CN103370771A - Series of nozzles, and substrate treatment apparatus provided with series of nozzles - Google Patents
Series of nozzles, and substrate treatment apparatus provided with series of nozzles Download PDFInfo
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- CN103370771A CN103370771A CN201280008138.5A CN201280008138A CN103370771A CN 103370771 A CN103370771 A CN 103370771A CN 201280008138 A CN201280008138 A CN 201280008138A CN 103370771 A CN103370771 A CN 103370771A
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- gas
- entrance hole
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- combining nozzle
- ejiction opening
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Nozzles (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
Provided are nozzles and a substrate treatment apparatus, wherein a broad area of a substrate can be treated efficiently, by scanning. This series of nozzles (1) comprises a section of multiple nozzles (10) provided with acceleration nozzles (100) comprising: first gas introduction holes (101); first liquid introduction holes (103) provided downstream of the first gas introduction holes (101); acceleration flow paths (105) for accelerating gas supplied from the first gas introduction holes (101) and liquid supplied from the first liquid introduction holes (103); and ejection nozzles (107) through which the accelerated multiphase fluids are ejected. In the section of multiple nozzles (10), the acceleration nozzles (100) are arranged in parallel.
Description
Technical field
The present invention relates to the nozzle and the processing unit that in the operation that pollution, the attachment of substrate are removed, cleaned, use.
Background technology
In the manufacturing process of electronic device, with respect to 1 substrate, repeatedly clean 50～100 times.Its cleaning on as if can bring on device reliability organic substance, the particulate etc. such as resist film, polymer film of impact.In this matting, usually use the combination of alkali wash water and pickle, in addition medicines such as persulfuric acid (sulfuric acid and aquae hydrogenii dioxidi are with 4 to 1 materials that mix), organic solvent, in addition, in the flushing operation that is used for removing its residue, use a large amount of pure water.In addition, when removing resist, usually use plasma ashing apparatus, but other cleaning device is used in the cleaning of residue afterwards, impurity.At this, the cleaning of the conventional art shown in above-mentioned, remove the employed liquid of film and have such shortcoming: 1) at high price, 2) environmental pressure is larger, therefore need special drainage treatment equipment, 3) device is maximized, need exhaust equipment in the special device, need a large amount of pure water, 4 in order to wash out liquid) utilize 1 table apparatus can not contain from removing film to the operation of cleaning.
Under above-mentioned technical task, proposing has the substrate processing method using same (patent documentation 1) that uses steam and water.According to the method, only utilize steam and water, just can obtain higher physical impact power, therefore, can peel off resist, polymer film.Therefore, in the manufacturing process of electronic device, can reduce liquid.
Technical literature formerly
Patent documentation
Patent documentation 1: international the 2009/013797th brochure that discloses
Summary of the invention
The problem that invention will solve
From the problem of the treatment effeciency of substrate, exist to require with respect to the go forward side by side situation of processing of line scanning of the miscible fluids of substrate injection water steam and water.But according to foregoing invention, the single treatment of being undertaken by scanning is difficult to process wider area, can not obtain higher treatment effeciency.Therefore, the object of the invention is to, nozzle and the substrate board treatment that can process the substrate of wider area efficiently by scanning are provided.
Be used for solving the means of problem
The present invention (1) is a kind of combining nozzle, this combining nozzle possesses compound accelerating jet section, this compound accelerating jet section possesses a plurality of accelerating jets, this accelerating jet configures side by side, and this accelerating jet has: the first gas entrance hole, be located at the first liquid entrance hole of the position of swimming on the lower than described the first gas entrance hole, the acceleration stream that the gas of supplying with from this first gas entrance hole and the liquid of supplying with from this first liquid entrance hole are accelerated and the ejiction opening that sprays the miscible fluids after accelerating.
In the situation that use combining nozzle, when importing gas from steam generator etc., the inhomogeneous such problem that becomes of the gas spray volume with each nozzle.As cause, generation can not be removed fully resist etc. and be removed the such problem of object.
Therefore, in the present invention (2)～(6), purpose is to be provided in the situation of using combining nozzle, and the gas spray volume from each nozzle is adjusted such method equably.
The present invention (2) is on the basis of the combining nozzle of described invention (1), this combining nozzle also has gas delay section, this gas delay section has the second gas entrance hole and gas detention space, at gas detention space place the gas of supplying with from this second gas entrance hole is detained, and passes through described the first gas entrance hole with respect to described a plurality of accelerating jet supply gas.
The present invention (3) also possesses near the second gas entrance hole of described gas delay section in described gas detention space and covers rod to what the gas from the ejection of this second gas entrance hole spread on the basis of the combining nozzle of described invention (2).
The present invention (4) is on the basis of the combining nozzle of described invention (3), and the described width of rod that covers is greater than the internal diameter of described gas entrance hole.
The present invention (5) is on the basis of the combining nozzle of described invention (3) or (4), and the described rod that covers has the square shape inclination position relative with the direction of described gas entrance hole.
The present invention (6) is on the basis of the combining nozzle of described invention (5), and the inclination angle at described square shape inclination position is 30～150 °.
In the situation that use combining nozzle to spray with respect to object, there are more different such problem in the impulsive force and the impulsive force under the nozzle ejiction opening that have between nozzle ejiction opening and the nozzle ejiction opening.That is, in the situation that only use combining nozzle to spray for object, inhomogeneous to the impulsive force of bringing on the object.Therefore, in the present invention (7)～(8), purpose is to offer the higher combining nozzle of impulsive force uniformity that object brings.
On the basis of the present invention (7) each combining nozzle in described invention (1)～(6), described a plurality of accelerating jets ejiction opening separately configures in a row in the horizontal,
Horizontal spreading width W(［ the restriction horizontal stroke is wide ］-［ the ejiction opening horizontal stroke is wide ］ of the distance P from the lateral ends of the ejiction opening of described a plurality of accelerating jets to the lateral ends of adjacent ejiction opening and the ejiction opening of described a plurality of accelerating jets)/2 ratio (［ P ］/［ W ］)) is 0.2～1.0.
The present invention (8) is on the basis of the combining nozzle of described invention (7), and described ejiction opening is provided with the slit that adjacent ejiction opening is linked to each other, opens to emission direction.
In the situation that use combining nozzle to spray miscible fluids with respect to object, has the inhomogeneous such problem of amount of the liquid that sprays from each nozzle ejiction opening.Therefore, in the present invention (9)～(10), purpose is to be provided in the situation of using combining nozzle, and the liquid spray volume from each nozzle is adjusted such method equably.
The present invention (9) is on each the basis of combining nozzle, described invention (1)～(8), this combining nozzle also possesses liquid holdup section, this liquid holdup section possesses second liquid entrance hole and liquid holdup space, make the liquid holdup that imports from this second liquid entrance hole at this place, liquid holdup space, and pass through described first liquid entrance hole with respect to described a plurality of accelerating jet feed fluids.
The present invention (10) is on the basis of the combining nozzle of described invention (8), and described liquid holdup section is located at the side of described combining nozzle,
Described liquid holdup space has the rectangular shape of growing crosswise,
Described second liquid entrance hole is located at the top of an end in liquid holdup space,
Described first liquid entrance hole is located at the top of the other end in described liquid holdup space.
The present invention (11) is substrate board treatment, and it possesses:
Each combining nozzle in described invention (1)～(10);
Supply with the steam generating unit of steam with respect to described combining nozzle; And
Water supply unit with respect to described combining nozzle feed fluid.
The present invention (12) is on the basis of the substrate board treatment of described invention (11), and this substrate board treatment also possesses gas supply part, and this gas supply part is supplied with non-active gas or clean air with respect to described combining nozzle.
The invention effect
According to combining nozzle of the present invention, realize utilizing single pass just can process such effect to the substrate of wider area expeditiously.
In addition, by gas delay of the present invention section is set, owing to supplying with to each nozzle after temporary transient the delay from the gas that the second gas entrance hole imports, therefore, realize making from the spray volume of the miscible fluids of each accelerating jet ejection of the consisting of combining nozzle even such effect that becomes.Particularly cover rod by in the gas detention space, arranging, the mobile of gas that imports from the second gas entrance hole covered, become remarkable by the inhomogeneity raising effect that the generation of gas delay section is set.
Horizontal spreading width W by making combining nozzle and the ratio of distance P be above-mentioned shown in such scope, under each nozzle and the impulsive force between the nozzle ejiction opening distribute and show higher uniformity.In addition, by between the nozzle ejiction opening slit being set, the uniformity that impulsive force distributes further improves.
By also having liquid holdup section, the quantitative change of the water of supplying with to each nozzle gets constant, therefore, realizes the miscible fluids that ejects the evenly such effect that also becomes.
Description of drawings
Fig. 1 is the front view of combining nozzle of the present invention.
Fig. 2 is the end view of combining nozzle of the present invention.
Fig. 3 is the upward view of combining nozzle of the present invention.
Fig. 4 is the vertical view of combining nozzle of the present invention.
Fig. 5 is spreading width W(［ the restriction horizontal stroke is wide ］-［ the ejiction opening horizontal stroke is wide ］)/2) with the key diagram of distance P.
Fig. 6 is the photo of structure of the slit of expression combining nozzle of the present invention.
Fig. 7 is the figure that the structure of rod is covered in expression.
Fig. 8 is the summary construction diagram of substrate board treatment of the present invention.
Fig. 9 is the situation of miscible fluids is sprayed in expression from combining nozzle of the present invention photo.
Figure 10 is that expression has been measured from the result's of the impulsive force of the fluid of combining nozzle of the present invention ejection chart.
Figure 11 is that expression has been measured from the result's of the impulsive force of the fluid of combining nozzle of the present invention ejection chart.
Figure 12 be expression the lateral attitude of nozzle is changed measure the fluid that sprays from combining nozzle of the present invention impulsive force and must result's chart.
Embodiment
Use the description of drawings embodiments of the present invention.The form of Fig. 1～4 expressions combining nozzle of the present invention.Fig. 1 is the front view of combining nozzle of the present invention, and Fig. 2 is the end view of combining nozzle of the present invention, and Fig. 3 is the upward view of combining nozzle of the present invention, and Fig. 4 is the vertical view of combining nozzle of the present invention.Need to prove, the part of with dashed lines performance is the perspective ray of the internal structure of expression combining nozzle.
Combining nozzle 1 of the present invention possesses compound accelerating jet section 10, and this compound accelerating jet section 10 possesses a plurality of accelerating jets 100, and this accelerating jet configures side by side.A plurality of accelerating jets 100 are arranged in the parallel mode of emission direction each other.At this, show the example that accelerating jet 100 arranges eight (100a～100h), but the radical of nozzle is not particularly limited.
Use Fig. 2 to describe accelerating jet 100 in detail.Accelerating jet 100 has: the first gas entrance hole 101, and it is located at the upstream of this nozzle, has maximum secting area in nozzle; First liquid entrance hole 103, it is positioned at the position of swimming on the lower than this first gas entrance hole, is located at the side of accelerating stream; Accelerate stream 105, it accelerates the gas of supplying with from this first gas entrance hole and the liquid of supplying with from this first liquid entrance hole; Ejiction opening 107, it is used for spraying the miscible fluids after being accelerated.Accelerating stream 105 has: import road 1051, its sectional area is along with diminishing gradually towards the downstream; Restriction 1053, it has minimum sectional area in the stream of the terminal that is formed at this introduction part; Accelerate road 1055, itself and this restriction forms continuously, along with becoming large towards the downstream sectional area.Need to prove, the sectional area of the first gas entrance hole 101 is preferably greater than the sectional area of first liquid entrance hole 103.By being made as such structure, easily spray the miscible fluids that the drop by the gas of continuous phase and decentralized photo consists of.Need to prove, the cross sectional shape of ejiction opening 107 can be circular, can be oval, also can be slit shape.
Ejiction opening 107a～the 107h of the accelerating jet 100 of compound accelerating jet section 10 is along landscape configuration (Fig. 1) in a row.
As shown in Figure 5, horizontal spreading width W(［ the restriction horizontal stroke is wide ］-［ the ejiction opening horizontal stroke is wide ］ of the distance P from the lateral ends of the ejiction opening of described a plurality of accelerating jets to the lateral ends of adjacent ejiction opening and the ejiction opening 107 of accelerating jet)/2 ratio (［ P ］/［ W ］)) is preferably 0.01～2.0, and more preferably 0.2～1.0.By being made as the ratio of this scope, very close to each other between the miscible fluids that ejects from combining nozzle, the impulsive force of bringing to object becomes even.If be made as greater than this than value, then wide between ejiction opening and the ejiction opening, produce the gap between the miscible fluids that ejects from combining nozzle, locate impulsive force under ejiction opening and between ejiction opening and produce significant difference.Need to prove, in the situation that is provided with the slit 109 between the accelerating jet ejiction opening described later (Fig. 5 (b)), horizontal wide horizontal wide (Fig. 5 (c)) that refers to the upper end of slit of ejiction opening.
In addition, such as Fig. 3, shown in Figure 6, the ejiction opening 107 of combining nozzle section preferably is provided with the slit 109 that adjacent ejiction opening is linked to each other, opens to emission direction.Need to prove, the part that fences up with circle of Fig. 6 is slit 109.Slit 109 is located between each ejiction opening 107 (slit 109a～109g).By this slit is set, in the situation of the impulsive force of not damaging the miscible fluids that sprays from combining nozzle, increase the width of jet flow, therefore, the uniformity of impulsive force further improves.
Need to prove, in the present invention, the width of slit is preferably 0.3～1.0 scope in the ratio (［ slit width ］/［ the longitudinally width of ejiction opening ］) with respect to the longitudinally width of ejiction opening.The degree of depth of slit is preferably apart from ejiction opening 1～10mm.By having such width and the degree of depth, the uniformity of impulsive force improves.
Combining nozzle 1 of the present invention possesses for the gas delay section 20 that imports equably gas to the first gas introduction part 101.Gas delay section 20 possesses the second gas entrance hole 201 and gas detention space 203, and this gas detention space 203 is detained the gas of supplying with from this second gas entrance hole, also passes through described the first gas entrance hole with respect to described a plurality of accelerating jet supply gas.
Also possess near the second gas entrance hole 201 of described gas delay section 20 in detention space 203 for what the gas from these the second gas entrance hole 201 ejections was spread and cover excellent 205.Fig. 7 is the figure that the structure of rod 205 is covered in expression, and Fig. 7 (a) is end view, and Fig. 7 (b) is front view, and (c) of Fig. 7 is the a-a cutaway view.Cover rod 205 and be set up in the wall that forms detention space 203.Cover rod 205 by configuration, can cover from the gas flow of the second gas entrance hole 201 ejection, prevent that gas is not detained and deflection is present in the combining nozzle of the positive downstream portion of the second gas entrance hole 201 and comes supply gas at gas detention space 203.
As shown in Figure 7, cover rod 205 and preferably have the square shape inclination position 2051 relative with the direction of the second gas entrance hole.Need to prove, the tilt angle theta at square shape inclination position 2051 is not particularly limited, but is preferably 30 °～150 °, more preferably 60 °～120 °, is particularly preferably 90 °.By being made as the angle of inclination of such scope, can obtain the screening effect of appropriateness, improve to the uniformity of the gas delivery volume of each accelerating jet.In addition, also can groove 2053 be set and consist of square shape rake bit position in the mode that can rotate in the side of covering rod 205.
As shown in Figure 4, cover the width d of rod 205
aBe preferably greater than the inner diameter d of the second gas entrance hole 201
bCover the width d of rod 205
aRefer to the Breadth Maximum with the part of the perpendicular direction of the second gas entrance hole 201.Utilize this structure, the screening effect of gas flow is remarkable, improves from the uniformity of the gas of each nozzle ejection.
Combining nozzle 1 of the present invention possesses for the liquid holdup section 30 that imports equably water to first liquid introduction part 103.Liquid holdup section 30 possesses second liquid entrance hole 301 and liquid holdup space 302, and this liquid holdup space 302 makes from the liquid holdup of this second liquid entrance hole importing, also passes through described first liquid entrance hole with respect to described a plurality of accelerating jet feed fluids.Liquid holdup section 30 is located at the side of combining nozzle.Liquid holdup space 302 has the rectangular shape of growing crosswise.In addition, second liquid entrance hole 301 is located at the upper surface of a horizontal end in liquid holdup space 302, and the top adjacent with first liquid introduction part 103 of the horizontal other end in described liquid holdup space is located in liquid supply hole 303.Under utilizing above-mentioned gas delay section 20 to make to become uniform situation to the gas delivery volume of each accelerating jet, this liquid holdup section 30 makes the liquid supply quantitative change get evenly especially.
Fig. 8 is the overall diagram of substrate board treatment 500 of the present invention.This device 500 is to have the up and down structure of section of mechanism (F) of steam supply unit (A), gas supply part (B), water supply unit (C), two fluid adjustment parts (D), miscible fluids injection section (E), substrate maintenance selection.Below, each one is described in detail in detail.
(A) steam supply unit
Steam supply unit (A) is made of following structure: the water supplying pipe 511 that is used for supplying with pure water; Be heated to set point of temperature D1(℃) above and produce the generation of steam, control steam and steam is forced into setting C1(MPa) steam generator 512; The supply of management steam and the steam open and close valve 513 that can open and close that stops thereof; Be used for to measure the pressure gauge 514 of the pressure of the steam of supplying with downstream from steam generator 512; Be used for steam supply pressure is adjusted into the water vapour pressure adjustment valve 515 of desired value; The heating steam maker with temperature control device of be used for to adjust supplying with the fine droplet amount in the steam saturated steam wetness adjuster 516 of holding concurrently; And as the safety valve 517 of safety device.The flow of steam and pressure only utilize water vapour pressure to adjust valve 515 and just can control.
(B) gas supply part
Gas supply part (B) is made of following structure: the gas supply pipe 521 that is used for supplying with non-active gas or clean air; Be used for the supply pressure of non-active gas or clean air is adjusted into the gas pressure adjustment valve 522 of desired value; The gas switching dual-purpose flow rate regulating valve 523 that stops and opening again, flow is adjusted into desired value that is used for management non-active gas or clean air; The heating part 524 with the gas temperature controlling organization that is used for the temperature of adjustment non-active gas or clean air; Be used for measuring the downstream gas flowmeter 525 of the pressure of the gas of supply.Utilize gas pressure to adjust valve 522 and make first pressing constant (about 0.4MPa), can utilize to open and close dual-purpose flow rate regulating valve 523 control output flows.
(C) water supply unit
Water supply unit (C) is made of following structure: be used for the water supplying pipe 531 for feedwater; Be used for making glassware for drinking water that the heating part 532 with the coolant-temperature gage controlling organization of thermal energy be arranged; The water ga(u)ge 533 that is used for the flow of affirmation water; Water open and close valve 534 is supplied with in the downstream that stops and opening that is used for the supply of management water downstream; Be used for to adjust flow and water is successfully imported to throttle orifice (flow rate regulating valve) 535 in the gas pipe arrangement.Need to prove, in the situation that this liquid (be water at this) is supplied with to nozzle, preferably do not adopt the mixture of in the past such nitrogen gas etc.This be because: can not be in the situation that mist and at above-mentioned mixture equably in the liquid worries to have entered discontinuously bubble in pipe arrangement.But, also can in the situation that dissolved can be to dissolved gases in this liquid (at this for water), for example be CO at water
2Liquid condition supply with to nozzle.For the flow of water, can apply under the state of constant pressure (being generally 0.4MPa) at the container (not shown) to pure water adjusting joint discharge orifice (flow rate regulating valve) 535 and utilize water ga(u)ge 533 to confirm its outputs and control.
(D) two fluid adjustment parts
Two fluid adjustment parts (D) have the heating part 541 with two fluid temperature (F.T.) controlling organizations for the humidity of the temperature of adjusting two fluids that generate, saturated steam.
(E) miscible fluids injection section
Miscible fluids injection section (E) is made of following structure: be used for spraying combining nozzle 1 miscible fluids, forwards, backwards left and right directions (the X-axis nozzle scan scope of Fig. 8 or Y-axis nozzle scan scope) movement with respect to object; The flexible pipe arrangement 552 that is used for making the movement of nozzle to carry out smoothly; Pressure gauge 553 for the pressure in front of the nozzle of measuring fluid.Combining nozzle 1 can be processed substrate expeditiously by scanning along X-direction.Need to prove, nozzle shown in Figure 8 is the summary construction diagram of the side of combining nozzle 1.
(F) substrate keeps rotating part
Substrate keeps rotating part (F) by the workbench 561 that can carry holding object (substrate) and is used for making the rotation motor 562 of workbench 561 rotations to consist of.
Below, the effect of device of the present invention is described.
In device of the present invention, the miscible fluids that the steam of supplying with from the steam supply unit and the water of supplying with from the water supply unit are generated in combining nozzle 1 interior mixing sprays.Need to prove, by mixing non-active gas or clean air, the emitted dose of steam can be suppressed lower and obtain higher pressure.For example, residual and only peel off the recovery rare metal in order to make resist in the stripping process of rare metal, also can in steam, mix non-active gas or clean air.
In the second gas entrance hole 201 of combining nozzle 1 of the present invention, import the steam supplied with from the steam supply unit is arranged, from the gas of gas supply part.Flow and after the 203 interior delays of air trapping space, supply with equably to the first gas entrance hole 101 of each accelerating jet 100 from the temporarily blocking of gas crested rod 205 that this second gas entrance hole imports.
On the other hand, at second liquid entrance hole 301 places of combining nozzle 1, come for feedwater from the water supply unit.At this moment, the water of supply also can use and add the water that liquid mixes.The water that imports from second liquid entrance hole 301 is detained in this detention space after the bottom surface sections in liquid holdup space 302 flows, and supplies with equably to the first liquid entrance hole 103 of each accelerating jet from the liquid supply hole 303 of being located at the top in this space.
In each accelerating jet in compound accelerating jet section 10, the gas that imports from the first gas entrance hole 101 and the liquid supplied with from the first liquid entrance hole 103 that accelerates the stream side are accelerated by this that stream accelerates and from ejiction opening 107 ejections.Because the quantity delivered of the gas of each nozzle and liquid is even, therefore, get evenly from the quantitative change of the miscible fluids of each nozzle ejection.
As mentioned above, while spray miscible fluids combining nozzle 1 is scanned along the direction (X-axis) vertical with horizontal (Y-axis) of ejiction opening 107 arrangements to substrate, thereby can process substrate integral body expeditiously.In addition, even from the amount of the miscible fluids of each accelerating jet ejection, therefore, can be to processing equably on the substrate surface.In addition, by at ejiction opening 107 slit 109 being set, impulsive force is become evenly, therefore, utilize scan process treatment substrate equably just once.
Embodiment
Example 1
Under following condition, be that seven combining nozzle of the present invention 1 sprays miscible fluids with accelerating jet section, observe from the state of the fluid of each nozzle ejection.The results are shown among Fig. 9.In addition, under this condition, the substrate that is formed with metallic film on the resist surface that is formed with the electrode wiring pattern is sprayed miscible fluids (gas: steam+air, liquid: water), carry out peeling off of unwanted metal.
The pressure of gas integral body: 0.34MPa
The temperature of steam: 68 ℃
The flow of steam: 15kg/Hr root
The temperature of air: 25 ℃
The flow of air: 150L/min root
The flow of pure water: 300cc/min root
The temperature of pure water: 20 ℃
Nozzle GAP:10mm
Nozzle scan: 15mm/s
Example 2
As a comparison experiment, use is not except arranging the combining nozzle cover rod, ejiction opening slit, P/W than being structure same as Example 1 7.0, in addition under condition same as Example 1, spray miscible fluids, observe from the state of the miscible fluids of each nozzle ejection.The results are shown among Fig. 9.In addition, under this condition, the substrate that is formed with metallic film on the resist surface that is formed with the electrode wiring pattern is sprayed miscible fluids (gas: steam+air, liquid: water), carry out peeling off of unwanted metal.
Above result sprays at the combining nozzle that utilizes example 1 in the situation of miscible fluids, sprays the situation of miscible fluids with the combining nozzle that utilizes example 2 and compares, and observes emitted dose from each nozzle become evenly (Fig. 9).In addition, when having carried out the peeling off of metal, in the situation of the combining nozzle that has used example 1, observe the situation that metal is peeled off equably, but in the situation of the combining nozzle of example 2, observe a part of metal and be not stripped from and residual situation.
The inhomogeneity experiment of hitting power
Under following condition, the use accelerating jet is that seven combining nozzle of the present invention 1 sprays miscible fluids, measures from the impulsive force of the fluid of each nozzle ejection.Need to prove the mensuration working load transducer of impulsive force.The results are shown among Figure 10, Figure 11.
The pressure of gas integral body: 0.34MPa
The temperature of steam: 68 ℃
The flow of steam: 15kg/Hr root
The temperature of air: 25 ℃
The flow of air: 150L/min root
The flow of pure water: 300cc/min root
The temperature of pure water: 20 ℃
Nozzle GAP:10mm
Nozzle scan: 0mm/s
Above result is not covered rod in the situation that be provided with, and many from the injection quantitative change of the gas of the accelerating jet that is positioned at the center, the emitted dose of liquid tails off.Cover rod by setting, become even from the gas of each nozzle, each spray volume of liquid.Particularly when angle is 60 °～120 °, has higher uniformity from the spray volume of each nozzle.
More specifically, use and to arrange 180 ° and cover rod, the combining nozzle of ejiction opening slit be not set and the combining nozzle that uses carries out the detailed mensuration of impulsive force in example 1.Under above-mentioned injection conditions, towards the other end, while being changed, the nozzle lateral attitude measures impulsive force from an end of combining nozzle.The results are shown among Figure 12.
The result, ［ slit width ］/［ vertical width of ejiction opening ］ be set be 0.4 between ejiction opening, the degree of depth of slit is the slit of 5mm, the angle of inclination that to cover the square shape inclination position of rod is made as 90 °, thereby makes under each nozzle and the higher uniformity of the distribution of the impulsive force between nozzle ejiction opening demonstration.
Industrial applicibility
Nozzle of the present invention and device are used in the electrode forming process of the luminescent device manufacturing process such as the peeling off of the manufacturing process of the recording medium of semiconductor crystal wafer, liquid crystal display, hard disk etc., printed board, solar cell substrate etc., matting, light-emitting diode, semiconductor laser.
Description of reference numerals
1 combining nozzle
10 compound accelerating jet sections
100 accelerating jets
101 first gas entrance holes
103 first liquid entrance holes
105 accelerate stream
107 ejiction openings
20 gas delay sections
201 second gas entrance holes
203 gas detention spaces
205 cover rod
30 liquid holdup sections
301 second liquid entrance holes
302 liquid holdup spaces
A steam supply unit
The B gas supply part
C water supply unit
D two fluid adjustment parts
E miscible fluids injection section
The F substrate keeps up and down section of mechanism of rotation
Claims (12)
1. combining nozzle, this combining nozzle possesses compound accelerating jet section, this compound accelerating jet section possesses a plurality of accelerating jets, this accelerating jet configures side by side, and this accelerating jet has: the first gas entrance hole, be located at the first liquid entrance hole of the position of swimming on the lower than described the first gas entrance hole, the acceleration stream that the gas of supplying with from this first gas entrance hole and the liquid of supplying with from this first liquid entrance hole are accelerated and the ejiction opening that sprays the miscible fluids after accelerating.
2. combining nozzle according to claim 1,
This combining nozzle also possesses gas delay section, this gas delay section has the second gas entrance hole and gas detention space, at this gas detention space place the gas of supplying with from this second gas entrance hole is detained, and passes through described the first gas entrance hole with respect to described a plurality of accelerating jet supply gas.
3. combining nozzle according to claim 2,
Also possess near the second gas entrance hole of described gas delay section in described gas detention space and cover rod to what the gas from the ejection of this second gas entrance hole spread.
4. combining nozzle according to claim 3,
The described width of rod that covers is greater than the internal diameter of described gas entrance hole.
5. according to claim 3 or 4 described combining nozzles,
The described rod that covers has the square shape inclination position relative with the direction of described gas entrance hole.
6. combining nozzle according to claim 5,
The inclination angle at described square shape inclination position is 30～150 °.
7. each described combining nozzle according to claim 1～6,
Described a plurality of accelerating jet ejiction opening separately configures in a row in the horizontal,
Horizontal spreading width W(［ the restriction horizontal stroke is wide ］-［ the ejiction opening horizontal stroke is wide ］ of the distance P from the lateral ends of the ejiction opening of described a plurality of accelerating jets to the lateral ends of adjacent ejiction opening and the ejiction opening of described a plurality of accelerating jets)/2 ratio (［ P ］/［ W ］)) is 0.2～1.0.
8. combining nozzle according to claim 7,
Described ejiction opening is provided with the slit that adjacent ejiction opening is linked to each other, opens to emission direction.
9. each described combining nozzle according to claim 1～8,
This combining nozzle also possesses liquid holdup section, this liquid holdup section possesses second liquid entrance hole and liquid holdup space, make the liquid holdup that imports from this second liquid entrance hole at this place, liquid holdup space, and pass through described first liquid entrance hole with respect to described a plurality of accelerating jet feed fluids.
10. combining nozzle according to claim 9,
Described liquid holdup section is located at the side of described combining nozzle,
Described liquid holdup space has the rectangular shape of growing crosswise,
Described second liquid entrance hole is located at the top of an end in liquid holdup space,
Described first liquid entrance hole is located at the top of the other end in described liquid holdup space.
11. a substrate board treatment, it possesses:
Each described combining nozzle in the claim 1～10;
Supply with the steam generating unit of steam with respect to described combining nozzle; And
Water supply unit with respect to described combining nozzle feed fluid.
12. substrate board treatment according to claim 11,
This substrate board treatment also possesses gas supply part, and this gas supply part is supplied with non-active gas or clean air with respect to described combining nozzle.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-032677 | 2011-02-17 | ||
| JP2011032677A JP2012174741A (en) | 2011-02-17 | 2011-02-17 | Multiply-connected nozzle and substrate processing apparatus having the same |
| PCT/JP2012/053828 WO2012111809A1 (en) | 2011-02-17 | 2012-02-17 | Series of nozzles, and substrate treatment apparatus provided with series of nozzles |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103370771A true CN103370771A (en) | 2013-10-23 |
Family
ID=46672720
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201280008138.5A Pending CN103370771A (en) | 2011-02-17 | 2012-02-17 | Series of nozzles, and substrate treatment apparatus provided with series of nozzles |
Country Status (5)
| Country | Link |
|---|---|
| JP (1) | JP2012174741A (en) |
| KR (1) | KR20140042782A (en) |
| CN (1) | CN103370771A (en) |
| TW (1) | TWI579061B (en) |
| WO (1) | WO2012111809A1 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107710389A (en) * | 2015-06-02 | 2018-02-16 | 株式会社Ｎｓｃ | Spray etching device |
| CN112074701A (en) * | 2018-05-01 | 2020-12-11 | 环宇制罐株式会社 | Nozzle, drying device and can manufacturing method |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI595332B (en) * | 2014-08-05 | 2017-08-11 | 頎邦科技股份有限公司 | Method for photoresist stripping |
| KR101835986B1 (en) * | 2016-07-25 | 2018-03-07 | 시오 컴퍼니 리미티드 | Fluid Supply Pipe |
| JP6811113B2 (en) * | 2017-02-14 | 2021-01-13 | 株式会社Ｓｃｒｅｅｎホールディングス | Impact force measuring device, substrate processing device, impact force measuring method, and substrate processing method |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07185434A (en) * | 1993-12-28 | 1995-07-25 | Kao Corp | Coating device |
| JP2005021894A (en) * | 1999-10-27 | 2005-01-27 | Tokyo Electron Ltd | Liquid treatment apparatus |
| JP2003145064A (en) * | 2001-11-12 | 2003-05-20 | Tokyo Electron Ltd | Two-fluid jet nozzle and substrate cleaning device |
| JP2004237282A (en) * | 2003-01-16 | 2004-08-26 | Kyoritsu Gokin Co Ltd | Double fluid nozzle |
| JP5022074B2 (en) * | 2006-05-02 | 2012-09-12 | 株式会社共立合金製作所 | Two-fluid nozzle and spraying method using the same |
| WO2009013797A1 (en) * | 2007-07-20 | 2009-01-29 | Aqua Science Corporation | Method of treating work and system for treating work |
| JP4447042B2 (en) * | 2007-12-06 | 2010-04-07 | 福岡県 | Atomization apparatus and atomization method |
| TWI469832B (en) * | 2008-12-17 | 2015-01-21 | Aqua Science Corp | Object cleansing method and object cleansing system |
| WO2010125664A1 (en) * | 2009-04-30 | 2010-11-04 | アクアサイエンス株式会社 | Peeling liquid and method for cleaning object |
-
2011
- 2011-02-17 JP JP2011032677A patent/JP2012174741A/en not_active Withdrawn
-
2012
- 2012-02-14 TW TW101104640A patent/TWI579061B/en active
- 2012-02-17 KR KR1020137021031A patent/KR20140042782A/en not_active Application Discontinuation
- 2012-02-17 WO PCT/JP2012/053828 patent/WO2012111809A1/en active Application Filing
- 2012-02-17 CN CN201280008138.5A patent/CN103370771A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107710389A (en) * | 2015-06-02 | 2018-02-16 | 株式会社Ｎｓｃ | Spray etching device |
| CN112074701A (en) * | 2018-05-01 | 2020-12-11 | 环宇制罐株式会社 | Nozzle, drying device and can manufacturing method |
| CN112074701B (en) * | 2018-05-01 | 2023-06-02 | 环宇制罐株式会社 | Nozzle, drying device and method for manufacturing tank body |
Also Published As
| Publication number | Publication date |
|---|---|
| TWI579061B (en) | 2017-04-21 |
| KR20140042782A (en) | 2014-04-07 |
| WO2012111809A1 (en) | 2012-08-23 |
| JP2012174741A (en) | 2012-09-10 |
| TW201240743A (en) | 2012-10-16 |
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Application publication date: 20131023 |