CN104655408A - Laser power monitoring device - Google Patents
Laser power monitoring device Download PDFInfo
- Publication number
- CN104655408A CN104655408A CN201510046533.8A CN201510046533A CN104655408A CN 104655408 A CN104655408 A CN 104655408A CN 201510046533 A CN201510046533 A CN 201510046533A CN 104655408 A CN104655408 A CN 104655408A
- Authority
- CN
- China
- Prior art keywords
- laser
- absorber
- diffuse reflector
- monitoring device
- power monitoring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Lasers (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
The invention relates to a laser power monitoring device which is arranged on the laser transmission side of a rear mirror and positioned on the laser propagation path. The laser power monitoring device comprises a control unit, an absorber, a diffuse reflector and a photosensitive sensor, wherein the control unit is in electric signal connection with the absorber, the diffuse reflector and the photosensitive sensor; the absorber is opposite to the rear mirror and a first light through hole is formed in the absorber; the diffuse reflector is arranged on the light-out side of the absorber and a laser reflection space exists between the diffuse reflector and the absorber; a connection hole and a second light through hole are formed in the diffuse reflector; the photosensitive sensor is arranged on the light-out side of the diffuse reflector and corresponding to the second light through hole; a lighting hole is formed in the end, close to the second light through hole, of the photosensitive sensor. The laser power monitoring device provided by the invention is used for detecting the output power of high-power carbon dioxide lasers through the photosensitive sensor, is extremely short in response time and can satisfy the requirement for rapid real-time feedback of laser power in the laser processing industry.
Description
Technical field
The invention belongs to laser technology application, be specifically related to a kind of laser power monitoring device, for monitoring the output power of high-power carbon dioxide laser in real time.
Background technology
The size of laser power is the important indicator of laser technical parameters, only has suitable laser power could ensure laser instrument and the work of light path system long-time stable, is also the determinative realizing optimal process quality simultaneously.As shown in Figure 1, existing conventional laser power monitoring device comprises heat sensitive sensor and control module (not shown).The resonator cavity of laser instrument sends laser, transmits 0.5% even more lower powered laser beam, impinge upon on heat sensitive sensor, cause the change of heat-sensitive sensor actuator temperature, and convert electric signal to through tail mirror; Control module receives electric signal, and rower of going forward side by side is fixed; Finally, the laser instrument real output monitored externally is shown.
The heat sensitive sensor response time adopted in above-mentioned existing scheme is longer, react insensitive, can not feedback laser real output in time so that laser equipment carries out boring a hole and wedge angle cutting time crudy cannot get a desired effect.And light sensor has response time short advantage, but power threshold is extremely low, can not bear the irradiation of watt level laser, cannot be applied and promote.
Summary of the invention
The object of the embodiment of the present invention is, for above-mentioned the deficiencies in the prior art, to provide a kind of laser power monitoring device, meets the requirement of Laser Processing industry to the quick Real-time Feedback of laser output power.
The technical scheme of the embodiment of the present invention is such:
A kind of laser power monitoring device, for monitoring the output power of high-power carbon dioxide laser in real time, it is arranged on the side of tail mirror transmitted through laser, and is positioned on the path of laser propagation, and it comprises control module, absorber, diffuse reflector and at least one light sensor; Described control module and absorber, diffuse reflector and light sensor carry out electric signal and are connected; Described absorber is relative with described tail mirror, it offers the first light hole; Described diffuse reflector is arranged on the side of described absorber bright dipping, and existence one allows laser carry out the space reflected between the two; Described diffuse reflector offers a wiring hole and at least one second light hole; Described light sensor is arranged on the side of described diffuse reflector bright dipping, and corresponding with described second light hole, and its one end near described second light hole offers lightlng hole.
Further illustrate, described first light hole is round table-like, and its xsect is trapezoidal, and its aperture near described tail mirror one end is greater than the diameter of laser beam, and its aperture near described diffuse reflector one end is less than the diameter of laser beam.
Further illustrate, described absorber is common process face near described tail mirror one end, and described first light hole inwall and described absorber are smooth surface near described diffuse reflector one end.
Further illustrate, described absorber passes into the chilled water circulated and dispels the heat.
Further illustrate, the one side that described diffuse reflector is relative with described absorber is the diffuse surface processed through frosted.
Further illustrate, described diffuse reflector edge is fixed together by heat conducting module and described absorber.
Further illustrate, described absorber and diffuse reflector are aluminum alloy materials and process.
Further illustrate, described second light hole is arranged on outside the scope of laser direct projection.
Further illustrate, the aperture of described second light hole is less than the aperture of described first light hole near diffuse reflector one end.
Further illustrate, described light sensor has multiple, is uniformly distributed, and is layout structure in parallel.
The beneficial effect that laser power monitoring device provided by the present invention brings is: the laser transmitted from tail mirror can reflected through absorber and diffuse reflector and absorb, laser energy is made to decay within the scope of the power threshold of light sensor, avoid damaging light sensor because laser power is too high, give full play to light sensor response time short advantage, meet the requirement of Laser Processing industry to the quick Real-time Feedback of high-power carbon dioxide laser output power.
Accompanying drawing explanation
Fig. 1 is the structural representation of existing laser power monitoring device;
Fig. 2 is the structural representation of the laser power monitoring device that the embodiment of the present invention provides;
Fig. 3 is the structural representation of middle absorber embodiment illustrated in fig. 2;
Fig. 4 is laser through the schematic diagram of absorber and diffuse reflector;
Fig. 5 is the structural representation of middle diffuse reflector embodiment illustrated in fig. 2;
Fig. 6 is that laser arrives the schematic diagram of light sensor through the second light hole.
Description of reference numerals: 1-absorber, 2-diffuse reflector, 3-light sensor, 11-first light hole, 12-absorber near one end of tail mirror, 13-absorber near one end of diffuse reflector, 21-second light hole, one end that 22-diffuse reflector is relative with absorber, 23-wiring hole, 31-lightlng hole, 111-first light hole inwall
Embodiment
In order to make object of the present invention, technical scheme and advantage clearly understand, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explain the present invention, be not intended to limit the present invention.
The embodiment of the present invention provides a kind of laser power monitoring device, is applicable to the carbon dioxide laser that wavelength is 10.6 μm.This laser power monitoring device is located at the side of tail mirror transmitted through laser, and is positioned on the path of laser propagation.
As shown in Figure 2, this laser power monitoring device comprises control module (not shown), absorber 1, diffuse reflector 2 and light sensor 3.Specifically, control module carries out electric signal with absorber 1, diffuse reflector 2 and light sensor 3 and is connected; Absorber 1 is relative with tail mirror, it offers the first light hole 11; Diffuse reflector 2 is arranged on the side of absorber 1 bright dipping, and existence one allows laser carry out the space reflected between the two; Diffuse reflector 2 offers wiring hole (not shown) and the second light hole 21; Light sensor 3 is arranged on the side of diffuse reflector 2 bright dipping, and corresponding with the second light hole 21, and its one end near the second light hole 21 offers lightlng hole (not marking in figure).
As shown in Figure 3, the first light hole 11 is round table-like, and its xsect is trapezoidal, and its aperture D near tail mirror one end is greater than the diameter of laser beam, and its aperture d near diffuse reflector 2 one end is less than the diameter of laser beam.Like this, the laser transmitted from tail mirror is in absorber 1, and a part can directly be absorbed by absorber 1 or reflect, and another part then arrives the surface of diffuse reflector 2 by the first light hole 11.
In the present embodiment, absorber 1 is common process face near one end 12 of tail mirror, and the inwall 111 of the first light hole 11 and absorber 1 are smooth surface near one end 13 of diffuse reflector 2.Laser impinges upon on smooth surface can carry out multiple reflections, is conducive to absorber 1 and absorbs more laser.
In the present embodiment, absorber 1 passes into the chilled water circulated, and takes away the heat that absorber 1 produces due to absorbing laser, ensures the reliability and stability of laser power monitoring device.
As shown in Figure 4, one end 22 that diffuse reflector 2 is relative with absorber 1 is the diffuse surface processed through frosted.Diffuse reflection can be there is in the laser through the first light hole 11 on the surface 22 of diffuse reflector 2.A part can directly be reflected back, as light L1, L1', L1 〃; Can there is multiple reflections in another part, the energy of light beam is absorbed in a large number by absorber 1 and diffuse reflector 2, as light L2, L2', L2 〃 between the surface 13 of absorber 1 and the surface 22 of diffuse reflector 2.
In the present embodiment, the edge of diffuse reflector 2 is fixed together by heat conducting module (not shown) and absorber 1, improves the heat-sinking capability of diffuse reflector 2.
In the present embodiment, absorber 1 and diffuse reflector 2 are aluminum alloy materials and process, and also can use the material substitution that other heat conduction are good.
In the present embodiment, the second light hole 21 is arranged on outside the scope of laser direct projection.Like this, must there is multiple reflections in laser before inciding the second light hole 21 between absorber 1 and diffuse reflector 2, and the energy of light beam is absorbed in a large number.
The aperture of the second light hole 21 is less than the aperture d of the first light hole 11 near diffuse reflector 2 one end.In the present embodiment, the aperture of the second light hole 21 is 0.5mm.Like this, only have a small amount of laser just can incide in the second light hole 21, most of laser can be diffusely reflected body 2 directly reflection or absorption.
In the present embodiment, the inwall of the second light hole 21 is smooth surface.Laser is before being received by the lightlng hole of light sensor 3, and in the second light hole 21, multiple reflections can occur, beam energy is diffusely reflected body 2 and absorbs in a large number.
As shown in Figure 5, diffuse reflector 2 evenly offers five the second light holes 21 and a wiring hole 23.Correspondingly, light sensor 3 also has five, and with the second light hole 21 one_to_one corresponding, and five light sensors 3 are layout structure in parallel.The light that can effectively prevent indivedual light sensor 3 from receiving like this is crossed weak and the larger error of existence maybe cannot detect, and ensures reliability and the accuracy of laser power monitoring device.
As shown in Figure 2 and Figure 6, the course of work of laser power monitoring device that provides of the embodiment of the present invention is roughly as follows:
The resonator cavity of carbon dioxide laser sends laser, transmits 0.5% even more lower powered light beam through tail mirror; Transmitted light arrives absorber 1 place, and a part can directly be absorbed or reflect, and another part then impinges upon the surface of diffuse reflector 2 through the first light hole 11; Arrive the laser at diffuse reflector 2 place, a part can directly be absorbed or be reflected, and another part then between absorber 1 and diffuse reflector 2, multiple reflections occurs; A small amount of laser incides the second light hole 21, and in hole, multiple reflections occurs, and finally arrives lightlng hole 31 place; After light sensor 3 receives laser, send electric signal to control module; Control module processes electric signal, draws the real output of laser instrument.
From the course of work of this laser power monitoring device above-mentioned, laser is before being received by light sensor, beam energy can be absorbed in a large number by absorber and diffuse reflector, make laser attenuation within the scope of the power threshold of light sensor, avoid damaging light sensor because laser power is too high, give full play to light sensor response time short advantage, meet the requirement of Laser Processing industry to the quick Real-time Feedback of high-power carbon dioxide laser output power.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, all any amendments done within the spirit and principles in the present invention, equivalent replacement and improvement etc., all should be included within protection scope of the present invention.
Claims (10)
1. a laser power monitoring device, for monitoring the output power of high-power carbon dioxide laser in real time, it is arranged on the side of tail mirror transmitted through laser, and be positioned on the path of laser propagation, it is characterized in that: comprise control module, absorber, diffuse reflector and at least one light sensor; Described control module and absorber, diffuse reflector and light sensor carry out electric signal and are connected; Described absorber is relative with described tail mirror, it offers the first light hole; Described diffuse reflector is arranged on the side of described absorber bright dipping, and existence one allows laser carry out the space reflected between the two; Described diffuse reflector offers a wiring hole and at least one second light hole; Described light sensor is arranged on the side of described diffuse reflector bright dipping, and corresponding with described second light hole, and its one end near described second light hole offers lightlng hole.
2. laser power monitoring device according to claim 1, it is characterized in that: described first light hole is round table-like, its xsect is trapezoidal, and its aperture near described tail mirror one end is greater than the diameter of laser beam, and its aperture near described diffuse reflector one end is less than the diameter of laser beam.
3. laser power monitoring device according to claim 2, is characterized in that: described absorber is common process face near described tail mirror one end, and described first light hole inwall and described absorber are smooth surface near described diffuse reflector one end.
4. laser power monitoring device according to claim 3, is characterized in that: described absorber passes into the chilled water circulated and dispels the heat.
5. laser power monitoring device according to claim 1, is characterized in that: the one side that described diffuse reflector is relative with described absorber is the diffuse surface processed through frosted.
6. laser power monitoring device according to claim 5, is characterized in that: described diffuse reflector edge is fixed together by heat conducting module and described absorber.
7. laser power monitoring device according to claim 6, is characterized in that: described absorber and diffuse reflector are aluminum alloy materials and process.
8. laser power monitoring device according to claim 1, is characterized in that: described second light hole is arranged on outside the scope of laser direct projection.
9. laser power monitoring device according to claim 8, is characterized in that: the aperture of described second light hole is less than the aperture of described first light hole near diffuse reflector one end.
10. laser power monitoring device according to claim 1, is characterized in that: described light sensor has multiple, is uniformly distributed, and is layout structure in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510046533.8A CN104655408A (en) | 2015-01-29 | 2015-01-29 | Laser power monitoring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201510046533.8A CN104655408A (en) | 2015-01-29 | 2015-01-29 | Laser power monitoring device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN104655408A true CN104655408A (en) | 2015-05-27 |
Family
ID=53246798
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201510046533.8A Pending CN104655408A (en) | 2015-01-29 | 2015-01-29 | Laser power monitoring device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN104655408A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105372798A (en) * | 2015-12-08 | 2016-03-02 | 中国科学院上海光学精密机械研究所 | High-energy reflection type optical attenuator |
| CN108195463A (en) * | 2017-12-30 | 2018-06-22 | 深圳市创鑫激光股份有限公司 | Laser Power Measuring System, method and storage medium |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4336589C1 (en) * | 1993-10-27 | 1994-12-08 | Deutsche Aerospace | Laser power meter |
| CN1621787A (en) * | 2003-11-27 | 2005-06-01 | 北京光电技术研究所 | Measuring system and method for wave zone laser energy/power |
| CN201053898Y (en) * | 2007-06-21 | 2008-04-30 | 北京光电技术研究所 | Uneven light removing device and laser detector |
| CN201110909Y (en) * | 2007-09-13 | 2008-09-03 | 深圳市大族激光科技股份有限公司 | Absorbent body in laser light-valve shutter component |
| CN101451886A (en) * | 2008-12-31 | 2009-06-10 | 北京工业大学 | Semiconductor laser power real time on-line detection device |
| CN201724738U (en) * | 2010-03-29 | 2011-01-26 | 中国工程物理研究院激光聚变研究中心 | High-power laser near field tester |
| CN102419214A (en) * | 2011-08-15 | 2012-04-18 | 西北核技术研究所 | Photo-thermal/photo-electrical composite high-energy laser parameter measurement device |
| CN103148931A (en) * | 2013-01-18 | 2013-06-12 | 华北电力大学（保定） | Device of detecting large power laser beam by using small power detector and method |
| CN103644967A (en) * | 2013-11-29 | 2014-03-19 | 西北核技术研究所 | High-energy laser homogenizing cavity attenuator |
| CN104019891A (en) * | 2014-06-20 | 2014-09-03 | 西北核技术研究所 | Attenuation sampling device used for large-angle high-energy laser incidence |
| WO2014202476A1 (en) * | 2013-06-17 | 2014-12-24 | Commissariat à l'énergie atomique et aux énergies alternatives | Device for absorbing an optical power |
-
2015
- 2015-01-29 CN CN201510046533.8A patent/CN104655408A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4336589C1 (en) * | 1993-10-27 | 1994-12-08 | Deutsche Aerospace | Laser power meter |
| CN1621787A (en) * | 2003-11-27 | 2005-06-01 | 北京光电技术研究所 | Measuring system and method for wave zone laser energy/power |
| CN201053898Y (en) * | 2007-06-21 | 2008-04-30 | 北京光电技术研究所 | Uneven light removing device and laser detector |
| CN201110909Y (en) * | 2007-09-13 | 2008-09-03 | 深圳市大族激光科技股份有限公司 | Absorbent body in laser light-valve shutter component |
| CN101451886A (en) * | 2008-12-31 | 2009-06-10 | 北京工业大学 | Semiconductor laser power real time on-line detection device |
| CN201724738U (en) * | 2010-03-29 | 2011-01-26 | 中国工程物理研究院激光聚变研究中心 | High-power laser near field tester |
| CN102419214A (en) * | 2011-08-15 | 2012-04-18 | 西北核技术研究所 | Photo-thermal/photo-electrical composite high-energy laser parameter measurement device |
| CN103148931A (en) * | 2013-01-18 | 2013-06-12 | 华北电力大学（保定） | Device of detecting large power laser beam by using small power detector and method |
| WO2014202476A1 (en) * | 2013-06-17 | 2014-12-24 | Commissariat à l'énergie atomique et aux énergies alternatives | Device for absorbing an optical power |
| CN103644967A (en) * | 2013-11-29 | 2014-03-19 | 西北核技术研究所 | High-energy laser homogenizing cavity attenuator |
| CN104019891A (en) * | 2014-06-20 | 2014-09-03 | 西北核技术研究所 | Attenuation sampling device used for large-angle high-energy laser incidence |
Non-Patent Citations (1)
| Title |
|---|
| 彭登峰 等: ""高功率激光实时检测与控制系统的研究"", 《激光技术》 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105372798A (en) * | 2015-12-08 | 2016-03-02 | 中国科学院上海光学精密机械研究所 | High-energy reflection type optical attenuator |
| CN105372798B (en) * | 2015-12-08 | 2018-03-20 | 中国科学院上海光学精密机械研究所 | Big energy reflecting light attenuator |
| CN108195463A (en) * | 2017-12-30 | 2018-06-22 | 深圳市创鑫激光股份有限公司 | Laser Power Measuring System, method and storage medium |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| ES2596311T3 (en) | Device and optical module for light transmission and attenuation | |
| CN111934194B (en) | Laser device | |
| CN102419214B (en) | Photo-thermal/photo-electrical composite high-energy laser parameter measurement device | |
| IT9020022A1 (en) | OPTICAL FIBER SAFETY SYSTEM | |
| CN108889728B (en) | Optical fiber output end with return light monitoring function for laser cleaning | |
| CN109980494A (en) | A kind of monitoring method and fiber laser device of Raman light | |
| CN204649617U (en) | A kind of tunable laser humidity measuring instrument | |
| CN104655408A (en) | Laser power monitoring device | |
| CN102620613A (en) | Laser fire initiating explosive device optical window in double-self-focusing lens structure | |
| CN111129915B (en) | Anti-reflection system and method for optical fiber laser | |
| CN208239607U (en) | A kind of laser radar radiator structure | |
| TWI623755B (en) | Power measuring device for high power fiber laser system | |
| CN212875038U (en) | Optical fiber laser | |
| CN207853158U (en) | Optical fiber laser energy monitoring device based on integrating sphere | |
| CN105466638A (en) | System for leakage monitoring and protection of energy transmission fiber | |
| CN209461791U (en) | Strike-machine device for middle power pulse optical fiber laser | |
| CN210347934U (en) | Distance detection device and aircraft | |
| CN111082291B (en) | Monitoring device for perforation and fiber laser | |
| CN205081789U (en) | A OTDR device for communicating by letter optical cable fault point accurate positioning | |
| CN207487992U (en) | A kind of full-automatic strike-machine test system of superpower laser | |
| CN207675664U (en) | A kind of laser range finder lens contamination detection device | |
| CN209117974U (en) | A kind of multi output laser attenuation device of large angle incidence | |
| CN203193637U (en) | OTDR control circuit of OLT optical module | |
| CN202854034U (en) | Anti-dewing diffuse sulfur hexafluoride gas sensor | |
| CN115993691B (en) | Optical path coupling system and control method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20150527 |
|
| WD01 | Invention patent application deemed withdrawn after publication |