CN103208417B - 一种用合金旋转靶材制备铜锌锡硫硒薄膜的方法 - Google Patents
一种用合金旋转靶材制备铜锌锡硫硒薄膜的方法 Download PDFInfo
- Publication number
- CN103208417B CN103208417B CN201310099415.4A CN201310099415A CN103208417B CN 103208417 B CN103208417 B CN 103208417B CN 201310099415 A CN201310099415 A CN 201310099415A CN 103208417 B CN103208417 B CN 103208417B
- Authority
- CN
- China
- Prior art keywords
- znsns
- copper
- substrate
- sputtering
- zinc tin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310099415.4A CN103208417B (zh) | 2013-03-26 | 2013-03-26 | 一种用合金旋转靶材制备铜锌锡硫硒薄膜的方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201310099415.4A CN103208417B (zh) | 2013-03-26 | 2013-03-26 | 一种用合金旋转靶材制备铜锌锡硫硒薄膜的方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103208417A CN103208417A (zh) | 2013-07-17 |
CN103208417B true CN103208417B (zh) | 2015-05-20 |
Family
ID=48755605
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201310099415.4A Active CN103208417B (zh) | 2013-03-26 | 2013-03-26 | 一种用合金旋转靶材制备铜锌锡硫硒薄膜的方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN103208417B (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103515482A (zh) * | 2013-09-10 | 2014-01-15 | 华中科技大学 | 铜铟镓硒薄膜太阳能电池吸收层及其制备方法和应用 |
CN104716229B (zh) * | 2013-12-16 | 2017-06-27 | 中国电子科技集团公司第十八研究所 | 铜锌锡硒薄膜太阳电池的制备方法 |
EP2947175A1 (en) * | 2014-05-21 | 2015-11-25 | Heraeus Deutschland GmbH & Co. KG | CuSn, CuZn and Cu2ZnSn sputter targets |
CN104846342A (zh) * | 2015-05-27 | 2015-08-19 | 清华大学 | 铜锌锡硫溅射靶及其制备方法 |
CN105256274B (zh) * | 2015-08-31 | 2018-02-09 | 南京航空航天大学 | 一种衬底加热共溅射法制备铜锌锡硫薄膜的方法 |
CN114864752A (zh) * | 2022-06-15 | 2022-08-05 | 金陵科技学院 | 一种改善柔性CZTSSe薄膜太阳能电池吸收层残余应力的方法及应用 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101830444A (zh) * | 2010-05-28 | 2010-09-15 | 上海交通大学 | 铜锌锡硫硒纳米粒子的制备方法 |
CN102769047A (zh) * | 2012-07-31 | 2012-11-07 | 深圳先进技术研究院 | 铜锌锡硫硒薄膜及其制备方法、铜锌锡硫硒薄膜太阳能电池 |
CN102769046A (zh) * | 2012-07-31 | 2012-11-07 | 深圳先进技术研究院 | 铜锌锡硫硒薄膜、铜锌锡硫硒薄膜制备方法及铜锌锡硫硒薄膜太阳能电池 |
-
2013
- 2013-03-26 CN CN201310099415.4A patent/CN103208417B/zh active Active
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101830444A (zh) * | 2010-05-28 | 2010-09-15 | 上海交通大学 | 铜锌锡硫硒纳米粒子的制备方法 |
CN102769047A (zh) * | 2012-07-31 | 2012-11-07 | 深圳先进技术研究院 | 铜锌锡硫硒薄膜及其制备方法、铜锌锡硫硒薄膜太阳能电池 |
CN102769046A (zh) * | 2012-07-31 | 2012-11-07 | 深圳先进技术研究院 | 铜锌锡硫硒薄膜、铜锌锡硫硒薄膜制备方法及铜锌锡硫硒薄膜太阳能电池 |
Also Published As
Publication number | Publication date |
---|---|
CN103208417A (zh) | 2013-07-17 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
Yuan et al. | Efficient planar antimony sulfide thin film photovoltaics with large grain and preferential growth | |
CN103208417B (zh) | 一种用合金旋转靶材制备铜锌锡硫硒薄膜的方法 | |
Li et al. | Fabrication of Cu (In, Ga) Se2 thin films solar cell by selenization process with Se vapor | |
CN104134720A (zh) | 单源闪蒸法生长有机无机杂化钙钛矿材料及其平面型太阳能电池的制备方法 | |
Lu et al. | HTL-free Sb2 (S, Se) 3 solar cells with an optimal detailed balance band gap | |
CN104269452A (zh) | 硅基薄膜材料的钙钛矿太阳电池及其制备方法 | |
CN106129146B (zh) | 一种以黑磷烯作为导电材料的硒化锑薄膜太阳能电池及其制备方法 | |
CN103219420B (zh) | 一种用四元素合金靶材制备铜锌锡硫薄膜的方法 | |
CN102044577B (zh) | 一种柔性薄膜太阳电池及其制造方法 | |
CN106282926A (zh) | 一种室温溅射法制备二氧化钛薄膜的方法 | |
CN104916785A (zh) | 一种CH3NH3PbI3薄膜太阳能电池制备方法 | |
CN101527332A (zh) | 一种高效薄膜太阳能电池光吸收层的制备方法 | |
Park et al. | A comparative study of solution based CIGS thin film growth on different glass substrates | |
CN102522447A (zh) | 一种吸收层具有带隙梯度结构的微晶硅锗薄膜太阳电池 | |
Pan et al. | Vapor transport deposition of Sb2 (S, Se) 3 solar cells with continuously tunable band gaps | |
Kang et al. | In situ growth of CuSbS2 thin films by reactive co-sputtering for solar cells | |
CN103515482A (zh) | 铜铟镓硒薄膜太阳能电池吸收层及其制备方法和应用 | |
CN102437237A (zh) | 黄铜矿型薄膜太阳能电池及其制造方法 | |
CN103872154B (zh) | 一种含钠钼膜及其制备方法和应用 | |
CN103469170B (zh) | 一种用于薄膜太阳能电池的溅射靶 | |
CN103620792A (zh) | 太阳能电池及其制备方法 | |
CN103339741A (zh) | 太阳能电池设备及其制造方法 | |
CN103225060B (zh) | 一种铜锌锡硫薄膜的制备方法 | |
CN101707219B (zh) | 本征隔离结构太阳能电池及其制造方法 | |
CN103219419B (zh) | 一种利用铜铟镓硒合金溅射靶材生产铜铟镓硒薄膜的方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20170725 Address after: 224200, room 609, building 9, Dongcheng Road, Chengdong new district, Jiangsu, Dongtai Patentee after: Dongtai super photoelectric material Co., Ltd. Address before: 214192 Xishan City, Xishan Province Economic and Technological Development Zone, Wuxi Furong Road No. 99, No., No. three Patentee before: Wuxi XuMatic New Energy Technology Inc. |
|
CP03 | Change of name, title or address | ||
CP03 | Change of name, title or address |
Address after: 224200 Chengdong new district, Dongtai City, Jiangsu Province, No. 88 Patentee after: Jiangsu super product Optoelectronic Technology Co., Ltd. Address before: 224200, room 609, building 9, Dongcheng Road, Chengdong new district, Jiangsu, Dongtai Patentee before: Dongtai super photoelectric material Co., Ltd. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20201201 Address after: 3rd floor, building 17, 341000 standard workshop (Jinling science and Technology Park), Ganzhou economic and Technological Development Zone, Ganzhou City, Jiangxi Province Patentee after: Ganzhou Youmo Technology Co., Ltd Address before: 224200 Chengdong new district, Dongtai City, Jiangsu Province, No. 88 Patentee before: Jiangsu super product Optoelectronic Technology Co.,Ltd. |