CN103308188B - A kind of high-energy pulse laser multi-path measurement mechanism and method - Google Patents
A kind of high-energy pulse laser multi-path measurement mechanism and method Download PDFInfo
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- CN103308188B CN103308188B CN201310261860.6A CN201310261860A CN103308188B CN 103308188 B CN103308188 B CN 103308188B CN 201310261860 A CN201310261860 A CN 201310261860A CN 103308188 B CN103308188 B CN 103308188B
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Abstract
The present invention relates to a kind of high-energy pulse laser multi-path measurement mechanism and method.The present invention builds the first darkroom and the second darkroom.First darkroom, for the decay of incident beam and light-splitting processing, the light beam after process enters the second darkroom via the light hole in the first darkroom; Be provided with the second darkroom of light beam collecting device, for carrying out light beam collection to the light beam from the first darkroom; Output module, for exporting the light beam collection result from the second darkroom.The first directional light attenuation module, the second directional light attenuation module, sync control device is provided with in first darkroom; The reflected light produced when described sync control device is decayed to incident beam based on the first directional light attenuation module generates synchronous control signal, and the light beam collecting device that synchro control is arranged in the second darkroom carries out light beam collection to corresponding parallel beam.The laser measuring device for measuring that the present invention proposes is not only applicable to the measurement of high energy pulse laser, may be used for measuring low-yield, continuous print laser simultaneously.
Description
Technical field
The present invention relates to a kind of support Multi-path synchronous to measure near field laser measuring device for measuring and method, belong to laser measuring technique field.
Background technology
Along with the development of science and technology, high energy pulse type laser instrument in the field such as scientific research and commercial production, as: the fields such as fast reaction kinetics, spectral analysis, medical science, obtain applying more and more widely.At present, the level of application of laser technology has become one of mark of a measurement National Industrial technical advance, and the good and bad degree of laser-quality has decisive role for the range of application of laser technology and the degree of depth.
The measurement and assessment of beam quality is one of importance of laser research.In order to meet the demand of different user, the light beam sent for LASER Light Source needs to carry out the measurement of many-sided parameter.But current existing laser parameter testing tool, majority can only be measured for several parameters that are single or close ties.
Application number is the laser multiparameter measuring device of 201110087744.8, although can measure multiple parameters of laser different aspect, but this device does not consider the problem of multiple terminal device synchronous acquisition, particularly for pulse laser, temporal asynchronous, the inaccurate of laser parameter measurement can be caused.The device being simultaneously suitable for measuring high energy pulse laser parameter is fewer, although the apparatus for measuring quality of laser beam that application number is 200620039036.1 is applicable to measuring high energy pulse laser, this device does not consider the problem of the intrinsic pump light interference of laser instrument.In the near field measurement of high energy pulse laser, the effects such as the scattering of pump light in communication process, reflection all can have a negative impact to measurement effect.Usually software is adopted to go background and narrow-band-filter mode to weaken the impact of surround lighting in existing measuring technique.Software goes the method for background to reduce dynamic range and the precision of measurement in essence; The solid state laser of flash lamp pumping, the emission spectrum of pump light is the continuous spectrum of wider range, and attenuation factor is not obvious for the attenuation of scatter ambient light, easily causes imaging device supersaturation.
Summary of the invention
The object of the invention is to: for above-mentioned Problems existing, a kind of high-energy pulse laser multi-path measurement mechanism is provided.This high-energy pulse laser multi-path measurement mechanism, comprises
First darkroom, for the decay of incident beam and light-splitting processing, the light beam after process enters the second darkroom via the light hole in the first darkroom; Be provided with the second darkroom of light beam collecting device, for carrying out light beam collection to the light beam from the first darkroom;
Output module, for exporting the light beam collection result from the second darkroom;
The first directional light attenuation module, the second directional light attenuation module, sync control device is provided with in described first darkroom; Described first directional light attenuation module corresponds to the incident light hole of light beam in the first darkroom, incident beam is decayed, generate parallel beam A, parallel beam A enters the second darkroom through light hole, and by the incident beam light splitting after decay to described second directional light attenuation module, generate parallel beam B by the second parallel beam attenuation module, enter the second darkroom through light hole; The reflected light produced when described sync control device is decayed to incident beam based on the first directional light attenuation module generates synchronous control signal, the light beam collecting device being arranged in the second darkroom for synchro control carries out light beam collection to corresponding parallel beam, and is input to output module.
The darkroom containing light hole set by the present invention, can at utmost block external disturbance light, solve the technical matters of pumping ambient light interference.
See Fig. 1, build darkroom of the present invention and be specially: the darkroom of building rectangle framework on optical table, outside, darkroom adopts shading material, inner employing extinction material.Darkroom is divided into former and later two little darkrooms, is designated as the first darkroom and the second darkroom respectively.The first directional light attenuation module is placed in first darkroom, the second directional light attenuation module, and sync control device, each terminal device is placed in the second darkroom.Light imports the first darkroom into by light hole, like this, what just can try one's best in the first darkroom blocks outside pump light, light is divided into two-beam line in the first darkroom, import the second darkroom into by light hole, what just can try one's best in such second darkroom blocks the parasitic light that in the first darkroom, light reflection, scattering etc. produce.
The feature in darkroom:
1. darkroom is rectangle framework, easy and simple to handle;
2. block surround lighting to greatest extent, improve measuring accuracy.
Because the usual repetition rate of high power solid pulse laser is lower, precise synchronization is the important step ensureing measuring accuracy, in the present invention, the reflected light produced when incident beam being decayed based on the first directional light attenuation module, generate synchronous control signal, the generation realizing light beam is synchronous with the collection of terminal device to light beam, compare and directly itself generate synchronizing signal or controlled the time shutter (when equipment is more to imaging device based on laser instrument (realizing circuit is complicated) with existing, control inconvenient) ensure compared with the scheme that the generation of light beam is synchronous with the collection of terminal device to light beam, synchro control scheme of the present invention possesses following advantage: (1) does not relate to the control to laser element, laser instrument is not needed to provide output signal as synchronizing signal yet, minimum to the constraint of laser instrument, (2) avoid the transformation to laser element assembly, and do not need the collection sequential considering light beam collecting device, (3) randomness light beam being avoided to arrive and the lower leakage frame phenomenon caused of frame per second.
Simultaneously for the ease of arranging the mode of operation of collecting device, the time shutter of such as collecting device, collecting device control module can being set at output module, forming terminal control and output module, for controlling the mode of operation of light beam collecting device.
In addition, high energy pulse laser measuring device for measuring of the present invention can also add flexibly, delete attenuator according to the energy range of testing laser in directional light attenuation module, to ensure that each device is all operated in normal range.This device also according to the quantity of light beam collecting device, can increase parallel beam attenuation module of the present invention thus realizes analyzing laser-quality parameter from different perspectives in the first darkroom.
In multichannel measurement experiment, include multiple collecting device, this just makes to ensure the synchronous acquisition of each collecting device to light beam, and namely in the present invention, synchro control relates to two aspects: one is synchronous between light beam collection generates with light beam; Two is that it is synchronous to gather between each equipment.See Fig. 2, synchronous device of the present invention comprises photoelectric commutator, oscillograph and synchronizing circuit, during work, oscillograph is operated in the state of external trigger, and the light beam that laser instrument produces reaches photoelectric commutator and generates electric signal, and this electric signal imports oscillograph into, trigger oscillographic device produces a negative edge, this negative edge, by synchronization control module circuit, is converted into collecting device acceptable along trigger pip, triggers each collecting device and starts to gather.
The present invention takes oscillograph to produce the method for synchronous control signal, both can observation oscilloscope waveform, can export by multiplexing oscillograph again, supports multiplexed, and change-over circuit needed for sensor-triggered end is simple, and safety is easy.When particularly measuring superlaser, experimenter, not near experiment porch, guarantees safety.
During multiple parameter of near field measurement superlaser, need on limited optical table, build the multiple light paths be independent of each other, in the present invention, by multistage light attenuation unit, meet the dynamic operating range of different light beam collecting device, the present invention utilizes optical splitter design to build easy, to save platform space parallel light path.
Concrete, in the present invention, first directional light attenuation module is placed in turn formed by attenuator 3-1, optical splitter 3-2, attenuator 3-3, second directional light attenuation module is placed in turn by optical splitter 4-1, attenuator 4-2 and is formed, and the optical splitter of each directional light attenuation module and attenuator are fixed by the adjustable mirror holder of bidimensional, distance between two directional light attenuation module is greater than the width of the adjustable mirror holder of bidimensional, and the attenuator in attenuation module is all reflection-types.
Enter in the process of light beam collecting device at incident beam via two directional light attenuation module decay of the present invention and light-splitting processing, its index path is as shown in Figure 3: the light beam of laser emitting incides light path system through light hole 1-1, optical splitter 3-2 is passed to through attenuator 3-1, under the effect of optical splitter 3-2,4-1, generate two-way directional light, be designated as parallel rays A and parallel rays B.Parallel rays A arrives light hole 1-2 by attenuator 3-3, incides in terminal device Wavefront sensor 6; Parallel rays B arrives light hole 1-3 by attenuator 4-2, then, reflexes in light beam collecting device camera 8 by diffuse reflector 7, and the hot spot that final two-way light produces all uploads to output module 9.The reflected light of attenuator 3-1 is as the incident light of sync control device 5, and the reflected light of other attenuators is absorbed by printing paper, causes damage with preventing laser to equipment.Printing paper is fixed by the adjustable mirror holder of bidimensional, its putting position with block respective attenuation sheet reflected light, do not disturb other light paths to be as the criterion.When laser emitting energy change or when changing other-end equipment, can by adding between attenuator 3-3, light hole 1-2 and attenuator 4-2, light hole 1-3 or removing attenuator, ensure that light beam collecting device is operated within the scope of saturation power, and can be distinguished clearly by the hot spot that light beam collecting device uploads to output module 9.If need more light beam collecting device to carry out acquisition process to light beam in test, between two light paths at parallel rays A, B place, just add the parallel light path of respective numbers, and the distance w1 between parallel light path must be greater than the width of the adjustable mirror holder of bidimensional, and consider the convenient and easy property of putting, w1 is when platform allows, and appropriateness increases.See Fig. 4, the distance d1 between adjacent two adjustable mirror holders of bidimensional meets following formula:
(1) as γ-2 β > 0:
(2) as γ-2 β < 0:
Wherein, x is the width of the adjustable mirror holder of bidimensional;
D is the thickness of the adjustable mirror holder of bidimensional;
R is the radius injecting darkroom light beam;
D1 is the distance between adjacent two adjustable mirror holders of bidimensional;
γ is the deflection angle of the adjustable mirror holder 15 of bidimensional, and 0 ° of ﹤ γ ﹤ 90 °;
β is the deflection angle of the adjustable mirror holder 16 of bidimensional, and 0 ° of ﹤ β ﹤ 90 °;
The feature of parallel light path:
1. support multichannel measurement;
2. support multiple decay combination.
Time shutter is then by software set.In sum, owing to have employed technique scheme, the invention has the beneficial effects as follows:
1, utilize darkroom to block the intrinsic pump light interference of laser instrument, improve measuring accuracy;
2, use the synchronizing signal produced during oscillograph external trigger to control to gather, synchro control is flexible, Er Qieke
To control multiplex terminal simultaneously, collection analysis is carried out to hot spot, evaluate optical quality from different perspectives.
3, in light path design, adopt parallel light path, (concrete decay multiplying power is by reality for light splitting piece, attenuator
Demand determines) additions and deletions convenience, can according to measured laser energy range and each terminal device operate in saturation merit
Rate flexible combination.
Accompanying drawing explanation
Examples of the present invention will be described by way of reference to the accompanying drawings, wherein:
Fig. 1 is block diagram of the present invention;
Fig. 2 is that fixed mount distance calculates schematic diagram;
Fig. 3 is synchro control schematic diagram;
Fig. 4 is light path design figure of the present invention;
Fig. 5 is specific embodiments of the invention installation drawings;
Reference numeral:
First darkroom-2, darkroom-1, the second, parallel beam attenuation module-3,4, optical splitter-3-2,4-1, attenuator-3-1,3-3,4-2, light hole-1-1,1-2,1-3, sync control device-5, Wavefront sensor-6, diffuse reflector-7, camera-8, industrial computer-9, bidimensional is adjustable mirror holder-15,16, parallel rays-A, B.
Embodiment
All features disclosed in this instructions, or the step in disclosed all methods or process, except mutually exclusive feature and/or step, all can combine by any way.
Arbitrary feature disclosed in this instructions (comprising any accessory claim, summary and accompanying drawing), unless specifically stated otherwise, all can be replaced by other equivalences or the alternative features with similar object.That is, unless specifically stated otherwise, each feature is an example in a series of equivalence or similar characteristics.
Embodiment
As shown in Figure 5, the light hole 1-1 of laser emitting light beam through front, darkroom is incident, through the attenuator 3-1 that multiplying power is 0.1%, reach R=78%, on optical splitter 3-2 and 4-1 of T=22%, two route parallel beams A is formed under the effect of optical splitter, B, A is the attenuator 3-3 of 0.1% by multiplying power, light hole 1-2 in darkroom imports in Wavefront sensor 6, B is the attenuator 4-2 of 0.1% by multiplying power, light hole 1-3 in darkroom passes on diffuse reflector 7, reflection enters in camera 8, by camera 8 with import Wavefront sensor 6 into respectively to parallel beam A, B carries out light beam collection, and just collection result is delivered to industrial computer 9(and terminal control of the present invention and output module is arranged on industrial computer 9) carry out the display of collection result, simultaneously, can also set camera 8 and the time shutter of importing Wavefront sensor 6 into based on the control program on industrial computer 9, control.
In embodiment 1, the unwanted reflected light in darkroom absorbs by printing paper, and the reflected light of attenuator 3-1 is by photoelectric commutator, imports in oscillograph and generates synchronizing signal, gathers light beam through corresponding change-over circuit triggering camera and Wavefront sensor simultaneously.Under above-mentioned light path, the beam energy importing camera and Wavefront sensor into, all within the scope of relevant device saturation energy, can not damage terminal device and photoelectric sensor.If need the emanated energy improving laser instrument, just need add the attenuator of suitable multiplying power between attenuator 3-3, light hole 1-2 and attenuator 4-2, light hole 1-3, ensure that each terminal device is operated within the scope of normal power.
The estimation of the spacing d1 of attenuator fixed mount:
(1) as γ-2 β > 0:
(2) as γ-2 β < 0:
Get mirror holder size x=100mm, mirror holder thickness d=40mm, spot radius r=25mm, gets γ=30 °, β=5 °, can obtain: d1=494mm.
The estimation of the spacing w1 of two-way light path:
W1 must be greater than the width of attenuator fixed mount, and secondly, this distance suitably can strengthen according to the number of the overall width in darkroom and light path, and the fixed mount putting attenuator etc. is like this convenient and easy.
The present invention is not limited to aforesaid embodiment.The present invention expands to any new feature of disclosing in this manual or any combination newly, and the step of the arbitrary new method disclosed or process or any combination newly.
Claims (4)
1. a high-energy pulse laser multi-path measurement mechanism, is characterized in that, comprising:
First darkroom, for the decay of incident beam and light-splitting processing, the light beam after process enters the second darkroom via the 1st and the 2nd light hole in the first darkroom;
Be provided with the second darkroom of light beam collecting device, for carrying out light beam collection to the light beam from the first darkroom;
Output module, for exporting the light beam collection result from the second darkroom;
The first directional light attenuation module, the second directional light attenuation module and sync control device is provided with in described first darkroom; Described first directional light attenuation module corresponds to the incident light hole of light beam in the first darkroom, incident beam is decayed, generate parallel beam A, parallel beam A enters the second darkroom through the 1st light hole, first directional light attenuation module and by decay after incident beam light splitting to described second directional light attenuation module, generate parallel beam B by the second directional light attenuation module, enter the second darkroom through the 2nd light hole; The reflected light produced when described sync control device is decayed to incident beam based on the first directional light attenuation module generates synchronous control signal, the light beam collecting device that synchro control is arranged in the second darkroom carries out light beam collection to corresponding parallel beam, and outputs to output module;
Described sync control device (5) comprises photoelectric commutator, oscillograph and synchronizing circuit, described photoelectric commutator is used for the light signal of reception to be converted to electric signal, after oscillograph, enter synchronizing circuit, generate synchronous control signal by synchronizing circuit and be sent to light beam collecting device;
Described first directional light attenuation module is placed in turn by 1-1 attenuator (3-1), the 1st optical splitter (3-2) and 1-2 attenuator (3-3) and is formed, second directional light attenuation module is placed in turn by the 2nd optical splitter (4-1) and 2-1 attenuator (4-2) and is formed, described optical splitter and attenuator are fixed by the adjustable mirror holder of bidimensional, distance between two directional light attenuation module is greater than the width of the adjustable mirror holder of bidimensional, and described attenuator is reflection-type attenuator;
The distance that adjacent bidimensional is adjustable between mirror holder meets following formula:
(1) as γ-2 β >0:
(2) as γ-2 β <0:
Wherein, x is the width of the adjustable mirror holder of bidimensional;
D is the thickness of the adjustable mirror holder of bidimensional;
R is the beam radius injecting the first darkroom;
D1 is the distance between two the adjustable mirror holders of bidimensional in left and right;
γ is the 1st bidimensional adjustable mirror holder (15) deflection angle, and 0 ° of ﹤ γ ﹤ 90 °;
β is the 2nd bidimensional adjustable mirror holder (16) deflection angle, and 0 ° of ﹤ β ﹤ 90 °.
2. high-energy pulse laser multi-path measurement mechanism as claimed in claim 1, it is characterized in that, described first darkroom, the second darkroom are made up of double-deck material, and it is outer is shading material, and internal layer is extinction material.
3. high-energy pulse laser multi-path measurement mechanism as claimed in claim 1, it is characterized in that, described first darkroom, the second darkroom are set to rectangle.
4. high-energy pulse laser multi-path measurement mechanism as claimed in claim 1, is characterized in that, be also provided with collecting device control module at described output module, for controlling the mode of operation of light beam collecting device.
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| CN103542942B (en) * | 2013-10-16 | 2016-09-07 | 西北核技术研究所 | The timesharing measuring method of a kind of multipath single-pulse laser parameter and device |
| CN105444878A (en) * | 2014-09-24 | 2016-03-30 | 中国科学院大连化学物理研究所 | High-precision mass measurement device and high-precision mass measurement method of chemical oxygen iodine laser far-field beam |
| CN104359564B (en) * | 2014-11-19 | 2018-11-02 | 湖北三江航天红峰控制有限公司 | A kind of pulsed laser light beam quality synchronized measurement system and its synchronisation control means |
| CN113210903A (en) * | 2021-05-21 | 2021-08-06 | 苏州德擎光学科技有限公司 | Laser processing detection method, device and system |
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