CN104924468A - Drill bit equipment for taking out cylindrical monocrystalline silicon and usage method - Google Patents

Drill bit equipment for taking out cylindrical monocrystalline silicon and usage method Download PDF

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Publication number
CN104924468A
CN104924468A CN201510391731.8A CN201510391731A CN104924468A CN 104924468 A CN104924468 A CN 104924468A CN 201510391731 A CN201510391731 A CN 201510391731A CN 104924468 A CN104924468 A CN 104924468A
Authority
CN
China
Prior art keywords
drill bit
monocrystalline silicon
taking out
hoisting gear
power distribution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510391731.8A
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Chinese (zh)
Inventor
薛佳伟
薛佳勇
王海军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tianjin Zhongjing Semiconductor Material Co Ltd
Original Assignee
Tianjin Zhongjing Semiconductor Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tianjin Zhongjing Semiconductor Material Co Ltd filed Critical Tianjin Zhongjing Semiconductor Material Co Ltd
Priority to CN201510391731.8A priority Critical patent/CN104924468A/en
Publication of CN104924468A publication Critical patent/CN104924468A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/021Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by drilling
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0064Devices for the automatic drive or the program control of the machines
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B28WORKING CEMENT, CLAY, OR STONE
    • B28DWORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/0058Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
    • B28D5/0082Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

The invention provides drill bit equipment for taking out cylindrical monocrystalline silicon and a usage method. The drill bit equipment for taking out the cylindrical monocrystalline silicon comprises a framework formed by welding metal square tubes, a motor, a drill bit lifting device, a drill bit, an installing back plate, a monocrystalline silicon locating plate and a power distribution cabinet; the installing back plate is tightly attached and fixed to the inner side of the upper portion of the framework, the motor and the drill bit lifting device are connected to the installing back plate in a fastening mode, the motor is in electric connection with the power distribution cabinet through a cable, the drill bit lifting device is in driving connection with the output stage of the motor through a belt, and the bottom of the drill bit lifting device is connected with the drill bit through a vertical lifting rod; the lower portion of the framework is provided with a supporting table, the monocrystalline silicon locating plate is tightly attached and fixed to the supporting table, and the central axis of the drill bit is aligned with that of the monocrystalline silicon locating plate; when the drill bit equipment for taking out the cylindrical monocrystalline silicon is used, the cylindrical monocrystalline silicon is taken out through four steps. The drill bit equipment for taking out the cylindrical monocrystalline silicon and the usage method have the advantages that the standard cylindrical monocrystalline silicon can be taken out from irregularly shaped monocrystalline silicon raw materials, the equipment is easy to operate, economical and practical, and the working efficiency is greatly improved.

Description

A kind of drill bit apparatus for taking out cylindrical shaped single crystal silicon and using method
Technical field
The invention belongs to drill bit apparatus field, especially relating to a kind of drill bit apparatus for taking out cylindrical shaped single crystal silicon.
Background technology
Monocrystalline silicon is the crystal with substantially complete lattice structure, is a kind ofly to have the corresponding good semi-conducting material of different nature in different direction.Highly purified monocrystalline silicon may be used for production and the deep processing manufacture of diode level, rectifying device level, circuit-level and solar battery grade single crystal product article, its subsequent product integrated circuit and semiconductor separation part are widely used in every field, in military avionic equipment, also occupy critical role.Highly purified monocrystalline silicon draws to form in single crystal growing furnace, direct drawing monocrystalline silicon is out rendered as more and more less cylindrical of diameter, and need the monocrystalline silicon playing practical application effect to require it is cylindrical, so it is regular cylindrical to need the monocrystalline silicon that draws out in single crystal growing furnace to take out.
Summary of the invention
In view of this, the present invention is intended to propose a kind of drill bit apparatus for taking out cylindrical shaped single crystal silicon, can take out the monocrystalline silicon of standard cylindrical from single crystal silicon materials in irregular shape, and equipment operating is simple, economical and practical, substantially increases operating efficiency.
For achieving the above object, technical scheme of the present invention is achieved in that
A kind of drill bit apparatus for taking out cylindrical shaped single crystal silicon, comprise and being welded by metal side tube, in order to as erection unit carrier and the framework of playing a supporting role, also comprise motor, drill bit lowering or hoisting gear, drill bit, backboard is installed, monocrystalline silicon location-plate and power distribution cabinet, described installation backboard is close to and is fixed on inside described framework upper, described motor and described drill bit lowering or hoisting gear are fastenedly connected on described installation backboard, described motor is electrically connected by cable with described power distribution cabinet, described drill bit lowering or hoisting gear is in transmission connection by the output stage of belt and described motor, the bottom of described drill bit lowering or hoisting gear connects described drill bit by vertical lift bar, the bottom of described framework is provided with saddle, described monocrystalline silicon location-plate is close to and is fixed on described saddle, and align with the axis of described monocrystalline silicon location-plate in the axis of described drill bit.
Further, described drill bit is core drill tubular, and sidewall has the long kidney-shaped hole extended along direction, axis, the both sides of described long kidney-shaped hole respectively have multiple circular hole.
Further, the middle part of described monocrystalline silicon location-plate has the clamping locating hole of the circle connecting and fixing monocrystalline silicon workpiece.
Further, the upper beam of described framework hangs and is connected to fastener tab, and described fastener tab is fastenedly connected by the top of steel wire rope and described drill bit lowering or hoisting gear.
Further, the left side of described framework is provided with cable planning disk, and described cable is connected to described power distribution cabinet by the cabling of described cable planning disk planning.
Further, the pillar for stable support is provided with between the bottom of described saddle and described drill bit lowering or hoisting gear.
Using a method for the described drill bit apparatus for taking out cylindrical shaped single crystal silicon, comprising the steps:
The first step, is first fixed on the top of monocrystalline silicon workpiece to be processed in the described clamping locating hole of described monocrystalline silicon location-plate, finely tunes the position of described monocrystalline silicon location-plate, is alignd with the axis of described monocrystalline silicon location-plate in the axis of described drill bit;
Second step, again by switch opens corresponding in described power distribution cabinet, described power distribution cabinet is described motor power supplying by described cable, the output stage of described motor is by drill bit lowering or hoisting gear described in described belt drive, the described vertical lift bar be connected with bottom described drill bit lowering or hoisting gear is driven to rotate and controllably moves both vertically up and down, the described drill bit be connected with bottom described vertical lift bar is driven to rotate cutting, and moves both vertically up and down;
3rd step, after described bit contact to monocrystalline silicon workpiece, workman needs to injected clear water in contact surface, and in order to lower the temperature and to wash away chip, clear water passes through described long kidney-shaped hole and the described circular hole inflow contact surface of described drill bit;
4th step, when described drill bit is cut to the lowermost end of monocrystalline silicon workpiece downwards, workman control in described power distribution cabinet to inductive switch, lift described drill bit, take off the monocrystalline silicon of the standard cylindrical of cutting processing.
Relative to prior art, the drill bit apparatus for taking out cylindrical shaped single crystal silicon of the present invention has following advantage:
(1) when the present invention uses, the clamping locating hole that monocrystalline silicon location-plate has, the top presenting up-narrow and down-wide monocrystalline silicon workpiece can be fixed, the axis of monocrystalline silicon workpiece is located with the axis of drill bit and aligns, facilitate the drill bit of core drill tubular perpendicular cuts can go out the cylindrical shaped single crystal silicon of rule from top to bottom; Power distribution cabinet is by cable for motor provides electric energy, and the corresponding switch control rule start and stop speed of the present invention simultaneously also by being provided with in power distribution cabinet, contributes to accuracy and the simplification of increase operation; The output stage of motor drives the operation of drill bit lowering or hoisting gear by bel-drivenn mode, vertical lift bar upper and lower vertical telescopic in the process rotated that drill bit lowering or hoisting gear is provided with by controlling bottom, and then the drill bit controlling to be connected with vertical lift bar bottom realizes being elevated running in the process rotated, can complete and cut out columniform cutting action, realize the monocrystalline silicon taking out standard cylindrical from single crystal silicon materials in irregular shape, improve the efficiency of work.
(2) drill bit sidewall of the present invention has the long kidney-shaped hole extended along direction, axis, the both sides of long kidney-shaped hole respectively have multiple circular hole, in the process that drill bit is rotated down on monocrystalline silicon workpiece, need by workman's constantly injected clear water on the contact surface of drill bit and workpiece, clear water can play on the one hand and reduce contact surface temperature action, another effect is gone out by the monocrystalline silicon flour cut down, and the long kidney-shaped hole on drill bit and circular hole facilitate clear water directly to inject drill bit bottom contact surface; The upper beam of framework hangs the fastener tab be connected to, and fastener tab is fastenedly connected by the top of steel wire rope and drill bit lowering or hoisting gear, and the pillar for stable support be provided with between the bottom of saddle and drill bit lowering or hoisting gear, fastener tab and pillar all contribute to firm drill bit lowering or hoisting gear, the vibration to drill bit lowering or hoisting gear feedback produced when cutting down bit operation, improves stability; The cable that the left side of framework is provided with plans disk, ensures that cable is connected to power distribution cabinet by the cabling of cable planning disk planning, contributes to making cable wiring more clear, carelessly can not be wound around, while clean and tidy, also not easily directly touch, prevent electric shock hidden danger, safer.
Accompanying drawing explanation
The accompanying drawing forming a part of the present invention is used to provide a further understanding of the present invention, and schematic description and description of the present invention, for explaining the present invention, does not form inappropriate limitation of the present invention.In the accompanying drawings:
Fig. 1 is the structural representation of the embodiment of the present invention.
Description of reference numerals:
1-framework, 2-motor, 3-drill bit lowering or hoisting gear, 4-drill bit, 5-installs backboard, 6-monocrystalline silicon location-plate, 7-power distribution cabinet, 8-cable, 9-belt, 10-fastener tab, 11-saddle, 12-pillar, 13-cable planning disk, 31-vertical lift bar, 41-long kidney-shaped hole, 42-circular hole, 61-clamping locating hole, 101-steel wire rope.
Detailed description of the invention
It should be noted that, when not conflicting, the embodiment in the present invention and the feature in embodiment can combine mutually.
Below with reference to the accompanying drawings and describe the present invention in detail in conjunction with the embodiments.
As shown in Figure 1, the invention provides a kind of drill bit apparatus for taking out cylindrical shaped single crystal silicon, comprise and being welded by metal side tube, in order to as erection unit carrier and the framework 1 of playing a supporting role, also comprise motor 2, drill bit lowering or hoisting gear 3, drill bit 4, backboard 5 is installed, monocrystalline silicon location-plate 6 and power distribution cabinet 7, described installation backboard 5 is close to and is fixed on described framework 1 upper inner, described motor 2 and described drill bit lowering or hoisting gear 3 are fastenedly connected on described installation backboard 5, described motor 2 is electrically connected by cable 8 with described power distribution cabinet 7, described drill bit lowering or hoisting gear 3 is in transmission connection by the output stage of belt 9 with described motor 2, the bottom of described drill bit lowering or hoisting gear 3 connects described drill bit 4 by vertical lift bar 31, the bottom of described framework 1 is provided with saddle 11, described monocrystalline silicon location-plate 6 is close to and is fixed on described saddle 11, and align with the axis of described monocrystalline silicon location-plate 6 in the axis of described drill bit 4.
Described drill bit 4 is core drill tubular, and sidewall has the long kidney-shaped hole 41 extended along direction, axis, the both sides of described long kidney-shaped hole 41 respectively have multiple circular hole 42.
The middle part of described monocrystalline silicon location-plate 6 has the clamping locating hole 61 of the circle connecting and fixing monocrystalline silicon workpiece.
The upper beam of described framework 1 hangs and is connected to fastener tab 10, and described fastener tab 10 is fastenedly connected by the top of steel wire rope 101 with described drill bit lowering or hoisting gear 3.
The left side of described framework 1 is provided with cable planning disk 13, and the cabling that described cable 8 is planned by described cable planning disk 13 is connected to described power distribution cabinet 7.
The pillar 12 for stable support is provided with between the bottom of described saddle 11 and described drill bit lowering or hoisting gear 3.
Using a method for the described drill bit apparatus for taking out cylindrical shaped single crystal silicon, comprising the steps:
The first step, first the top of monocrystalline silicon workpiece to be processed is fixed in the described clamping locating hole 61 of described monocrystalline silicon location-plate 6, finely tune the position of described monocrystalline silicon location-plate 6, alignd with the axis of described monocrystalline silicon location-plate 6 in the axis of described drill bit 4;
Second step, again by switch opens corresponding in described power distribution cabinet 7, described power distribution cabinet 7 is powered for described motor 2 by described cable 8, the output stage of described motor 2 drives described drill bit lowering or hoisting gear 3 by described belt 9, the described vertical lift bar 31 be connected with bottom described drill bit lowering or hoisting gear 3 is driven to rotate and controllably moves both vertically up and down, the described drill bit 4 be connected with bottom described vertical lift bar 31 is driven to rotate cutting, and moves both vertically up and down;
3rd step, after described drill bit 4 touches monocrystalline silicon workpiece, workman needs to injected clear water in contact surface, and in order to cooling with wash away chip, clear water flows into contact surface by the described long kidney-shaped hole 41 of described drill bit 4 and described circular hole 42;
4th step, when described drill bit 4 is cut to the lowermost end of monocrystalline silicon workpiece downwards, workman control in described power distribution cabinet 7 to inductive switch, lift described drill bit 4, take off the monocrystalline silicon of the standard cylindrical of cutting processing.
The course of work of this example: when using of the present invention, first the top of up-narrow and down-wide monocrystalline silicon workpiece is fixed in the clamping locating hole 61 of monocrystalline silicon location-plate 6, align with the axis of the drill bit 4 of hollow tubular in the axis of bonding crystal silicon workpiece, again by opening switch corresponding in power distribution cabinet 7, powered for motor 2 by cable 8, the output stage of motor 2 drives drill bit lowering or hoisting gear 3 by belt 9, vertical lift bar 31 bottom drill bit lowering or hoisting gear 3 rotates and controllably moves both vertically up and down, the drill bit 4 connected bottom vertical lift bar 31 realizes circumgyration incision, and move both vertically up and down, workman is after drill bit 4 contacts monocrystalline silicon workpiece, need to come in and go out clear water in contact surface, in order to lower the temperature and to wash away chip, clear water flows into contact surface by the long kidney-shaped hole 41 of drill bit 4 and circular hole 42, when drill bit 4 is cut to the lowermost end of monocrystalline silicon workpiece downwards, workman control in power distribution cabinet 7 to inductive switch, lift drill bit 4, take off the monocrystalline silicon of the standard cylindrical of cutting processing, realize the monocrystalline silicon taking out standard cylindrical from single crystal silicon materials in irregular shape.
The foregoing is only preferred embodiment of the present invention, not in order to limit the present invention, within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., all should be included within protection scope of the present invention.

Claims (7)

1. one kind for taking out the drill bit apparatus of cylindrical shaped single crystal silicon, it is characterized in that: comprise and being welded by metal side tube, in order to as erection unit carrier and the framework of playing a supporting role, also comprise motor, drill bit lowering or hoisting gear, drill bit, backboard is installed, monocrystalline silicon location-plate and power distribution cabinet, described installation backboard is close to and is fixed on inside described framework upper, described motor and described drill bit lowering or hoisting gear are fastenedly connected on described installation backboard, described motor is electrically connected by cable with described power distribution cabinet, described drill bit lowering or hoisting gear is in transmission connection by the output stage of belt and described motor, the bottom of described drill bit lowering or hoisting gear connects described drill bit by vertical lift bar, the bottom of described framework is provided with saddle, described monocrystalline silicon location-plate is close to and is fixed on described saddle, and align with the axis of described monocrystalline silicon location-plate in the axis of described drill bit.
2. the drill bit apparatus for taking out cylindrical shaped single crystal silicon according to claim 1, is characterized in that: described drill bit is core drill tubular, and sidewall has the long kidney-shaped hole extended along direction, axis, the both sides of described long kidney-shaped hole respectively have multiple circular hole.
3. the drill bit apparatus for taking out cylindrical shaped single crystal silicon according to claim 1, is characterized in that: the middle part of described monocrystalline silicon location-plate has the clamping locating hole of the circle connecting and fixing monocrystalline silicon workpiece.
4. the drill bit apparatus for taking out cylindrical shaped single crystal silicon according to claim 1, is characterized in that: the upper beam of described framework hangs and is connected to fastener tab, and described fastener tab is fastenedly connected by the top of steel wire rope and described drill bit lowering or hoisting gear.
5. the drill bit apparatus for taking out cylindrical shaped single crystal silicon according to claim 1, is characterized in that: the left side of described framework is provided with cable planning disk, and described cable is connected to described power distribution cabinet by the cabling of described cable planning disk planning.
6. the drill bit apparatus for taking out cylindrical shaped single crystal silicon according to claim 1, is characterized in that: be provided with the pillar for stable support between the bottom of described saddle and described drill bit lowering or hoisting gear.
7. using a method for the drill bit apparatus for taking out cylindrical shaped single crystal silicon described in claim 1, it is characterized in that: comprise the steps:
The first step, is first fixed on the top of monocrystalline silicon workpiece to be processed in the described clamping locating hole of described monocrystalline silicon location-plate, finely tunes the position of described monocrystalline silicon location-plate, is alignd with the axis of described monocrystalline silicon location-plate in the axis of described drill bit;
Second step, again by switch opens corresponding in described power distribution cabinet, described power distribution cabinet is described motor power supplying by described cable, the output stage of described motor is by drill bit lowering or hoisting gear described in described belt drive, the described vertical lift bar be connected with bottom described drill bit lowering or hoisting gear is driven to rotate and controllably moves both vertically up and down, the described drill bit be connected with bottom described vertical lift bar is driven to rotate cutting, and moves both vertically up and down;
3rd step, after described bit contact to monocrystalline silicon workpiece, workman needs to injected clear water in contact surface, and in order to lower the temperature and to wash away chip, clear water passes through described long kidney-shaped hole and the described circular hole inflow contact surface of described drill bit;
4th step, when described drill bit is cut to the lowermost end of monocrystalline silicon workpiece downwards, workman control in described power distribution cabinet to inductive switch, lift described drill bit, take off the monocrystalline silicon of the standard cylindrical of cutting processing.
CN201510391731.8A 2015-07-03 2015-07-03 Drill bit equipment for taking out cylindrical monocrystalline silicon and usage method Pending CN104924468A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510391731.8A CN104924468A (en) 2015-07-03 2015-07-03 Drill bit equipment for taking out cylindrical monocrystalline silicon and usage method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510391731.8A CN104924468A (en) 2015-07-03 2015-07-03 Drill bit equipment for taking out cylindrical monocrystalline silicon and usage method

Publications (1)

Publication Number Publication Date
CN104924468A true CN104924468A (en) 2015-09-23

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201205739Y (en) * 2008-04-24 2009-03-11 长葛市飞亚精密磨具厂 Material pulling out knife with hole
CN102514108A (en) * 2011-12-28 2012-06-27 元亮科技有限公司 Flexible feeding mechanism for sapphire coring machine
CN103072209A (en) * 2012-12-27 2013-05-01 洛阳金诺机械工程有限公司 Digging equipment
CN103203807A (en) * 2013-04-01 2013-07-17 合肥晶桥光电材料有限公司 Ultrasonic rotary corer
CN203409903U (en) * 2013-07-30 2014-01-29 元亮科技有限公司 Sapphire crystal bar drawing mechanism

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201205739Y (en) * 2008-04-24 2009-03-11 长葛市飞亚精密磨具厂 Material pulling out knife with hole
CN102514108A (en) * 2011-12-28 2012-06-27 元亮科技有限公司 Flexible feeding mechanism for sapphire coring machine
CN103072209A (en) * 2012-12-27 2013-05-01 洛阳金诺机械工程有限公司 Digging equipment
CN103203807A (en) * 2013-04-01 2013-07-17 合肥晶桥光电材料有限公司 Ultrasonic rotary corer
CN203409903U (en) * 2013-07-30 2014-01-29 元亮科技有限公司 Sapphire crystal bar drawing mechanism

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Application publication date: 20150923