CN103308477A - SOI (silicon on insulator) based slit waveguide grating FP (Fabry-Peror) cavity optical biochemical sensing chip - Google Patents
SOI (silicon on insulator) based slit waveguide grating FP (Fabry-Peror) cavity optical biochemical sensing chip Download PDFInfo
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- CN103308477A CN103308477A CN2013101807475A CN201310180747A CN103308477A CN 103308477 A CN103308477 A CN 103308477A CN 2013101807475 A CN2013101807475 A CN 2013101807475A CN 201310180747 A CN201310180747 A CN 201310180747A CN 103308477 A CN103308477 A CN 103308477A
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Abstract
The invention provides an SOI (silicon on insulator) based slit waveguide grating FP (Fabry-Peror) cavity optical biochemical sensing chip. The chip comprises a substrate consisting of a silicon base layer, a silicon dioxide layer and a mono-crystal silicon layer which are overlapped and bonded from the bottom to the top sequentially, wherein the mono-crystal silicon layer of the substrate comprises a slit waveguide, and the light signal transmission path of the slit waveguide comprises a grating FP cavity; the overlooking direction of the substrate is rectangular; and the slit waveguide comprises a slit which is positioned on the central axis in the length direction of the substrate, and the length of the slit is equal to the central axis of the substrate. According to the optical biochemical sensing chip, a grating FP cavity formed in the mono-crystal silicon layer at top can be used for detecting the influence of external substances on a light signal; moreover, due to the introduce of a slit waveguide structure, the light signal detection is transferred from a traditional evanescent field to a slit space; the advantages that the light energy density in the slit space is far higher than that in the evanescent field, the interaction between the light and the substances is stronger, the detection sensitivity is higher, and the detection difficulty is further reduced are achieved.
Description
Technical field
The present invention relates to the detection technique to the specific chemistry such as gas molecule or biomolecule or biological substance, be specifically related to the optical sensing field, be particularly related to a kind of based on SOI(Silicon-On-Insulator, the silicon on the dielectric substrate) slit light waveguide raster FP chamber optics biochemical sensitive chip.
Background technology
Biochemical sensor is the combination of a kind of bioactive materials and respective transducer, and it is used for measuring specific chemistry or biological substance.Because it is significant in environmental monitoring, diseases monitoring and medicament research and development to measure these chemistry or biological substance, so the research of biochemical sensor has been seemed extremely important.At present typical optics biochemical sensor mainly can be divided into fluorescence labeling type optics biochemical sensor and unmarked type optics biochemical sensor two large classes, by relevant document as can be known, although fluorescence labeling type optics biochemical sensor has been used to survey and distinguish specific biochemical molecule, but the shortcoming such as have that equipment is huge, complicated operation and spended time are long, and special messenger's operation that usually need to have certain professional technique, universal cost is higher, simultaneously, also might affect the detection of sample for the fluorescence molecule of mark.Comparatively speaking, the size of unmarked type optics biochemical sensor is less, and cost is lower, and application process is also more convenient, and no longer introduces new interference in measuring process, and the result is also more reliable.
Optics biochemical sensor based on SOI is exactly a kind of unmarked type optics biochemical sensor, simultaneously the also study hotspot of this area just.From existing optics biochemical sensor based on SOI, mostly adopted evanescent wave (disappearance ripple) detection principle, evanescent wave refers to because total reflection and a kind of electromagnetic wave of producing at the interphase of two kinds of different mediums, be again the disappearance ripple, its amplitude is the exponential form decay with the increase with the perpendicular degree of depth of interphase, and the evanescent wave of the optical waveguide by detecting described optics biochemical sensor is to survey the sample biochemical molecule.Its principle is that biochemical molecule in the sample to be tested can cause the change (evanscent field that shows as the optics biochemical sensor changes) of light wave transmissions character in the optics biochemical sensor, and the biochemical molecule concentration signal that also is about in the sample is converted to change in optical signal.The optical waveguide structure of optics biochemical sensor has the structures such as Mach Zehnder interferometer, grating and Fabry-Bai Luo (FP) chamber, ring cavity, surface plasma body resonant vibration at present.To based on optical resonator structures (such as the FP chamber, ring cavity etc.) optics biochemical sensor, the introducing of resonance effect can make light signal constantly resonance and amplification in optical resonator, therefore be equivalent to the increase that the optics biochemical sensor is surveyed length, can cause that more the change in optical signal such as phase place (or intensity) is to detectable value, and then realize reaching preferably sensing capabilities at the compact sized optical biochemical sensor, undersized optics biochemical sensor also is convenient to the miniaturization and microminiaturization of optics biochemical sensor system in addition, will effectively reduce system cost.
Current, based on the FP resonance effect, the optics biochemical sensor of grating FP cavity resonator structure can be done very smallly, and shows good sensing capabilities, but the energy density that is distributed in the evanescent wave around the optics biochemical sensor optical waveguide is lower, therefore still there is the lower defective of sensitivity.
Summary of the invention
The problem that the present invention surveys in order to solve some biochemical, in the prior art on the basis based on the biochemical sensor of optical detection of main flow, utilize existing because its evanescent wave that is detected of evanescent wave detection principle to be distributed in around the device optical waveguide and have that energy density is low to cause surveying the large defective of difficulty for further solving it, proposed a kind of slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI.
To achieve these goals, technical scheme of the present invention is: a kind of slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI, comprise the silicon base layer that stacks gradually bonding from bottom to top, the matrix that silicon dioxide layer and monocrystalline silicon layer consist of, it is characterized in that, the monocrystalline silicon layer of described matrix comprises the slit optical waveguide, comprise grating FP chamber on the lightray propagation path of described slit optical waveguide, it is rectangle that matrix is overlooked direction, the slit optical waveguide comprises a slit, described slit is positioned on the central axis of matrix length direction, and length equates with the described central axis of matrix.
Further, the slit of above-mentioned slit optical waveguide is the straight slit groove;
The slit of above-mentioned slit optical waveguide is the slit that is formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface;
The slit depth of above-mentioned slit optical waveguide is monocrystalline silicon layer thickness.
Further, it is rectangle that described matrix is overlooked direction, and described slit optical waveguide distributes take the center line of the length direction of matrix as rotational symmetry, and keeps direction consistent with the matrix length direction, and wherein the slit well width is 80nm～120nm.
Further, above-mentioned grating FP chamber comprises the first grating and the second grating, the first grating and the equal etching of the second grating are on the slit optical waveguide, described the first grating and the second grating be d at intervals, and the first grating has identical structure with the second grating, and etching forms grating FP chamber on the slit optical waveguide, and described parameter apart from d and grating is determined jointly by the phase condition of grating and the condition of resonance of FP resonator cavity.
The first above-mentioned grating or the second grating comprise and are no less than 3 no more than 25 periodic units.
The cycle of above-mentioned grating periodic unit is arbitrary value of 0.3 μ m～0.6 μ m.
The dutycycle of above-mentioned grating periodic unit is arbitrary value of 40%～70%.
The ratio that the longitudinal length of above-mentioned grating periodic unit (with corresponding as the lateral length of periodic unit length) accounts for above-mentioned matrix width is arbitrary value of 70%～100%.
Beneficial effect of the present invention: the biochemical sensitive chip of optics of the present invention forms grating FP chamber by the monocrystalline silicon layer at the top and detects external substance to the impact of light signal, introduce simultaneously the slit optical waveguide structure, because narrow slit wave-guide can be limited in slit areas greatly with light, thereby effectively strengthened the interaction between light and the material, make the detection of light signal turn to the slit space from traditional evanscent field, it is advantageous that the density of the optical energy density luminous energy in the evanscent field in the slit space, light-matter interaction is stronger, make detection sensitivity higher, detection difficulty further reduces.In addition, this optics biochemical sensitive chip adopts the FP cavity resonator structure, utilizes the resonance effect of optical resonator, so that can reach under the condition of identical sensing capabilities, greatly reduce the volume of optics biochemical sensitive chip, be conducive to realize sensor-based system on the microminiaturization of biochemical sensor and the sheet.Take the SOI material as matrix, can utilize ripe microelectronics CMOS processing technology, so that this optics biochemical sensitive chip is easy to large-scale mass production, be conducive to reduce the cost of optics biochemical sensitive chip.This optics biochemical sensitive chip both can be used for biomacromolecule (protein or DNA) liquid sample to be surveyed, and also can be used for gas molecule and detect.Therefore, the present invention compares with other biochemical sensitive chip, has the manufacture craft standardization, price is low, volume is little, it is integrated to be convenient to, sensing capabilities is good and a series of characteristics such as applied widely.
Description of drawings
Fig. 1-1 is the perspective view of the biochemical sensitive chip of embodiment;
Fig. 1-2 is the vertical view of the biochemical sensitive chip shown in Fig. 1-1;
Fig. 2-1 be NaCl solution under variable concentrations embodiment 1 sensor to the response curve of different wave length light wave;
Fig. 2-2 is the linear fit of corresponding embodiment 1 sensor resonant wavelength under the different N aCl solution refractive index;
Fig. 3 is the biochemical sensitive system architecture schematic diagram that biochemical sensitive chip of the present invention consists of.
Embodiment
Below in conjunction with drawings and Examples the present invention is further described.
As Figure 1-1, a kind of slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI of body embodiments, the matrix that comprises the silicon base layer 11, silicon dioxide layer 12 and monocrystalline silicon layer 13 formations that stack gradually bonding from bottom to top, the monocrystalline silicon layer 13 of described matrix comprises slit optical waveguide 15, comprise grating FP chamber 14 on the propagation path of light AA` of slit optical waveguide 15, be used for making the optical resonance of propagating along the slit optical waveguide.Make and guarantee the optical transmission performance of slit optical waveguide for the ease of technique, the slit of above-mentioned slit optical waveguide is straight slit; This slit optical waveguide is formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface; Its lithographic method for example, use electron beam exposure and by the RIE(reactive ion etching) etching technics etching on the single crystal silicon material of SOI obtains; In addition, the slit groove depth of described slit optical waveguide need to meet some requirements, and this condition is specially that the slit groove depth is monocrystalline silicon layer thickness in the slit optical waveguide.Slit groove the purpose here is flashlight to be concentrated in the slit propagate, make the energy density of light signal larger, be convenient to analyzing and testing, another purpose is to improve the performances such as sensitivity of sensing chip by the contact area that increases measured matter and optics biochemical sensor simultaneously.Shown in Fig. 1-2, it is rectangle that matrix is overlooked direction, and slit optical waveguide 15 comprises a slit groove, and described slit groove is positioned on the central axis of matrix length direction, and wherein the slit well width is arbitrary value of 80nm～120nm.In the present embodiment, the slit groove is positioned at the central axis place of matrix length direction, and the slit well width is 100nm.Slit groove in the slit optical waveguide is the travel path of light signal, on this path, also comprise grating FP chamber, grating FP chamber comprises the first grating 141 and the second grating 142 in the present embodiment, the first grating 141 and the second grating 142 equal etchings are on the slit optical waveguide, described the first grating and at intervals d identical with the second optical grating construction, and form grating FP resonator cavity in the slit optical waveguide, described parameter apart from d and grating is determined jointly by the phase condition of grating and the condition of resonance of FP resonator cavity.Grating FP resonator cavity is used for the selection of wavelength in the scheme of the present embodiment, utilize the resonance effect in grating FP chamber, can allow the light that satisfies condition of resonance in resonator cavity, shake back and forth, guarantee under device microsize condition, to realize allowing light fully contact with material, improve sensing capabilities.Because those of ordinary skill in the art uses prior art can determine relatively easily apart from d and grating parameter according to light source frequency range and the target component used, therefore no further details to be given herein.Concrete, first grating 141 of the present embodiment or the second grating 142 comprise and are no less than 3 no more than 25 grating periodic units.The cycle of described grating periodic unit refers to the length value of one-period unit, is arbitrary value of 0.3 μ m～0.6 μ m in the present embodiment.Further, the dutycycle of the grating periodic unit in the present embodiment is arbitrary value of 40%～70%, and the dutycycle here refers in the present embodiment consist of be etched in the grating periodic unit width of groove and accounts for the ratio of whole grating periodic unit lateral length.The ratio that the longitudinal length of grating periodic unit accounts for the rectangular base width is arbitrary value of 70%～100%, and the degree of depth of the groove that is etched in the grating periodic unit is 70%～100% of monocrystalline silicon layer thickness.Light in the FP resonator cavity can be limited in slit areas greatly owing to the slit optical waveguide in the present embodiment, the FP resonator cavity can make light back and forth concussion in resonator cavity simultaneously, increase intensity and the effective length of light-matter interaction, thereby improve the interaction between the flowing material in light and the slit areas, so that the sensitivity of device improves.Especially, in technical scheme of the present invention and all embodiment, related grating FP resonator cavity and grating FP chamber are the different expression of same parts; The common practise that laterally is described as those of ordinary skill in the art with the direction such as vertical of the grating periodic unit that relates to is the clearly form of presentation of this area acquiescence, and it also is clearly that the parameter of using it for technical scheme in the invention scheme limits nature.
Above-described embodiment shows the present invention program's basic structure, below provides further preferred embodiment from optimizing the sensing chip performance.
Biochemical sensor is mainly used in biomacromolecule such as DNA or protein detection etc. and military upper toxic gas or Detecting.A kind of concrete application example below in conjunction with above-described embodiment is described in further detail technical scheme of the present invention:
Be applied to detect and whether contain in the unknown sample that we wish the material that detects or detect in the unknown sample to contain which material certain, this requires sensor different to the selectivity that different material has, show as the specificity sensing of sensor, common way is the outside surface coating one deck biological sensitive materials at sensor, when certain has specific biomacromolecule when entering into sensor fluid passage and flowing through sensing chip with fluid sample, this biomacromolecule will with the sensitive material generation compatible reaction on sensing chip surface, the character of surface of sensing chip is changed, cause the effective refractive index of sensor to change, and then so that the resonance wavelength of sensor also drift about, go out this variation by the data processes and displays, can infer whether contain in the sample to be tested that we want to contain those materials in the test substance surveyed or the sample certain;
Be applied to contain in the known sample to be tested certain material, want now to measure how much concentration of this material is in the sample, in this case, we at first configure a standard solution as a reference, allow the upper epidermis of standard solution flows through sensor, when the flashlight that satisfies resonance wavelength is inputted into the grating FP chamber of going forward side by side from the port of the slit optical waveguide of top, by the resonance effect in FP chamber as can be known, when the optical path difference that produces when light wave comes and goes a week in resonator cavity after is the integral multiple of wavelength, light wave can be interfered generation resonance enhancement effect mutually with the light wave that newly is coupled into grating FP chamber, light can shake in resonator cavity back and forth, thereby the intensity that has increased the length of light and interaction between substances and strengthened light and interaction between substances, and, single slit groove 4 in the FP resonator cavity can be with the slit areas of light field restriction, be convenient to interact between the material of light and slit areas, thereby further improve the interaction between light and the material.Photodetector is surveyed the intensity size of output optical signal, obtain simultaneously corresponding resonance wavelength, then allow a certain amount of flow of solution to be measured cross the upper epidermis of senser element, because variation has occured in the concentration of solution, the effective refractive index of sensing chip changes, and then so that the resonance wavelength of sensor also drift about, light signal by measuring the output waveguide port and in addition data process the spectrogram that can obtain output optical signal, and then the position of the harmonic peak after obtaining drifting about and corresponding resonance wavelength, according to the relative size of resonance wavelength drift value, we can determine the concentration of certain material in the analysans.Thereby realize sensor function as scheduled.
Shown in Fig. 2-1 be the sensing chip of above-described embodiment to the response curve under the NaCl solution variable concentrations, be the linear fit of corresponding embodiment 1 sensor resonant wavelength under the different N aCl solution refractive index shown in Fig. 2-2.Relation from figure is not difficult to find out, the sensing chip of above-described embodiment can be with the concentration of NaCl solution by the wavelength location of output optical signal and intensity is corresponding and detect by detection system and to show.
Figure 3 shows that the biochemical sensitive system architecture schematic diagram based on biochemical sensitive chip of the present invention, comprise sensor chip, photodetector, laser instrument, temperature controller and computer control part, also comprise simultaneously the Micropump of control fluid to be measured input and inject valve, analysans enters sensing chip by injecting valve, is collected as waste liquid behind the sensing chip of flowing through.Below will describe in detail by the course of work to this sensor-based system, so that the principle of biochemical sensitive chip of the present invention and interaction energy are better understood: during this sensor-based system work, at first flashlight emits from laser instrument, enter into sensing chip by photo-coupler, for fear of the impact of temperature on the performance of sensor, we have installed temperature controller in the slit optical waveguide of sensor, be used for to sensor heating or refrigeration (monitoring temperature).When flashlight transmits in sensor, the light that satisfies the raster phase condition nearly all is reflected back, but the grating that design here is weak reflection grating, the light that namely satisfies the raster phase condition only has part to be reflected back, a part still can transmissive and is entered into the FP resonator cavity in addition, the light that the part that enters into the FP resonator cavity satisfies the raster phase condition will be continued to reflect back by second grating, will be interfered with the light that again sees through the part that is entered into the FP resonator cavity by first grating and satisfy the raster phase condition by the light of second optical grating reflection, because two gratings have formed the FP resonator cavity, so incident light and reflected light can interfere in grating FP chamber, back and forth concussion, thus a series of harmonic peak formed at transmission window.When the analysans sample is injected into microfluidic channel by Micropump, and when reaching the top covering of sensor chip, the sample meeting so that the sensor surrounding environment change, cause the effective refractive index of sensor to change, and then so that the harmonic peak of sensor output port can drift about, we are by measuring this variation at the photodetector of sensor output port, and the data of distribution of light intensity are delivered in the computing machine process, the database information of each material composition in the result that calculates and the computing machine is compared, we can draw the relevant information of measured object, thereby realize sensing function.
The above is the specific embodiment of the present invention only, one skilled in the art will appreciate that can carry out various modifications, replacement and change to the present invention in the disclosed technical scope of the present invention.Therefore the present invention should not limited by above-mentioned example, and should limit with the protection domain of claims.
Claims (10)
1. based on the slit light waveguide raster FP chamber optics biochemical sensitive chip of SOI, the matrix that comprises the silicon base layer, silicon dioxide layer and the monocrystalline silicon layer formation that stack gradually bonding from bottom to top, it is characterized in that, the monocrystalline silicon layer of described matrix comprises the slit optical waveguide, comprise grating FP chamber on the lightray propagation path of described slit optical waveguide, it is rectangle that matrix is overlooked direction, the slit optical waveguide comprises a slit, described slit is positioned on the central axis of matrix length direction, and length equates with the described central axis of matrix.
2. the slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 1 is characterized in that, described slit is straight slit.
3. the slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 1 is characterized in that, the slit of described slit optical waveguide is the slit that is formed by the downward etching of monocrystalline silicon layer perpendicular to monocrystalline surface.
4. according to claim 1 to the described slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI of each claim of 3, it is characterized in that, the slit depth of described slit optical waveguide is monocrystalline silicon layer thickness.
5. the slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 1 is characterized in that, described slit well width is 80nm～120nm.
6. the slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 1, it is characterized in that, described grating FP chamber comprises the first grating and the second grating, the first grating and the equal etching of the second grating are on the slit optical waveguide, described the first grating and the second grating are at intervals, and the first grating has identical structure with the second grating, and forms grating FP chamber in the slit optical waveguide.
7. according to claim 1, the described slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI of each claim of 2,3,5 and 6, it is characterized in that, described the first grating or the second grating comprise and are no less than 3 no more than 25 periodic units.
8. the slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 7 is characterized in that, the cycle of described grating periodic unit is arbitrary value of 0.3 μ m～0.6 μ m.
9. the slit light waveguide raster FP chamber optics biochemical sensitive chip based on SOI according to claim 8 is characterized in that, the dutycycle of described grating periodic unit is arbitrary value of 40%～70%.
10. according to claim 8 or 9 described many slits light waveguide raster FP chamber optics biochemical sensitive chips based on SOI, it is characterized in that, the ratio that the longitudinal length of described grating periodic unit accounts for described matrix width is arbitrary value of 70%～100%.
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Citations (3)
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| US20050089257A1 (en) * | 2003-04-09 | 2005-04-28 | Barrios Carlos A. | Electro-optic modulator on rib waveguide |
| CN102282458A (en) * | 2009-03-12 | 2011-12-14 | 特拉维夫大学未来技术发展有限合伙公司 | Peled asher [il]; nathan menachem [il]; ruschin shlomo [il]; betzalel yifaat [il]; rishpon judith [il] |
| CN203324181U (en) * | 2013-05-16 | 2013-12-04 | 电子科技大学 | SOI (silicon-on-insulator)-based slit optical waveguide optical biochemical sensor chip adopting grating FP (Fabry-Perot) resonators |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050089257A1 (en) * | 2003-04-09 | 2005-04-28 | Barrios Carlos A. | Electro-optic modulator on rib waveguide |
| CN102282458A (en) * | 2009-03-12 | 2011-12-14 | 特拉维夫大学未来技术发展有限合伙公司 | Peled asher [il]; nathan menachem [il]; ruschin shlomo [il]; betzalel yifaat [il]; rishpon judith [il] |
| CN203324181U (en) * | 2013-05-16 | 2013-12-04 | 电子科技大学 | SOI (silicon-on-insulator)-based slit optical waveguide optical biochemical sensor chip adopting grating FP (Fabry-Perot) resonators |
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