CN103180774B - 用于在工作平面内产生线状的强度分布的激光设备 - Google Patents
用于在工作平面内产生线状的强度分布的激光设备 Download PDFInfo
- Publication number
- CN103180774B CN103180774B CN201180043579.4A CN201180043579A CN103180774B CN 103180774 B CN103180774 B CN 103180774B CN 201180043579 A CN201180043579 A CN 201180043579A CN 103180774 B CN103180774 B CN 103180774B
- Authority
- CN
- China
- Prior art keywords
- light emitter
- lasing light
- propagation
- luminaire
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0604—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
- B23K26/0608—Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams in the same heat affected zone [HAZ]
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0738—Shaping the laser spot into a linear shape
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21V—FUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
- F21V7/00—Reflectors for light sources
- F21V7/0083—Array of reflectors for a cluster of light sources, e.g. arrangement of multiple light sources in one plane
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2051—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source
- G03F7/2053—Exposure without an original mask, e.g. using a programmed deflection of a point source, by scanning, by drawing with a light beam, using an addressed light or corpuscular source using a laser
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2103/00—Elongate light sources, e.g. fluorescent tubes
- F21Y2103/10—Elongate light sources, e.g. fluorescent tubes comprising a linear array of point-like light-generating elements
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F21—LIGHTING
- F21Y—INDEXING SCHEME ASSOCIATED WITH SUBCLASSES F21K, F21L, F21S and F21V, RELATING TO THE FORM OR THE KIND OF THE LIGHT SOURCES OR OF THE COLOUR OF THE LIGHT EMITTED
- F21Y2115/00—Light-generating elements of semiconductor light sources
- F21Y2115/10—Light-emitting diodes [LED]
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0905—Dividing and/or superposing multiple light beams
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Lasers (AREA)
- Semiconductor Lasers (AREA)
- Laser Beam Processing (AREA)
- Non-Portable Lighting Devices Or Systems Thereof (AREA)
Abstract
Description
Claims (10)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102010044875A DE102010044875A1 (de) | 2010-09-09 | 2010-09-09 | Beleuchtungsvorrichtung zur Erzeugung einer linienförmigen Intensitätsverteilung in einer Arbeitsebene |
DE102010044875.3 | 2010-09-09 | ||
PCT/EP2011/065553 WO2012032116A1 (de) | 2010-09-09 | 2011-09-08 | Laservorrichtung zur erzeugung einer linienförmigen intensitätsverteilung in einer arbeitsebene |
Publications (2)
Publication Number | Publication Date |
---|---|
CN103180774A CN103180774A (zh) | 2013-06-26 |
CN103180774B true CN103180774B (zh) | 2016-09-21 |
Family
ID=44720857
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201180043579.4A Active CN103180774B (zh) | 2010-09-09 | 2011-09-08 | 用于在工作平面内产生线状的强度分布的激光设备 |
Country Status (7)
Country | Link |
---|---|
US (1) | US8967826B2 (zh) |
EP (1) | EP2614399A1 (zh) |
JP (1) | JP5918768B2 (zh) |
KR (1) | KR101769653B1 (zh) |
CN (1) | CN103180774B (zh) |
DE (1) | DE102010044875A1 (zh) |
WO (1) | WO2012032116A1 (zh) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2014095836A1 (en) | 2012-12-20 | 2014-06-26 | Shell Internationale Research Maatschappij B.V. | Pipe connector and method |
FR3012226B1 (fr) * | 2013-10-18 | 2015-10-30 | Saint Gobain | Appareil laser modulaire |
WO2015197811A1 (en) | 2014-06-26 | 2015-12-30 | Shell Internationale Research Maatschappij B.V. | Coating method and coated substrate |
CN108886232B (zh) * | 2015-12-25 | 2021-08-17 | 鸿海精密工业股份有限公司 | 线束光源及线束照射装置以及激光剥离方法 |
DE102019102511B4 (de) * | 2019-01-31 | 2020-08-20 | Trumpf Laser- Und Systemtechnik Gmbh | Lasersystem |
US11237483B2 (en) * | 2020-06-15 | 2022-02-01 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and apparatus for controlling droplet in extreme ultraviolet light source |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1222674A (zh) * | 1998-01-07 | 1999-07-14 | 中国科学院大连化学物理研究所 | 一种紫外拉曼光谱仪 |
CN1549045A (zh) * | 2002-12-03 | 2004-11-24 | ��������˹�����տ����� | 具有对准光学器件和电子设备的投影仪 |
CN1677226A (zh) * | 2004-03-31 | 2005-10-05 | 三洋电机株式会社 | 照明装置及投射式影像显示装置 |
CN1914556A (zh) * | 2004-01-29 | 2007-02-14 | 松下电器产业株式会社 | 光源装置和二维图像显示装置 |
CN101324321A (zh) * | 2007-06-12 | 2008-12-17 | Jds尤尼弗思公司 | 光源 |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0260179A (ja) * | 1988-08-26 | 1990-02-28 | Fuji Photo Film Co Ltd | 合波用レーザ光源装置 |
DE19780124B4 (de) * | 1996-02-23 | 2007-02-15 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Anordnung zur Formung des geometrischen Querschnitts mehrerer Festkörper- und/oder Halbleiterlaser |
US20020051360A1 (en) | 1998-11-04 | 2002-05-02 | Solodovnikov Vladimir Vadimovich | Method and apparatus for unifying light beams |
IL140386A0 (en) | 2000-12-18 | 2002-02-10 | Rayteq Laser Ind Ltd | Optical device for unifying light beams emitted by several light sources |
US6356577B1 (en) * | 1999-07-15 | 2002-03-12 | Silicon Light Machines | Method and apparatus for combining light output from multiple laser diode bars |
JP2001215443A (ja) * | 2000-02-04 | 2001-08-10 | Hamamatsu Photonics Kk | 光学装置 |
DE10061265A1 (de) | 2000-12-06 | 2002-06-27 | Jenoptik Jena Gmbh | Diodenlaseranordnung |
CN100406872C (zh) * | 2002-11-04 | 2008-07-30 | 天津市先石光学技术有限公司 | 复合光谱测量方法及其光谱检测仪器 |
DE10306668B4 (de) * | 2003-02-13 | 2009-12-10 | Xtreme Technologies Gmbh | Anordnung zur Erzeugung von intensiver kurzwelliger Strahlung auf Basis eines Plasmas |
JP2004354898A (ja) * | 2003-05-30 | 2004-12-16 | Toshiba Corp | 光モジュール、光ファイバレーザ装置、映像表示装置 |
ATE405976T1 (de) | 2004-07-19 | 2008-09-15 | Trumpf Laser Gmbh & Co Kg | Diodenlaseranordnung und strahlformungseinheit dafür |
JP4739819B2 (ja) * | 2005-05-31 | 2011-08-03 | リコー光学株式会社 | 光束配列密度変換方法および光束配列密度変換部材および光源装置 |
WO2007019878A1 (de) | 2005-08-19 | 2007-02-22 | Limo Patentverwaltung Gmbh & Co. Kg | Laseranordnung |
US7494272B2 (en) | 2006-06-27 | 2009-02-24 | Applied Materials, Inc. | Dynamic surface annealing using addressable laser array with pyrometry feedback |
EP2061122B1 (en) * | 2007-11-16 | 2014-07-02 | Fraunhofer USA, Inc. | A high power laser diode array comprising at least one high power diode laser, laser light source comprising the same and method for production thereof |
DE102008027231B4 (de) * | 2008-06-06 | 2016-03-03 | Limo Patentverwaltung Gmbh & Co. Kg | Vorrichtung zur Strahlformung |
-
2010
- 2010-09-09 DE DE102010044875A patent/DE102010044875A1/de not_active Withdrawn
-
2011
- 2011-09-08 EP EP11763877.5A patent/EP2614399A1/de not_active Withdrawn
- 2011-09-08 US US13/822,061 patent/US8967826B2/en not_active Expired - Fee Related
- 2011-09-08 KR KR1020137008644A patent/KR101769653B1/ko active IP Right Grant
- 2011-09-08 WO PCT/EP2011/065553 patent/WO2012032116A1/de active Application Filing
- 2011-09-08 JP JP2013527602A patent/JP5918768B2/ja active Active
- 2011-09-08 CN CN201180043579.4A patent/CN103180774B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1222674A (zh) * | 1998-01-07 | 1999-07-14 | 中国科学院大连化学物理研究所 | 一种紫外拉曼光谱仪 |
CN1549045A (zh) * | 2002-12-03 | 2004-11-24 | ��������˹�����տ����� | 具有对准光学器件和电子设备的投影仪 |
CN1914556A (zh) * | 2004-01-29 | 2007-02-14 | 松下电器产业株式会社 | 光源装置和二维图像显示装置 |
CN1677226A (zh) * | 2004-03-31 | 2005-10-05 | 三洋电机株式会社 | 照明装置及投射式影像显示装置 |
CN101324321A (zh) * | 2007-06-12 | 2008-12-17 | Jds尤尼弗思公司 | 光源 |
Also Published As
Publication number | Publication date |
---|---|
JP2013541419A (ja) | 2013-11-14 |
DE102010044875A1 (de) | 2012-03-15 |
KR101769653B1 (ko) | 2017-08-18 |
US20130182435A1 (en) | 2013-07-18 |
JP5918768B2 (ja) | 2016-05-18 |
WO2012032116A1 (de) | 2012-03-15 |
EP2614399A1 (de) | 2013-07-17 |
CN103180774A (zh) | 2013-06-26 |
US8967826B2 (en) | 2015-03-03 |
KR20140004070A (ko) | 2014-01-10 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CP01 | Change in the name or title of a patent holder |
Address after: Borussia Dortmund Patentee after: LIMO LLC Address before: Borussia Dortmund Patentee before: LIMO Holdings Ltd. |
|
CP01 | Change in the name or title of a patent holder | ||
TR01 | Transfer of patent right |
Effective date of registration: 20180309 Address after: Borussia Dortmund Patentee after: LIMO Holdings Ltd. Address before: Borussia Dortmund Patentee before: LIMO PATENTVERWALTUNG GmbH & Co.KG |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20200630 Address after: No.56 Zhangba Liulu Road, high tech Zone, Xi'an City, Shaanxi Province Patentee after: Focuslight Technologies Inc. Address before: Borussia Dortmund Patentee before: LIMO LLC |
|
TR01 | Transfer of patent right |