CN103344471B - 一种调整硝酸滴加浓度的多晶硅预处理方法 - Google Patents
一种调整硝酸滴加浓度的多晶硅预处理方法 Download PDFInfo
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- CN103344471B CN103344471B CN201310289793.9A CN201310289793A CN103344471B CN 103344471 B CN103344471 B CN 103344471B CN 201310289793 A CN201310289793 A CN 201310289793A CN 103344471 B CN103344471 B CN 103344471B
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 52
- 229920005591 polysilicon Polymers 0.000 title claims abstract description 51
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 title claims abstract description 38
- 229910017604 nitric acid Inorganic materials 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims abstract description 22
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 18
- 239000012535 impurity Substances 0.000 claims abstract description 16
- 239000004810 polytetrafluoroethylene Substances 0.000 claims abstract description 15
- 229920001343 polytetrafluoroethylene Polymers 0.000 claims abstract description 15
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 10
- 239000010703 silicon Substances 0.000 claims abstract description 10
- FBPFZTCFMRRESA-KVTDHHQDSA-N D-Mannitol Chemical compound OC[C@@H](O)[C@@H](O)[C@H](O)[C@H](O)CO FBPFZTCFMRRESA-KVTDHHQDSA-N 0.000 claims abstract description 5
- 229930195725 Mannitol Natural products 0.000 claims abstract description 5
- 235000010355 mannitol Nutrition 0.000 claims abstract description 5
- 239000000594 mannitol Substances 0.000 claims abstract description 5
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 claims description 4
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 claims description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 abstract description 14
- 229910052796 boron Inorganic materials 0.000 abstract description 13
- 230000000694 effects Effects 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 3
- 238000011084 recovery Methods 0.000 abstract description 2
- 238000006243 chemical reaction Methods 0.000 description 11
- 239000013078 crystal Substances 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 230000001172 regenerating effect Effects 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- WTEOIRVLGSZEPR-UHFFFAOYSA-N boron trifluoride Chemical compound FB(F)F WTEOIRVLGSZEPR-UHFFFAOYSA-N 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 235000009508 confectionery Nutrition 0.000 description 2
- 230000029087 digestion Effects 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- 229910015900 BF3 Inorganic materials 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002309 gasification Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007781 pre-processing Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
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CN201310289793.9A CN103344471B (zh) | 2013-07-09 | 2013-07-09 | 一种调整硝酸滴加浓度的多晶硅预处理方法 |
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CN201310289793.9A CN103344471B (zh) | 2013-07-09 | 2013-07-09 | 一种调整硝酸滴加浓度的多晶硅预处理方法 |
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CN103344471A CN103344471A (zh) | 2013-10-09 |
CN103344471B true CN103344471B (zh) | 2016-05-25 |
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Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN103760218B (zh) * | 2014-01-13 | 2015-10-28 | 福建兴朝阳硅材料股份有限公司 | 一种快速测量多晶硅中微量硼杂质的方法 |
CN105300763A (zh) * | 2015-10-22 | 2016-02-03 | 厦门映日新材料科技有限公司 | 一种icp-ace检测样品的前处理方法 |
CN112229831A (zh) * | 2020-09-03 | 2021-01-15 | 华南师范大学 | 一种检测硅材料中硼含量的方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101685048A (zh) * | 2008-09-25 | 2010-03-31 | 华南师范大学 | 一种多晶硅的纯度检测方法及装置 |
CN102266859A (zh) * | 2011-07-25 | 2011-12-07 | 营口晶晶光电科技有限公司 | 菜花状及表面附氧化物的多晶硅原料的清洗方法及装置 |
CN102311121A (zh) * | 2011-08-29 | 2012-01-11 | 大连理工大学 | 一种合金化分凝提纯工业硅的方法 |
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Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101685048A (zh) * | 2008-09-25 | 2010-03-31 | 华南师范大学 | 一种多晶硅的纯度检测方法及装置 |
CN102266859A (zh) * | 2011-07-25 | 2011-12-07 | 营口晶晶光电科技有限公司 | 菜花状及表面附氧化物的多晶硅原料的清洗方法及装置 |
CN102311121A (zh) * | 2011-08-29 | 2012-01-11 | 大连理工大学 | 一种合金化分凝提纯工业硅的方法 |
Non-Patent Citations (2)
Title |
---|
ICP-A ES 法测定多晶硅中的杂质元素的方法;胡玉燕等;《功能材料》;20091231;第40卷;2.5节 * |
多晶硅中硼含量的密闭消解- ICP- AES法测定;田俊等;《分析测试学报》;20100930;第29卷(第9期);1.3节,2.2节第2段 * |
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