CN101101199A - Laser parameter measuring device - Google Patents
Laser parameter measuring device Download PDFInfo
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- CN101101199A CN101101199A CNA2006101673502A CN200610167350A CN101101199A CN 101101199 A CN101101199 A CN 101101199A CN A2006101673502 A CNA2006101673502 A CN A2006101673502A CN 200610167350 A CN200610167350 A CN 200610167350A CN 101101199 A CN101101199 A CN 101101199A
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Abstract
The invention relates to a laser measuring parameter device, including: the measured laser source, the reference laser source of the continuum laser which is used in launch as a reference standard, the diffuse reflectance imaging butt which is used diffusing the measured laser and the continuum laser, the image acquire device of the video frequency of the diffuse reflectance laser which is used in receiving the laser and the continuum laser, the image collection device of the gray image of the diffuse reflectance laser based on the video frequency signal of the laser and the diffuse reflectance laser, the laser spot diameter which storage continuous laser diffuse reflectance laser in the measured location, based on the gray image ratio of the laser and the diffuse reflectance laser and the laser spot diameter of the diffuse reflectance laser, get the control device of the laser spot diameter in the measured location, and laser display device which display the measured parameters. Using the invention, can be achieved the whole real-time measurement of the diameter spot beam parameters with the far field and the larger spot diameter.
Description
Technical field
The present invention relates to the laser parameter measurement technical field, especially a kind of laser parameter measuring device.
Background technology
Owing to have that monochromaticity is good, high brightness, high density, characteristics such as radiation directivity is strong, the angle of divergence is little, at present, laser has obtained widespread use in fields such as scientific research, industry, national defence, medical treatment.In various application, all to the parameter of laser, for example: power, energy, pattern, spot diameter, the angle of divergence, luminous point drift, power density in time with the variation in space, the angle of divergence, pulse width (that is: pulsewidth) etc., strict requirement is arranged, and this measures the parameter of laser with regard to needing in advance.In the prior art, the measuring method of paired pulses laser parameter mainly contains ablation method, scanning method, array detection method, imaging method etc., these methods can only be measured the spot radius and the energy distribution of spot radius near field laser hour, and the parameter of the far-field laser when can't be to spot diameter big is measured.And in national defense applications, the parameter of the far-field laser when often needing spot diameter big is measured, and existing various measuring methods can't satisfy this demand.
Summary of the invention
Technical matters to be solved by this invention is: the parameter of the far-field laser to spot diameter when big is measured.
For solving the problems of the technologies described above, a kind of laser parameter measurement provided by the invention system comprises the measured laser source, also comprises:
The reference laser source is used to launch the continuous laser as with reference to standard;
Diffuse reflection imaging light target is arranged in the light path of measured laser of described continuous laser and described measured laser source emission, the measured position of described measured laser, is used for described measured laser and described continuous laser are carried out diffuse reflection;
Image acquiring device is arranged in the diffuse reflection light path of described measured laser and described continuous laser, is used to receive the vision signal of the diffuse reflection laser of described measured laser and described continuous laser;
Image collecting device is arranged in the output light path of described image acquiring device, is used for obtaining according to the vision signal of the diffuse reflection laser of described measured laser and described continuous laser the gray level image of the diffuse reflection laser of described measured laser and described continuous laser;
The control and treatment device, be connected with described image collecting device, be used to store the spot diameter of the diffuse reflection laser of described continuous laser in described measured position, spot diameter according to the diffuse reflection laser of the ratio of the gray level image of the diffuse reflection laser of described measured laser and described continuous laser and described continuous laser obtains the spot diameter of described measured laser in described measured position;
Display device is connected with described control and treatment device, the parameter of the described measured laser that is used to show that described control and treatment device obtains.
In the said system, described control and treatment device also is used to store the power of described continuous laser, ratio according to the gray scale of the diffuse reflection laser of described measured laser and described continuous laser, obtain the power and/or the energy of described measured laser, perhaps, described control and treatment device also is used for the gray level image of the diffuse reflection laser of described measured laser is analyzed, and obtains the centre of form and the barycenter of described measured laser.
Described control and treatment device also is used to control the duty of described image acquiring device and described image collecting device, perhaps be used for according to described measured laser in the spot diameter of different measured positions and measured position calculating the angle of divergence of described measured laser to the distance between the described measured laser source.
Said system also comprises: first optical filter, be arranged at the input end of described image acquiring device, and be used for the outer veiling glare of standard wavelength of described measured laser of filtering and described continuous laser.
Said system also comprises: first attenuator, be arranged at the input end of described image acquiring device, and be used for the intensity of described measured laser and described continuous laser is decayed.
Said system also comprises:
Photodetector is arranged in the diffuse reflection light path of described measured laser, and the light signal that is used for receiving is converted to electric signal;
The pulse duration frequency processor is connected with described photodetector and described control and treatment device respectively, be used for to the electric signal of described measured laser sample, mould/number conversion, peak value keep and decoding;
Described control and treatment device also keeps obtaining with the decoded results data pulsewidth and the frequency of described measured laser according to described peak value.
In the said system, described photodetector is and the corresponding PIN photodiode of the wavelength of described measured laser, avalanche diode or antimony zinc cadmium mercury infrared eye.
Said system also comprises: second optical filter, be arranged at the input end of described photodetector, and be used for the outer veiling glare of standard wavelength of the described measured laser of filtering.
Said system also comprises: second attenuator, be arranged at the input end of described photodetector, and be used for the intensity of described measured laser is decayed.
In the said system, described image acquiring device is an imaging detector.Angle between the normal of the primary optical axis of described imaging detector and described diffuse reflection imaging light target diffuse surface is 0 °-60 °.Described imaging detector be CCD (Charge Coupled Device, charge-coupled device (CCD)) video camera, thermal infrared imager or with the wavelength respective imaging device of described measured laser.Described reference laser is identical with the wavelength of described measured laser, perhaps described continuous laser at the hot spot of measured position less than described measured laser.The surface of described diffuse reflection imaging light target is provided with the teflon with lambert's characteristic, pottery, aluminium film or silit.
Based on technique scheme, the present invention has following beneficial technical effects:
In laser parameter measurement provided by the invention system, by means of by the reference laser source,, realized to far field, spot diameter the real-time measurement of the lay the grain spot parameter when big by the diffuse reflection imaging, its measurable spot diameter can be centimetre to meter level; Utilize this system, also can realize real-time measurement the hot spot parameter of laser near-field; The laser parameter that can measure comprises spot diameter, far-field divergence angle, pulsewidth, light intensity/energy distribution, general power/energy value etc.;
Adopt continuous wave laser with the measured laser co-wavelength as the reference lasing light emitter, in same width of cloth hot spot gray level image, the comparison of reference laser and the total gray-scale value of measured laser can be measured the general power/energy value of measured laser;
System provided by the invention can be used for measuring the power of continuous laser and the single pulse energy of pulse laser.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Description of drawings
Figure 1 shows that the structural representation of laser parameter measurement system embodiment of the present invention.
Embodiment
Laser parameter measurement provided by the invention system adopts the auxiliary diffusion imaging method in reference laser source, realizes to far field, spot diameter the real-time measurement of the laser lay the grain spot parameter when big.
As shown in Figure 1, structural representation for laser parameter measurement system embodiment of the present invention, diffuse reflection imaging light target 3 in the light path of the measured laser that launch in the continuous laser that it comprises measured laser source 1, reference laser source 2, be arranged at 2 emissions of reference laser source and measured laser source 1, be arranged at image acquiring device 4 in the diffuse reflection light path of measured laser and continuous laser, be arranged on the image collecting device 5 in the output light path of image acquiring device 4, the control and treatment device 6 that is connected with image collecting device 5, and the display device 7 that is connected with control and treatment device 6.Wherein, measured laser source 1 can be continuous laser source or pulsed laser source arbitrarily; Reference laser source 2 is used to launch the continuous laser as with reference to standard; Diffuse reflection imaging light target 3 is used for measured laser and continuous laser are carried out diffuse reflection; Image acquiring device 4 is used to receive the vision signal of the diffuse reflection laser of measured laser and continuous laser; Image collecting device 5 is used for obtaining according to the vision signal of the diffuse reflection laser of measured laser and continuous laser the gray level image of the diffuse reflection laser of measured laser and continuous laser; Control and treatment device 6 is used to store the spot diameter of the diffuse reflection laser of continuous laser in the measured position, spot diameter according to the diffuse reflection laser of the ratio of the gray level image of the diffuse reflection laser of measured laser and continuous laser and continuous laser calculates and obtains the spot diameter of measured laser in the measured position; In addition, control and treatment device 6 also can be used for storing the power of continuous laser, ratio according to the gray scale of the diffuse reflection laser of measured laser and continuous laser, obtain the power and/or the energy of measured laser, gray level image to the diffuse reflection laser of measured laser is analyzed, obtain the centre of form and the barycenter of measured laser, and according to measured laser in the spot diameter of different measured positions and measured position to the distance R between the measured laser source, calculate the angle of divergence of measured laser; Display device 7 is used for the parameter of the measured laser that display control processing apparatus 6 obtains.
The continuous laser of reference laser source 2 emission is identical with the wavelength of the measured laser that launch in measured laser source 1, and less than measured laser, for example: the ratio of the two can be 1: 100 or 1: 200 to continuous laser at the hot spot of measured position; When the wavelength of the continuous laser of reference laser source 2 emission and the measured laser of measured laser source 1 emission is identical, the hot spot of continuous laser on diffuse reflection imaging light target 3 that launch in reference laser source 2 should be not overlapping with measured laser; And the power stability in reference laser source 2 is higher, and the best is higher than 95%, and beam divergence angle is little, and is best less than 1mrad.
The surface of diffuse reflection imaging light target 3 has lambert's characteristic, and (that is: persect reflecting diffuser is in the luminous intensity of a certain direction radiation or reflection, be proportional to the cosine of angle between this direction and the surface normal) reflecting material teflon or pottery, aluminium film or silit, it has certain anti-high light characteristic, and workplace each point homogeneity is better.
Image acquiring device 4 is specifically as follows imaging detector, angle theta between the normal of its primary optical axis and diffuse reflection imaging light target 2 diffuse surfaces is preferably between 0 °-60 °, because the hot spot of measured laser is bigger, the optimum position of image acquiring device 4, be to make the hot spot of measured laser be in the central authorities of image acquiring device 4 visual fields, and the hot spot of the continuous laser that makes not overlapping with the hot spot of measured laser other positions in its market.Imaging detector 7 changes according to the wavelength of measured laser, and for example: when measured laser was Nd:YAG laser (wavelength 1064nm), imaging detector can be selected the ccd video camera to the near infrared response for use; When measured laser was CO2 laser (wavelength is 10.6 μ m), imaging detector can be selected the thermal imaging system of centering far infrared response for use, comprises refrigeration mode thermal imaging system and non-refrigeration type thermal imaging system.
Again referring to Fig. 1, at the input end of image acquiring device 4 first optical filter 81 can be set, be used for the outer veiling glare of standard wavelength of filtering measured laser and continuous laser; When the intensity of measured laser and continuous laser is higher, first attenuator 91 can be set at the input end of image acquiring device 4, with the light intensity of decay measured laser and continuous laser, the sensor in the protection image acquiring device 4.
In addition, laser parameter measurement provided by the invention system can also comprise photodetector 10 in the diffuse reflection light path that is arranged at measured laser and continuous laser and the pulse duration frequency processor 11 that is connected with photodetector 10 and control and treatment device 6 respectively.Wherein, photodetector 10 light signal that is used for receiving is converted to electric signal; Pulse duration frequency processor 11 is used for the electric signal of measured laser is sampled, analog signal conversion is digital signal, digital signal is carried out sending to control and treatment device 6 after peak value maintenance and the decoding; Accordingly, control and treatment device 6 also can keep and the decoded results data according to peak value, calculates pulsewidth and the frequency of obtaining measured laser.Wherein, can adopt the RS422/RS232 interface to be connected between pulse duration frequency processor 11 and the control and treatment device 6.
Equally, second optical filter 82 can be set, be used for the outer veiling glare of standard wavelength of filtering measured laser at the input end of photodetector 10; When the intensity of measured laser and continuous laser is higher, second attenuator 92 can be set at the input end of photodetector 10, with the light intensity of decay measured laser and continuous laser, the protection photodetector.
In above-mentioned laser parameter measurement system, control and treatment device 6 also can be used for controlling in reference laser source 2, image acquiring device 4, image collecting device 5, photodetector 10 and the pulse duration frequency processor 11 any one or a plurality of duties.
Utilize the course of work of parameter of wherein a kind of laser parameter measurement systematic survey laser provided by the invention as follows:
Regulate the position that measured laser source 1 shines on the diffuse reflection imaging light target 3, make measured laser be in the central authorities of image acquiring device 4 visual fields through diffuse reflection imaging light target 3 casual radiative hot spots, simultaneously, regulate the position that reference laser source 2 shines on the diffuse reflection imaging light target 3, the position that makes measured laser and continuous laser shine on diffuse reflection imaging light target 3 diffuse surfaces (that is: target surface) is not overlapping.Start each equipment in the laser parameter measurement of the present invention system, also can start one or more in reference laser sources 2, image acquiring device 4, image collecting device 5, photodetector 10 and the pulse duration frequency processor 11, make it in running order by control and treatment device 6 control.Behind the measured laser transmission range R of measured laser source 1 emission, be radiated on the diffuse surface of diffuse reflection imaging light target 3, simultaneously, the continuous laser of reference laser source 2 emissions also is radiated on the diffuse surface of diffuse reflection imaging light target 3, the two is after 3 diffuse reflections of diffuse reflection imaging light target, through after first optical filter 81 and first attenuator, 91 green glows, the decay, measured laser and continuous laser are received by image acquiring device 4 respectively for part measured laser and continuous laser.Image acquiring device 4 sends to image collecting device 5 with the vision signal of the diffuse reflection laser of the measured laser that gets access to and continuous laser.Image collecting device 5 obtains the gray level image of the diffuse reflection laser of measured laser and continuous laser according to the vision signal of the diffuse reflection laser of measured laser and continuous laser, wherein have two gray level images, large spot big and the picture centre position be the hot spot that diffuses of measured laser, another small light spot and be positioned at the position, image border be the hot spot that diffuses of continuous laser.Control and treatment device 6 can utilize the laser single order to calculate the barycenter (that is: center of gravity) and the centre of form of measured laser apart from method, utilize the laser second order to calculate the spot radius of measured laser apart from method, can also pass through calculating, analysis to the gray level image of measured laser in addition, the relative light intensity that draws measured laser distributes; In addition, utilize the power of the continuous laser of storage, control and treatment device 6 calculates the power/gray scale specific factor that just can obtain light spot image behind the total gray-scale value of small light spot, be known because of the integral time of image acquiring device 4 in piece image again, therefore can draw the energy/gray scale specific factor of the light spot image of continuous laser, gray level image with this factor pair measured laser hot spot (that is: large spot) is demarcated, and obtains actual strength distribution plan and the general power and/or the energy value of measured laser.
Simultaneously, after photodetector 10 receives the casual emission light of measured laser, carry out opto-electronic conversion, electric signal is transferred to pulse duration frequency processor 11,11 pairs of electric signal of pulse duration frequency processor are sampled, with analog signal conversion is digital signal, this digital signal is carried out peak value to be kept, also digital signal is carried out decoding processing in addition, the data that processing is obtained are defeated by control and treatment device 6 then, control and treatment device 6 calculates, analyzes according to the gained data, obtains the pulsewidth and the frequency of measured laser.
In addition, control and treatment device 6 can also be according to the spot diameter D of different distance R place measured laser, by formula α=arctan| (D
2-D
1)/(R
2-R
1) |, calculate the far-field divergence angle α of measured laser.Wherein, D
2, D
1Correspond respectively to distance R
2, R
1The spot diameter at place.
After control and treatment device 6 calculates above-mentioned laser parameter, can initiatively send it to display device 7 and show, also can initiatively select to check arbitrary parameter wherein or show the hot spot of measured laser and continuous laser with two dimension or three dimensional constitution by the user.
Total beneficial effect:
The real-time measurement of the lay the grain spot parameter when having realized far field, spot diameter greatly, the laser parameter that can measure comprises spot diameter, far-field divergence angle, pulsewidth, light intensity/energy distribution, general power/energy value etc.; Can be used for measuring the power of continuous laser and the single pulse energy of pulse laser.
It should be noted last that: above embodiment is only in order to illustrating technical scheme of the present invention, but not the present invention is made restrictive sense.Although the present invention is had been described in detail with reference to above-mentioned preferred embodiment, those of ordinary skill in the art is to be understood that: it still can make amendment or be equal to replacement technical scheme of the present invention, and this modification or be equal to the spirit and scope that replacement does not break away from technical solution of the present invention.
Claims (14)
1, a kind of laser parameter measurement system comprises the measured laser source, it is characterized in that, also comprises:
The reference laser source is used to launch the continuous laser as with reference to standard;
Diffuse reflection imaging light target is arranged in the light path of measured laser of described continuous laser and described measured laser source emission, the measured position of described measured laser, is used for described measured laser and described continuous laser are carried out diffuse reflection;
Image acquiring device is arranged in the diffuse reflection light path of described measured laser and described continuous laser, is used to receive the vision signal of the diffuse reflection laser of described measured laser and described continuous laser;
Image collecting device is arranged in the output light path of described image acquiring device, is used for obtaining according to the vision signal of the diffuse reflection laser of described measured laser and described continuous laser the gray level image of the diffuse reflection laser of described measured laser and described continuous laser;
The control and treatment device, be connected with described image collecting device, be used to store the spot diameter of the diffuse reflection laser of described continuous laser in described measured position, spot diameter according to the diffuse reflection laser of the ratio of the gray level image of the diffuse reflection laser of described measured laser and described continuous laser and described continuous laser obtains the spot diameter of described measured laser in described measured position;
Display device is connected with described control and treatment device, the parameter of the described measured laser that is used to show that described control and treatment device obtains.
2, system according to claim 1, it is characterized in that, described control and treatment device also is used to store the power of described continuous laser, ratio according to the gray scale of the diffuse reflection laser of described measured laser and described continuous laser, obtain the power and/or the energy of described measured laser, perhaps, described control and treatment device also is used for the gray level image of the diffuse reflection laser of described measured laser is analyzed, and obtains the centre of form and the barycenter of described measured laser.
3, system according to claim 2, it is characterized in that, described control and treatment device also is used to control the duty of described image acquiring device and described image collecting device, perhaps be used for according to described measured laser in the spot diameter of different measured positions and measured position calculating the angle of divergence of described measured laser to the distance between the described measured laser source.
4, system according to claim 1 and 2 is characterized in that, also comprises:
First optical filter is arranged at the input end of described image acquiring device, is used for the outer veiling glare of standard wavelength of described measured laser of filtering and described continuous laser.
5, system according to claim 1 and 2 is characterized in that, also comprises:
First attenuator is arranged at the input end of described image acquiring device, is used for the intensity of described measured laser and described continuous laser is decayed.
6, system according to claim 1 and 2 is characterized in that, also comprises:
Photodetector is arranged in the diffuse reflection light path of described measured laser, and the light signal that is used for receiving is converted to electric signal;
The pulse duration frequency processor is connected with described photodetector and described control and treatment device respectively, be used for to the electric signal of described measured laser sample, mould/number conversion, peak value keep and decoding;
Described control and treatment device also keeps obtaining with the decoded results data pulsewidth and the frequency of described measured laser according to described peak value.
7, system according to claim 6 is characterized in that, described photodetector is and the corresponding PIN silicon photoelectric diode of the wavelength of described measured laser, avalanche diode or antimony zinc cadmium mercury infrared eye.
8, system according to claim 6 is characterized in that, also comprises:
Second optical filter is arranged at the input end of described photodetector, is used for the outer veiling glare of standard wavelength of the described measured laser of filtering.
9, system according to claim 6 is characterized in that, also comprises:
Second attenuator is arranged at the input end of described photodetector, is used for the intensity of described measured laser is decayed.
10, system according to claim 1 and 2 is characterized in that, described image acquiring device is an imaging detector.
11, system according to claim 10 is characterized in that, the angle between the normal of the primary optical axis of described imaging detector and described diffuse reflection imaging light target diffuse surface is 0 °-60 °.
12, system according to claim 10 is characterized in that, described imaging detector be ccd video camera, thermal infrared imager or with the wavelength respective imaging device of described measured laser.
13, system according to claim 1 and 2 is characterized in that, described reference laser is identical with the wavelength of described measured laser, perhaps described continuous laser at the hot spot of measured position less than described measured laser.
14, system according to claim 1 and 2 is characterized in that, the surface of described diffuse reflection imaging light target is provided with the teflon with lambert's characteristic, pottery, aluminium film or silit.
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| CNB2006101673502A CN100460809C (en) | 2006-12-29 | 2006-12-29 | Laser parameter measuring device |
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