting member, and it is used for supporting above-mentioned bearing structure
Part, at least a portion of this supporting member is configured at around above-mentioned 3rd component and above-mentioned bearing components, above-mentioned 2nd supply mouth
The supply gas into the space being limited by the above-mentioned lower surface of the 3rd component and the inner surface of above-mentioned supporting member.
Thus, due to the lower surface by the 3rd component and supporting member inner surface closing space in supply gas, because
This can be using the pressure of the gas adjustment space well from the 2nd supply mouth supply.
In the table device of the present invention, above-mentioned gravity-compensated device from above-mentioned 2nd supply mouth supply gas so that
Above-mentioned lower surface faced by space pressure be higher than above-mentioned supporting member the space in outside pressure.
Thus, gravity-compensated device can apply power upward to the 3rd component and workbench, with eliminate because workbench from
Heavy and the effect towards below vertical power.Therefore, the load putting on actuator is made to reduce.
The conveying device of the present invention for achieving the object above includes above-mentioned table device.
Thus, the object that conveying device can will bear upon workbench is transported to target location.
The semiconductor- fabricating device of the present invention for achieving the object above includes above-mentioned table device.
Thus, semiconductor- fabricating device due to the object in target location for the configuration can be processed, therefore from this thing
The situation that system produces bad products is inhibited.In addition, semiconductor- fabricating device includes such as exposure device, set in semiconductor
Use at least a portion operation of standby manufacturing process.
The flat panel display manufacturing apparatus of the present invention for achieving the object above include above-mentioned table device.
Thus, flat panel display manufacturing apparatus due to the object in target location for the configuration can be processed, therefore from
The situation that this object produces bad products is inhibited.In addition, flat panel display manufacturing apparatus include such as exposure device,
Use at least a portion operation of the manufacturing process of flat-panel monitor.Flat-panel monitor includes liquid crystal display, plasma shows
Show at least one of device and organic el display.
The effect of invention
Table device according to the present invention and conveying device, the situation that workbench departs from from target track is inhibited,
The reduction of positioning precision is inhibited.
Brief description
Fig. 1 is the front view of of the table device representing present embodiment.
Fig. 2 is the line A-A direction view of Fig. 1.
Fig. 3 is the side view of of the table device representing present embodiment.
Fig. 4 is the side view of of the table device representing present embodiment.
Fig. 5 is the figure after amplifying a part of Fig. 1.
Fig. 6 is the figure of of the guide representing present embodiment.
Fig. 7 is the sectional view of of the gas bearing representing present embodiment.
Fig. 8 is the sectional view of of the gas bearing representing present embodiment.
Fig. 9 is the figure of of the action of the table device representing present embodiment.
Figure 10 is the figure of of the supporting arrangement representing present embodiment.
Figure 11 is the sectional view of of the gas bearing representing present embodiment.
Figure 12 is the figure of that represents the conveying device of present embodiment and semiconductor- fabricating device.
Figure 13 is the figure of that represents the conveying device of present embodiment and check device.
Specific embodiment
Hereinafter, with reference to the accompanying drawings of embodiments of the present invention, but the present invention is not limited to this.Hereinafter illustrate is each
The important document of individual embodiment can suitably be combined.Additionally, there is also the situation not using a part of inscape.With
In lower explanation, set XYZ orthogonal coordinate system, the position relationship in each portion is described with reference to this XYZ orthogonal coordinate system.By in horizontal plane
One direction is set to X-direction, and direction orthogonal with X-direction in the horizontal plane is set to Y direction, will respectively with X-axis side
To the direction orthogonal with Y direction（I.e. vertical）It is set to Z-direction.Additionally, by the rotation around X-axis, Y-axis and Z axis（Incline
Tiltedly）Direction is set to θ X-direction, θ Y-direction and θ Z-direction.X-axis is orthogonal with YZ plane.Y-axis is orthogonal with XZ plane.Z axis with
X/Y plane is orthogonal.
Fig. 1 is the figure of of the table device 100 representing present embodiment.Fig. 2 is the line A-A direction view of Fig. 1.
Fig. 3 is the figure that the table device 100 observing Fig. 1 from-X side obtains.Fig. 4 is the table device observing Fig. 1 from+X side
100 figures obtaining.Fig. 5 is the figure after amplifying a part of Fig. 1.
Table device 100 includes：Workbench 10, it being capable of bearing objects S；1st component 1, it can be in X/Y plane
（In horizontal plane）Mobile；2nd component 2, it can be with respect to the 1st component 1 relative movement；Guide 4, it is joined at least partially
Be placed in the 1st component 1, and by the movement by the 1st component 1 make the 2nd component 2 along Z-direction movement by way of guide the 2nd component 2；
3rd component 3, it is connected at least a portion of workbench 10；Bearing components 5, form gas axle at it and the 3rd component 3 between
Hold 5G, and support the 3rd component 3 in the way of can moving along Z-direction；And supporting arrangement 19, it is used for flexibly supporting
Workbench 10.Bearing components 5 have can be to the supply mouth 15 of supply gas between the 3rd component 3, using from this supply mouth 15
The gas of supply, forms gas bearing 5G between the 3rd component 3, and supports the 3rd component 3 in a non contact fashion.Workbench
10 are supported on the 2nd component 2 by supporting arrangement 19.
Additionally, table device 100 includes：Supporting member 6, it is used for bearing support component 5；Actuator 7, it produces uses
In the power making the 1st component 1 movement；And gravity-compensated device 60, it is used for reducing the weight of workbench 10 to actuator 7
Effect.Gravity-compensated device 60 has the supply mouth 62 being capable of supply gas, from this supply mouth 62 supply gas, reduces workbench
The effect to actuator 7 for 10 weight.
Additionally, table device 100 includes base component 8.In the present embodiment, base component 8 includes the 1st pedestal structure
Part 81 and the 2nd base component 82 for supporting the 1st base component 81.Base component 8 configures and is for example arranging table device
100 facility（Such as factory）Ground etc. on.
Workbench 10 is supported on the 2nd component 2.3rd component 3 is connected at least a portion of workbench 10.Workbench 10 has
There are the upper surface 10A towards +Z direction and the rightabout towards upper surface 10A（-Z direction）Lower surface 10B.Object S carries
It is placed in the upper surface 10A of workbench 10.Upper surface 10A being capable of bearing objects S.
1st component 1, the 2nd component 2 and the 3rd component 3 are respectively arranged at the lower surface 10B side of workbench 10（- Z side）.
2nd component 2 is in the lower surface 10B side of workbench 10（- Z side）Supporting table 10.3rd component 3 is connected under workbench 10
Surface 10B.
1st component 1, the 2nd component 2 and the 3rd component 3 are movable link respectively.1st component 1, the 2nd component 2 and the 3rd
Component 3 is respectively in the space of the lower section of workbench 10（The space of-Z side）Interior movement.1st component 1, the 2nd component 2 and the 3rd structure
Part 3 space above base component 8 respectively（The space of+Z side）Interior movement.
1st component 1 can move in X/Y plane.In the present embodiment, the 1st component 1 can move along X-direction.
Profile in XZ plane for 1st component 1 is in general triangular（Wedge shape）.As shown in Figure 1 and Figure 5, the 1st component 1 is had and is put down with XY
The parallel lower surface 1B in face, inclined-plane 1G and the side 1S parallel with Z axis with respect to X/Y plane inclination.Inclined-plane 1G and side 1S
It is configured at more upper than lower surface 1B（+ Z side）Position.Inclined-plane 1G is towards +X direction upward（+Z direction）Tilt.Tiltedly
The bottom of face 1G is linked together with the end of-X side of lower surface 1B.The upper end of inclined-plane 1G and the upper end of side 1S
Link together.The bottom of side 1S is linked together with the end of+X side of lower surface 1B.
2nd component 2 is supported on the 1st component 1 in the way of can moving.1st component 1 can relative move with the 2nd component 2
Dynamic.2nd component 2 is above the 1st component 1（+ Z side）Carry out relative movement with respect to the 1st component 1.
2nd component 2 can move along at least Z-direction.In the present embodiment, in the X-direction by the 1st component 1
Movement, the 2nd component 2 along Z-direction move.Profile in XZ plane for 2nd component 2 is in general triangular（Wedge shape）.As Fig. 1
With shown in Fig. 5, the 2nd component 2 has the upper surface 2A parallel with X/Y plane, inclined-plane 2G and and Z with respect to X/Y plane inclination
The parallel side 2S of axle.Upper surface 2A configures more upper than side 2S and inclined-plane 2G（+ Z side）Position.Inclined-plane 2G direction+
X-direction and upward（+Z direction）Tilt.In the present embodiment, inclined-plane 1G is parallel with inclined-plane 2G.The upper end of inclined-plane 2G with
The end of+X the side of upper surface 2A links together.The bottom of inclined-plane 2G is linked together with the bottom of side 2S.Side
The upper end of 2S is linked together with the end of-X side of upper surface 2A.
Guide 4 by the movement in the X-direction by the 1st component 1 make the 2nd component 2 along Z-direction movement by way of
Guide the 2nd component 2.At least a portion of guide 4 is configured at the 1st component 1.In the present embodiment, guide 4 includes
Be configured at the 1st component 1 guide rail 41 and be configured at the 2nd component 2 and can on guide rail 41 movement sliding part 42.Guide rail 41
It is configured at the inclined-plane 1G of the 1st component 1.Sliding part 42 is configured at the inclined-plane 2G of the 2nd component 2.
Guide 4 includes the bearing of direct acting type.In the present embodiment, guide 4 includes rolling bearing.Roll
Bearing has rotor.Rotor include one of ball and roller bearing or both.That is, rolling bearing includes ball bearing and roller bearing axle
One of hold or both.In the present embodiment, guide 4 includes direct acting type ball bearing（linear ball
bearing）.
Fig. 6 is the figure of of the guide 4 representing present embodiment.Guide rail 41 have surface 41A upward,
The side 41B of both sides the being configured at surface 41A and groove 41C being respectively formed in side 41B.Sliding part 42 has can be with guide rail
The 1st relative opposite face 42A of 41 surface 41A, the 2nd opposite face 42B and at least that can be relative with the side 41B of guide rail 41
A part is configured at the rotor in the groove 41C of guide rail 41（Ball）42T.The inner surface of ball 42T contact groove 41C and carry out turn
Dynamic.Rotated along groove 41C by ball 42T, sliding part 42 swimmingly can move on guide rail 41.
In the present embodiment, guide rail 41 is configured at the 1st component 1 with respect to X/Y plane in the way of tilting（Inclined-plane 1G）.
The surface 41A that guide rail 41 is configured to guide rail 41 tilts with respect to X/Y plane.As shown in figure 5, in the present embodiment, guide rail 41
（Surface 41A）It is θ with respect to the angle of inclination of X/Y plane.Angle, θ is more than 0 degree, and is less than 90 degree.Sliding part 42 is with the 1st relatively
The 42A mode parallel with the surface 41A of guide rail 41 in face is configured at the 2nd component 2（Inclined-plane 2G）.In the present embodiment, sliding part
42 are configured with two on the inclined-plane 2G of the 2nd component 2.In addition, sliding part 42 can also configure one on the 2nd component 2.Also may be used
Configured on the 2nd component 2 with the multiple sliding parts 42 being more than three.
2nd component 2 is directed device 4 by way of the movement in the X-direction by the 1st component 1 is along Z-direction movement
Guiding.If the 1st component 1 moves to -X direction, the 2nd component 2 moves to +Z direction（Rise）.If the 1st component 1 is to+X side
To movement, then the 2nd component 2 is to -Z direction movement（Decline）.Workbench 10 is supported on the 2nd component 2.Therefore, by the 2nd component 2
Z-direction on movement（Lifting）, workbench 10 also moved together with the 2nd component 2（Lifting）.That is, if the 2nd component 2
Move to +Z direction（Rise）, then workbench 10 together with the 2nd component 2 to +Z direction move.If the 2nd component 2 is to -Z direction
Mobile（Decline）, then workbench 10 together with the 2nd component 2 to -Z direction move.
In addition, being configured with sliding part 42 in guide 4 or on the inclined-plane 1G of the 1st component 1, in the 2nd structure
It is configured with guide rail 41 on the inclined-plane 2G of part 2.
The profile of the 1st component 1 is in general triangular（Wedge shape）.The profile of the 2nd component 2 is also in general triangular（Wedge shape）.
I.e., in the present embodiment, table device 100 includes so-called wedge type lowering or hoisting gear.1st component 1 can also be referred to as wedge
Component（1st wedge component）1.2nd component 2 can also be referred to as wedge component（2nd wedge component）2.
Actuator 7 can make the 1st component 1 move in X/Y plane.Actuator 7 produces for making the dynamic of the 1st component 1 movement
Power.Actuator 7 produce power so that the 1st component 1 in X/Y plane on move.In the present embodiment, by actuator 7
Work, the 1st component 1 moves along X-direction.Actuator 7 includes electric rotating machine, and the electric power using supply is operated.As Fig. 1 and
Shown in Fig. 2, actuator 7 is connected by power transmission 11 with the 1st component 1.The power of actuator 7（Driving force）Via dynamic
Force transfering device 11 is delivered to the 1st component 1.
In the present embodiment, the rotary motion of actuator 7 is converted to linear motion by power transmission 11.In this reality
Apply in mode, the axle of actuator 7 rotates in θ X-direction.The rotary motion of θ X-direction is converted to X-axis by power transmission 11
The linear motion in direction, and it is delivered to the 1st component 1.1st component 1 is using the actuator 7 coming via power transmission 11 transmission
Power（Driving force）Move along X-direction.
In the present embodiment, power transmission 11 includes ball-screw 11B.Ball-screw 11B is included by activating
The work of device 7 and rotate leading screw, be connected to the 1st component 1 and be configured at leading screw the nut of surrounding and configuration leading screw with
Ball between nut.The leading screw of ball-screw 11B is supported by bearing support 12 in the way of can rotating.In present embodiment
In, ball-screw 11B rotates in θ X-direction.Rotated in θ X-direction by ball-screw 11B, thus nut and be connected with this
1st component 1 of nut moves along X-direction（Rectilinear movement）.
If actuator 7 makes the leading screw of ball-screw 11B rotate in one direction, by the rotation of this leading screw, the 1st structure
Part 1 moves to +X direction.When the leading screw making ball-screw 11B in actuator 7 rotates in the reverse direction, by the rotation of this leading screw
Turn, the 1st component 1 moves to -X direction.That is, the direction of rotation according to actuator 7（The rotation side of the leading screw of ball-screw 11B
To）, determine the moving direction in the X-direction of the 1st component 1（Any one direction in +X direction and -X direction）.According to
The moving direction of the 1st component 1, determines the 2nd component 2（Workbench 10）Z-direction on moving direction（-Z direction and+Z side
To in any one direction）.
As shown in Figure 1 and Figure 5, table device 100 has the guide 9 for guiding the 1st component 1.Guide 9
Guide the 1st component 1 along X-direction.Guide 9 makes the 1st component 1 along X-direction movement with the work by actuator 7
Mode guides the 1st component 1.At least a portion of guide 9 is configured at base component 8.In the present embodiment, guide
9 guide rails 91 including being configured at base component 8 and be configured at the 1st component 1 and can on guide rail 91 movement sliding part 92.
Guide rail 91 is configured at the upper surface of base component 8.Sliding part 92 is configured at the lower surface 1B of the 1st component 1.
Guide 9 includes the bearing of direct acting type.In the present embodiment, guide 9 includes direct acting type ball bearing
（linear ball bearing）.1st component 1 by the work by actuator 7 along X-direction movement by way of be directed
Device 9 guides.The guide 4 identical construction that guide 9 is and illustrates with reference to Fig. 6.Omit detailed with regard to guide 9
Describe in detail bright.
In addition, being configured with sliding part 92 in guide 9 or on the upper surface of base component 8, the 1st
It is configured with guide rail 91 on the lower surface 1B of component 1.
Table device 100 includes the suppression component 13 for suppressing the movement in the X-direction of the 2nd component 2.Suppression structure
Part 13 configures in the position leaning on-X side than the 1st component 1 and the 2nd component 2.In the X-axis direction, at least a portion of the 2nd component 2
Configuration is between the 1st component 1 and suppression component 13.Suppression component 13 is fixed on base component 8.
For example pass through the movement to -X direction of the 1st component 1, the 2nd component 2 is possible to together with the 1st component 1 to-X side
To movement.Additionally, by the movement to +X direction of the 1st component 1, the 2nd component 2 is possible to together with the 1st component 1 to+X side
To movement.In the present embodiment, the 2nd component 2 is suppressed to move along X-direction using suppression component 13.Thus, the 1st component 1
Movement in X-direction is efficiently converted to the movement in the Z-direction of the 2nd component 2.
Additionally, suppression component 13 bears the power from the 2nd component 2 acting in the X-axis direction.Therefore, from the 2nd component 2
The power acting on the 3rd component 3 and the X-direction of bearing components 5 is inhibited.Thus, the 3rd component 3 and bearing components 5 are maintained
Between gap size, gas bearing 5G can along Z-direction guide the 3rd component 3.
In the present embodiment, table device 100 has at least a portion and is configured at suppression component 13 and is used for guiding
The guide 14 of the 2nd component 2.Guide 14 guides the 2nd component 2 along Z-direction.As shown in Figure 1 and Figure 5, in this enforcement
In mode, guide 14 includes being configured at the guide rail 141 of suppression component 13 and is configured at the 2nd component 2 can be in guide rail
The sliding part 142 of movement on 141.Sliding part 142 is configured at the side 2S of the 2nd component 2.Guide rail 141 with sliding part 142 phase
To mode be configured at suppression component 13 side 13S.
Guide 14 includes the bearing of direct acting type.In the present embodiment, guide 14 includes the rolling of direct acting type
Bearing.Guide 14 can also include as illustrated by with reference to Fig. 6, direct acting type ball bearing（linear ball bearing）.
In addition, being configured with sliding part 142 in guide 14 or on the side 13S of suppression component 13,
It is configured with guide rail 141 on the side 2S of the 2nd component 2.
In addition, in the present embodiment, it has been set to the rolling bearing that guide 4 includes having rotor.Guide 4
Both the sliding bearing not having the direct acting type of rotor can be included it is also possible to include the gas bearing of direct acting type.In addition, guiding dress
Putting 4 can also not have sliding part.For example, it is also possible to be that the inclined-plane 2G of the 2nd component 2 is moved along the guide rail located at the 1st component 1
Dynamic, so that the 2nd component 2 moves along Z-direction.In this case, located at the 1st component 1 guide rail as guiding the 2nd component 2
Guide play a role.Similarly, guide 9 both can include the sliding bearing of direct acting type it is also possible to include direct acting
The gas bearing of type.In addition, guide 9 can also not have sliding part.Similarly, guide 14 both can include direct acting type
Sliding bearing it is also possible to include direct acting type gas bearing.In addition, guide 14 can also not have sliding part.
3rd component 3 can move along Z-direction.3rd component 3 is supported in the way of can moving and can form gas
The bearing components 5 of bearing 5G.Bearing components 5 support the 3rd component 3 in the way of the 3rd component 3 can be made to move along Z-direction.Logical
Cross to supply gas between the 3rd component 3 and bearing components 5, thus forming gas axle between the 3rd component 3 and bearing components 5
Hold 5G.By forming gas bearing 5G between the 3rd component 3 and bearing components 5, the 3rd component 3 is made to be supported in a non contact fashion
Bearing components 5.
Fig. 7 is the sectional view parallel with XZ plane of the 3rd component 3, bearing components 5 and supporting member 6.Fig. 8 is the 3rd structure
The sectional view parallel with X/Y plane of part 3, bearing components 5 and supporting member 6.In the present embodiment, the 3rd component 3 is in Z
Longer bar-shaped component on direction of principal axis.3rd component 3 has the upper surface 3A towards +Z direction, the following table towards -Z direction
Face 3B and the side linking upper surface 3A and lower surface 3B（Outer surface）3C.As shown in figure 8, in the present embodiment, the 3rd structure
The profile in the section parallel with X/Y plane of part 3 is circle.That is, the 3rd component 3 is columned structure longer in the Z-axis direction
Part.The axis of the 3rd component 3 is parallel with Z axis.In addition, the inside of the 3rd component 3 can also be cavity.For example, the 3rd component 3 also may be used
To be the component of cylindrical shape longer in the Z-axis direction.
Bearing components 5 are arranged in the component of the tubular of the surrounding of side 3C of the 3rd component 3.Bearing components 5 are cylindric
Component.The axis of bearing components 5 is parallel with Z axis.In the present embodiment, the axle of the axis of the 3rd component 3 and bearing components 5
Line is consistent.In other words, the axis of the 3rd component 3 and the axis of bearing components 5 are identical axis.Bearing components 5 have can be with
The relative inner surface 5C of the side 3C of the 3rd component 3.Inner surface 5C can also be referred to as bearing surface 5C.In the present embodiment, axle
Bearing member 5 with the Z-direction of the diameter parallel of bearing components 5 on be configured with two.In the following description, Z axis will be configured at
In two bearing components 5 in direction, to be configured at+Z side bearing components 5 are properly called bearing components 51, will be configured at ratio
Bearing components 51 lean on the bearing components 5 of-Z side to be properly called bearing components 52.
Supporting member 6 bearing support component 5.Bearing components 5 are fixed on supporting member 6.Supporting member 6 is by bearing components
5 can make to support the 3rd component 3 in the way of the 3rd component 3 is mobile.In the present embodiment, supporting member 6 is at least a portion
It is configured at the component of the tubular of surrounding of the 3rd component 3 and bearing components 5.The axis of supporting member 6 is parallel with Z axis.In this enforcement
In mode, the axis of the axis, the axis of bearing components 5 and supporting member 6 of the 3rd component 3 is consistent.In other words, the 3rd component 3
The axis of axis, the axis of bearing components 5 and supporting member 6 be identical axis.As shown in Fig. 3 and Fig. 4 etc., support structure
Part 6 is supported on supporting arrangement 14S.Supporting arrangement 14S is fixed on base component 8.In the present embodiment, supporting member 6 by
Supporting arrangement 14S is supported on base component 8.Supporting member 6 is fixed on supporting arrangement 14S.In the present embodiment, supporting member
6 are fixed with respect to the position of base component 8.
In the present embodiment, supporting member 6 is configured to the lower surface of supporting member 6 and the upper surface phase of base component 8
Contact.
As shown in Figure 7 and Figure 8, bearing components 5 are configured at the inner surface of supporting member 6.Bearing components 5 are configured at the 3rd structure
Around the side 3C of part 3.The inner surface 5C of bearing components 5 is relative with the side 3C of the 3rd component 3.The inner surface of bearing components 5
5C is relative with the side 3C of the 3rd component 3 across gap.
Bearing components 5 support the 3rd component 3 in a non contact fashion.Bearing components 5 using to the side 3C with the 3rd component 3 it
Between supply gas form gas bearing 5G between the side 3C of the 3rd component 3.Bearing components 5 have can to the 3rd structure
The supply mouth 15 of supply gas between the side 3C of part 3.In the present embodiment, supply mouth 15 is configured to and the 3rd component 3
Side 3C is relatively.Supply mouth 15 is configured at the inner surface 5C of bearing components 5.Using from supply mouth 15 to the side 3C of the 3rd component 3
The gas of supply and the inner surface 5C of bearing components 5 between, the 3rd component 3 side 3C and bearing components 5 inner surface 5C it
Between formed gas bearing 5G.Using gas bearing 5G, shape between the side 3C and the inner surface 5C of bearing components 5 of the 3rd component 3
Become gap.In the present embodiment, supply mouth 15 supply air（Compressed air）.
Using gas bearing 5G of the surrounding of the side 3C being formed at the 3rd component 3, limit X-direction and the Y of the 3rd component 3
Movement on direction of principal axis.Using gas bearing 5G, suppress the movement in the X-direction and Y direction of the 3rd component 3, allow the 3rd
Movement in the Z-direction of component 3.
In the present embodiment, bearing components 5 include porous body（Porous member）.Porous body can also be for example as day
Graphite disclosed in this special permission the 5093056th, Japanese Unexamined Patent Publication 2007-120527 etc.（Graphitic carbon）System.In addition, porous body
It can also be pottery system.Supply mouth 15 includes the hole of porous body.In the present embodiment, from the hole of porous body（Supply mouth）15 confessions
To gas.As shown in fig. 7, in the present embodiment, it is formed with cavity 16 between bearing components 5 and supporting member 6.From gas
Feedway 17 is to supply gas in cavity 16.The gas being supplied in cavity 16 passes through the inside of bearing components 5（Porous body
Hole）Reach bearing components 5 inner surface 5C, and from be configured at this inner surface 5C supply mouth 15 inner surface 5C and side 3C it
Between space supply.Thus, form gas bearing 5G between inner surface 5C and side 3C.Inner surface 5C becomes non-with side 3C
Contact condition.
In the present embodiment, it is provided with least a portion of the gas being supplied between bearing components 5 and the 3rd component 3
The exhaust outlet 18 discharged.Exhaust outlet 18 is configured at supporting member 6.Exhaust outlet 18 configure bearing components 51 and bearing components 52 it
Between.
3rd component 3 is connected to workbench 10.3rd component 3 is with the lower surface of the upper surface 3A of the 3rd component 3 and workbench 10
The relative mode of 10B is connected to workbench 10.In the present embodiment, at least a portion of the upper surface 3A side of the 3rd component 3 connects
It is connected to workbench 10.In other words, at least a portion of the upper end of the 3rd component 3 is connected to workbench 10.The upper table of the 3rd component 3
Both can contact it is also possible to not contact between face 3A and the lower surface 10B of workbench 10.3rd component 3 is fixed on workbench
10.By fixing component as bolt, the 3rd component 3 is fixed on workbench 10.
As described above, by the work of actuator 7, making the 1st component 1 move along X-direction.X-axis by the 1st component 1
Movement on direction, the 2nd component 2 moves along Z-direction with the workbench 10 being supported on the 2nd component 2.In present embodiment
In, by the movement in the Z-direction of workbench 10, it is connected to the 3rd component 3 of this workbench 10 together with workbench 10 along Z
Direction of principal axis moves.3rd component 3 is by bearing components 5（Gas bearing 5G）Guiding is simultaneously moved along Z-direction.In the present embodiment,
Bearing components 5 guide the guide of the 3rd component 3 to play a role as in the way of making the 3rd component 3 move along Z-direction.
The bearing components 5 inner surface 5C relative with the side 3C of the 3rd component 3 can also be referred to as guide surface 5C.In present embodiment
In, side 3C is parallel with Z axis respectively with inner surface 5C.
In the Z-axis direction, the size of the 3rd component 3 is more than（It is longer than）The size of bearing components 5.In the present embodiment, exist
In Z-direction, the distance between upper surface 3A and lower surface 3B of the 3rd component 3 are more than the end of+Z side of bearing components 51
（Upper end）End with the-Z side of bearing components 52（Bottom）The distance between.
Center as shown in Fig. 7 etc., in the Z-direction with bearing components 5 for the center G3 in the Z-direction of the 3rd component 3
In the state of G5 is in unanimously, including the end of+Z side of the 3rd component 3 of upper surface 3A（Upper end）Configuration is in ratio bearing structure
Part 5（Bearing components 51）+ Z side end（Upper end）By the position of+Z side, including-the Z of the 3rd component 3 of lower surface 3B
The end of side（Bottom）Configuration is than bearing components 5（Bearing components 52）- Z side end（Bottom）Position by-Z side
Put.In other words, be in the center G3 in the Z-direction of the 3rd component 3 and the center G5 in the Z-direction of bearing components 5 consistent
In the state of, the upper and lower end of the 3rd component 3 is arranged respectively at bearing components 5（Bearing components 51 and bearing components 52）
Outside.
In addition, in the present embodiment, the center G5 in the Z-direction of bearing components 5 is the upper end of bearing components 51
The center and bottom of bearing components 52 between.In the case that bearing components 5 are one, in the Z-direction of bearing components 5
Center G5 be center between the upper end of this bearing components 5 and bottom.When being configured with more than three in the Z-axis direction
During multiple bearing components 5, the center G5 in the Z-direction of bearing components 5 is that being configured in multiple bearing components leans on+Z side most
The upper end of bearing components and be configured at most lean on-Z side the bottom of bearing components between center.
Additionally, as shown in Fig. 7 etc., in the Z-direction with bearing components 5 for the center G3 in the Z-direction of the 3rd component 3
Center G5 be in consistent in the state of, including the end of+Z side of the 3rd component 3 of upper surface 3A（Upper end）Configuration than
The end of+Z the side of supporting member 6（Upper end）Position by+Z side.In other words, in the Z-direction of the 3rd component 3
Heart G3 and the center G5 in the Z-direction of bearing components 5 be in consistent in the state of, the upper end configuration of the 3rd component 3 is in supporting
The outside of component 6.
Fig. 9 is to represent workbench 10 and the figure of of state that the 3rd component 3 moves in the Z-axis direction.In this embodiment party
In formula, the moving range that workbench 10 and the 3rd component 3 can move in the Z-axis direction（Amount of movement, stroke）It is determined.At this
In embodiment, according to the workload of actuator 7（Rotation amount）, determine the moving range in the X-direction of the 1st component 1.This
Outward, the moving range in the X-direction according to the 1st component 1, to determine the 2nd component 2（Workbench 10）Z-direction on shifting
Dynamic scope.Additionally, the 3rd component 3 is connected to workbench 10, the moving range in the Z-direction of the 3rd component 3 is according to workbench 10
Z-direction on moving range determining.As shown in figure 9, in the Z-axis direction, workbench 10 and the 3rd component 3 can be in place
Put Z1 and move than between the position Z2 by+Z side for the position Z1.That is, workbench 10 and the 3rd component 3 can move in the Z-axis direction
Dynamic moving range is the scope between position Z1 and position Z2.
In the present embodiment, in the moving range in the Z-direction of the 3rd component 3, the upper end of the 3rd component 3 continues
Configuration is in the outside of supporting member 6.In the moving range in the Z-direction of the 3rd component 3, the upper end of the 3rd component 3 and under
End persistently configures respectively in bearing components 5（Bearing components 51 and bearing components 52）Outside.
In the moving range in the Z-direction of the 3rd component 3, the inner surface 5C of bearing components 5 continues and the 3rd component 3
Side 3C is relatively.In the moving range in the Z-direction of the 3rd component 3, supply mouth 15 continues the side 3C phase with the 3rd component 3
Right.In other words, in the moving range in the Z-direction of the 3rd component 3, even if be configured at the position leaning on-Z side most in the 3rd component 3
In the state of putting Z1, the supply mouth 15 of bearing components 5 is also relative with the side 3C of the 3rd component 3.Z-direction in the 3rd component 3
On moving range in, even if workbench 10 be configured at most lean on+Z side position Z2 in the state of, the supply of bearing components 5
Mouth 15 is also relative with the side 3C of the 3rd component 3.That is, in the whole moving range in the Z-direction of the 3rd component 3, bearing structure
The supply mouth 15 of part 5 and the side 3C of the 3rd component 3 continue relative.Thus, in the moving range of the 3rd component 3, in the 3rd component
Persistently it is formed with gas bearing 5G between 3 and bearing components 5.
Additionally, in the present embodiment, in the moving range in the Z-direction of the 3rd component 3, the Z axis of the 3rd component 3
Center G3 on direction persistently configures between the upper end and bottom of bearing components 5.In other words, in the Z axis of the 3rd component 3
In moving range on direction, center G3 does not configure the outside in bearing components 5.In the present embodiment, do not joined with center G3
The mode in the outside of bearing components 5 of putting determines the moving range in the Z-direction of the 3rd component 3.
In addition, in the present embodiment, the upper end of bearing components 5 is the upper end of bearing components 51.Bearing components 5
Bottom is the bottom of bearing components 52.In the case that bearing components 5 are one, the upper end of bearing components 5 be this one
The upper end of individual bearing components 5, the bottom of bearing components 5 is the bottom of this bearing components 5.Additionally, when in Z axis side
When being configured with multiple bearing components 5 of more than three upwards, the upper end of bearing components 5 is being configured in multiple bearing components
Lean on the upper end of the bearing components of+Z side most.The bottom of bearing components 5 is that being configured in multiple bearing components depends on-Z most
The bottom of the bearing components of side.
As shown in Fig. 1, Fig. 3, Fig. 4, Fig. 7 and Fig. 9 etc., in the present embodiment, the lower surface 3B of the 3rd component 3 is away from base
Seat component 8.In the present embodiment, the 3rd component 3 is connected with workbench 10, and not with the component phase in addition to workbench 10
Connect.In the present embodiment, the upper surface 3A in the 3rd component 3 is connected with workbench 10, with noncontact around the 3C of side
State is configured with bearing components 5 and supporting member 6, has been not connected with component in the lower surface 3B of the 3rd component 3.
In the present embodiment, supporting member 6 is configured to the lower surface of supporting member 6 and the upper surface phase of base component 8
Contact.The bottom of supporting member 6 configures in the bottom than the 3rd component 3 on the lower（- Z side）Position.Using the 3rd component
3 lower surface 3B and the inner surface of supporting member 6 define space 63.The lower surface 3B of the 3rd component 3 is facing with space 63.
In the present embodiment, space 63 is included by the lower surface 3B of the 3rd component 3, the inner surface of supporting member 6 and base component 8
The space that surrounds of upper surface.
Gravity-compensated device 60 have can to the lower surface 3B of the 3rd component 3 faced by space 63 supply gas confession
To mouth 62.In order to reduce the effect to actuator 7 of the weight of workbench 10, gravity-compensated device 60 supplies gas from supply mouth 62
Body.Both gravity-compensated device 60 can be referred to as from weight compensating device 60 it is also possible to call it as canceller 60 of conducting oneself with dignity.
Gravity-compensated device 60 has the gas supply device 61 being capable of supply gas and for from gas supply device 61
Gas flowing stream 64.In the present embodiment, at least a portion of stream 64 is formed at the inside of base component 8.Stream
Road 64 links gas supply device 61 and supply mouth 62.It is configured with supply mouth 62 in the one end of stream 64.In present embodiment
In, supply mouth 62 includes the opening of the one end of stream 64.The other end of stream 64 is connected with gas supply device 61.From
The gas of gas supply device 61 supply is transported to supply mouth 62 via stream 64.Supply mouth 62 will be from gas supply device 61
Gas be supplied to space 63.
Supply mouth 62 is configured to facing with space 63.In the present embodiment, supply mouth 62 is configured at base component 8
Upper surface.Supply mouth 62 is configured to relative with the lower surface 3B of the 3rd component 3.In addition, supply mouth 62 can also with space 63 phase
The mode on opposite is configured at the inner surface of supporting member 6.
Gas supply device 61 includes adjusting the flow adjuster of the gas delivery volume of time per unit.Flow is adjusted
Engagement positions include adjuster.Gas supply device 61 can be adjusted using flow adjuster to supply to space 63 from supply mouth 62
The gas delivery volume of the time per unit given.By adjustment from the gas delivery volume of supply mouth 62, carry out the pressure of adjustment space 63
Power.From the gas delivery volume of supply mouth 62 more when, the pressure rise in space 63.In the gas supply from supply mouth 62
When measuring less, the reduced pressure in space 63.By adjusting the gas delivery volume supplying from supply mouth 62 to space 63, gas supplies
Device 61 is capable of the pressure of adjustment space 63.In the present embodiment, supply air from supply mouth 62（Compressed air）.
In order to reduce the effect to actuator 7 of the weight of workbench 10, gravity-compensated device 60 supplies gas from supply mouth 62
Body.Under gravity, workbench 10 produces the power of -Z direction.The power of this workbench 10 is via the 2nd component 2, the 1st component 1
And power transmission 11 is delivered to actuator 7.In order to reduce the power being delivered to actuator 7 from workbench 10, gravity compensation
Device 60 is from supply mouth 62 supply gas.In order to suppress workbench 10 and power produced by the 3rd component 3 under gravity to pass
It is delivered to actuator 7, gravity-compensated device 60 is from supply mouth 62 supply gas.
In the present embodiment, in order to reduce the effect to actuator 7 of the weight of workbench 10 and the 3rd component 3, gravity is mended
Repay device 60 from supply mouth 62 supply gas.It is delivered to cause in order to reduce from workbench 10 and the 3rd component 3 under gravity
The power of dynamic device 7, gravity-compensated device 60 is from supply mouth 62 supply gas.In order to eliminate because of the deadweight of workbench 10 and the 3rd component 3
And the power to -Z direction effect, gravity-compensated device 60 is to the 3rd component 3 and workbench 10 along +Z direction applying power.In other words,
In order to offset the power to -Z direction effect because of the effect of gravity, gravity-compensated device 60 is applied to the 3rd component 3 and workbench 10
Plus the power of +Z direction.That is, in order to above push away workbench 10 and the 3rd component 3, gravity-compensated device 60 is to workbench 10 and the 3rd component
Space 63 supply gas of 3 lower section.In the present embodiment, gravity-compensated device 60 is from supply mouth 62 supply gas, so that
Obtain the pressure higher than the space 65 in outside of supporting member 6 for the pressure in space 63.Space 65 includes the sky of the surrounding of workbench 10
Between.Space 65 includes the space of the surrounding of upper surface 3A of the 3rd component 3.Space 65 is with respect to the space outerpace in space 63.?
In present embodiment, the pressure in space 65 is atmospheric pressure.Gravity-compensated device 60 from supply mouth 62 to space 63 supply gas, with
Make the pressure superatmospheric in space 63.
In view of the weight of the object S being placed in workbench 10, gravity-compensated device 60 can also supply gas to space 63
Body.That is, in order to reduce the effect to actuator 7 of the weight of workbench 10, the 3rd component 3 and object S, gravity-compensated device 60
Can also be from supply mouth 62 supply gas.In other words, in order to reduce under gravity from workbench 10, the 3rd component 3 and
Object S is delivered to the power of actuator 7, and gravity-compensated device 60 can also be from supply mouth 62 supply gas.
In the present embodiment, the profile in the section parallel with X/Y plane of the 3rd component 3 is circle.Additionally, in this enforcement
In mode, the 3rd component 3 is at least configured with two.That is, table device 100 has multiple 3rd components 3.In present embodiment
In, multiple 3rd components 3 are connected to different multiple positions of workbench 10 in X/Y plane.Bearing components 5, supporting structure
Part 6 and supply mouth 62 are accordingly configured with multiple 3rd components 3 respectively.By multiple 3rd components 3 are connected on workbench 10,
And the plurality of 3rd component 3 is supported on bearing components 5 and supporting member 6, to suppress movement in X/Y plane for the workbench 10.That is,
Multiple 3rd components 3 are connected to different multiple positions of workbench 10 in X/Y plane, by the plurality of 3rd component 3
Hold in bearing components 5 and supporting member 6, thus suppressing the movement in the θ Z-direction of workbench 10（Rotation）.
For example, at two（Two）In the case that 3rd component 3 is connected to workbench 10, these the 3rd components 3 connect respectively
In the 1st position of workbench 10 and 2nd position different from the 1st position of workbench 10.At three（Three）3rd component 3
In the case of being connected to workbench 10, these the 3rd components 3 be connected to the 1st position of workbench 10, workbench 10 with this
The 2nd different position of 1st position and 3rd position different from the 1st position and the 2nd position of workbench 10.
As shown in Figure 1, Figure 2, shown in Fig. 3 and Fig. 4 etc., in the present embodiment, four（Four）3rd component 3 is connected to work
Platform 10.These the 3rd components 3 are connected to the 1st position of lower surface 10B of workbench 10, the lower surface 10B of workbench 10
2nd position different from the 1st position, 3rd position different with the 1st position and the 2nd position of the lower surface 10B of workbench 10 with
And the lower surface 10B of workbench 10 from the 1st position, different the 4th position in the 2nd position and the 3rd position.1st position, the 2nd
Position, the 3rd position and the 4th position are configured at around the center of lower surface 10B.In the present embodiment, multiple 3rd components 3
It is configured at least a portion of the surrounding of the 1st component 1 and the 2nd component 2.Bearing components 5 and supporting member 6 respectively with four the 3rd
Component 3 accordingly configures.
In addition, table device 100 can also have five（Five）Above any number of 3rd components 3.Bearing components
5 and supporting member 6 accordingly configure with multiple 3rd components 3 respectively.By multiple 3rd components 3 are connected with workbench 10,
And the plurality of 3rd component 3 is supported on bearing components 5 and supporting member 6, to suppress movement in X/Y plane for the workbench 10.
Then, supporting arrangement 19 is described.Figure 10 is the enlarged drawing of of the supporting arrangement 19 representing present embodiment.?
Bearing apparatus 19 flexibly supporting table 10.As shown in Fig. 1, Fig. 3, Fig. 4 and Figure 10 etc., at least a portion of supporting arrangement 19 is joined
Put between the 2nd component 2 and workbench 10.2nd component 2 is by supporting arrangement 19 supporting table 10.
Supporting arrangement 19 includes pin 20.Pin 20 is the pin of the flexibility with flexibility.Pin 20 can somewhat be deformed.Pin
20 have flexibility, being capable of elastic deformation.The deformation of pin 20 include one of flexural deformation and torsional deflection or both.
In the present embodiment, pin 20 is parallel pin.In the following description, pin 20 is properly called parallel pin 20.Flat
Marketing 20 is configured to parallel with Z axis.Parallel pin 20 is configured to axis and the Z of parallel pin 20 between the 2nd component 2 and workbench 10
Axle is parallel.Parallel pin 20 is bar-shaped component longer in the Z-axis direction.Outside the section parallel with X/Y plane of parallel pin 20
Shape is circle.That is, parallel pin 20 is columned component longer in the Z-axis direction.The constant diameter of parallel pin 20.Parallel pin
20 to the 3 components 3 are thin.In other words, profile in X/Y plane for the parallel pin 20 is less than the profile of the 3rd component 3.
Parallel pin 20 links the 2nd component 2 and workbench 10.As shown in Figure 10, parallel pin 20 have upper towards +Z direction
Surface 20A, towards -Z direction lower surface 20B and link upper surface 20A and lower surface 20B side（Outer surface）20C.
In the present embodiment, parallel pin 20 is connected to the central portion of the lower surface 10B of workbench 10.Parallel pin 20 is connected to the 2nd structure
The central portion of the upper surface 2A of part 2.Parallel pin 20 is configured to the upper surface 20A of the parallel pin 20 and lower surface 10B of workbench 10
Contact.The lower surface 20B that parallel pin 20 is configured to parallel pin 20 is contacted with the upper surface 2A of the 2nd component 2.Can also be with flat
The mode that the upper surface 20A of marketing 20 is contacted with the center of the lower surface 10B of workbench 10 is connected parallel pin 20 and workbench
10.Can also connect parallel in the way of the lower surface 20B of parallel pin 20 is contacted with the center of the upper surface 2A of the 2nd component 2
Pin 20 and the 2nd component 2.
Supporting arrangement 10 includes the supporting member 21 of the top 20D for support parallel pin 20 and is used for support parallel pin 20
Bottom 20E supporting member 22.The top 20D of parallel pin 20 includes the upper end of parallel pin 20（Upper surface 20A）.Parallel pin
20 bottom 20E includes the bottom of parallel pin 20（Lower surface 20B）.
Supporting member 21 has upper surface 21A that can be relative with the lower surface 10B of workbench 10, towards upper surface 21A
Rightabout lower surface 21B and the hole being formed in the way of linking upper surface 21A and lower surface 21B（Through hole）21H.?
Bearing member 21 is fixed on workbench 10 using fixing component as bolt 23.Supporting member 21 is with upper surface 21A and workbench
The state that 10 lower surface 10B contacts is fixed on workbench 10.
Supporting member 22 has lower surface 22B that can be relative with the upper surface 2A of the 2nd component 2, towards lower surface 22B's
Rightabout upper surface 22A and the hole being formed in the way of linking upper surface 22A and lower surface 22B（Through hole）22H.Supporting
Component 22 is fixed on the 2nd component 2 using fixing component as bolt 24.Supporting member 22 is with lower surface 22B and the 2nd component 2
The state that contacts of upper surface 2A be fixed on the 2nd component 2.
The top 20D of parallel pin 20 is configured in the hole 21H of supporting member 21.The top 20D embedded hole of parallel pin 20
21H.Thus, the position of the top 20D of parallel pin 20 is fixed, the phase between supporting member 21 and the top 20D of parallel pin 20
Change to position is inhibited.By supporting member 21, the top 20D of parallel pin 20 is fixed on workbench 10, parallel pin 20
Top 20D and workbench 10 between the change of relative position be inhibited.In the present embodiment, supporting member 21 has
Link the side of supporting member 21（Outer surface）The hole 21K of the inner surface of 21C and hole 21H.Fixing component 25 energy as bolt
Enough configurations are in the 21K of hole.For example, in order that the top ends pressing of fixing component 25 is configured at the upper of the parallel pin 20 in the 21H of hole
The side 20C of portion 20D is it is also possible to be screwed into fixing component 25 in the hole 21K being provided with thread groove.Top by parallel pin 20
20D is clamped between the top ends of fixing component 25 and the inner surface of hole 21H, be reliably suppressed further supporting member 21 with
The change of the relative position between the top 20D of parallel pin 20.
The bottom 20E of parallel pin 20 is configured in the hole 22H of supporting member 22.The bottom 20E embedded hole of parallel pin 20
22H.Thus, the position of the bottom 20E of parallel pin 20 is fixed, the phase between supporting member 22 and the bottom 20E of parallel pin 20
Change to position is inhibited.By supporting member 22, the bottom 20E of parallel pin 20 is fixed on the 2nd component 2, parallel pin 20
Bottom 20E and the 2nd component 2 between the change of relative position be inhibited.In the present embodiment, supporting member 22 has
Link the side of supporting member 22（Outer surface）The hole 22K of the inner surface of 22C and hole 22H.Fixing component 26 energy as bolt
Enough it is configured in the 22K of hole.For example, in order that the top ends pressing of fixing component 26 is configured under the parallel pin 20 in the 22H of hole
The side 20C of portion 20E is it is also possible to be screwed into fixing component 26 in the hole 22K being provided with thread groove.Bottom by parallel pin 20
20E is clamped between the top ends of fixing component 26 and the inner surface of hole 22H, be reliably suppressed further supporting member 22 with
The change of the relative position between the bottom 20E of parallel pin 20.
In the present embodiment, parallel pin 20, pars intermedia 20F between top 20D and bottom 20E configuration is in supporting structure
The outside of the hole 22H of the hole 21H of part 21 and supporting member 22.Supporting member 21 and supporting is not configured around pars intermedia 20F
Component 22.That is, non-layout structure around pars intermedia 20F, the side 20C of pars intermedia 20F is not contacted with component.
Parallel pin 20 is configured to bear the load in Z-direction.In the present embodiment, propping up using inclusion parallel pin 20
Bearing apparatus 19, suppression（Limit）The relative movement in Z-direction between workbench 10 and the 2nd component 2.
At least a portion of parallel pin 20 can bend.At least a portion of parallel pin 20 can deform（Can elasticity become
Shape）.That is, at least a portion of parallel pin 20 has flexibility, being capable of elastic deformation.In the present embodiment, in parallel pin 20
Between portion 20F can bend, being capable of elastic deformation.The deformation of pars intermedia 20F（Elastic deformation）Including flexural deformation and torsional deflection
One of or both.Pars intermedia 20F can be become with the relative position between the top 20D in X/Y plane and bottom 20E
The mode changed is deformed.For example, pars intermedia 20F can be with the X-direction and Y direction between top 20D and bottom 20E
One of or the mode that changes of the relative position on both deformed（Flexural deformation, deflection deformation）.Pars intermedia 20F energy
Enough deformed in the way of the relative position in the θ Z-direction between top 20D and bottom 20E changes（Torsional deflection）.
Additionally, pars intermedia 20F can be with one of the θ X-direction of top 20D and bottom 20E and θ Y-direction or the relative position on both
Put the mode changing to be deformed（Flexural deformation, deflection deformation）.That is, deformed by pars intermedia 20F, top 20D
The direction in addition to Z-direction and the 20E of bottom between（X-direction, Y direction, θ X-direction, θ Y-direction and θ Z-direction）On
Relative position change.Top 20D is fixed on workbench 10 by supporting member 21.Bottom 20E is by supporting member 22
It is fixed on the 2nd component 2.Thus, by the deformation of pars intermedia 20F, between workbench 10 and the 2nd component 2 in addition to Z-direction
Direction（X-direction, Y direction, θ X-direction, θ Y-direction and θ Z-direction）On relative position change.That is, by bag
Include the supporting arrangement 19 of parallel pin 20, workbench 10 and the 2nd component 2 being capable of relative movements.Using the supporting including parallel pin 20
Device 19, allows the direction in addition to Z-direction between workbench 10 and the 2nd component 2（X-direction, Y direction, θ X side
To, θ Y-direction and θ Z-direction）On relative movement.
In the present embodiment, parallel pin 20（Supporting arrangement 19）It is connected to the central portion of the lower surface 10B of workbench 10.
Multiple（Four）3rd component 3 is configured in the way of surrounding parallel pin 20.Multiple 3rd components 3 are connected under workbench 10
The circumference of surface 10B.
In the present embodiment, suppress component 13（Guide 14）At least a portion contact with the 2nd component 2.Therefore,
Exist so that the 2nd component 2 is vibrated due to the relative movement between suppression component 13 and the 2nd component 2 or the 2nd component 2 from
Target track departs from the possibility of movement.In the present embodiment, because workbench 10 is supported on the 2nd structure by supporting arrangement 19
Part 2, even if therefore due to suppressing component 13（Guide 14）Contact between the 2nd component 2 and so that the 2nd component 2 is shaken
Dynamic or the 2nd component 2 departs from movement from target track, also by workbench 10（Top 20D, supporting member 21）With the 2nd component 2
（Bottom 20E, supporting member 22）Between relative movement absorbing this undesirable movement（Vibration）.Thus, workbench 10 from
Target track departs from mobile or the 2nd component 2 vibration and is inhibited to the situation of workbench 10 transmission.
Then, illustrate one of action of above-mentioned table device 100.By the work of actuator 7, actuator 7 dynamic
Power is delivered to the 1st component 1 via power transmission 11.By the work of actuator 7, the 1st component 1 moves along X-direction.The
1 component 1 is directed device 9 and guides and move along X-direction.By guide the 9, the 1st component 1 along X-direction in target track
Road（Desired track）Upper movement.In the present embodiment, can be straight in the X-axis direction by guide the 9, the 1st component 1
Ground is mobile.
By the movement in the X-direction of the 1st component 1, the 2nd component 2 moves along Z-direction.2nd component 2 is directed dress
Put 4 guiding and move along Z-direction.Additionally, by suppression movement on being suppressed X-direction for component the 13, the 2nd component 2
While along Z-direction move.Additionally, the 2nd component 2 is directed device 14 and guiding and moves along Z-direction.By the 2nd component 2
Move along Z-direction, so that the workbench 10 being supported on the 2nd component 2 is also moved along Z-direction together with the 2nd component 2.
In the present embodiment, in the 3rd component 3 being connected to workbench 10 and so that the side of the 3rd component 3 movement can be made
Formula supports and is formed with gas bearing 5G between the bearing components 5 of the 3rd component 3.Gas bearing 5G is in suppression the 3rd component 3 along X-axis
Direction and Y direction allow while mobile that 3rd component 3 moves along Z-direction.Additionally, by gas bearing 5G, bearing structure
Part 5 supports the 3rd component 3 in a non contact fashion.That is, the bearing components 5 forming gas bearing 5G between the 3rd component 3 are in suppression
Make the 3rd component 3 along X-direction and Y direction mobile while by can make the 3rd component 3 along this Z-direction mobile in the way of
Non-contactly support the 3rd component 3.Bearing components 5 guide the 3rd component 3 along Z-direction in a non contact fashion.Thus, the 3rd structure
Part 3 and be connected to the workbench 10 of the 3rd component 3 along Z-direction in target track（Desired track）Upper movement.In this enforcement
In mode, by the bearing components 5 that can form gas bearing 5G between the 3rd component 3, the 3rd component 3 and be connected to this
The workbench 10 of 3 components 3 can move in the Z-axis direction as the crow flies.
Actuator 7 is operated, so that the object S being supported on workbench 10 configures in target location.In this embodiment party
In formula, it is provided with and can form the bearing components 5 guiding gas bearing 5G of the 3rd component 3 in a non contact fashion along Z-direction, because
This, can make workbench 10 in target track（Desired track）Upper movement.Therefore, object S can be joined by table device 100
Put in target location.
In the present embodiment, it is provided with suppression component 13.Therefore, even if the 1st component 1 moves along X-direction, also suppression the
2 components 2 move along X-direction.Thus, the movement in the X-direction of the 1st component 1 is efficiently converted to the Z of the 2nd component 2
Movement on direction of principal axis.On the other hand, due to suppressing component 13（Guide 14）The contact between the 2nd component 2, the 2nd structure
Part 2 is possible to carry out undesirable movement（Vibration）.In the present embodiment, workbench 10 is taken up by including propping up of parallel pin 20
Put 19 flexibly to support.Using include parallel pin 20 supporting arrangement 19, allow between workbench 10 and the 2nd component 2 except Z axis
Direction beyond direction（X-direction, Y direction, θ X-direction, θ Y-direction and θ Z-direction）On relative movement.Thus, even if
2nd component 2 carries out undesirable movement（Vibration）, suppress this undesirable movement also by supporting arrangement 19（Vibration）To work
Platform 10 transmits.
In the present embodiment, in the case that the power using actuator 7 makes workbench 10 move to +Z direction, or
Person is in the case of the position in the Z-direction of the power maintenance workbench 10 using actuator 7 it is possible in this actuator 7
Upper service load.That is, in order that workbench 10 rises, or the position for maintenance work platform 10, actuator 7 has to last for producing
The power of raw regulation（Torque）.In that case it is necessary to the electric power that actuator 7 sustainable supply is specified（Electric current）, as a result, causing
Dynamic device 7 is possible to generate heat.In actuator 7 adstante febre, the component of surrounding is possible to thermal deformation.As a result, there is workbench 10
Positioning precision reduces or workbench 10 departs from the possibility making the performance of table device 100 reduce such as mobile from target track
Property.Additionally, there are and make to be supported on the possibility of the object S thermal deformation of workbench 10 because of the heating of actuator 7.
In the present embodiment, it is provided with gravity-compensated device 60.Therefore, the feelings to +Z direction movement for the workbench 10 are made
Under condition, or in the case of the position in the Z-direction of maintenance work platform 10, power produced by actuator 7（Torque）Relatively
Little.That is, it is supplied to the electric power of actuator 7（Electric current）Less.Therefore, the heating of actuator 7 is inhibited.Its knot
Really, the thermal deformation of the component of surrounding and the thermal deformation of object S is made to be inhibited.
Further, since being provided with gravity-compensated device 60, even if being therefore equipped on the quality of the object S of workbench 10（Weight）
Larger, the load putting on actuator 7 also reduces.Further, since being provided with gravity-compensated device 60, therefore actuator 7 is produced
Power less.Therefore, seek the miniaturization of actuator 7.
Further, since improve the pressure in space 63 using gravity-compensated device 60, even if it is abnormal therefore to produce power failure etc.
（Improper stopping）, actuator 7 do not produce power, and workbench 10 drastically declines（Fall）Situation can also be inhibited.Example
As omitted the electromagnetic brake for preventing workbench 10 from falling, therefore there will not be and caused by this electromagnetic brake
Heating（Thermal deformation）.
As mentioned above, according to present embodiment, due to be provided between the 3rd component 3 formed gas bearing 5G,
And supported in the way of the 3rd component 3 can be made to move along Z-direction（Guiding）The bearing components 5 of the 3rd component 3, are therefore connected with
The workbench 10 of the 3rd component 3 can be in target track（Desired track）Upper movement.In the present embodiment, bearing components 5
Can make to support in the way of the 3rd component 3 is mobile（Guiding）3rd component 3, so that the 3rd component 3 is in the Z-axis direction as the crow flies
Move.Thus, the workbench 10 being connected with the 3rd component 3 can move in the Z-axis direction as the crow flies.That is, utilize
The bearing components 5 of gas bearing 5G, the linear reduction in the movement of suppression the 3rd component 3 and workbench 10 can be formed.By
This, the object S being supported on workbench 10 is configured in target location.
In the present embodiment, be formed with gas bearing 5G between the 3rd component 3 and bearing components 5, bearing components 5 with
Cordless supports the 3rd component 3.Thus, the 3rd component 3 can swimmingly move in the Z-axis direction.In bearing components 5 and
It is possible to mobile generation resistance to the 3rd component 3 when 3 components 3 contact.Although as a result, being set to workbench 10 He to be made
3rd component 3 moves as the crow flies, but workbench 10 and the 3rd component 3 are possible to not move as the crow flies.Additionally, in bearing components 5
When contacting with the 3rd component 3, vibration may be produced because of the movement of the 3rd component 3.When the 3rd component 3 produces vibration, workbench
10 are also carried out vibrating, as a result, the positioning precision of workbench 10 is likely to decrease.In the present embodiment, due to bearing components 5
Non-contactly supporting the 3rd component 3, therefore workbench 10 and the 3rd component 3 in the way of the 3rd component 3 can be made to move can be straight
Ground is mobile.Additionally, making the generation of vibration be inhibited.As a result, the reduction of the positioning precision of workbench 10 is inhibited, can
Workbench 10 is configured in target location with the object S being supported on this workbench 10.
Additionally, in the present embodiment, table device 100 includes the relative movement using the 1st component 1 and the 2nd component 2
Make the wedge type lowering or hoisting gear of workbench 10 movement, therefore, can be adjusted by adjustment angle θ in the X-direction of the 1st component 1
Amount of movement and the 2nd component 2 Z-direction on amount of movement ratio（Speed reducing ratio, capacity of decomposition）.
Additionally, in the present embodiment, because workbench 10 is flexibly supported on the 2nd component 2 by supporting arrangement 19, because
Even if this is due to for example suppressing component 13（Guide 14）Contact between the 2nd component 2 and make the 2nd component 2 carry out the not phase
The movement hoped（Vibration）, also utilize supporting arrangement 19 to suppress this undesirable movement（Vibration）Transmit to workbench 10.
In addition, in the present embodiment, supporting arrangement 19 includes parallel pin the 20, the 2nd component 2 with workbench 10 by parallel
Pin 20 links together.Thus, it is ensured that supporting member 21（Workbench 10）With parallel pin 20（Supporting arrangement 19）Between phase
To position and supporting member 22（2nd component 2）With parallel pin 20（Supporting arrangement 19）Between relative position it is suppressed that supporting
Component 21（Workbench 10）With parallel pin 20（Supporting arrangement 19）Between loosen or supporting member 22（2nd component 2）With parallel
Pin 20（Supporting arrangement 19）Between loosen.
Additionally, in the present embodiment, in the moving range in the Z-direction of the 3rd component 3, supply mouth 15 continue with
The side 3C of the 3rd component 3 is relatively.Thus, in the moving range of the 3rd component 3, can the 3rd component 3 and bearing components 5 it
Between persistently form gas bearing 5G, be able to maintain that the contactless state between the 3rd component 3 and bearing components 5.
Additionally, in the present embodiment, in the Z-axis direction, the size of the 3rd component 3 is more than the size of bearing components 5.By
This, being capable of swimmingly connecting working table 10 and the 3rd component 3 projecting from the upper end of bearing components 5.Additionally, passing through the 3rd component
3 project than the bottom of bearing components 5, make the quality between the upper end side of bearing components 5 and bottom side（Weight）Flat
Weighing apparatus property improves.Thus, the 3rd component 3 can move as the crow flies.
Additionally, in the present embodiment, in the moving range of the 3rd component 3, the center G3 of the 3rd component 3 persistently configures
The upper end of bearing components 5（One end）With bottom（The other end）Between.Thus, even if in the movement of the 3rd component 3,
Due to the quality between the upper end side of bearing components 5 and bottom side（Weight）Balance improve, the therefore the 3rd component 3
Can move as the crow flies.
Additionally, in the present embodiment, the profile in the section of the 3rd component 3 is circle.Bearing components 5 are arranged in the 3rd structure
The component of the cylindrical shape of the surrounding of side 3C of part 3.The profile in section be the circular processing of the 3rd component 3 with for example, square
The processing of the 3rd component compare, the possibility that can be readily available higher machining accuracy is higher.In other words, manufacture profile
For during circular 3 component 3 with manufacture profile be during 3 square component 3 compared with, can be readily available target shape can
Energy property is higher.Additionally, manufacture section be the circular bearing components 5 with inner surface 5C with manufacture section be square have in
The bearing components on surface are compared, and can be readily available higher machining accuracy（Target shape）Possibility higher.For example,
In the case of manufacturing square the 3rd component and bearing components, to be formed between corner and the bearing components of the 3rd component
The equal sized mode in the size in gap and the gap being formed between the planar portions of the 3rd component and bearing components manufactures
3 components and bearing components are likely to be difficulty.According to present embodiment, by using the 3rd circular component 3 and bearing components
5, the uneven situation of the size in the gap making to be formed between the side 3C and the inner surface 5C of bearing components 5 of the 3rd component 3
It is inhibited.Thus, make pressure in the gap between the side 3C and the inner surface 5C of bearing components 5 that are formed at the 3rd component 3
The uneven situation of power is inhibited.Therefore, the reduction of the performance of gas bearing 5G is inhibited, and makes the 3rd component 3 from target track
The situation that road departs from movement is inhibited.
Additionally, in the present embodiment, the 3rd component 3 is at least configured with two, and is connected to the difference of workbench 10
Position.Thus, suppress the rotation of such as workbench 10 using multiple 3rd components 3 being connected to workbench.Thus, workbench
10 positioning precision improves.I.e., in the present embodiment, the profile in the section of the 3rd component 3 is circle, and bearing components 5 are configurations
Component in the cylindrical shape of the surrounding of the side 3C of the 3rd component 3.Therefore, in the inner side of bearing components 5, the 3rd component 3 is possible to
θ Z-direction moves（Rotation）.In the case that the 3rd component 3 being connected to workbench 10 is one, by the 3rd component 3 phase
For the rotation of bearing components 5, this workbench 10 is also possible to be rotated.In the present embodiment, the 3rd component 3 is configured with
Multiple.Thus, bearing components 5 and supporting member 6 are supported on by the plurality of 3rd component 3, to suppress the θ Z-direction of workbench 10
On movement（Rotation）.
Additionally, in the present embodiment, it is provided with suppression component 13, even if the therefore the 1st component 1 moves along X-direction, also may be used
To suppress the 2nd component 2 to move along X-direction.Thus, the movement in the X-direction of the 1st component 1 is efficiently converted to the 2nd structure
Movement in the Z-direction of part 2.
Additionally, in the present embodiment, due to being provided with gravity-compensated device 60, the load therefore putting on actuator 7 subtracts
Few.Therefore, the heating making actuator 7 is inhibited, and in table device 100, makes the heat change of the component of the surrounding of actuator 7
Shape is inhibited.The component of the surrounding of actuator 7 includes the component of guide 4, the component of guide 9, guide 14
Component, the 1st component 1, the 2nd component 2, the 3rd component 3, at least one of supporting member 6 and workbench 10.Therefore, make work
The situation that the positioning precision of station 10 reduces or workbench 10 departs from movement from target track is inhibited.As a result, making work
The reduction making the performance of table apparatus 100 is inhibited.
In addition, in the present embodiment, the top 20D being set to parallel pin 20 is fixed to the supporting of workbench 10
On component 21, the bottom 20E of parallel pin 20 is fixed in the supporting member 22 of the 2nd component 2.For example, it is also possible in work
The lower surface 10B of station 10 is provided with the hole of the top 20D that can configure parallel pin 20, and the top 20D of parallel pin 20 is embedded should
In the hole.The hole of the bottom 20E that can configure parallel pin 20 can also be provided with the upper surface 2A of the 2nd component 2, by parallel pin 20
Bottom 20E embeds this in the hole.By being arranged such, also make the top 20D of parallel pin 20 be fixed on workbench 10, make parallel pin 20
Bottom 20E be fixed on the 2nd component 2.Thus, it is ensured that workbench 10 and parallel pin 20（Supporting arrangement 19）Between relative position
Put and the 2nd component 2 and parallel pin 20（Supporting arrangement 19）Between relative position it is suppressed that workbench 10 and parallel pin 20
（Supporting arrangement 19）Between loosen or the 2nd component 2 and parallel pin 20（Supporting arrangement 19）Between loosen.
In addition, in the present embodiment, the pin 20 of bridging work platform 10 and the 2nd component 2 both can be parallel pin it is also possible to
It is the cone pin with taper, can also be the split taper pin that top has grooving（First cut り テ パ ピ Application）, can also be
Coil sheet is cylindric and the spring catch using the spring effect on radial direction or split pin（Cut り ピ Application）.
These pins 20 have flexibility, and the axis that pin 20 is configured to pin 20 is parallel with Z axis, and workbench 10 is fixed on the top of this pin 20
（Supporting member 21）, the 2nd component 2 is fixed in the bottom of this pin 20（Supporting member 22）.Thus, the 2nd component 2 can be by supporting
Device 19 flexibly supporting table 10.
In addition, in the present embodiment, include porous body and using from the supply of the hole of this porous body with bearing components 5
Gas formed gas bearing 5G, be illustrated as a example so-called porous restriction mode.For forming gas bearing 5G
The throttle style of bearing components 5 is not limited to porous restriction.For example, it is also possible to be the not annular cellular type section using porous body
Stream mode, can also be cellular type throttle style, can also be via located at bearing surface（Guide surface）Groove supply gas surface
Throttle style.For example in the case of the bearing components 5 of cellular type throttle style, the supply mouth 15 of supply gas includes opening of cellular type
Mouthful.
In addition, in the present embodiment, the profile being set to the section parallel with X/Y plane of the 3rd component 3 is circle.As
Shown in Figure 11, the profile in the section parallel with X/Y plane of the 3rd component 30 can also be polygon.Example shown in Figure 11
In, the profile in the section of the 3rd component 30 is quadrangle.In addition, the profile in the section of the 3rd component 30 is not limited to quadrangle,
Can be other polygons.Bearing components 50 can also according to the shape in the section of the 3rd component 30 be defined as with the 3rd component 30
Side between be formed with constant gap.In example shown in Figure 11, the 3rd component 30 is in the inner side of bearing components 50 in θ Z
Side moves up（Rotation）Situation be inhibited.3rd component 30 can also be connected with one on workbench 10（One）.?
It can be two（Two）Above multiple 3rd components 30 are connected to workbench 10.
Figure 14 is the figure of of the semiconductor- fabricating device 200 of table device 100 representing and having present embodiment.
Semiconductor- fabricating device 200 includes the semiconductor equipment manufacture device that can manufacture semiconductor equipment.Semiconductor- fabricating device 200
At least a portion operation of the manufacturing process of semiconductor equipment uses.Semiconductor- fabricating device 200 includes conveying use
Conveying device 300 in the object S manufacturing semiconductor equipment.Conveying device 300 includes the table device of present embodiment
100.In addition, in fig. 14, simplify table device 100 and illustrated.
In the present embodiment, object S is the substrate for manufacturing semiconductor equipment.Produce semiconductor from object S to set
Standby.Object S both can include semiconductor crystal wafer it is also possible to include glass plate.By equipment pattern is formed on object S（Wiring
Pattern）, to produce semiconductor equipment.
Semiconductor- fabricating device 200 carries out the place for forming equipment pattern to the object S being configured at processing position PJ1
Reason.The object S that table device 100 will bear upon workbench 10 configures in processing position PJ1.Conveying device 300 includes can
Convey to the workbench 10 of table device 100（Input）The input unit 301 of object S and can conveying from workbench 10（Defeated
Go out）The output device 302 of object S.Using input unit 301, the object S of before processing is conveyed to workbench 10（Input）.Profit
With table device 100, the object S that will bear upon workbench 10 is delivered to processing position PJ1.Using output device 302, from work
Station 10 conveys（Output）Object S after process.
Table device 100 makes workbench 10 mobile, makes the object S being supported on workbench 10 move to processing position PJ1.
As illustrated by above-mentioned embodiment, workbench 10 is connected with the 3rd component 3.3rd component 3 is by bearing components 5 with non-
The way of contact guides.Therefore, table device 100 can make workbench 10 move on target track, can will bear upon work
The object S of station 10 configures in processing position（Target location）PJ1.
For example, include, by projection optical system 201, the picture of equipment pattern is projected in thing in semiconductor- fabricating device 200
In the case of exposure device on body S, processing position PJ1 includes the position of the image planes of projection optical system 201（Exposure position）.
By configuring object S in processing position PJ1, enable semiconductor- fabricating device 200 by projection optical system 201 by equipment
The picture of pattern is projected on object S.
After object S being processed at processing position PJ1, should from workbench 10 conveying using output device 302
Object S after process.Conveyed using output device 302（Output）Object S be transported to the processing meanss carrying out later procedure.
In the present embodiment, table device 100 can configure object S in processing position（Target location）PJ1.Cause
This, make the situation producing bad products be inhibited.That is, suppressed in semiconductor- fabricating device 200 using table device 100
The positioning precision of object S reduction, therefore suppress bad products generation.
Additionally, in the present embodiment, by gravity-compensated device 60, make table device 100 puts on actuator 7
Load reduce so that the heating of actuator 7 is inhibited.Therefore, the thermal deformation making object S is inhibited.Additionally, making cause
The thermal deformation of the component of surrounding of dynamic device 7 is inhibited.The component of the surrounding of actuator 7 includes the component of table device 100.
Therefore, the situation that the positioning precision of workbench 10 reduces or workbench 10 departs from movement from target track is made to be inhibited.Cause
And, table device 100 can configure object S in processing position（Target location）PJ1.The component of the surrounding of actuator 7 is not
Only include the component of table device 100, also include conveying device 300（Input unit 301 and output device 302）Component.
By suppressing the thermal deformation of conveying device 300, the reduction of the performance of conveying device 300 is made to be inhibited.Thus, conveying device
Object S can be transported to target location by 300.The component of the surrounding of actuator 7 also includes the structure of semiconductor- fabricating device 200
Part.For example, by suppressing the thermal deformation of projection optical system 201, the reduction of the performance of semiconductor- fabricating device 200 is made to be pressed down
System.Additionally, by suppress actuator 7 heating, make from projection optical system 201 project light direct of travel change or
Person's situation that refractive index changes in the space that light is passed through is inhibited.
In addition, include the measurement apparatus of the equipment pattern by optical system measuring object S in semiconductor- fabricating device 200
In the case of, processing position PJ1 includes the position of the focus of optical system（Measurement position）.By object S configuration is being processed
Position PJ1, enables semiconductor- fabricating device 200 to obtain the figure of the equipment pattern being formed on object S by optical system
Picture.In the case that semiconductor- fabricating device 200 includes the film formation device of formation film on object S, processing position PJ1 is can
Supply the position of the material for forming film.By configuring object S in processing position PJ1, it is used in formation equipment pattern
Film is formed on object S.
In addition, flat panel display manufacturing apparatus both can include the table device 100 of present embodiment it is also possible to include
There is the conveying device 300 of table device 100.Flat panel display manufacturing apparatus include such as exposure device, in FPD
Use at least a portion operation of the manufacturing process of device.In the case that flat panel display manufacturing apparatus include exposure device,
Picture for manufacturing the pattern of flat-panel monitor is projected in the object S including glass plate by projection optical system.Flat board shows
Show the object S process that device manufacture device can be to configuration in target location, therefore produce bad products from this object S
Situation is inhibited.Flat-panel monitor includes in liquid crystal display, plasma display and organic el display at least one
Individual.
Figure 13 is the figure of of the check device 400 of table device 100 representing and having present embodiment.Check dress
Put 400 to the object manufacturing using semiconductor- fabricating device 200（Semiconductor equipment）S2 is checked.Check device 400 includes
Conveying device 300B of object S2 can be conveyed.Conveying device 300B includes the table device 100 of present embodiment.In addition,
In fig. 13, simplify table device 100 to be illustrated.
Check device 400 is configured the inspection in the object S2 checking position PJ2.Table device 100 will bear upon
The object S2 configuration of workbench 10 is checking position PJ2.Conveying device 300B includes can be to the workbench of table device 100
10 conveyings（Input）The input unit 301B of object S2 and can conveying from workbench 10（Output）The output device of object S2
302B.Using input unit 301B, the object S2 before checking is transported to workbench 10.Using table device 100, will support
It is delivered to inspection position PJ2 in the object S2 of workbench 10.Using output device 302B, convey from workbench 10（Output）Check
Object S2 afterwards.
Table device 100 makes workbench 10 mobile, makes the object S2 being supported on workbench 10 move to inspection position
PJ2.As illustrated by above-mentioned embodiment, workbench 10 is connected with the 3rd component 3.3rd component 3 is by bearing components 5
Guide in a non contact fashion.Therefore, table device 100 can make workbench 10 move on target track, can will support
Object S2 configuration in workbench 10 is checking position（Target location）PJ2.
In the present embodiment, check device 400 optically carries out the inspection of object S2 using detection light.Check device
400 include to project the irradiation unit 401 of detection light and being received from irradiation unit 401 projecting and being reflected by object S2
Detection light at least one of infrared rays receiver 402.In the present embodiment, check that position PJ2 includes the irradiation of detection light
Position.By object S2 configuration is being checked position PJ2, optically to check the state of object S2.
After checking the inspection having carried out object S2 at the PJ2 of position, conveyed from workbench 10 using output device 302B
Object S2 after this inspection.
In the present embodiment, object S2 configuration can checked position by table device 100（Target location）PJ2,
Therefore, it is possible to suppress to check bad generation.That is, whether check device 400 can bad to object S2 and sentence well
Disconnected.Thus, make for example bad object S2 be transported to later procedure or situation about dispatching from the factory is inhibited.
Additionally, in the present embodiment, by gravity-compensated device 60, make table device 100 puts on actuator 7
Load reduce so that the heating of actuator 7 is inhibited.Therefore, the thermal deformation of object S2 is inhibited.Additionally, making cause
The thermal deformation of the component of surrounding of dynamic device 7 is inhibited.The component of the surrounding of actuator 7 includes the component of table device 100.
Therefore, the situation that the positioning precision of workbench 10 reduces or workbench 10 departs from movement from target track is made to be inhibited.Cause
And, object S2 configuration can checked position by table device 100（Target location）PJ2.Thus it is suppressed that checking bad
Produce.The component of the surrounding of actuator 7 not only includes the component of table device 100, also includes conveying device 300（Input dress
Put 301B and output device 302B）Component.By suppressing the thermal deformation of conveying device 300B, make the performance of conveying device 300B
Reduction be inhibited.Thus, object S2 can be transported to target location by conveying device 300.The component of the surrounding of actuator 7
Also include the component of check device 400.For example, by suppressing the thermal deformation of irradiation unit 401 and infrared rays receiver 402, make inspection
The reduction of the performance of device 400 is inhibited.Additionally, by the heating suppressing actuator 7, making from irradiation unit 401 injection
The situation that the direct of travel of detection light changes or refractive index changes in the space that detection light is passed through is pressed down
System.Thus, check device 400 can suppress to check bad generation.
In addition, in the present embodiment, it has been set to workbench 10 and has moved along Z-direction.In the present embodiment, workbench
10 can also move along the direction tilting with respect to Z axis.Both can move along the 1st component 1 with respect to the direction that X/Y plane tilts,
Can also move along the 2nd component 2 with respect to the direction that Z axis tilt.It is supported on the 3rd component 3 of bearing components 5 in a non contact fashion
The direction guiding workbench 10 that can tilt along it.By the 3rd component 3 being supported on bearing components 5 in a non contact fashion, work
Platform 10 can move as the crow flies along the direction that it tilts.
In addition, in the above-described embodiment it is also possible to omit suppression component 13.2nd component 2 is connected to workbench 10,
It is connected with the 3rd component 3 on this workbench 10.Inhibited in the X-direction and Y direction of the 3rd component 3 using gas bearing 5G
Mobile.Therefore, even if the situation eliminating suppression component the 13, the 2nd component 2 and workbench 10 along X-direction movement is also pressed down
System.
In addition, in the above-described embodiment it is also possible to omit gravity-compensated device 60.
Description of reference numerals
1 the 1st component；2 the 2nd components；3 the 3rd components；4 guides；5 bearing components；5G gas bearing；6 supporting members；7
Actuator；8 base components；9 guides；10 workbench；11 power transmissions；12 bearing supports；13 suppression components；14 draw
Lead device；15 supply mouths；16 cavitys；17 gas supply devices；18 exhaust outlets；19 supporting arrangements；20 parallel pins；60 gravity compensations
Device；61 gas supply devices；62 supply mouths；63 spaces；64 streams；65 spaces；100 table devices；200 semiconductor manufacturing
Device；300 conveying devices；400 check devices.
Claims (12)
1. a kind of table device, wherein, this table device includes：
1st component, it can move in predetermined surface；
2nd component, it can be with respect to above-mentioned 1st component relative movement；
1st guide, it is configured at above-mentioned 1st component at least partially, and is made above-mentioned with the movement by above-mentioned 1st component
2nd component guides above-mentioned 2nd component along the mode of the direction movement of the 1st diameter parallel orthogonal with above-mentioned predetermined surface；
Workbench, it is supported on above-mentioned 2nd component；
3rd component, it is connected at least a portion of above-mentioned workbench；
Bearing components, it is using the gas to supply between this bearing components and above-mentioned 3rd component in this bearing components and above-mentioned 3
Form gas bearing between component, propped up in the way of above-mentioned 3rd component can be made to move along the direction with above-mentioned 1st diameter parallel
Hold above-mentioned 3rd component；And
Supporting arrangement, it includes parallel pin, and is used for supporting above-mentioned workbench, and this parallel pin is configured to put down with above-mentioned 1st axis
OK, and be used for linking above-mentioned 2nd component and above-mentioned workbench,
Above-mentioned workbench is supported on above-mentioned 2nd component by above-mentioned supporting arrangement.
2. table device according to claim 1, wherein,
Above-mentioned bearing components have the 1st supply mouth of the supply gas between the side of this bearing components and above-mentioned 3rd component,
In the moving range on the direction with above-mentioned 1st diameter parallel of above-mentioned 3rd component, above-mentioned 1st supply mouth continue with
The side of above-mentioned 3rd component is relatively.
3. table device according to claim 1, wherein,
With the direction of above-mentioned 1st diameter parallel on, the size of above-mentioned 3rd component is more than the size of above-mentioned bearing components.
4. table device according to claim 1, wherein,
In the moving range of above-mentioned 3rd component, with the direction of above-mentioned 1st diameter parallel on, the center of above-mentioned 3rd component is held
Continuous configuration is between the one end of above-mentioned bearing components and the other end.
5. table device according to claim 1, wherein,
The profile in the section parallel with above-mentioned predetermined surface of above-mentioned 3rd component is circle.
6. table device according to claim 5, wherein,
Above-mentioned 3rd component is at least configured with two, and be connected to the 1st position of above-mentioned workbench and above-mentioned workbench with
The 2nd different position of above-mentioned 1st position.
7. table device according to claim 1, wherein,
Above-mentioned 1st component moves along the direction with the 2nd diameter parallel in above-mentioned predetermined surface,
This table device includes the suppression for suppressing the movement on the direction with above-mentioned 2nd diameter parallel of above-mentioned 2nd component
Component processed.
8. table device according to claim 7, wherein,
This table device has the 2nd guide, and at least a portion of the 2nd guide is configured at above-mentioned suppression component,
And the 2nd guide be used for along and above-mentioned 1st diameter parallel direction guide above-mentioned 2nd component.
9. table device according to claim 1, wherein,
Above-mentioned 3rd component has upper and lower surface, and at least a portion of above-mentioned upper surface side is connected to above-mentioned workbench,
This table device includes：
Actuator, it produces the power for making above-mentioned 1st component movement；And
Gravity-compensated device, its be configured to the lower surface of above-mentioned 3rd component faced by space facing, and have for
2nd supply mouth of above-mentioned space supply gas.
10. table device according to claim 9, wherein,
This table device includes supporting member, and it is used for supporting above-mentioned bearing components, and at least a portion of this supporting member is joined
It is placed in around above-mentioned 3rd component and above-mentioned bearing components,
Above-mentioned 2nd supply mouth supplies into the space being limited by the above-mentioned lower surface of the 3rd component and the inner surface of above-mentioned supporting member
To gas.
11. table devices according to claim 10, wherein,
Above-mentioned gravity-compensated device from above-mentioned 2nd supply mouth supply gas so that above-mentioned lower surface faced by space pressure
Power is higher than the pressure in the space in outside of above-mentioned supporting member.
A kind of 12. conveying devices, wherein, this conveying device includes the table device any one of claim 1 to 11.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013138729A JP5594404B1 (en) | 2013-07-02 | 2013-07-02 | Table device, transfer device, semiconductor manufacturing device, and flat panel display manufacturing device |
| JP2013-138729 | 2013-07-02 | ||
| PCT/JP2013/083978 WO2015001690A1 (en) | 2013-07-02 | 2013-12-18 | Table device and carrier device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN104396000A CN104396000A (en) | 2015-03-04 |
| CN104396000B true CN104396000B (en) | 2017-02-08 |
Family
ID=51702078
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201380003286.2A Active CN104396000B (en) | 2013-07-02 | 2013-12-18 | Table device and carrier device |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US9877576B2 (en) |
| JP (1) | JP5594404B1 (en) |
| KR (1) | KR20160013199A (en) |
| CN (1) | CN104396000B (en) |
| WO (1) | WO2015001690A1 (en) |
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|---|---|---|---|---|
| JP6294170B2 (en) * | 2014-06-26 | 2018-03-14 | 京セラ株式会社 | Tactile presentation device |
| WO2016181230A2 (en) * | 2015-03-20 | 2016-11-17 | Alexasoft Di Alessandro Pampaloni | A mobile table on the three axes (x, y, z) of reduced encumbrance |
| NL2016164B1 (en) * | 2016-01-27 | 2017-08-01 | Ultimaker Bv | Nozzle lifting assembly. |
| WO2017170020A1 (en) | 2016-03-29 | 2017-10-05 | 平田機工株式会社 | Method for raising and lowering, raising-and-lowering apparatus, and raising-and-lowering system |
| US10393242B2 (en) * | 2016-08-31 | 2019-08-27 | Uchicago Argonne, Llc | Method and apparatus for implementing ultra-high stability long-vertical travel stage |
| CN110449922B (en) * | 2019-07-09 | 2021-03-12 | 科德数控股份有限公司 | Nested formula numerical control revolving stage |
| PL3868252T3 (en) * | 2020-02-20 | 2022-10-24 | Realthingks Gmbh | Receiving device and method for controlling a brake acting on a height-adjustable receiving unit of a receiving device |
| KR102602707B1 (en) * | 2021-12-27 | 2023-11-14 | 송근상 | Integrated basic tools practice education worktable |
| KR102528371B1 (en) | 2022-03-14 | 2023-05-03 | (주)오로스테크놀로지 | Transferring apparatus for optical instrument |
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- 2013-07-02 JP JP2013138729A patent/JP5594404B1/en active Active
- 2013-12-18 KR KR1020157036825A patent/KR20160013199A/en not_active Application Discontinuation
- 2013-12-18 CN CN201380003286.2A patent/CN104396000B/en active Active
- 2013-12-18 WO PCT/JP2013/083978 patent/WO2015001690A1/en active Application Filing
- 2013-12-18 US US14/901,377 patent/US9877576B2/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| US20160135587A1 (en) | 2016-05-19 |
| CN104396000A (en) | 2015-03-04 |
| JP5594404B1 (en) | 2014-09-24 |
| JP2015011005A (en) | 2015-01-19 |
| US9877576B2 (en) | 2018-01-30 |
| KR20160013199A (en) | 2016-02-03 |
| WO2015001690A1 (en) | 2015-01-08 |
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