CN103454708B - 吸光层状结构体 - Google Patents

吸光层状结构体 Download PDF

Info

Publication number
CN103454708B
CN103454708B CN201310211208.3A CN201310211208A CN103454708B CN 103454708 B CN103454708 B CN 103454708B CN 201310211208 A CN201310211208 A CN 201310211208A CN 103454708 B CN103454708 B CN 103454708B
Authority
CN
China
Prior art keywords
sublayer
layered structure
oxide
back side
conductive material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201310211208.3A
Other languages
English (en)
Chinese (zh)
Other versions
CN103454708A (zh
Inventor
威尔玛·德瓦尔德
伯恩德·西斯泽卡
阿尔伯特·卡斯特纳
扎比内·施奈德-贝茨
马丁·施洛特
马库斯·舒尔特海斯
詹斯·瓦格纳
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heraeus Deutschland GmbH and Co KG
Materion Advanced Materials Germany GmbH
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Original Assignee
Heraeus Materials Technology GmbH and Co KG
Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Heraeus Materials Technology GmbH and Co KG, Fraunhofer Gesellschaft zur Foerderung der Angewandten Forschung eV filed Critical Heraeus Materials Technology GmbH and Co KG
Publication of CN103454708A publication Critical patent/CN103454708A/zh
Application granted granted Critical
Publication of CN103454708B publication Critical patent/CN103454708B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0688—Cermets, e.g. mixtures of metal and one or more of carbides, nitrides, oxides or borides
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/003—Light absorbing elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/206—Filters comprising particles embedded in a solid matrix
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/22—Absorbing filters
    • G—PHYSICS
    • G02—OPTICS
    • G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333—Constructional arrangements; Manufacturing methods
    • G02F1/1335—Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/133509—Filters, e.g. light shielding masks
    • G02F1/133512—Light shielding layers, e.g. black matrix

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Nonlinear Science (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Optical Filters (AREA)
  • Liquid Crystal (AREA)
  • Physical Vapour Deposition (AREA)
CN201310211208.3A 2012-06-01 2013-05-31 吸光层状结构体 Expired - Fee Related CN103454708B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102012010803A DE102012010803A1 (de) 2012-06-01 2012-06-01 Licht absorbierende Schichtstruktur
DE102012010803.6 2012-06-01

Publications (2)

Publication Number Publication Date
CN103454708A CN103454708A (zh) 2013-12-18
CN103454708B true CN103454708B (zh) 2016-08-10

Family

ID=48366128

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201310211208.3A Expired - Fee Related CN103454708B (zh) 2012-06-01 2013-05-31 吸光层状结构体

Country Status (6)

Country Link
EP (1) EP2669718B1 (enExample)
JP (1) JP5675896B2 (enExample)
KR (1) KR101489070B1 (enExample)
CN (1) CN103454708B (enExample)
DE (1) DE102012010803A1 (enExample)
TW (1) TWI508862B (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101983691B1 (ko) * 2012-08-17 2019-05-30 삼성디스플레이 주식회사 차광 부재 및 이를 포함하는 표시 장치
WO2015135524A1 (de) 2014-03-13 2015-09-17 Hottinger Baldwin Messtechnik Gmbh Monolithische miniatur-breitband-lichtquelle für messungen mit fbg-dehnungssensoren
EP3467140A1 (de) * 2017-10-06 2019-04-10 Plansee SE Targetmaterial zur abscheidung von molybdänoxid-schichten
TWI850175B (zh) * 2022-10-20 2024-07-21 大立光電股份有限公司 光路轉折元件、成像鏡頭模組及電子裝置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5976639A (en) * 1995-01-11 1999-11-02 Anelva Corporation Black matrix laminated film and reactive sputtering apparatus
US6366012B1 (en) * 1999-08-19 2002-04-02 Samsung Sdi Co., Ltd. Cathode ray tube having a light absorbing filter layer formed on a glass panel thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04342204A (ja) * 1991-05-20 1992-11-27 Matsushita Electric Ind Co Ltd ブラックマトリクスおよびその製造方法
EP1111438A3 (en) * 1999-12-23 2003-03-19 Samsung SDI Co., Ltd. Black matrix and preparing method thereof
JP4614027B2 (ja) 2000-07-03 2011-01-19 ソニー株式会社 光学多層構造体および光スイッチング素子、並びに画像表示装置
US7332852B2 (en) * 2004-07-02 2008-02-19 Samsung Electronics Co., Ltd. One-way transparent optical system having light absorption elements and light refracting structures
US8893711B2 (en) * 2007-10-18 2014-11-25 Alliance For Sustainable Energy, Llc High temperature solar selective coatings

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5976639A (en) * 1995-01-11 1999-11-02 Anelva Corporation Black matrix laminated film and reactive sputtering apparatus
US6366012B1 (en) * 1999-08-19 2002-04-02 Samsung Sdi Co., Ltd. Cathode ray tube having a light absorbing filter layer formed on a glass panel thereof

Also Published As

Publication number Publication date
KR20130135766A (ko) 2013-12-11
CN103454708A (zh) 2013-12-18
TW201412542A (zh) 2014-04-01
EP2669718B1 (de) 2016-12-28
DE102012010803A1 (de) 2013-12-05
JP2013250560A (ja) 2013-12-12
EP2669718A1 (de) 2013-12-04
JP5675896B2 (ja) 2015-02-25
TWI508862B (zh) 2015-11-21
KR101489070B1 (ko) 2015-02-02

Similar Documents

Publication Publication Date Title
TWI506154B (zh) 吸光層系統，彼之製法以及適合彼所用之濺射靶材
US20160070033A1 (en) Light-absorbing layer and layer system containing the layer, method for producing the layer system and a sputter target suited therefor
JP6021030B2 (ja) 構造体、タッチパネル及びディスプレイ
JP6767723B2 (ja) 酸化物薄膜及び該薄膜を製造するためのスパッタリングターゲット用酸化物焼結体
KR20020065760A (ko) 광학적 전기적 특성을 지닌 기능성 박막
TW201539487A (zh) 導電結構體及其製造方法
KR100768175B1 (ko) 광학적 전기적 특성을 지닌 기능성 박막
KR100708640B1 (ko) 광학적 전기적 특성을 지닌 기능성 박막
CN103454708B (zh) 吸光层状结构体
CN108242276A (zh) 层叠布线膜及其制造方法以及Mo合金溅射靶材
KR101847751B1 (ko) 입력 장치에 사용되는 전극, 및 그 제조 방법
WO2014171149A1 (ja) 透明導電体及びその製造方法
WO1997001853A1 (en) Transparent conductive laminate and touch panel made by using the same
TW202018111A (zh) 光學機能膜、濺鍍靶及濺鍍靶之製造方法
JP4316868B2 (ja) 透明導電積層体
JP2017068219A (ja) 電極構造
WO2014030617A1 (ja) フラットパネルディスプレイの半透過電極用Ａｌ合金膜、およびフラットパネルディスプレイ用半透過電極

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
CP01 Change in the name or title of a patent holder
CP01 Change in the name or title of a patent holder

Address after: Hanau, Germany

Co-patentee after: FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Patentee after: HERAEUS DEUTSCHLAND GmbH & Co.KG

Address before: Hanau, Germany

Co-patentee before: FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Patentee before: HERAEUS MATERIALS TECHNOLOGY GmbH & Co.KG

TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20170925

Address after: Hanau, Germany

Co-patentee after: FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Patentee after: MATERION ADVANCED MATERIALS GERMANY GmbH

Address before: Hanau, Germany

Co-patentee before: FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V.

Patentee before: HERAEUS DEUTSCHLAND GmbH & Co.KG

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20160810

Termination date: 20190531