CN103422059A - 一种可同时实现玻璃基板单、双面镀膜设备 - Google Patents
一种可同时实现玻璃基板单、双面镀膜设备 Download PDFInfo
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- CN103422059A CN103422059A CN2012101521810A CN201210152181A CN103422059A CN 103422059 A CN103422059 A CN 103422059A CN 2012101521810 A CN2012101521810 A CN 2012101521810A CN 201210152181 A CN201210152181 A CN 201210152181A CN 103422059 A CN103422059 A CN 103422059A
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CN201210152181.0A CN103422059B (zh) | 2012-05-16 | 2012-05-16 | 一种可同时实现玻璃基板单、双面镀膜设备 |
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CN201210152181.0A CN103422059B (zh) | 2012-05-16 | 2012-05-16 | 一种可同时实现玻璃基板单、双面镀膜设备 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111580193A (zh) * | 2020-06-08 | 2020-08-25 | 华天慧创科技(西安)有限公司 | 一种超薄镀膜光学晶圆及其制备方法 |
CN114907023A (zh) * | 2022-05-19 | 2022-08-16 | 安徽立光电子材料股份有限公司 | 一种增透超硬层叠体及其应用和制备方法 |
CN114966910A (zh) * | 2022-05-19 | 2022-08-30 | 安徽立光电子材料股份有限公司 | 一种增透减反层叠体及其应用和制备方法 |
CN115032726A (zh) * | 2022-05-19 | 2022-09-09 | 安徽立光电子材料股份有限公司 | 一种自洁净层叠体及其应用和制备方法 |
Citations (8)
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CN1093213A (zh) * | 1993-04-01 | 1994-10-05 | 中国建筑材料科学研究院 | 制备类金刚石复合振膜的方法 |
DE19914129C2 (de) * | 1999-03-27 | 2001-04-05 | Forschungszentrum Juelich Gmbh | Verfahren zum doppelseitigen Beschichten eines Substrates mit insbesondere einem Hochtemperatursupraleiter-Material durch Materialabscheidung und Vorrichtung zur Durchführung des Verfahrens |
CN1619010A (zh) * | 2003-11-18 | 2005-05-25 | 电子科技大学 | 双倒筒靶结合基片双轴旋转的镀膜装置 |
CN2706479Y (zh) * | 2004-04-14 | 2005-06-29 | 衡阳市真空机电设备有限公司 | 双面溅射真空卷绕连续镀膜设备 |
WO2006025336A1 (ja) * | 2004-08-30 | 2006-03-09 | Ulvac, Inc. | 成膜装置 |
JP2011236487A (ja) * | 2010-05-13 | 2011-11-24 | Seiko Epson Corp | 搬送式両面スパッタリング装置 |
CN102268642A (zh) * | 2011-07-22 | 2011-12-07 | 上海奕瑞光电子科技有限公司 | 电阻加热式蒸发源 |
CN202671420U (zh) * | 2012-05-16 | 2013-01-16 | 深圳市正星光电技术有限公司 | 一种可同时实现玻璃基板单、双面镀膜设备 |
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- 2012-05-16 CN CN201210152181.0A patent/CN103422059B/zh not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1093213A (zh) * | 1993-04-01 | 1994-10-05 | 中国建筑材料科学研究院 | 制备类金刚石复合振膜的方法 |
DE19914129C2 (de) * | 1999-03-27 | 2001-04-05 | Forschungszentrum Juelich Gmbh | Verfahren zum doppelseitigen Beschichten eines Substrates mit insbesondere einem Hochtemperatursupraleiter-Material durch Materialabscheidung und Vorrichtung zur Durchführung des Verfahrens |
CN1619010A (zh) * | 2003-11-18 | 2005-05-25 | 电子科技大学 | 双倒筒靶结合基片双轴旋转的镀膜装置 |
CN2706479Y (zh) * | 2004-04-14 | 2005-06-29 | 衡阳市真空机电设备有限公司 | 双面溅射真空卷绕连续镀膜设备 |
WO2006025336A1 (ja) * | 2004-08-30 | 2006-03-09 | Ulvac, Inc. | 成膜装置 |
JP2011236487A (ja) * | 2010-05-13 | 2011-11-24 | Seiko Epson Corp | 搬送式両面スパッタリング装置 |
CN102268642A (zh) * | 2011-07-22 | 2011-12-07 | 上海奕瑞光电子科技有限公司 | 电阻加热式蒸发源 |
CN202671420U (zh) * | 2012-05-16 | 2013-01-16 | 深圳市正星光电技术有限公司 | 一种可同时实现玻璃基板单、双面镀膜设备 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111580193A (zh) * | 2020-06-08 | 2020-08-25 | 华天慧创科技(西安)有限公司 | 一种超薄镀膜光学晶圆及其制备方法 |
CN114907023A (zh) * | 2022-05-19 | 2022-08-16 | 安徽立光电子材料股份有限公司 | 一种增透超硬层叠体及其应用和制备方法 |
CN114966910A (zh) * | 2022-05-19 | 2022-08-30 | 安徽立光电子材料股份有限公司 | 一种增透减反层叠体及其应用和制备方法 |
CN115032726A (zh) * | 2022-05-19 | 2022-09-09 | 安徽立光电子材料股份有限公司 | 一种自洁净层叠体及其应用和制备方法 |
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Address after: 688 No. 330096 Jiangxi city of Nanchang province high tech Zone, North Road Patentee after: Nanchang Jingzhong Photoelectric Co.,Ltd. Address before: 688 No. 330096 Jiangxi city of Nanchang province high tech Zone, North Road Patentee before: NANCHANG ZHENGXING OPTOELECTRONICS TECHNOLOGY CO.,LTD. |
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Effective date of registration: 20211229 Address after: 231300 building D3, industrial park, Hangbu Park, economic development zone, Hangbu Town, Shucheng County, Lu'an City, Anhui Province (intersection of Xiangzhang Avenue and Shilan Road) Patentee after: Anhui Yigao Photoelectric Technology Co.,Ltd. Address before: 330096 No. 688, Tianxiang North Avenue, high tech Zone, Nanchang City, Jiangxi Province Patentee before: Nanchang Jingzhong Photoelectric Co.,Ltd. |
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