CN103203807A - Ultrasonic rotary corer - Google Patents
Ultrasonic rotary corer Download PDFInfo
- Publication number
- CN103203807A CN103203807A CN2013101328786A CN201310132878A CN103203807A CN 103203807 A CN103203807 A CN 103203807A CN 2013101328786 A CN2013101328786 A CN 2013101328786A CN 201310132878 A CN201310132878 A CN 201310132878A CN 103203807 A CN103203807 A CN 103203807A
- Authority
- CN
- China
- Prior art keywords
- support body
- cooling water
- screw mandrel
- workbench
- main shaft
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Abstract
The invention discloses an ultrasonic rotary corer which comprises a cutting device, a bench and a water cooler. The cutting device comprises a guide, a frame, a frame drive motor, a spindle, and a spindle drive motor, wherein the frame is capable of moving along the guide, the frame drive motor is used for driving the frame to move along the guide, the spindle is provided with a cutting tool, and the spindle drive motor is used for driving the spindle to rotate. A current collector is arranged at the upper end of the spindle, and the spindle is provided with an inner cavity which contains an ultrasonic transducer. A sleeve is fixed at the lower end of the spindle. The cutting tool is disposed at the lower end of the sleeve. The spindle is provided with a second cooling water pipeline. The water cooler comprises a water pump, an outlet pipe, a return pipe and a water tank. The ultrasonic rotary corer has such advantages that the ultrasonic rotary corer grinds sapphire crystal easily, cutting is efficient, cooling is effective and surface quality of crystal bars is better.
Description
Technical field
The present invention relates to a kind of excellent machine of drawing, especially a kind ofly draw excellent machine for the ultrasonic wave rotation of sapphire material being drawn rod.
Background technology
Because what the large-size sapphire backing material was used popularizes, LED and SOS (Silicon on Sapphire particularly, silicon-on-sapphire) semicon industry has promoted the demand fast rise of industry to sapphire material processing for the sapphire wafer growth of requirement.Because the physics of sapphire material belongs to hard brittle material, to the large volume sapphire crystal, the sapphire crystal of 80～100kg level for example, the process operation of extracting heavy caliber crystal bar (particularly 6,8 inches) is very difficult, and inefficiency, therefore that studies that sapphire draws rod effectively is processed into a current difficult problem fast.
In the prior art, sapphire is drawn excellent technology and is adopted the sleeve rotation more, drills through crystal bar.The employing mode of pressing down that is illustrated in figure 5 as prior art is extracted crystal bar a kind ofly draws excellent machine structure, and the travelling table 406 that can move up and down is provided with first motor 401, gear drive 402, leading screw 403, sleeve anchor clamps 404 and by the sleeve 405 of sleeve anchor clamps clamping.Travelling table 406 can move up and down along vertical rod 408 under the driving of second motor 407.First motor, 401 driven gear transmission mechanisms 402 rotate, rotated by the leading screw 403 of driven gear drive installation in the center of driven gear, leading screw drives the sleeve anchor clamps 404 be installed on the leading screw and by sleeve 405 rotations of sleeve anchor clamps clamping, sleeve high-speed rotation and feeding downwards under first motor 401 drives drawn rod processing to the sapphire material that is positioned on the stationary work-table 409.Utilize the diamond segment of sleeve 405 bottoms to contact with sapphire material, rotary grinding until drilling sapphire material, is obtained columniform sapphire crystal bar.The excellent machine of drawing of this kind mode has following shortcoming: 1) rod is drawn in single rotation, and grinding speed is slow, and speed generally has only 2～5mm/min, is no more than 8mm/min the soonest, and the efficient of processing is lower; 2) outer cooling separately, radiating effect is poor; If the cooling deficiency can cause the heating of diamond sleeve cutter head, the sleeve loss is big even cause sleeve to damage, and the crystal bar surface quality is poor, product quality is not ideal enough; 3) strict for the axial runout of sleeve, if the axial runout of sleeve is excessive (general 〉=as 0.05mm), to cause crystal to burst so in drawing rod motion easily.
Application number is that 200610004701.8 Chinese invention patent discloses a kind of cutting equipment, as shown in Figure 6.Whirligig is induction machine in this equipment, and it comprises permanent magnet and winding on the rearward end that is placed in axle.Piezoelectric vibrator is connected to the rearward end of axle.The electric supply installation that is used for alternating current is supplied to piezoelectric vibrator also is placed in the axle unit.The cooling fluid source of supply is supplied to input hole by flexible pipe with cooling fluid, the cooling press electric tachometer indicator.Mainly there is following problem in this cutting equipment: 1) induction machine of whirligig is embedded, and equipment works long hours, and is unfavorable for motor radiating, burns out motor easily; 2) piezoelectric vibrator is placed on the rearward end of axle unit, and the transmission distance is long, causes the ultrasonic vibration decay, and vibrating effect is poor; 3) this system cools fluid can only cool off to piezoelectric vibrator, and the place does not have cooling in factory interface, and cutting tool can't cool off.
Summary of the invention
The present invention is the weak point that exists in the above-mentioned prior art for avoiding, and provides a kind of ultrasonic wave rotation to draw excellent machine, to solve the problem that the excellent working (machining) efficiency of drawing of current sapphire material is low, supplementary product onsumption reaches crystal bar surface quality difference greatly.
The present invention be the technical solution problem by the following technical solutions.
Excellent machine is drawn in the ultrasonic wave rotation, and its design feature is to comprise cutter sweep, workbench and water-cooling apparatus;
Described cutter sweep comprises guide rail, the support body that can move along guide rail, be used for driving support body drive motors, the main shaft that is provided with cutting tool that support body moves along guide rail and be used for driving the spindle drive motor that main shaft rotates; The both sides of described support body respectively are provided with a described guide rail; Described support body is provided with internal thread hole, and the output of described support body drive motors is provided with screw mandrel, and threaded engagement between the internal thread hole of described screw mandrel and described support body moves along described guide rail so that described screw mandrel can drive described support body when rotating; Described support body is provided with spindle drive motor, and the main shaft that is driven by described spindle drive motor also is installed on the described support body; Adopt driving-belt as transmission mechanism between described spindle drive motor and the described main shaft; The upper end of main shaft is provided with current-collecting device, and the inside of main shaft is provided with cavity, is provided with ultrasonic transducer in the described cavity, and the lower end of described main shaft is set with sleeve, and the lower end of described sleeve is provided with cutting tool; Described main shaft is provided with for second cooling water pipeline by cooling water, described support body is provided with first cooling water pipeline, described first cooling water pipeline and second cooling water pipeline communicate, and first cooling water pipeline on the described support body is connected with the outlet pipe of described water-cooling apparatus, injects cooling water by water-cooling apparatus in first cooling water pipeline and second cooling water pipeline; Described current-collecting device comprises collecting ring and lower header ring, and the described collecting ring of going up all is connected with described ultrasonic transducer by power line with the lower header ring;
Described workbench comprises workbench body, magnechuck and is used for the fixedly fixed head of workpiece to be machined; Described magnechuck is arranged on the described workbench body, and described fixed head is arranged on the described magnechuck;
Described water-cooling apparatus comprises water pump, outlet pipe, return pipe and water tank; Described water tank is used for the storage cooling water, is connected by connecting water pipe between described water tank and the water pump; Also be provided with described return pipe on the described water tank; Described outlet pipe is arranged on the described water pump, and outlet pipe is connected with first cooling water pipeline of the support body of described cutter sweep.
Ultrasonic wave rotation of the present invention is drawn excellent machine and is also had following technical characterstic.
Also be provided with the conduit that cooling water can be guided to workpiece to be machined on the described support body.
Described workbench also comprises first motor, first screw mandrel, second motor and second screw mandrel;
Described first screw mandrel is rotated by described first motor-driven, and an end of described first screw mandrel and the output of described first motor are fixedly connected, and the other end of described first screw mandrel inserts in intrinsic first screw of workbench of described workbench;
Described second screw mandrel is rotated by described second motor-driven, and an end of described second screw mandrel and the output of described second motor are fixedly connected, and the other end of described second screw mandrel inserts in intrinsic second screw of workbench of described workbench.
Described ultrasonic transducer is the piezoelectric ceramic ultrasound transducer.
Compared with the prior art, beneficial effect of the present invention is embodied in:
Excellent machine is drawn in ultrasonic wave rotation of the present invention, and the additional ultrasonic wave of rotation is drawn excellent technology, by ultrasonic vibration the machined surface of working is washed away the formation micro-crack, and sleeve is the grinding sapphire crystal easily, is common the 3-5 that draws excellent speed times.The reduction of grinding force also makes the sleeve wearing and tearing alleviate, and has improved the service life of sleeve.Two coolings obviously improve radiating effect inside and outside adopting in addition, and chip removal has easily prevented from adding the powder that produces man-hour and accumulated, and injures crystal bar, has guaranteed the surface quality of crystal bar.The present invention is by the auxiliary vibration of ultrasonic wave, and removal rates reaches more than the 20mm/min, and inside and outside cooling has well solved the heat dissipation problem of process, reduces the proportion of goods damageds of sleeve, and product quality also is improved.
Compare with prior art, of the present inventionly draw excellent machine following characteristics are arranged: 1) drive motors in the whirligig is independent of outside the main shaft, drives main axis rotation by synchronous band, is beneficial to motor radiating; 2) the piezoelectric ceramics transducing head directly is connected with cutter head, reduces the vibration transmitting range, and the ultrasonic vibration effect is obviously improved; 3) the built-in cooling tube of cooling system passes to cutter head by piezoelectric ceramic transducer, and other has outer nozzle to the cooling of the sleeve edge of a knife, realize inside and outside cooling system, and cooling fluid realizes through the return pipe reflow tank recycling.
Excellent machine is drawn in ultrasonic wave of the present invention rotation, grinding sapphire crystal easily, and the stock-removing efficiency height, good cooling results has improved the surface quality of crystal bar.
Description of drawings
Fig. 1 draws the structural representation of the cutter sweep of excellent machine for ultrasonic wave rotation of the present invention.
Fig. 2 draws the front view of the workbench of excellent machine for ultrasonic wave rotation of the present invention.
Fig. 3 draws the vertical view of the workbench of excellent machine for ultrasonic wave rotation of the present invention.
Fig. 4 draws the structure chart of the water-cooling apparatus of excellent machine for ultrasonic wave rotation of the present invention.
Fig. 5 is a kind of structural representation of drawing excellent machine of prior art.
Fig. 6 is the structural representation of the cutter sweep of drawing excellent machine of prior art.
Label in accompanying drawing 1～accompanying drawing 6: 1 guide rail, 2 support bodys, 3 support body drive motors, 4 cutting tools, 5 main shafts, 6 spindle drive motors, 7 screw mandrels, 8 driving-belts, 9 cavitys, 10 ultrasonic transducers, 11 sleeves, 12 first cooling water pipelines, 13 second cooling water pipelines, collecting ring on 14,15 lower header rings, 16 power lines, 17 workbench bodies, 18 magnechucks, 19 fixed heads, 20 water pumps, 21 outlet pipes, 22 return pipes, 23 water tanks, 24 connect water pipe, 25 conduits, 26 first motors, 27 first screw mandrels, 28 second motors, 29 second screw mandrels, 30 workpieces to be machined, 406 workbench, 401 first motors, 402 gear drives, 403 leading screws, 404 sleeve anchor clamps, 405 sleeves, 407 second motors, 408 vertical rods, 409 stationary work-tables.
Below pass through the specific embodiment, and the invention will be further described by reference to the accompanying drawings.
The specific embodiment
Referring to Fig. 1, excellent machine is drawn in the ultrasonic wave rotation, comprises cutter sweep, workbench and water-cooling apparatus; Described cutter sweep comprises guide rail 1, the support body 2 that can move along guide rail 1, be used for driving support body drive motors 3, the main shaft 5 that is provided with cutting tool 4 that support body 2 moves along guide rail 1 and be used for driving the spindle drive motor 6 that main shaft 5 rotates; The both sides of described support body 2 respectively are provided with a described guide rail 1; Described support body 2 is provided with internal thread hole, the output of described support body drive motors 3 is provided with screw mandrel 7, and threaded engagement between the internal thread hole of described screw mandrel 7 and described support body 2 moves along described guide rail 1 so that described screw mandrel 7 can drive described support body 2 when rotating; Described support body 2 is provided with spindle drive motor 6, and the main shaft 5 that is driven by described spindle drive motor 6 also is installed on the described support body 2; Adopt driving-belt 8 as transmission mechanism between described spindle drive motor 6 and the described main shaft 5; The upper end of main shaft 5 is provided with current-collecting device, and the inside of main shaft 5 is provided with cavity 9, is provided with ultrasonic transducer 10 in the described cavity 9, and the lower end of described main shaft 5 is set with sleeve 11, and the lower end of described sleeve 11 is provided with cutting tool 4; Described main shaft 5 is provided with for second cooling water pipeline 13 by cooling water, described support body 2 is provided with first cooling water pipeline 12, described first cooling water pipeline 12 and second cooling water pipeline 13 communicate, and first cooling water pipeline 12 on the described support body 2 is connected with the outlet pipe 21 of described water-cooling apparatus, injects cooling water by water-cooling apparatus in first cooling water pipeline 12 and second cooling water pipeline 13; Described current-collecting device comprises collecting ring 14 and lower header ring 15, and the described collecting ring 14 of going up all is connected with described ultrasonic transducer 10 by power line 16 with lower header ring 15;
During concrete enforcement, guide rail can be set to two cylinders of vertically placing, support body each side be provided with a circular hole that penetrates described support body up and down, described guide rail passes circular hole and the guide rail lower end of described support body and fixes; The support body drive motors is fixed, and screw mandrel is fixed on output and and the output shaft coaxial rotation of described support body drive motors of support body drive motors.
As Fig. 1, in the main shaft of cutter sweep internal cavities is arranged, be provided with piezoelectric ceramic transducer in the bottom of cavity.The upper end of piezoelectric ceramic transducer is connected with the power line of two piezoelectric ceramic transducers, these two power lines pass cavity respectively with current-collecting device on last collecting ring and lower header ring link together, last collecting ring and lower header ring and ultrasonic power link together.Inside has thin conduit to pass to cutting tool.
Cooling fluid enters support body by first cooling water pipeline 12, enter second cooling water pipeline 13 then, enter in the inner chamber of sleeve after entering the central through hole on the sleeve again, because cutting tool is positioned at the sleeve bottom, cooling fluid just drops on cutting tool when falling naturally, cool thereby can be cutting tool, damage in order to avoid cutter is overheated.Cooling system by described first cooling water pipeline 12 and second cooling water pipeline 13 constitute has played the effect of cutter being cooled off from the inside of sleeve.
Described workbench comprises workbench body 17, magnechuck 18 and is used for the fixedly fixed head 19 of workpiece to be machined; Described magnechuck 18 is arranged on the described workbench body 17, and described fixed head 19 is arranged on the described magnechuck 18;
Described water-cooling apparatus comprises water pump 20, outlet pipe 21, return pipe 22 and water tank 23; Described water tank 23 is used for the storage cooling water, is connected by connecting water pipe 24 between described water tank 23 and the water pump 20; Also be provided with described return pipe 22 on the described water tank 23; Described outlet pipe 21 is arranged on the described water pump 20, and outlet pipe 21 is connected with first cooling water pipeline 12 of the support body 2 of described cutter sweep.
During concrete operations, workbench place cutter on the sleeve under so that cutting sapphire crystal during the downward feeding of cutter.After being fixed on processed crystal workpiece on the fixed head on the workbench, start spindle drive motor and support body drive motors, connect the power supply of ultrasonic transducer, open starting mode of pump water cooling function simultaneously.The support body drive motors drives leading screw and rotates, and promotes support body when leading screw rotates and moves down along guide rail.When support body moves down, the sleeve and the cutter that drive on main shaft and the main shaft move down, while main shaft, sleeve and cutter high-speed rotation under the drive of spindle drive motor, and cutter begins cutting and feeding downwards behind the contact sapphire crystal, thereby can draw rod processing to crystal, drill through crystal bar.Described ultrasonic transducer is used for providing ultrasonic vibration, make and produce ultrasonic vibration at process middle sleeve and cutter, in the process of vibration, cut sapphire material, can the machined surface of working be washed away the formation micro-crack by ultrasonic vibration, sleeve is the grinding sapphire crystal easily, and can improve cutting speed.The cooling fluid cooling cutter that has cooling system to provide simultaneously can avoid cutter to cross cause thermal damage in the process of cutting, has improved cutting efficiency, has also guaranteed good cut quality.
Also be provided with the conduit 25 that cooling water can be guided to workpiece to be machined on the described support body 2.
As Fig. 1, the below of cutting tool is aimed in the outlet of conduit just, thereby cooling fluid falls within the processed sapphire position that is cut after catheter guidance, can processed sapphire be cooled off, can the outer surface of sleeve and cutting tool be cooled off simultaneously.
Described workbench also comprises first motor 26, first screw mandrel 27, second motor 28 and second screw mandrel 29;
Described first screw mandrel 27 drives rotation by described first motor 26, one end of described first screw mandrel 27 and the output of described first motor 26 are fixedly connected, and the other end of described first screw mandrel 27 inserts in first screw in the workbench body 17 of described workbench;
Described second screw mandrel 29 drives rotation by described second motor 28, one end of described second screw mandrel 29 and the output of described second motor 28 are fixedly connected, and the other end of described second screw mandrel 29 inserts in second screw in the workbench body 17 of described workbench.
Described ultrasonic transducer 10 is the piezoelectric ceramic ultrasound transducer.
Described workbench is provided with two orthogonal screws of axis, two orthogonal screw mandrels of axis insert respectively in two screws, by two screw mandrels of two driven by motor, can make the workbench body 17 of workbench to move along two orthogonal directions respectively, these two orthogonal directions can be remembered make directions X and Y-direction.Fig. 2 and shown in Figure 3, workbench comprise magnechuck and are used for fixing processed sapphire fixed head 19 that crystal is fixed on the fixed head 19.Workbench can carry out the movement of X, Y-axis under the drive of two motors.It is motor-driven by two that the diaxon of workbench moves, first motor 26 rotates and drives 27 rotations of first screw mandrel, and threaded engagement between the internal thread hole of first screw mandrel 27 and workbench body 17 drives workbench 17 and described magnechuck 18 and moves along X-axis so that first screw mandrel 27 rotates the moment.In like manner cooperate the movement of the Y direction that realizes workbench 17 by second motor 28 and second leading screw 29.
Cooling water system comprises water tank, water pump among Fig. 4, and outlet pipe and return pipe are that first cooling water pipeline 12 and second cooling water pipeline 13, conduit 25 supply water by this system for the outlet pipe 21 among Fig. 1.After water pump is opened, cooling fluid in the water tank is delivered to sleeve processing place by outlet pipe, outlet pipe is divided into two-way with cooling fluid, and one the road directly carries out water-cooled to the edge of a knife 4 from conduit 25 ejections, and in time washes away and add the chip that produce man-hour; Another road enters in the sleeve from first cooling water pipeline 12 and second cooling water pipeline 13 centre bore by sleeve, because sleeve inner is hollow, cooling fluid can directly enter sleeve inner, dispels the heat, prevent the edge of a knife 4 because of overheated damage the in the process, realize inside and outside two cooling.By return pipe, can realize recovery and the circulation of cooling water.
Excellent machine is drawn in ultrasonic wave of the present invention rotation, and the additional ultrasonic wave of rotation is drawn excellent technology, and can inside and outside two coolings, improves grinding efficiency, is increased to 20mm/min by original 2-5mm/min; Reduce supplementary product onsumption, for example loss of sleeve by original 2400mm/, is increased to 6000mm/; Improve the quality of products crystal bar surface flawless and the scratch extracted.
Claims (4)
1. excellent machine is drawn in the ultrasonic wave rotation, it is characterized in that, comprises cutter sweep, workbench and water-cooling apparatus;
Described cutter sweep comprise guide rail (1), can be along the mobile support body (2) of guide rail (1), be used for driving support body (2) along the mobile support body drive motors (3) of guide rail (1), be provided with the main shaft (5) of cutting tool (4) and be used for driving the spindle drive motor (6) that main shaft (5) rotates; The both sides of described support body (2) respectively are provided with a described guide rail (1); Described support body (2) is provided with internal thread hole, the output of described support body drive motors (3) is provided with screw mandrel (7), threaded engagement between the internal thread hole of described screw mandrel (7) and described support body (2) so that described screw mandrel (7) can to drive described support body (2) when rotating mobile along described guide rail (1); Described support body (2) is provided with spindle drive motor (6), and the main shaft (5) that is driven by described spindle drive motor (6) also is installed on the described support body (2); Adopt driving-belt (8) as transmission mechanism between described spindle drive motor (6) and the described main shaft (5); The upper end of main shaft (5) is provided with current-collecting device, the inside of main shaft (5) is provided with cavity (9), be provided with ultrasonic transducer (10) in the described cavity (9), the lower end of described main shaft (5) is set with sleeve (11), and the lower end of described sleeve (11) is provided with cutting tool (4); Described main shaft (5) is provided with for second cooling water pipeline (13) by cooling water, described support body (2) is provided with first cooling water pipeline (12), described first cooling water pipeline (12) and second cooling water pipeline (13) communicate, and first cooling water pipeline (12) on the described support body (2) is connected with the outlet pipe (21) of described water-cooling apparatus, injects cooling water by water-cooling apparatus in first cooling water pipeline (12) and second cooling water pipeline (13); Described current-collecting device comprises collecting ring (14) and lower header ring (15), and the described collecting ring (14) of going up all is connected with described ultrasonic transducer (10) by power line (16) with lower header ring (15);
Described workbench comprises workbench body (17), magnechuck (18) and is used for the fixedly fixed head of workpiece to be machined (19); Described magnechuck (18) is arranged on the described workbench body (17), and described fixed head (19) is arranged on the described magnechuck (18);
Described water-cooling apparatus comprises water pump (20), outlet pipe (21), return pipe (22) and water tank (23); Described water tank (23) is used for the storage cooling water, is connected by connecting water pipe (24) between described water tank (23) and the water pump (20); Also be provided with described return pipe (22) on the described water tank (23); Described outlet pipe (21) is arranged on the described water pump (20), and outlet pipe (21) is connected with first cooling water pipeline (12) of the support body (2) of described cutter sweep.
2. excellent machine is drawn in ultrasonic wave rotation according to claim 1, it is characterized in that, also is provided with the conduit (25) that cooling water can be guided to workpiece to be machined on the described support body (2).
3. excellent machine is drawn in ultrasonic wave rotation according to claim 1, it is characterized in that described workbench also comprises first motor (26), first screw mandrel (27), second motor (28) and second screw mandrel (29);
Described first screw mandrel (27) drives rotation by described first motor (26), the output of one end of described first screw mandrel (27) and described first motor (26) is fixedly connected, and the other end of described first screw mandrel (27) inserts in first screw in the workbench body (17) of described workbench;
Described second screw mandrel (29) drives rotation by described second motor (28), the output of one end of described second screw mandrel (29) and described second motor (28) is fixedly connected, and the other end of described second screw mandrel (29) inserts in second screw in the workbench body (17) of described workbench.
4. excellent machine is drawn in ultrasonic wave rotation according to claim 1, it is characterized in that described ultrasonic transducer (10) is the piezoelectric ceramic ultrasound transducer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310132878.6A CN103203807B (en) | 2013-04-01 | 2013-04-01 | Ultrasonic rotary corer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310132878.6A CN103203807B (en) | 2013-04-01 | 2013-04-01 | Ultrasonic rotary corer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN103203807A true CN103203807A (en) | 2013-07-17 |
| CN103203807B CN103203807B (en) | 2014-02-05 |
Family
ID=48751313
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201310132878.6A Expired - Fee Related CN103203807B (en) | 2013-04-01 | 2013-04-01 | Ultrasonic rotary corer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103203807B (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104924468A (en) * | 2015-07-03 | 2015-09-23 | 天津众晶半导体材料有限公司 | Drill bit equipment for taking out cylindrical monocrystalline silicon and usage method |
| CN105171939A (en) * | 2015-08-14 | 2015-12-23 | 中传重型机床有限公司 | Sapphire bar drawing cutter |
| CN105437391A (en) * | 2014-08-27 | 2016-03-30 | 兆远科技股份有限公司 | Drilling device and manufacturing method for curved substrate made of high-hardness materials |
| CN105541308A (en) * | 2016-01-23 | 2016-05-04 | 胡海波 | High-anti-reflection sapphire ingot manufacturing device and manufacturing process |
| CN105666713A (en) * | 2016-01-12 | 2016-06-15 | 中原工学院 | Ultrasonic-vibrating rotary excavating device |
| CN106644568A (en) * | 2016-12-26 | 2017-05-10 | 东北电力大学 | Concrete drilling and sampling machine |
| CN107283656A (en) * | 2017-06-19 | 2017-10-24 | 宁波市北仑甬享昇机械有限公司 | A kind of Double End square set circular hole machine |
| CN107322821A (en) * | 2017-08-04 | 2017-11-07 | 宁夏中晶半导体材料有限公司 | Monocrystalline silicon draws bar device |
| CN108372598A (en) * | 2018-01-23 | 2018-08-07 | 江阴华芯源半导体装备有限公司 | Stick machine is drawn in full-automatic silicon crystal bar numerical control |
| CN110936506A (en) * | 2019-12-09 | 2020-03-31 | 济南晶众光电科技有限公司 | DKDP crystal automatic rod rotating machine and processing technology |
| CN113020922A (en) * | 2021-03-22 | 2021-06-25 | 四川众友机械有限责任公司 | Planetary gear machining process |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4828052A (en) * | 1988-06-20 | 1989-05-09 | The United States Of America As Represented By The United States Department Of Energy | Ultrasonic drilling apparatus |
| JPH11291228A (en) * | 1998-04-08 | 1999-10-26 | Inax Corp | Method and apparatus for making hole |
| CN200998826Y (en) * | 2006-12-21 | 2008-01-02 | 张小军 | Improved structure of ultrasonic rotating head |
| CN201020638Y (en) * | 2007-04-10 | 2008-02-13 | 哈尔滨工大奥瑞德光电技术有限公司 | Ultrasonic vibration abrasive machining composite processing tool |
| CN102514108A (en) * | 2011-12-28 | 2012-06-27 | 元亮科技有限公司 | Flexible feeding mechanism for sapphire coring machine |
| CN102922609A (en) * | 2012-10-13 | 2013-02-13 | 洛阳金诺机械工程有限公司 | Ultrasonic vibration rotary drawing-out device |
-
2013
- 2013-04-01 CN CN201310132878.6A patent/CN103203807B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4828052A (en) * | 1988-06-20 | 1989-05-09 | The United States Of America As Represented By The United States Department Of Energy | Ultrasonic drilling apparatus |
| JPH11291228A (en) * | 1998-04-08 | 1999-10-26 | Inax Corp | Method and apparatus for making hole |
| CN200998826Y (en) * | 2006-12-21 | 2008-01-02 | 张小军 | Improved structure of ultrasonic rotating head |
| CN201020638Y (en) * | 2007-04-10 | 2008-02-13 | 哈尔滨工大奥瑞德光电技术有限公司 | Ultrasonic vibration abrasive machining composite processing tool |
| CN102514108A (en) * | 2011-12-28 | 2012-06-27 | 元亮科技有限公司 | Flexible feeding mechanism for sapphire coring machine |
| CN102922609A (en) * | 2012-10-13 | 2013-02-13 | 洛阳金诺机械工程有限公司 | Ultrasonic vibration rotary drawing-out device |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105437391A (en) * | 2014-08-27 | 2016-03-30 | 兆远科技股份有限公司 | Drilling device and manufacturing method for curved substrate made of high-hardness materials |
| CN104924468A (en) * | 2015-07-03 | 2015-09-23 | 天津众晶半导体材料有限公司 | Drill bit equipment for taking out cylindrical monocrystalline silicon and usage method |
| CN105171939B (en) * | 2015-08-14 | 2017-03-01 | 中传重型机床有限公司 | Excellent knife drawn by sapphire |
| CN105171939A (en) * | 2015-08-14 | 2015-12-23 | 中传重型机床有限公司 | Sapphire bar drawing cutter |
| CN105666713A (en) * | 2016-01-12 | 2016-06-15 | 中原工学院 | Ultrasonic-vibrating rotary excavating device |
| CN105541308B (en) * | 2016-01-23 | 2018-06-01 | 胡海波 | A kind of high anti-reflection sapphire ingot manufacturing equipment and manufacturing process |
| CN105541308A (en) * | 2016-01-23 | 2016-05-04 | 胡海波 | High-anti-reflection sapphire ingot manufacturing device and manufacturing process |
| CN106644568A (en) * | 2016-12-26 | 2017-05-10 | 东北电力大学 | Concrete drilling and sampling machine |
| CN106644568B (en) * | 2016-12-26 | 2019-06-07 | 东北电力大学 | A kind of concrete drill hole sampler |
| CN107283656A (en) * | 2017-06-19 | 2017-10-24 | 宁波市北仑甬享昇机械有限公司 | A kind of Double End square set circular hole machine |
| CN107322821A (en) * | 2017-08-04 | 2017-11-07 | 宁夏中晶半导体材料有限公司 | Monocrystalline silicon draws bar device |
| CN108372598A (en) * | 2018-01-23 | 2018-08-07 | 江阴华芯源半导体装备有限公司 | Stick machine is drawn in full-automatic silicon crystal bar numerical control |
| CN110936506A (en) * | 2019-12-09 | 2020-03-31 | 济南晶众光电科技有限公司 | DKDP crystal automatic rod rotating machine and processing technology |
| CN113020922A (en) * | 2021-03-22 | 2021-06-25 | 四川众友机械有限责任公司 | Planetary gear machining process |
Also Published As
| Publication number | Publication date |
|---|---|
| CN103203807B (en) | 2014-02-05 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103203807B (en) | Ultrasonic rotary corer | |
| CN111906542B (en) | Device for machining spiral groove of circular pipe | |
| CN206614346U (en) | A kind of rotary ultrasonic magnetic abrasive finishing device | |
| CN201455410U (en) | Full-automatic pipe cutter | |
| CN204524539U (en) | Complex function Continuous Drive Friction Welding machine | |
| CN109382776B (en) | Centering clamping device for multi-diameter pipe | |
| CN201172106Y (en) | Automatic tube cutter | |
| CN110202329A (en) | A kind of production method of automobile gear and automobile gear drilling equipment | |
| CN202270995U (en) | Inner cooling type drilling machine | |
| CN110625397A (en) | Pipe cutting and surface drilling integration equipment | |
| CN201385136Y (en) | Deep hole processing machine | |
| CN203471505U (en) | Device for polishing punching burrs on inner wall of radiator oil collecting tube for transformer | |
| CN201124313Y (en) | Tool power head | |
| CN112643911A (en) | Self-cooling hollow rod ultrasonic knife handle system | |
| CN114393410B (en) | Processing equipment for main pole iron core inner wall reversing groove | |
| CN102528573B (en) | Ultrasonic deburring device for horizontal working-head magnetic core | |
| CN103084415B (en) | Pipe billet cooling centering machine | |
| CN202225058U (en) | Small caliber stainless steel circular pipe inner hole polishing machine | |
| CN212217312U (en) | Neodymium iron boron thin slice high efficiency cutting device | |
| CN104475834A (en) | A flat milling machine for roller carrier shafts | |
| CN104325188A (en) | Thin-walled steel pipe cutting machine | |
| JP3056327B2 (en) | Chamfering equipment such as pipes | |
| CN103537882B (en) | A kind of slender shaft surface supersonic processing method and device | |
| CN103394765A (en) | Device for machining inner wall of seamless tube | |
| CN202716121U (en) | Device for de-burring magnetic cores of horizontal work heads through ultrasonic wave |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20140205 Termination date: 20160401 |