CN102353446A - Method and system for testing power of pulsing laser - Google Patents

Method and system for testing power of pulsing laser Download PDF

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Publication number
CN102353446A
CN102353446A CN2011101915521A CN201110191552A CN102353446A CN 102353446 A CN102353446 A CN 102353446A CN 2011101915521 A CN2011101915521 A CN 2011101915521A CN 201110191552 A CN201110191552 A CN 201110191552A CN 102353446 A CN102353446 A CN 102353446A
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laser
electric signal
output
calibration
correcting
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刘兴胜
张彦鑫
昊迪
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Xian Focuslight Technology Co Ltd
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Xian Focuslight Technology Co Ltd
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Abstract

The invention provides a method and a system for testing the power of a pulsing laser. A testing unit of the system for testing the power of the pulsing laser comprises a photoelectric converting module, a data acquiring module, a calibrating module and a power recording unit, wherein the data acquiring module is used for recording an electric signal output by the photoelectric converting module; the calibrating module can be used for calculating the output power of a pulsing laser to be tested according to a calibrating coefficient and the electric signal output by the photoelectric converting module; the output power=(the calibrating coefficient)*(the electric signal output by the photoelectric converting module); the recording unit is used for recording the peak output power of the pulsing laser to be tested; and the photoelectric converting module of the calibrating unit is the same as a photoelectric converting module of the testing unit. The method and the system can be used for detecting the real-time power of the laser, have high environmental adaptability and high accuracy, and can be calibrated through a continuous laser.

Description

A kind of pulsed laser power testing method and system
Technical field
The present invention relates to a kind of pulsed laser power testing method and system.
Background technology
The existing method of measuring pulsed laser power mainly is the average power method.
Average power method of testing principle is: can learn that when laser works (unit: second us), collection a period of time (for example 1s) laser power value is P, calculates the peak power (P of laser instrument with pulsewidth u for the frequency f (unit: hertz Hz) of laser instrument Peak) be:
P peak = P f · u · 10 - 6 ,
Wherein pulsewidth multiply by frequency (fu) and is called dutycycle, and dutycycle is the ratio that the time of laser works accounts for T.T., for semiconductor laser, is generally 0.1%~10%.
But the average power method of testing exists following not enough:
1, power test has retardance: test through average power, the peak power that obtains laser instrument must just can be calculated after after a while average, and obtaining has time-delay on time of peak power.
2, environment poor practicability: conventional test methods is affected by environment bigger.
3, calibration difficulties: for the test macro of average power method of testing, the accuracy of data is the most key, calibrates but the instrument of testing usually is merely able to return factory, can calibrate seldom at random.
4, poor accuracy: at first for these computing method, the basis of dependence is that the frequency and the pulsewidth of laser instrument all is known, and is very accurate or desirable, just can provide accurate data.But, be difficult under the usual conditions guarantee that the frequency and the pulsewidth of laser instrument are very accurate or desirable, so the poor accuracy of data.In addition, this method is equivalent to data have been carried out amplifying (for example when pulsewidth 100us, the frequency 10Hz, the peak power of test is 1000 times of average power) divided by dutycycle (pulsewidth X frequency) at last, therefore also can influence the accuracy of data.
Summary of the invention
The object of the invention provides a kind of pulsed laser power testing method and system, and it has solved the technical matters that existing average power method of testing exists test delay, calibration difficulties, poor accuracy.
Technical solution of the present invention is:
First kind of pulsed laser power testing method may further comprise the steps:
1] gets a standard laser identical as correcting laser with pulsed laser wavelength to be measured; Said laser instrument is continuous wave laser or pulsed laser;
2] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers;
3] calibration electric signal and the output power with detection laser compares, and obtains calibration factor; The output power ÷ calibration electric signal of said calibration factor=correcting laser;
4] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
5] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
Second kind of pulsed laser power testing method may further comprise the steps:
1] gets a standard laser identical as correcting laser with pulsed laser wavelength to be measured; Said laser instrument is continuous wave laser or pulsed laser;
The output electric signal of photoelectric conversion device is gathered as the noise electric signal during 2] with the correcting laser no-output;
3] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers;
4] the calibration electric signal with detection laser deducts the noise electric signal, compares with output power then, obtains calibration factor; The output power ÷ of said calibration factor=correcting laser (calibration electric signal-noise electric signal);
5] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
6] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
The third pulsed laser power testing method may further comprise the steps:
1] gets a laser instrument identical as correcting laser with pulsed laser wavelength to be measured; Said laser instrument is continuous wave laser or pulsed laser;
2] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers, and measures the output power of correcting laser simultaneously;
3] calibration electric signal and the output power with detection laser compares, and obtains calibration factor; The output power ÷ calibration electric signal of said calibration factor=correcting laser;
4] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
5] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
The 4th kind of pulsed laser power testing method may further comprise the steps:
1] gets a laser instrument identical as correcting laser with pulsed laser wavelength to be measured; Said laser instrument is continuous wave laser or pulsed laser;
The output electric signal of photoelectric conversion device is gathered as the noise electric signal during 2] with the correcting laser no-output;
3] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers, and measures the output power of correcting laser simultaneously;
4] the calibration electric signal with detection laser deducts the noise electric signal, compares with output power then, obtains calibration factor; The output power ÷ of said calibration factor=correcting laser (calibration electric signal-noise electric signal);
5] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
6] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
First kind of pulsed laser power test system,
Comprise alignment unit and test cell;
Said alignment unit comprises correcting laser, photoelectric conversion module, data acquisition module and calibration factor generation module; Said correcting laser is standard continuous wave laser or the full sized pules laser instrument identical with pulsed laser wavelength to be measured; Said photoelectric conversion module can convert the calibration laser optical into the detection electric signal by force; Said data acquisition module is used for the acquisition testing electric signal; The calibration factor generation module can be calculated calibration factor according to the output power that detects electric signal and correcting laser, the output power ÷ calibration electric signal of said calibration factor=correcting laser;
Said test cell comprises photoelectric conversion module, data acquisition module, calibration module and power trace unit; Said data acquisition module is used to write down the electric signal of photoelectric conversion module output, and said calibration module can calculate the output power of pulsed laser to be measured according to the electric signal of calibration factor and photoelectric conversion module output; The electric signal of said output power=calibration factor * photoelectric conversion module output; Said record cell is used to write down the maximum output of pulsed laser to be measured;
The photoelectric conversion module of said alignment unit is identical with the photoelectric conversion module of test cell.
Second kind of pulsed laser power test system,
Comprise alignment unit and test cell;
Said alignment unit comprises correcting laser, photoelectric conversion module, data acquisition module, output power detection module and calibration factor generation module; Said correcting laser is continuous wave laser or the pulsed laser identical with pulsed laser wavelength to be measured; Said photoelectric conversion module can convert the calibration laser optical into the detection electric signal by force; Said data acquisition module is used for the acquisition testing electric signal; Said output power detection module can be measured the output power of correcting laser; The calibration factor generation module can be calculated calibration factor according to the output power that detects electric signal and correcting laser, the output power ÷ calibration electric signal of said calibration factor=correcting laser;
Said test cell comprises photoelectric conversion module, data acquisition module, calibration module and power trace unit; Said data acquisition module is used to write down the electric signal of photoelectric conversion module output, and said calibration module can calculate the output power of pulsed laser to be measured according to the electric signal of calibration factor and photoelectric conversion module output; The electric signal of said output power=calibration factor * photoelectric conversion module output; Said record cell is used to write down the maximum output of pulsed laser to be measured;
The photoelectric conversion module of said alignment unit is identical with the photoelectric conversion module of test cell.
The advantage that the present invention has:
1, the inventive method has real-time.Because electrooptical device has high response speed, can the realtime power of laser instrument be detected.
2, the environment applicability of the inventive method is strong.Can only under particular environment, be suitable for for common laser detection equipment, for example hot inductive power meter is influenced by environmental temperature.This method of testing can not monitored under the condition of work at laser instrument, and the data that obtain is carried out denoising handle (promptly Ci Shi power is zero).
3, be easy to calibration characteristics.The present invention can calibrate through continuous wave laser, with continuous wave laser through this method of testing to one group of voltage signal, again the voltage signal that obtains and laser instrument normal data are contrasted, obtain the calibration factor of this kind laser instrument.This calibration factor is equally applicable to pulsed laser test, because the size of the voltage signal of conversion is only relevant with the size of light signal, it doesn't matter with continuous laser or pulse laser.
4, accuracy is high: can detect the output waveform of laser instrument through the output power of real-time monitoring laser, also can be reflected to accurately in the power of laser instrument for nonideal Laser Drive waveform.Method of testing of the present invention can be carried out the data that obtain denoising and handled the accuracy height.
5, data are directly perceived.The inventive method is compared with traditional average power method of testing, under the pulsewidth of unknown laser instrument and frequency condition, also can directly provide the output power of laser instrument, promptly need not conversion.
6, the peak power of testing laser device is not subjected to the influence of pulsewidth and frequency, laser instrument in the course of the work frequency and pulse width variations to the not influence of peak power of testing laser device.
Description of drawings
Fig. 1 is the principle of work block diagram of the inventive method;
Fig. 2 is the fundamental diagram of the inventive method denoising;
Fig. 3 is the structural representation of the inventive method.
Embodiment
Referring to Fig. 3, pulsed laser power test system comprises the alignment unit in left side and the test cell on right side; Alignment unit comprises correcting laser, photoelectric conversion module, data acquisition module, output power detection module and calibration factor generation module; Correcting laser is continuous wave laser or the pulsed laser identical with pulsed laser wavelength to be measured; Photoelectric conversion module can convert the calibration laser optical into the detection electric signal by force; Data acquisition module is used for the acquisition testing electric signal; The output power detection module can be measured the output power of correcting laser; The calibration factor generation module can be calculated calibration factor according to the output power that detects electric signal and correcting laser, the output power ÷ calibration electric signal of calibration factor=correcting laser; Test cell comprises photoelectric conversion module, data acquisition module, calibration module and power trace unit; Data acquisition module is used to write down the electric signal of photoelectric conversion module output, and calibration module can calculate the output power of pulsed laser to be measured according to the electric signal of calibration factor and photoelectric conversion module output; The electric signal of output power=calibration factor * photoelectric conversion module output; Record cell is used to write down the maximum output of pulsed laser to be measured; The photoelectric conversion module of alignment unit is identical with the photoelectric conversion module of test cell.
Referring to Fig. 1 and Fig. 2, the step of the inventive method is:
1] gets a laser instrument identical as correcting laser with pulsed laser wavelength to be measured; Laser instrument can be continuous wave laser or pulsed laser;
The output electric signal of photoelectric conversion device is gathered as the noise electric signal during 2] with the correcting laser no-output;
3] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers, and measures the output power of correcting laser simultaneously;
4] the calibration electric signal with detection laser deducts the noise electric signal, compares with output power then, obtains calibration factor; The output power ÷ of said calibration factor=correcting laser (calibration electric signal-noise electric signal);
5] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
6] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
When neighbourhood noise influences when little, also acquisition noise electric signal not.
When correcting laser is the known standard laser of power, also can not measure the output power of correcting laser.
Principle of the present invention is: the size that light signal converts electric signal into by the power decision of light with continuously and pulse it doesn't matter.The signal that just obtains continuous and that pulse is determined is respectively continuous signal and pulse signal, can directly extract maximum value signal (perhaps peak-to-peak value signal) through the mode of software for pulse signal and get final product.

Claims (6)

1. pulsed laser power testing method is characterized in that: may further comprise the steps:
1] gets a standard laser identical as correcting laser with pulsed laser wavelength to be measured; Said laser instrument is continuous wave laser or pulsed laser;
2] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers;
3] calibration electric signal and the output power with detection laser compares, and obtains calibration factor; The output power ÷ calibration electric signal of said calibration factor=correcting laser;
4] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
5] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
2. pulsed laser power testing method is characterized in that: may further comprise the steps:
1] gets a standard laser identical as correcting laser with pulsed laser wavelength to be measured; Said laser instrument is continuous wave laser or pulsed laser;
The output electric signal of photoelectric conversion device is gathered as the noise electric signal during 2] with the correcting laser no-output;
3] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers;
4] the calibration electric signal with detection laser deducts the noise electric signal, compares with output power then, obtains calibration factor; The output power ÷ of said calibration factor=correcting laser (calibration electric signal-noise electric signal);
5] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
6] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
3. pulsed laser power testing method is characterized in that: may further comprise the steps:
1] gets a laser instrument identical as correcting laser with pulsed laser wavelength to be measured; Said laser instrument is continuous wave laser or pulsed laser;
2] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers, and measures the output power of correcting laser simultaneously;
3] calibration electric signal and the output power with detection laser compares, and obtains calibration factor; The output power ÷ calibration electric signal of said calibration factor=correcting laser;
4] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
5] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
4. pulsed laser power testing method is characterized in that: may further comprise the steps:
1] gets a laser instrument identical as correcting laser with pulsed laser wavelength to be measured; Said laser instrument is continuous wave laser or pulsed laser;
The output electric signal of photoelectric conversion device is gathered as the noise electric signal during 2] with the correcting laser no-output;
3] correcting laser output laser converts the light intensity signal of correcting laser into the calibration electric signal and gathers, and measures the output power of correcting laser simultaneously;
4] the calibration electric signal with detection laser deducts the noise electric signal, compares with output power then, obtains calibration factor; The output power ÷ of said calibration factor=correcting laser (calibration electric signal-noise electric signal);
5] get pulsed laser output laser to be measured; Convert the light intensity signal of pulsed laser to be measured into the detection electric signal;
6] detect electric signal and multiply by calibration factor, obtain the maximum output of pulsed laser to be measured.
5. pulsed laser power test system is characterized in that:
Comprise alignment unit and test cell;
Said alignment unit comprises correcting laser, photoelectric conversion module, data acquisition module and calibration factor generation module; Said correcting laser is standard continuous wave laser or the full sized pules laser instrument identical with pulsed laser wavelength to be measured; Said photoelectric conversion module can convert the calibration laser optical into the detection electric signal by force; Said data acquisition module is used for the acquisition testing electric signal; The calibration factor generation module can be calculated calibration factor according to the output power that detects electric signal and correcting laser, the output power ÷ calibration electric signal of said calibration factor=correcting laser;
Said test cell comprises photoelectric conversion module, data acquisition module, calibration module and power trace unit; Said data acquisition module is used to write down the electric signal of photoelectric conversion module output, and said calibration module can calculate the output power of pulsed laser to be measured according to the electric signal of calibration factor and photoelectric conversion module output; The electric signal of said output power=calibration factor * photoelectric conversion module output; Said record cell is used to write down the maximum output of pulsed laser to be measured;
The photoelectric conversion module of said alignment unit is identical with the photoelectric conversion module of test cell.
6. pulsed laser power test system is characterized in that:
Comprise alignment unit and test cell;
Said alignment unit comprises correcting laser, photoelectric conversion module, data acquisition module, output power detection module and calibration factor generation module; Said correcting laser is continuous wave laser or the pulsed laser identical with pulsed laser wavelength to be measured; Said photoelectric conversion module can convert the calibration laser optical into the detection electric signal by force; Said data acquisition module is used for the acquisition testing electric signal; Said output power detection module can be measured the output power of correcting laser; The calibration factor generation module can be calculated calibration factor according to the output power that detects electric signal and correcting laser, the output power ÷ calibration electric signal of said calibration factor=correcting laser;
Said test cell comprises photoelectric conversion module, data acquisition module, calibration module and power trace unit; Said data acquisition module is used to write down the electric signal of photoelectric conversion module output, and said calibration module can calculate the output power of pulsed laser to be measured according to the electric signal of calibration factor and photoelectric conversion module output; The electric signal of said output power=calibration factor * photoelectric conversion module output; Said record cell is used to write down the maximum output of pulsed laser to be measured;
The photoelectric conversion module of said alignment unit is identical with the photoelectric conversion module of test cell.
CN2011101915521A 2011-07-08 2011-07-08 Method and system for testing power of pulsing laser Pending CN102353446A (en)

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CN110749782A (en) * 2018-07-23 2020-02-04 潍坊华光光电子有限公司 Pulse drive test method for semiconductor laser
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CN106488826A (en) * 2014-07-14 2017-03-08 Asml荷兰有限公司 The calibration of the photoelectricity Magnetic Sensor in lasing light emitter
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CN110749782A (en) * 2018-07-23 2020-02-04 潍坊华光光电子有限公司 Pulse drive test method for semiconductor laser
CN110749782B (en) * 2018-07-23 2021-07-02 潍坊华光光电子有限公司 Pulse drive test method for semiconductor laser
CN111044141A (en) * 2019-12-16 2020-04-21 苏州长光华芯光电技术有限公司 Laser peak power testing method and device
CN111458695A (en) * 2020-06-22 2020-07-28 光梓信息科技(上海)有限公司 High-speed laser pulse sampling detection circuit, system and method
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CN113884753A (en) * 2021-08-17 2022-01-04 之江实验室 Laser output power measuring circuit
CN113884753B (en) * 2021-08-17 2024-05-03 之江实验室 Laser output power measuring circuit

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Application publication date: 20120215