CN100451578C - Measuring system and method for wave zone laser energy/power - Google Patents
Measuring system and method for wave zone laser energy/power Download PDFInfo
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- CN100451578C CN100451578C CNB2003101152978A CN200310115297A CN100451578C CN 100451578 C CN100451578 C CN 100451578C CN B2003101152978 A CNB2003101152978 A CN B2003101152978A CN 200310115297 A CN200310115297 A CN 200310115297A CN 100451578 C CN100451578 C CN 100451578C
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- 239000000523 sample Substances 0.000 claims abstract description 44
- 238000003384 imaging method Methods 0.000 claims abstract description 39
- 238000005259 measurement Methods 0.000 claims abstract description 10
- 239000000758 substrate Substances 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000001914 filtration Methods 0.000 claims description 3
- 230000010354 integration Effects 0.000 claims description 3
- 230000013011 mating Effects 0.000 claims description 3
- 239000011236 particulate material Substances 0.000 claims description 3
- 230000011664 signaling Effects 0.000 claims description 3
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- 238000006243 chemical reaction Methods 0.000 description 2
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Abstract
The present invention discloses a far field laser energy/power measuring system which comprises a diffuse reflecting target having a Lambert property, a CCD imaging module, a data acquiring and processing device, wherein one or more than one small hole is arranged on the diffuse reflecting target, and an energy/powder probe is connected to a position at the opposite side of the reflecting surface of the diffuse reflecting target, which is corresponding to the small hole. In a measuring method, data transferred by the enegy/powder probe and the CCD imaging module is received and processed by the data acquiring and processing device, and energy density and a grey value at the small hole are obtained. Therefore, laser energy corresponding to pixels and unit grey is obtained, the total grey value of laser spots on the diffuse reflecting target is obtained, and the energy/power of lasers to be measured is obtained. The present invention has the advantage of accurate measurement, is not limited by the size of the caliber of the laser energy/powder probe, and is especially suitable for the measurement of the energy of lasers with far field and high energy.
Description
Technical field
The present invention relates to a kind of measuring system and measuring method thereof of far-field laser energy/power, especially a kind of measuring system and measuring method thereof of the far-field laser energy/power based on the diagnostic laser beam that is diffused into picture belong to the information science technology field.
Background technology
Traditional power/energy measurement mechanism is that laser is shone directly on laser power/energy sensor, obtains and measured linear voltage signal, the back is handled and demarcated to this signal directly show the power/energy value.So traditional laser energy/power-measuring device must be in the near field with the unified reception measured laser ability of laser energy/power probe energy measurement.Be subjected to the restriction of device, the less (diameter≤200mm) of the general bore of the laser energy/power-measuring device of this principle.Therefore, its application is restricted, and can't measure the energy/power of the large-caliber laser of hundreds of millimeters of the diameters in emission far field.
Summary of the invention
The objective of the invention is at the deficiencies in the prior art, a kind of measuring system of far-field laser energy/power is proposed, based on the diagnostic laser beam device that is diffused into picture, the not caliber size of Stimulated Light energy/power measurement mechanism restriction can be measured the energy/power of diameter at hundreds of millimeters large-caliber laser.
Another object of the present invention is at the deficiencies in the prior art, propose a kind of measuring method of far-field laser energy/power, be used to measure the energy/power of diameter at hundreds of millimeters large-caliber laser.
The objective of the invention is to realize by the following technical solutions:
A kind of measuring system of far-field laser energy/power comprises diffuse reflecting target, CCD image-forming module, data acquisition and processing (DAP) device with lambert's characteristic, wherein:
Diffuse reflecting target is used for the light beam of measured laser is carried out diffuse reflection, make the characteristic that diffuses of its generation identical with the characteristic of incident light, and offer aperture on the described diffuse reflecting target, dorsal part at the diffuse reflecting target reflecting surface, position corresponding to aperture is provided with the energy/power probe, be used to receive transmission and cross the laser beam of diffuse reflecting target and it is measured, then measurement data is sent to the data acquisition and processing (DAP) device;
The CCD image-forming module is arranged among the reflected light district of diffuse reflecting target, is used for the imaging that diffuses to diffuse reflecting target, and the data of imaging are delivered to the data acquisition and processing (DAP) device;
The data that data acquisition and processing (DAP) device received energy/power probe and CCD image-forming module are sent here, and these data are handled, the energy/power of measured laser obtained.
Described diffuse reflecting target constitutes by diffuse reflector is set in substrate, and described diffuse reflector is made by means of particulate material, is arranged on a side surface of substrate; When incident light irradiation diffuse reflector, form the diffuse district identical with the incident light characteristic at the homonymy of light source at substrate surface.
The aperture of offering on the described diffuse reflecting target is one or more, and the total area of described one or more aperture is not more than 1% of the hot spot total area that the measured laser light beam forms on diffuse reflecting target.
Described energy/power probe comprises laser energy/power sensor and signal processing circuit, described energy/power sensor connects the aperture position that is located at diffuse reflecting target reflecting surface heteropleural, and aperture covered, the signal end of energy/power sensor is connected with the input end of signal processing circuit, and the output terminal of signal processing circuit is connected by the signaling interface of data line with the data acquisition and processing (DAP) device.
Described CCD image-forming module comprises imaging lens and Array CCD Camera, imaging lens is installed on the front of Array CCD Camera, attenuator group, optical filter are installed before imaging lens successively, optical filter receives and diffuses, diffusing of mating plate passed through attenuator group, imaging lens successively after filtration, enter Array CCD Camera, Array CCD Camera is to this imaging that diffuses, and the data of imaging are exported to the data acquisition and processing (DAP) device.
The distance of described CCD image-forming module and diffuse reflecting target is to make Array CCD Camera be operated in the distance of linear zone.
A kind of measuring method of far-field laser energy/power is measured laser, is comprised the steps: based on above-mentioned far-field laser energy/merit system for measuring quantity
Step 100: obtain the performance data of measured laser light beam and send to the data acquisition and processing (DAP) device by the CCD image-forming module;
Step 200: obtain the laser energy data by aperture and send to the data acquisition and processing (DAP) device by energy/power probe;
Step 300: the data that data acquisition and processing (DAP) device received energy/power probe and CCD image-forming module send are also handled, and obtain the energy of measured laser.
The process of the performance data of passing through CCD image-forming module acquisition measured laser light beam in the described step 100 is: the measured laser light source sends light beam and incides on the diffuse reflecting target; Diffuse reflecting target reflection measured laser light beam, generation diffuses, and forms the district that diffuses; The CCD image-forming module is arranged on the district that diffuses, and receives diffusing and imaging of diffusion target, and the data with imaging output to the data acquisition and processing (DAP) device then.
The processing of the data that the data acquisition and processing (DAP) device sends energy/power probe and CCD image-forming module in the described step 300 comprises the steps:
Step 310: the data-switching that the energy/power probe is sent becomes laser energy E
0
Step 320:, obtain the laser energy density by aperture: E according to the area of aperture
0/ S
0Wherein, S
0Area for aperture;
Step 330: the gray-scale value I that obtains the aperture place
0
Step 340: the laser energy (E that obtains a pixel, unit gray scale correspondence
0S
1)/(S
0I
0);
Wherein, S
1Target area for the unit pixel correspondence;
Step 350: the gray-scale value to the unit pixel of the imaging data in the CCD image-forming module is done numerical integration, draws the gray-scale value ∑ ∑ I of whole laser facula
Ij
Wherein, I
IjIt is the gray-scale value of the capable j row of i pixel.
Step 360: according to formula E=(E
0S
1) ∑ ∑ I
Ij/ (S
0I
0) draw the gross energy E of laser facula.
The laser energy E that passes through aperture in the described step 310
0Change by following relation:
E
0＝K*U
Wherein, K is a correction factor;
U is the output voltage of energy probe.
When system debug, place earlier standard energy instrumentation amount and obtain actual energy by aperture in the position of energy probe, use the same energy of energy probe measurement again, obtain output voltage values.The output voltage that standard energy meter reading is popped one's head in divided by energy obtains correction factor K.Later on the output voltage of energy probe takes advantage of correction factor just to finish conversion from the energy probe data to laser energy, obtains E
0
The gray-scale value I at aperture place in the described step 330
0The method of asking be:
I
0＝(∑I
i)/k
Wherein, I
iFor the gray-scale value around the aperture is I
1, I
2... I
k, the I here
1, I
2... I
kIt is the gray-scale value of CCD gamma camera corresponding units output.
In sum, the diagnostic laser beam system that the present invention is based on the application diffuse reflecting target records the performance data of laser beam, by connecing the energy density that is located at the probe of the energy/power behind aperture acquisition aperture place on the diffuse reflecting target, the binding characteristic data calculate the energy/power of far-field laser; The present invention measures accurately, and the not restriction of Stimulated Light energy/power bore probe size especially is fit to the measurement of the laser energy of far field, macro-energy.
Description of drawings
Fig. 1 is the measuring system structure principle chart of far-field laser energy/power provided by the invention;
Fig. 2 is the measuring method process flow diagram of far-field laser energy/power provided by the invention.
Embodiment
Below in conjunction with accompanying drawing and specific embodiment technical scheme of the present invention is elaborated.
Referring to Fig. 1, be the measuring system structure principle chart of far-field laser energy/power provided by the invention.The present invention includes diffuse reflecting target 1, energy/power probe 2, CCD image-forming module 3, data acquisition and processing (DAP) device 4 with lambert's characteristic, the light beam A of 1 pair of measured laser of diffuse reflecting target is carried out diffuse reflection, CCD image-forming module 3 receives diffusing of diffuse reflecting target 1, imaging, and the data of imaging are delivered to data acquisition and processing (DAP) device 4; On described diffuse reflecting target 1, offer aperture 11, dorsal part at diffuse reflecting target 1 reflecting surface, the position of respective apertures 11 is equipped with energy/power probe 2, the data terminal of energy/power probe 2 is delivered to data acquisition and processing (DAP) device 4 by the energy datum of the survey laser beam that data line will receive, the data that data acquisition and processing (DAP) device 4 received energies/power probe 2 and CCD image-forming module 3 are sent here, and the data that receive are handled the energy/power that obtains measured laser.
Wherein, diffuse reflecting target 1 comprises by opaque substrate 12 and diffuse reflector 13 and forming that diffuse reflector 13 is arranged in the opaque substrate 12, and described diffuse reflector 11 is made the diameter of described particle and the same order of magnitude of the wavelength of incident laser by means of particulate material; When incident light irradiation diffuse reflector 13, form the diffuse district identical with the incident light characteristic at the homonymy of light source on substrate 12 surfaces.
The aperture of offering on the diffuse reflecting target 1 11 can be one, also can be for more than one, but for target surface, aperture is a kind of defective, when calculating, utilize gray scale around the aperture on average to obtain the gray scale at aperture place, if little hole area is too big, it is this that [average error can be very big, so the total area of aperture is not more than 1% of the hot spot total area that the measured laser light beam forms on diffuse reflecting target 1.
The present invention adopts energy/power probe 2 to detect the energy of the laser that leaked from aperture, energy/power probe 2 comprises laser energy/power sensor 21 and signal processing circuit 22, laser energy/power sensor 21 connects the position of the aperture 11 that is located at diffuse reflecting target 1 reflecting surface heteropleural, and with aperture 11 coverings, the signal end of energy/power sensor 21 is connected with the input end of signal processing circuit 22, and the output terminal of signal processing circuit 22 is connected by the signaling interface of data line with data acquisition and processing (DAP) device 4.
The measured laser that aperture 11 leaked from the diffuse reflecting target 1 enters energy/power probe 2, laser energy/power sensor 21 in the energy/power probe 2 is converted to electric signal with the light signal of laser and sends into connected signal processing circuit 22, this signal Processing is become voltage signal, this voltage signal is sent into computing machine 42 in the data acquisition and processing (DAP) device 4 by data line.
In the present invention, CCD image-forming module 3 is placed in the reflected light district of measured laser light beam, it comprises imaging lens 33 and Array CCD Camera 34, imaging lens 33 is installed in the front of Array CCD Camera 34, attenuator group 32, optical filter 31 are installed before imaging lens 33 successively, optical filter 31 receives diffusing of measured laser light beam, this diffuses and passes through attenuator group 32, imaging lens 33 successively, enter Array CCD Camera 34,34 pairs of these imagings that diffuse of Array CCD Camera, and the signal of imaging exported to data acquisition and processing (DAP) device 4.
Data acquisition and processing (DAP) device 4 comprises capture card 41 and computing machine 42, process software 421 is installed in computing machine 42, send to computing machine 42 after the data that the data processing that capture card 41 sends Array CCD Camera 34 becomes computing machine 42 to receive, 421 pairs of these data of process software in the computing machine 42 are analyzed, judge, are calculated, and obtain the performance data of measured laser light beam.
The measuring method of a kind of far-field laser energy/power provided by the invention, its flow process be as shown in Figure 2: comprise following step:
Step 10: obtain the performance data of measured laser light beam and send to the data acquisition and processing (DAP) device by the CCD image-forming module;
Step 20: obtain the laser energy data by aperture and send to the data acquisition and processing (DAP) device by energy/power probe;
Step 30: the data that data acquisition and processing (DAP) device received energy/power probe and CCD image-forming module send are also handled, and obtain the energy of measured laser.
The process of the performance data of passing through CCD image-forming module acquisition measured laser light beam in the described step 10 is: the measured laser light source sends light beam and incides on the diffuse reflecting target; Diffuse reflecting target reflection measured laser light beam, generation diffuses, and forms the district that diffuses; The CCD image-forming module is arranged on the district that diffuses, and receives diffusing and imaging of diffusion target, and the data with imaging output to the data acquisition and processing (DAP) device then.
The processing of the data that the data acquisition and processing (DAP) device sends energy/power probe and CCD image-forming module in the described step 30 comprises the steps:
Step 310: the data-switching that the energy/power probe is sent becomes laser energy E
0
Step 320:, obtain the laser energy density by aperture: E according to the area of aperture
0/ S
0
Wherein, S
0Area for aperture;
Step 330: the gray-scale value I that obtains the aperture place
0
Step 340: the laser energy (E that obtains a pixel, unit gray scale correspondence
0S
1)/(S
0I
0);
Wherein, S
1Target area for the unit pixel correspondence;
Step 350: the gray-scale value to the unit pixel of the imaging data in the CCD image-forming module is done numerical integration, draws the gray-scale value ∑ ∑ I of whole laser facula
Ij
Wherein, I
IjIt is the gray-scale value of the capable j row of i pixel.
Step 360: according to formula E=(E
0S
1) ∑ ∑ I
Ij/ (S
0I
0) draw the gross energy E of laser facula.
Wherein, the laser energy E that passes through aperture in the described step 310
0Change by following relation:
E
0＝K*U
Wherein, K is a correction factor;
U is the output voltage of energy probe.
When system debug, place earlier standard energy instrumentation amount and obtain actual energy by aperture in the position of energy probe, use the same energy of energy probe measurement again, obtain output voltage values.The output voltage that standard energy meter reading is popped one's head in divided by energy obtains correction factor K.Later on the output voltage of energy probe takes advantage of correction factor just to finish conversion from the energy probe data to laser energy, obtains E
0
The gray-scale value I at aperture place in the described step 330
0The method of asking be:
I
0＝(∑I
i)/k
Wherein, I
iFor the gray-scale value around the aperture is I
1, I
2... I
k
It should be noted last that, above embodiment is only unrestricted in order to explanation the present invention, although the present invention is had been described in detail with reference to preferred embodiment, those of ordinary skill in the art is to be understood that, can make amendment or be equal to replacement the present invention, and not breaking away from the spirit and scope of the present invention, it all should be encompassed in the middle of the claim scope of the present invention.
Claims (13)
1, a kind of measuring system of far-field laser energy/power is characterized in that: comprise diffuse reflecting target, CCD image-forming module, data acquisition and processing (DAP) device with lambert's characteristic, wherein:
Diffuse reflecting target is used for the light beam of measured laser is carried out diffuse reflection, make the characteristic that diffuses of its generation identical with the characteristic of incident light, and offer aperture on the described diffuse reflecting target, dorsal part at the diffuse reflecting target reflecting surface, position corresponding to aperture is provided with the energy/power probe, the energy/power probe is used to receive through the laser beam of diffuse reflecting target and to it to be measured, and then measurement data is sent to the data acquisition and processing (DAP) device;
The CCD image-forming module is arranged among the reflected light district of diffuse reflecting target, is connected with the data acquisition and processing (DAP) device by data line, is used for the imaging that diffuses to diffuse reflecting target, and the data of imaging are delivered to the data acquisition and processing (DAP) device;
The data that data acquisition and processing (DAP) device received energy/power probe and CCD image-forming module are sent here, and these data are handled, the energy/power of measured laser obtained.
2, the measuring system of far-field laser energy/power according to claim 1, it is characterized in that: described diffuse reflecting target comprises substrate and diffuse reflector, diffuse reflector is arranged on a side surface of substrate, described diffuse reflector is made by means of particulate material, the diameter of described particle and the same order of magnitude of incident light wavelength; When incident light irradiation diffuse reflector, form the diffuse district identical with the incident light characteristic at the homonymy of light source at substrate surface.
3, the measuring system of far-field laser energy/power according to claim 1 and 2 is characterized in that: the aperture of offering on the described diffuse reflecting target is one or more.
4, the measuring system of far-field laser energy/power according to claim 1 is characterized in that: the total area of the aperture of offering on the described diffuse reflecting target is not more than 1% of the hot spot total area that the measured laser light beam forms on diffuse reflecting target.
5, the measuring system of far-field laser energy/power according to claim 1, it is characterized in that: described energy/power probe comprises laser energy/power sensor and signal processing circuit, described energy/power sensor is arranged on the aperture position of diffuse reflecting target reflecting surface dorsal part, and aperture covered, the signal end of energy/power sensor is connected with the input end of signal processing circuit, the output terminal of signal processing circuit is connected by the signaling interface of data line with the data acquisition and processing (DAP) device, and the data that are used for measuring send to the data acquisition and processing (DAP) device.
6, the measuring system of far-field laser energy/power according to claim 1, it is characterized in that: described CCD image-forming module comprises imaging lens and Array CCD Camera, imaging lens is installed in the front of Array CCD Camera, attenuator group, optical filter are installed before imaging lens successively, optical filter receives and diffuses, diffusing of mating plate passed through attenuator group, imaging lens successively after filtration, enter Array CCD Camera, Array CCD Camera is to this imaging that diffuses, and the data of imaging are exported to the data acquisition and processing (DAP) device.
7, the measuring system of far-field laser energy/power according to claim 6 is characterized in that: the distance of described CCD image-forming module and diffuse reflecting target is to make Array CCD Camera be operated in the distance of linear zone.
8, the measuring system of far-field laser energy/power according to claim 1, it is characterized in that: described data acquisition and processing (DAP) device comprises image pick-up card and the computing machine of process software is installed, capture card receives the output signal of CCD image-forming module, and the data that become computing machine to receive this signal Processing send to computing machine, the data that computing machine reception capture card and energy/power probe are sent here, process software on it is judged, analyzes, is calculated this data-signal, draws the performance data of tested light beam.
9, a kind of far-field laser energy/power measuring method is characterized in that: based on the arbitrary described far-field laser energy/power measuring system of claim 1-8 laser is measured, comprised the steps:
Step 100:CCD image-forming module obtains the performance data of measured laser light beam, and these data are sent to the data acquisition and processing (DAP) device;
Step 200: the energy/power probe records by the laser energy data of aperture and sends to the data acquisition and processing (DAP) device;
Step 300: the data that data acquisition and processing (DAP) device received energy/power probe and CCD image-forming module send are also handled, and obtain the energy of measured laser.
10, the measuring method of far-field laser energy/power according to claim 9, it is characterized in that: the CCD image-forming module in the described step 100 comprises imaging lens and Array CCD Camera, imaging lens is installed in the front of Array CCD Camera, the attenuator group is installed before imaging lens successively, optical filter, optical filter receives and diffuses, diffusing of mating plate passed through the attenuator group successively after filtration, imaging lens, enter Array CCD Camera, Array CCD Camera is to this imaging that diffuses, and the data of imaging are exported to the data acquisition and processing (DAP) device.
11, the measuring method of far-field laser energy/power according to claim 10 is characterized in that: also comprise in the described step 100: adjust the distance of described CCD image-forming module and diffuse reflecting target, make Array CCD Camera be operated in linear zone.
12, the measuring method of far-field laser energy/power according to claim 9 is characterized in that: the processing of the data that the data acquisition and processing (DAP) device sends energy/power probe and CCD image-forming module in the described step 300 comprises the steps:
Step 310: the data-switching that the energy/power probe is sent becomes laser energy E
0
Step 320: obtain the laser energy density by aperture: E
0/ S
0Wherein, S
0Area for aperture;
Step 330: the gray-scale value I that obtains the aperture place
0
Step 340: the laser energy (E that obtains a pixel, unit gray scale correspondence
0S
1)/(S
0I
0); Wherein, S
1Target area for the unit pixel correspondence;
Step 350: the gray-scale value to the unit pixel of the imaging data in the CCD image-forming module is done numerical integration, draws the gray-scale value ∑ ∑ I of whole laser facula
Ij
Wherein, I
IjIt is the gray-scale value of the capable j row of i pixel;
Step 360: according to formula E=(E
0S
1) ∑ ∑ I
Ij/ (S
0I
0) draw the gross energy E of laser facula.
13, the measuring method of far-field laser energy/power according to claim 12 is characterized in that: the laser energy E that passes through aperture in the described step 310
0Change by following relation:
E
0＝K*U
Wherein, K is a correction factor;
U is the output voltage of signal processing circuit.
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| CNB2003101152978A CN100451578C (en) | 2003-11-27 | 2003-11-27 | Measuring system and method for wave zone laser energy/power |
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| CN100460809C (en) * | 2006-12-29 | 2009-02-11 | 中国人民解放军总参谋部第五十四研究所 | Laser parameter measuring device |
| CN101858779B (en) * | 2009-04-10 | 2012-01-11 | 南京理工大学 | Far-field laser power distribution measurer |
| CN102192706B (en) * | 2010-03-12 | 2012-11-21 | 国家纳米科学中心 | Device and method for in situ measurement of energy distribution of focused laser faculae |
| CN102486402B (en) * | 2010-12-01 | 2014-03-12 | 中国科学院西安光学精密机械研究所 | Method and system for measuring pulse laser energy |
| CN102538960A (en) * | 2011-12-14 | 2012-07-04 | 长春理工大学 | Long time exposure-based laser energy distribution detector |
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| CN104568141B (en) * | 2015-01-22 | 2016-08-24 | 中国科学院上海光学精密机械研究所 | Position adjustable laser collimated probe device |
| CN104655408A (en) * | 2015-01-29 | 2015-05-27 | 大族激光科技产业集团股份有限公司 | Laser power monitoring device |
| CN106768316B (en) * | 2017-03-07 | 2019-05-07 | 西北核技术研究所 | Apparatus for measuring quality of laser beam and method based on the sampling of plate involute hole |
| CN107991064B (en) * | 2017-12-14 | 2024-01-30 | 中国科学院西安光学精密机械研究所 | Near back scattering light measuring system resistant to stray light interference |
| CN114323268B (en) * | 2021-12-17 | 2024-03-29 | 锡凡半导体无锡有限公司 | Energy detection device and method for photoetching machine |
| CN114370935A (en) * | 2022-01-10 | 2022-04-19 | 中国人民解放军63892部队 | CCD target surface laser energy distribution measuring system and method based on image fusion |
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Address after: 100010 Beijing city Dongcheng District North Street No. 20 Patentee after: Beijing Jingyi Photoelectric Technology Research Institute Co.,Ltd. Address before: 100010 Beijing city Dongcheng District North Street No. 20 Patentee before: Beijing Institute of Opto-Electronic Technology |
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