CN103165421A - 一种提高中子嬗变掺杂或去应力硅单晶退火后少子寿命的方法 - Google Patents
一种提高中子嬗变掺杂或去应力硅单晶退火后少子寿命的方法 Download PDFInfo
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- CN103165421A CN103165421A CN2013100582652A CN201310058265A CN103165421A CN 103165421 A CN103165421 A CN 103165421A CN 2013100582652 A CN2013100582652 A CN 2013100582652A CN 201310058265 A CN201310058265 A CN 201310058265A CN 103165421 A CN103165421 A CN 103165421A
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- single crystal
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- 239000013078 crystal Substances 0.000 title claims abstract description 33
- 238000000034 method Methods 0.000 title claims abstract description 26
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 25
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 25
- 239000010703 silicon Substances 0.000 title claims abstract description 25
- 238000000137 annealing Methods 0.000 title claims abstract description 24
- 238000009377 nuclear transmutation Methods 0.000 title claims abstract description 13
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 claims abstract description 17
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000010453 quartz Substances 0.000 claims abstract description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 11
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 8
- 239000001301 oxygen Substances 0.000 claims abstract description 8
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 8
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 claims abstract description 6
- 229910017604 nitric acid Inorganic materials 0.000 claims abstract description 6
- 239000008367 deionised water Substances 0.000 claims abstract description 5
- 229910021641 deionized water Inorganic materials 0.000 claims abstract description 4
- 238000001035 drying Methods 0.000 claims abstract description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims abstract description 3
- 238000009423 ventilation Methods 0.000 claims abstract description 3
- 238000010438 heat treatment Methods 0.000 claims description 5
- 238000005260 corrosion Methods 0.000 abstract description 6
- 230000007797 corrosion Effects 0.000 abstract description 6
- 238000011109 contamination Methods 0.000 abstract description 2
- 229910021645 metal ion Inorganic materials 0.000 abstract description 2
- 238000007669 thermal treatment Methods 0.000 abstract 2
- 238000002791 soaking Methods 0.000 abstract 1
- 238000005406 washing Methods 0.000 abstract 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000003708 ampul Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000002253 acid Substances 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 description 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920001343 polytetrafluoroethylene Polymers 0.000 description 1
- 230000036632 reaction speed Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
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- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
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CN201310058265.2A CN103165421B (zh) | 2013-02-25 | 2013-02-25 | 提高中子嬗变掺杂或去应力硅单晶退火后少子寿命的方法 |
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CN201310058265.2A CN103165421B (zh) | 2013-02-25 | 2013-02-25 | 提高中子嬗变掺杂或去应力硅单晶退火后少子寿命的方法 |
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CN103165421A true CN103165421A (zh) | 2013-06-19 |
CN103165421B CN103165421B (zh) | 2015-11-04 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104278328A (zh) * | 2014-09-30 | 2015-01-14 | 天津市环欧半导体材料技术有限公司 | 一种大直径区熔硅单晶的去应力退火的方法 |
CN104532355A (zh) * | 2015-02-05 | 2015-04-22 | 天津市环欧半导体材料技术有限公司 | 一种大直径ntd单晶热处理工艺 |
CN107641837A (zh) * | 2017-09-14 | 2018-01-30 | 河北工业大学 | 一种恢复ntd区熔单晶硅真实电阻率的退火方法 |
CN113061991A (zh) * | 2021-03-23 | 2021-07-02 | 韩华新能源(启东)有限公司 | 改善单晶硅片金字塔绒面均匀性制备方法及太阳能电池 |
Citations (5)
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US3998668A (en) * | 1973-12-21 | 1976-12-21 | Owens-Illinois, Inc. | Aluminum metaphosphate dopant sources |
CN101708848A (zh) * | 2009-11-26 | 2010-05-19 | 浙江大学 | 金属硅的物理提纯方法 |
CN102593264A (zh) * | 2012-03-28 | 2012-07-18 | 泰通(泰州)工业有限公司 | 一种提高太阳能电池效率的扩散工艺 |
CN102703987A (zh) * | 2012-06-08 | 2012-10-03 | 天威新能源控股有限公司 | 基于多晶硅中金属杂质去除的低温磷吸杂扩散工艺 |
CN102820378A (zh) * | 2012-08-27 | 2012-12-12 | 晶澳(扬州)太阳能科技有限公司 | 一种提高晶体硅基体有效寿命的吸杂方法 |
-
2013
- 2013-02-25 CN CN201310058265.2A patent/CN103165421B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3998668A (en) * | 1973-12-21 | 1976-12-21 | Owens-Illinois, Inc. | Aluminum metaphosphate dopant sources |
CN101708848A (zh) * | 2009-11-26 | 2010-05-19 | 浙江大学 | 金属硅的物理提纯方法 |
CN102593264A (zh) * | 2012-03-28 | 2012-07-18 | 泰通(泰州)工业有限公司 | 一种提高太阳能电池效率的扩散工艺 |
CN102703987A (zh) * | 2012-06-08 | 2012-10-03 | 天威新能源控股有限公司 | 基于多晶硅中金属杂质去除的低温磷吸杂扩散工艺 |
CN102820378A (zh) * | 2012-08-27 | 2012-12-12 | 晶澳(扬州)太阳能科技有限公司 | 一种提高晶体硅基体有效寿命的吸杂方法 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104278328A (zh) * | 2014-09-30 | 2015-01-14 | 天津市环欧半导体材料技术有限公司 | 一种大直径区熔硅单晶的去应力退火的方法 |
CN104532355A (zh) * | 2015-02-05 | 2015-04-22 | 天津市环欧半导体材料技术有限公司 | 一种大直径ntd单晶热处理工艺 |
CN107641837A (zh) * | 2017-09-14 | 2018-01-30 | 河北工业大学 | 一种恢复ntd区熔单晶硅真实电阻率的退火方法 |
CN113061991A (zh) * | 2021-03-23 | 2021-07-02 | 韩华新能源(启东)有限公司 | 改善单晶硅片金字塔绒面均匀性制备方法及太阳能电池 |
CN113061991B (zh) * | 2021-03-23 | 2022-08-30 | 韩华新能源(启东)有限公司 | 改善单晶硅片金字塔绒面均匀性制备方法及太阳能电池 |
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