CN103365111A - 曝光装置及曝光方法、图案膜的制造方法 - Google Patents

曝光装置及曝光方法、图案膜的制造方法 Download PDF

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Publication number
CN103365111A
CN103365111A CN 201310063956 CN201310063956A CN103365111A CN 103365111 A CN103365111 A CN 103365111A CN 201310063956 CN201310063956 CN 201310063956 CN 201310063956 A CN201310063956 A CN 201310063956A CN 103365111 A CN103365111 A CN 103365111A
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China
Prior art keywords
film
exposure
photoreactivity
tablet
pliability
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CN 201310063956
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Chinese (zh)
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香川英章
大场孝浩
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Fujifilm Corp
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Fujifilm Corp
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Publication of CN103365111A publication Critical patent/CN103365111A/zh
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  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Liquid Crystal (AREA)
  • Polarising Elements (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
CN 201310063956 2012-03-31 2013-02-28 曝光装置及曝光方法、图案膜的制造方法 Pending CN103365111A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2012083395A JP2013213885A (ja) 2012-03-31 2012-03-31 露光装置及び露光方法及びパターンフィルムの製造方法
JP2012-083395 2012-03-31

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CN103365111A true CN103365111A (zh) 2013-10-23

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CN 201310063956 Pending CN103365111A (zh) 2012-03-31 2013-02-28 曝光装置及曝光方法、图案膜的制造方法

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JP (1) JP2013213885A (ja)
CN (1) CN103365111A (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6690117B2 (ja) * 2013-12-05 2020-04-28 住友化学株式会社 光学異方性フィルム部材の製造方法
JP7324851B2 (ja) * 2019-08-23 2023-08-10 富士フイルム株式会社 光学積層体、パターン光学異方性層の製造方法、３ｄ画像表示装置および３ｄ画像表示システム

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01229256A (ja) * 1988-03-09 1989-09-12 Fuji Photo Film Co Ltd 画像形成装置
JP4224479B2 (ja) * 2005-09-07 2009-02-12 富士フイルム株式会社 パターン露光方法及び装置
JP2010001949A (ja) * 2008-06-19 2010-01-07 Ntn Corp ボールねじ支持用転がり軸受
JP2010078971A (ja) * 2008-09-26 2010-04-08 Toppan Printing Co Ltd 配向膜形成方法およびラビング装置
EP2583813B1 (en) * 2010-06-16 2020-07-01 Asahi Kasei Kabushiki Kaisha Roller mold manufacturing device and manufacturing method
JP5610432B2 (ja) * 2010-07-15 2014-10-22 株式会社ブイ・テクノロジー フィルムの露光装置
JP5251994B2 (ja) * 2010-08-06 2013-07-31 ウシオ電機株式会社 光照射装置および光照射方法

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JP2013213885A (ja) 2013-10-17

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Application publication date: 20131023