CN103203807B - Ultrasonic rotary corer - Google Patents
Ultrasonic rotary corer Download PDFInfo
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- CN103203807B CN103203807B CN201310132878.6A CN201310132878A CN103203807B CN 103203807 B CN103203807 B CN 103203807B CN 201310132878 A CN201310132878 A CN 201310132878A CN 103203807 B CN103203807 B CN 103203807B
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- support body
- cooling water
- screw mandrel
- workbench
- cooling
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Abstract
The invention discloses an ultrasonic rotary corer which comprises a cutting device, a bench and a water cooler. The cutting device comprises a guide, a frame, a frame drive motor, a spindle, and a spindle drive motor, wherein the frame is capable of moving along the guide, the frame drive motor is used for driving the frame to move along the guide, the spindle is provided with a cutting tool, and the spindle drive motor is used for driving the spindle to rotate. A current collector is arranged at the upper end of the spindle, and the spindle is provided with an inner cavity which contains an ultrasonic transducer. A sleeve is fixed at the lower end of the spindle. The cutting tool is disposed at the lower end of the sleeve. The spindle is provided with a second cooling water pipeline. The water cooler comprises a water pump, an outlet pipe, a return pipe and a water tank. The ultrasonic rotary corer has such advantages that the ultrasonic rotary corer grinds sapphire crystal easily, cutting is efficient, cooling is effective and surface quality of crystal bars is better.
Description
Technical field
The present invention relates to a kind of excellent machine of drawing, especially a kind ofly for sapphire material being drawn to the rotation of excellent ultrasonic wave, draw excellent machine.
Background technology
Due to popularizing of large-size sapphire backing material application, LED and SOS (Silicon on Sapphire particularly, silicon-on-sapphire) semicon industry, for the growth of sapphire wafer demand, has promoted the demand fast rise of industry to sapphire material processing.Because the physics of sapphire material belongs to hard brittle material, to large volume sapphire crystal, the sapphire crystal of 80～100kg level for example, the process operation of extracting heavy caliber crystal bar (particularly 6,8 inches) is very difficult, and inefficiency, therefore that studies that sapphire draws rod is effectively processed into a current difficult problem fast.
In the prior art, sapphire is drawn excellent technology and is adopted sleeve rotating more, drills through crystal bar.The employing that is illustrated in figure 5 prior art presses down a kind of excellent machine structure, sleeve 405 that is provided with the first motor 401, gear drive 402, leading screw 403, sleeve fixture 404 and is clamped by sleeve fixture on the travelling table 406 that can move up and down drawn that mode is extracted crystal bar.Travelling table 406, under the driving of the second motor 407, can move up and down along vertical rod 408.The first motor 401 driven gear transmission mechanisms 402 rotate, leading screw 403 by driven gear drive installation in the center of driven gear rotates, leading screw drives sleeve 405 rotations that are installed on the sleeve fixture 404 on leading screw and clamped by sleeve fixture, sleeve high speed rotating to lower feeding under the first motor 401 drives, draws rod processing to the sapphire material being positioned on stationary work-table 409.Utilize the diamond segment of sleeve 405 bottoms to contact with sapphire material, rotary grinding, until drill sapphire material, obtains columniform sapphire crystal bar.The excellent machine of drawing of this kind of mode has following shortcoming: 1) rod is drawn in single rotation, and grinding speed is slow, and speed generally only has 2～5mm/min, is no more than the soonest 8mm/min, and the efficiency of processing is lower; 2) outer cooling separately, radiating effect is poor; If cooling deficiency can cause the heating of diamond sleeve cutter head, sleeve loss greatly even causes sleeve to damage, and crystal bar surface quality is poor, product quality is not ideal enough; 3) axial runout for sleeve requires strictly, if the axial runout of sleeve excessive (general >=0.05mm) easily causes crystal to burst so in drawing rod motion.
Application number is that 200610004701.8 Chinese invention patent discloses a kind of cutting equipment, as shown in Figure 6.In this equipment, whirligig is induction machine, and it comprises permanent magnet and winding in the rearward end that is placed in axle.Piezoelectric vibrator is connected to the rearward end of axle.The electric supply installation that is used for the alternating current to be supplied to piezoelectric vibrator is also placed in mandrel unit.Cooling fluid source of supply is supplied to input hole by flexible pipe by cooling fluid, cooling press electric tachometer indicator.Mainly there is following problem in this cutting equipment: 1) induction machine of whirligig is embedded, and equipment works long hours, and is unfavorable for motor radiating, easily burns out motor; 2) piezoelectric vibrator is placed on the rearward end of mandrel unit, and transmission distance is long, causes ultrasonic vibration decay, and vibrating effect is poor; 3) it is cooling that this system cools fluid can only be given piezoelectric vibrator, and at factory interface place, without cooling, cutting tool cannot be cooling.
Summary of the invention
The present invention is the weak point existing in above-mentioned prior art for avoiding, and provides a kind of ultrasonic wave rotation to draw excellent machine, and to solve, the excellent working (machining) efficiency of drawing of current sapphire material is low, supplementary product onsumption large and the poor problem of crystal bar surface quality.
The present invention be technical solution problem by the following technical solutions.
Excellent machine is drawn in ultrasonic wave rotation, and its design feature is to comprise cutter sweep, workbench and water-cooling apparatus;
Described cutter sweep comprises guide rail, the support body that can move along guide rail, the support body drive motors for driving support body to move along guide rail, the main shaft that is provided with cutting tool and the spindle drive motor for driving main shaft to rotate; The both sides of described support body are respectively provided with a described guide rail; On described support body, be provided with internal thread hole, the output of described support body drive motors is provided with screw mandrel, and threaded engagement between described screw mandrel and the internal thread hole of described support body is so that described screw mandrel can drive described support body to move along described guide rail while rotating; On described support body, be provided with spindle drive motor, the main shaft being driven by described spindle drive motor is also installed on described support body; Between described spindle drive motor and described main shaft, adopt driving-belt as transmission mechanism; The upper end of main shaft is provided with current-collecting device, and the inside of main shaft is provided with cavity, in described cavity, is provided with ultrasonic transducer, and the lower end of described main shaft is fixedly installed sleeve, and the lower end of described sleeve is provided with cutting tool; On described main shaft, be provided with for passing through the second cooling water pipeline of cooling water, on described support body, be provided with the first cooling water pipeline, described the first cooling water pipeline and the second cooling water pipeline communicate, and the first cooling water pipeline on described support body is connected with the outlet pipe of described water-cooling apparatus, by water-cooling apparatus, in the first cooling water pipeline and the second cooling water pipeline, inject cooling water; Described current-collecting device comprises collecting ring and lower header ring, and described upper collecting ring is all connected with described ultrasonic transducer by power line with lower header ring;
Described workbench comprises workbench body, magnechuck and for the fixing fixed head of workpiece to be machined; Described magnechuck is arranged on described workbench body, and described fixed head is arranged on described magnechuck;
Described water-cooling apparatus comprises water pump, outlet pipe, return pipe and water tank; Described water tank is used for storing cooling water, between described water tank and water pump, by connecting water pipe, is connected; On described water tank, be also provided with described return pipe; Described outlet pipe is arranged on described water pump, and outlet pipe is connected with the first cooling water pipeline of the support body of described cutter sweep.
Ultrasonic wave rotation of the present invention is drawn excellent machine and is also had following technical characterstic.
On described support body, be also provided with and cooling water can be guided to the conduit of workpiece to be machined.
Described workbench also comprises the first motor, the first screw mandrel, the second motor and the second screw mandrel;
Described the first screw mandrel drives rotation by described the first motor, and the output of one end of described the first screw mandrel and described the first motor is fixedly connected, and the other end of described the first screw mandrel inserts in intrinsic first screw of workbench of described workbench;
Described the second screw mandrel drives rotation by described the second motor, and the output of one end of described the second screw mandrel and described the second motor is fixedly connected, and the other end of described the second screw mandrel inserts in intrinsic second screw of workbench of described workbench.
Described ultrasonic transducer is piezoelectric ceramic ultrasonic transducer.
Compared with the prior art, beneficial effect of the present invention is embodied in:
Excellent machine is drawn in ultrasonic wave rotation of the present invention, and the additional ultrasonic wave of rotation is drawn excellent technology, by ultrasonic vibration, the machined surface of work is washed away to formation micro-crack, and sleeve is grinding sapphire crystal easily, is common the 3-5 that draws excellent speed times.The reduction of grinding force, also makes sleeve wearing and tearing alleviate, and has improved the service life of sleeve.Employing is inside and outside two cooling in addition, and radiating effect is obviously improved, and easily chip removal has prevented from adding the powder producing man-hour and accumulated, and injures crystal bar, has guaranteed the surface quality of crystal bar.The present invention assists vibration by ultrasonic wave, more than removal rates reaches 20mm/min, and the inside and outside cooling good heat dissipation problem that solves process, the proportion of goods damageds of minimizing sleeve, product quality is also improved.
Compared to the prior art, of the present inventionly draw excellent machine and have following feature: 1) drive motors in whirligig is independent of outside main shaft, by Timing Belt, drives main shaft to rotate, and is beneficial to motor radiating; 2) piezoelectric ceramics transducing head is directly connected with cutter head, reduces vibration transmitting range, and ultrasonic vibration successful improves; 3) the built-in cooling tube of cooling system passes to cutter head by piezoelectric ceramic transducer, separately has outer nozzle cooling to the sleeve edge of a knife, realizes inside and outside cooling system, and cooling fluid process return pipe reflow tank, and realization recycles.
Excellent machine is drawn in ultrasonic wave of the present invention rotation, grinding sapphire crystal easily, and stock-removing efficiency is high, and good cooling results has improved the surface quality of crystal bar.
Accompanying drawing explanation
Fig. 1 is the structural representation that the cutter sweep of excellent machine is drawn in ultrasonic wave rotation of the present invention.
Fig. 2 is the front view that the workbench of excellent machine is drawn in ultrasonic wave rotation of the present invention.
Fig. 3 is the top view that the workbench of excellent machine is drawn in ultrasonic wave rotation of the present invention.
Fig. 4 is the structure chart that the water-cooling apparatus of excellent machine is drawn in ultrasonic wave rotation of the present invention.
Fig. 5 is a kind of structural representation of drawing excellent machine of prior art.
Fig. 6 is the structural representation of the cutter sweep of drawing excellent machine of prior art.
Label in accompanying drawing 1～accompanying drawing 6: 1 guide rail, 2 support bodys, 3 support body drive motors, 4 cutting tools, 5 main shafts, 6 spindle drive motors, 7 screw mandrels, 8 driving-belts, 9 cavitys, 10 ultrasonic transducers, 11 sleeves, 12 first cooling water pipelines, 13 second cooling water pipelines, collecting ring on 14, 15 lower header rings, 16 power lines, 17 workbench bodies, 18 magnechucks, 19 fixed heads, 20 water pumps, 21 outlet pipes, 22 return pipes, 23 water tanks, 24 connecting water pipes, 25 conduits, 26 first motors, 27 first screw mandrels, 28 second motors, 29 second screw mandrels, 30 workpieces to be machined, 406 workbench, 401 first motors, 402 gear drives, 403 leading screws, 404 sleeve fixtures, 405 sleeves, 407 second motors, 408 vertical rods, 409 stationary work-tables.
Below pass through the specific embodiment, and the invention will be further described by reference to the accompanying drawings.
The specific embodiment
Referring to Fig. 1, excellent machine is drawn in ultrasonic wave rotation, comprises cutter sweep, workbench and water-cooling apparatus; Described cutter sweep comprises guide rail 1, the support body 2 that can move along guide rail 1, the support body drive motors 3 for driving support body 2 to move along guide rail 1, the main shaft 5 that is provided with cutting tool 4 and the spindle drive motor 6 for driving main shaft 5 to rotate; The both sides of described support body 2 are respectively provided with a described guide rail 1; On described support body 2, be provided with internal thread hole, the output of described support body drive motors 3 is provided with screw mandrel 7, and threaded engagement between described screw mandrel 7 and the internal thread hole of described support body 2 is so that described screw mandrel 7 can drive described support body 2 to move along described guide rail 1 while rotating; On described support body 2, be provided with spindle drive motor 6, the main shaft 5 being driven by described spindle drive motor 6 is also installed on described support body 2; Between described spindle drive motor 6 and described main shaft 5, adopt driving-belt 8 as transmission mechanism; The upper end of main shaft 5 is provided with current-collecting device, and the inside of main shaft 5 is provided with cavity 9, in described cavity 9, is provided with ultrasonic transducer 10, and the lower end of described main shaft 5 is fixedly installed sleeve 11, and the lower end of described sleeve 11 is provided with cutting tool 4; On described main shaft 5, be provided with for passing through the second cooling water pipeline 13 of cooling water, on described support body 2, be provided with the first cooling water pipeline 12, described the first cooling water pipeline 12 and the second cooling water pipeline 13 communicate, and the first cooling water pipeline 12 on described support body 2 is connected with the outlet pipe 21 of described water-cooling apparatus, by water-cooling apparatus to the first cooling water pipeline 12 and the interior injection cooling water of the second cooling water pipeline 13; Described current-collecting device comprises collecting ring 14 and lower header ring 15, and described upper collecting ring 14 is all connected with described ultrasonic transducer 10 by power line 16 with lower header ring 15;
During concrete enforcement, guide rail can be set to two cylinders of vertically placing, support body be each side provided with a circular hole that penetrates up and down described support body, described guide rail is fixed through circular hole and the guide rail lower end of described support body; Support body drive motors is fixed, and screw mandrel is fixed on output and and the output shaft coaxial rotation of described support body drive motors of support body drive motors.
As Fig. 1, in the main shaft of cutter sweep, there is internal cavities, in the bottom of cavity, be provided with piezoelectric ceramic transducer.The upper end of piezoelectric ceramic transducer is connected with the power line of two piezoelectric ceramic transducers, these two power lines through cavity respectively with current-collecting device on upper collecting ring and lower header ring link together, upper collecting ring and lower header ring and ultrasonic power link together.Inside has thin conduit to pass to cutting tool.
Cooling fluid enters support body by the first cooling water pipeline 12, then enter the second cooling water pipeline 13, after entering again the central through hole on sleeve, enter in the inner chamber of sleeve, because cutting tool is positioned at sleeve bottom, cooling fluid just drops on cutting tool while falling naturally, thereby can be cutting tool, cool, in order to avoid cutter is overheated, damage.The cooling system consisting of described the first cooling water pipeline 12 and the second cooling water pipeline 13, has played from the inside of sleeve cutter has been carried out to cooling effect.
Described workbench comprises workbench body 17, magnechuck 18 and for the fixing fixed head 19 of workpiece to be machined; Described magnechuck 18 is arranged on described workbench body 17, and described fixed head 19 is arranged on described magnechuck 18;
Described water-cooling apparatus comprises water pump 20, outlet pipe 21, return pipe 22 and water tank 23; Described water tank 23, for storing cooling water, is connected by connecting water pipe 24 between described water tank 23 and water pump 20; On described water tank 23, be also provided with described return pipe 22; Described outlet pipe 21 is arranged on described water pump 20, and outlet pipe 21 is connected with the first cooling water pipeline 12 of the support body 2 of described cutter sweep.
During concrete operations, workbench be placed in cutter on sleeve under so that cutter cutting sapphire crystal during to lower feeding.After processed crystal workpiece is fixed on the fixed head on workbench, start spindle drive motor and support body drive motors, connect the power supply of ultrasonic transducer, simultaneously open water pump startup water cooling function.Support body drive motors drives leading screw to rotate, and leading screw promotes support body while rotating and moves down along guide rail.When support body moves down, drive sleeve and cutter on main shaft and main shaft to move down, main shaft, sleeve and cutter high speed rotating under the drive of spindle drive motor simultaneously, cutter starts cutting and to lower feeding after contact sapphire crystal, thereby can draw rod processing to crystal, drill through crystal bar.Described ultrasonic transducer is used for providing ultrasonic vibration, make to produce ultrasonic vibration at process middle sleeve and cutter, in the process of vibration, cut sapphire material, can the machined surface of work be washed away to formation micro-crack by ultrasonic vibration, sleeve is grinding sapphire crystal easily, and can improve cutting speed.The cooling cutter of cooling fluid that simultaneously has cooling system to provide, can avoid cutter in the process of cutting, to cross cause thermal damage, has improved cutting efficiency, has also guaranteed good cut quality.
On described support body 2, be also provided with the conduit 25 that cooling water can be guided to workpiece to be machined.
As Fig. 1, the below of cutting tool is aimed in the outlet of conduit just, thereby cooling fluid is after conduit guiding, falls within processed sapphire cut position, can carry out processed sapphire coolingly, simultaneously can carry out cooling to the outer surface of sleeve and cutting tool.
Described workbench also comprises the first motor 26, the first screw mandrel 27, the second motor 28 and the second screw mandrel 29;
Described the first screw mandrel 27 drives rotation by described the first motor 26, the output of one end of described the first screw mandrel 27 and described the first motor 26 is fixedly connected, and the other end of described the first screw mandrel 27 inserts in the first screw in the workbench body 17 of described workbench;
Described the second screw mandrel 29 drives rotation by described the second motor 28, the output of one end of described the second screw mandrel 29 and described the second motor 28 is fixedly connected, and the other end of described the second screw mandrel 29 inserts in the second screw in the workbench body 17 of described workbench.
Described ultrasonic transducer 10 is piezoelectric ceramic ultrasonic transducer.
On described workbench, be provided with two orthogonal screws of axis, two orthogonal screw mandrels of axis insert respectively in two screws, by two screw mandrels of two driven by motor, can make the workbench body 17 of workbench along two orthogonal directions, to move respectively, these two orthogonal directions can be denoted as to directions X and Y-direction.Shown in Fig. 2 and Fig. 3, workbench comprises magnechuck and for fixing processed sapphire fixed head 19, crystal is fixed on fixed head 19.Workbench can carry out the movement of X, Y-axis under the drive of two motors.It is motor-driven by two that the diaxon of workbench moves, the first motor 26 rotates and drives the first screw mandrel 27 rotations, and threaded engagement between the first screw mandrel 27 and the internal thread hole of workbench body 17 constantly drives workbench 17 and described magnechuck 18 to move along X-axis so that the first screw mandrel 27 rotates.In like manner by the second motor 28 and the second leading screw 29, coordinate the movement of the Y direction that realizes workbench 17.
In Fig. 4, cooling water system comprises water tank, water pump, and outlet pipe and return pipe are that outlet pipe 21 in Fig. 1 is that the first cooling water pipeline 12 and the second cooling water pipeline 13, conduit 25 supply water by this system.Water pump is delivered to sleeve processing place by cooling fluid in water tank by outlet pipe after opening, and outlet pipe is divided into two-way ，Yi road by cooling fluid and directly the edge of a knife 4 is carried out to water-cooled from conduit 25 ejections, and washes away in time the chip that adds generation in man-hour; From the first cooling water pipeline 12 and the second cooling water pipeline 13, the centre bore by sleeve enters in sleeve on another road, because sleeve inner is hollow, cooling fluid can directly enter sleeve inner, dispels the heat, prevent that the edge of a knife 4 is because of overheated damage in process, realize inside and outside two cooling.By return pipe, can realize recovery and the circulation of cooling water.
Excellent machine is drawn in ultrasonic wave rotation of the present invention, and the additional ultrasonic wave of rotation is drawn excellent technology, and can be inside and outside two cooling, improves grinding efficiency, by original 2-5mm/min, is increased to 20mm/min; Reduce supplementary product onsumption, for example loss of sleeve, by original 2400mm/, is increased to 6000mm/; Improve the quality of products, crystal bar surface flawless and the scratch extracted.
Claims (2)
1. excellent machine is drawn in ultrasonic wave rotation, it is characterized in that, comprises cutter sweep, workbench and water-cooling apparatus;
Described cutter sweep comprises guide rail (1), the support body (2) that can move along guide rail (1), the support body drive motors (3) for driving support body (2) to move along guide rail (1), the main shaft (5) that is provided with cutting tool (4) and the spindle drive motor (6) for driving main shaft (5) to rotate; The both sides of described support body (2) are respectively provided with a described guide rail (1); Described support body is provided with internal thread hole on (2), the output of described support body drive motors (3) is provided with screw mandrel (7), and threaded engagement between described screw mandrel (7) and the internal thread hole of described support body (2) is so that described screw mandrel (7) can drive described support body (2) mobile along described guide rail (1) while rotating; On described support body (2), be provided with spindle drive motor (6), the main shaft (5) being driven by described spindle drive motor (6) is also installed on described support body (2); Between described spindle drive motor (6) and described main shaft (5), adopt driving-belt (8) as transmission mechanism; The upper end of main shaft (5) is provided with current-collecting device, the inside of main shaft (5) is provided with cavity (9), in described cavity (9), be provided with ultrasonic transducer (10), the lower end of described main shaft (5) is fixedly installed sleeve (11), and the lower end of described sleeve (11) is provided with cutting tool (4); On described main shaft (5), be provided with for passing through second cooling water pipeline (13) of cooling water, on described support body (2), be provided with the first cooling water pipeline (12), described the first cooling water pipeline (12) and the second cooling water pipeline (13) communicate, and the first cooling water pipeline (12) on described support body (2) is connected with the outlet pipe (21) of described water-cooling apparatus, by water-cooling apparatus, in the first cooling water pipeline (12) and the second cooling water pipeline (13), inject cooling water; Described current-collecting device comprises collecting ring (14) and lower header ring (15), and described upper collecting ring (14) is all connected with described ultrasonic transducer (10) by power line (16) with lower header ring (15);
Described workbench comprises workbench body (17), magnechuck (18) and for the fixing fixed head of workpiece to be machined (19); It is upper that described magnechuck (18) is arranged at described workbench body (17), and described fixed head (19) is arranged on described magnechuck (18);
Described water-cooling apparatus comprises water pump (20), outlet pipe (21), return pipe (22) and water tank (23); Described water tank (23), for storing cooling water, is connected by connecting water pipe (24) between described water tank (23) and water pump (20); On described water tank (23), be also provided with described return pipe (22); It is upper that described outlet pipe (21) is arranged at described water pump (20), and outlet pipe (21) is connected with first cooling water pipeline (12) of the support body (2) of described cutter sweep; On described support body (2), be also provided with the conduit (25) that cooling water can be guided to workpiece to be machined; Described workbench also comprises the first motor (26), the first screw mandrel (27), the second motor (28) and the second screw mandrel (29);
Described the first screw mandrel (27) drives rotation by described the first motor (26), the output of one end of described the first screw mandrel (27) and described the first motor (26) is fixedly connected, and the other end of described the first screw mandrel (27) inserts in the first screw in the workbench body (17) of described workbench;
Described the second screw mandrel (29) drives rotation by described the second motor (28), the output of one end of described the second screw mandrel (29) and described the second motor (28) is fixedly connected, and the other end of described the second screw mandrel (29) inserts in the second screw in the workbench body (17) of described workbench.
2. excellent machine is drawn in ultrasonic wave rotation according to claim 1, it is characterized in that, described ultrasonic transducer (10) is piezoelectric ceramic ultrasonic transducer.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201310132878.6A CN103203807B (en) | 2013-04-01 | 2013-04-01 | Ultrasonic rotary corer |
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| CN201310132878.6A CN103203807B (en) | 2013-04-01 | 2013-04-01 | Ultrasonic rotary corer |
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| CN103203807A CN103203807A (en) | 2013-07-17 |
| CN103203807B true CN103203807B (en) | 2014-02-05 |
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| CN201310132878.6A Expired - Fee Related CN103203807B (en) | 2013-04-01 | 2013-04-01 | Ultrasonic rotary corer |
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Families Citing this family (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105437391A (en) * | 2014-08-27 | 2016-03-30 | 兆远科技股份有限公司 | Drilling device and manufacturing method for curved substrate made of high-hardness materials |
| CN104924468A (en) * | 2015-07-03 | 2015-09-23 | 天津众晶半导体材料有限公司 | Drill bit equipment for taking out cylindrical monocrystalline silicon and usage method |
| CN105171939B (en) * | 2015-08-14 | 2017-03-01 | 中传重型机床有限公司 | Excellent knife drawn by sapphire |
| CN105666713A (en) * | 2016-01-12 | 2016-06-15 | 中原工学院 | Ultrasonic-vibrating rotary excavating device |
| CN105541308B (en) * | 2016-01-23 | 2018-06-01 | 胡海波 | A kind of high anti-reflection sapphire ingot manufacturing equipment and manufacturing process |
| CN106644568B (en) * | 2016-12-26 | 2019-06-07 | 东北电力大学 | A kind of concrete drill hole sampler |
| CN107283656A (en) * | 2017-06-19 | 2017-10-24 | 宁波市北仑甬享昇机械有限公司 | A kind of Double End square set circular hole machine |
| CN107322821A (en) * | 2017-08-04 | 2017-11-07 | 宁夏中晶半导体材料有限公司 | Monocrystalline silicon draws bar device |
| CN108372598A (en) * | 2018-01-23 | 2018-08-07 | 江阴华芯源半导体装备有限公司 | Stick machine is drawn in full-automatic silicon crystal bar numerical control |
| CN110936506A (en) * | 2019-12-09 | 2020-03-31 | 济南晶众光电科技有限公司 | DKDP crystal automatic rod rotating machine and processing technology |
| CN113020922B (en) * | 2021-03-22 | 2022-02-25 | 四川众友机械有限责任公司 | Planetary gear machining process |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| US4828052A (en) * | 1988-06-20 | 1989-05-09 | The United States Of America As Represented By The United States Department Of Energy | Ultrasonic drilling apparatus |
| JP4132200B2 (en) * | 1998-04-08 | 2008-08-13 | 株式会社Ｉｎａｘ | Drilling method and apparatus |
| CN200998826Y (en) * | 2006-12-21 | 2008-01-02 | 张小军 | Improved structure of ultrasonic rotating head |
| CN201020638Y (en) * | 2007-04-10 | 2008-02-13 | 哈尔滨工大奥瑞德光电技术有限公司 | Ultrasonic vibration abrasive machining composite processing tool |
| CN102514108B (en) * | 2011-12-28 | 2014-10-08 | 元亮科技有限公司 | Flexible feeding mechanism for sapphire coring machine |
| CN102922609B (en) * | 2012-10-13 | 2016-03-30 | 洛阳金诺机械工程有限公司 | A kind of ultrasonic vibration rotary drawing-out device |
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