CN103137465A - 深沟槽工艺晶片周边硅针状缺陷的解决方法 - Google Patents
深沟槽工艺晶片周边硅针状缺陷的解决方法 Download PDFInfo
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CN201110374951.1A CN103137465B (zh) | 2011-11-22 | 2011-11-22 | 深沟槽工艺晶片周边硅针状缺陷的解决方法 |
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CN201110374951.1A CN103137465B (zh) | 2011-11-22 | 2011-11-22 | 深沟槽工艺晶片周边硅针状缺陷的解决方法 |
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CN103137465A true CN103137465A (zh) | 2013-06-05 |
CN103137465B CN103137465B (zh) | 2015-10-14 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN112650026A (zh) * | 2020-03-06 | 2021-04-13 | 腾讯科技(深圳)有限公司 | 基于单种光刻胶的多层胶膜、其图形化方法及其剥离方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH1124286A (ja) * | 1997-07-02 | 1999-01-29 | Citizen Watch Co Ltd | 感光性樹脂のパターン形成方法 |
US20040067654A1 (en) * | 2002-10-07 | 2004-04-08 | Promos Technologies, Inc. | Method of reducing wafer etching defect |
JP2005221801A (ja) * | 2004-02-06 | 2005-08-18 | Semiconductor Leading Edge Technologies Inc | レジストパターン形成方法 |
TW200845302A (en) * | 2007-05-09 | 2008-11-16 | Promos Technologies Inc | A method of two-step backside etching |
CN102053487A (zh) * | 2009-10-29 | 2011-05-11 | 上海华虹Nec电子有限公司 | 正光阻形成倒梯形形状的工艺方法 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1124286A (ja) * | 1997-07-02 | 1999-01-29 | Citizen Watch Co Ltd | 感光性樹脂のパターン形成方法 |
US20040067654A1 (en) * | 2002-10-07 | 2004-04-08 | Promos Technologies, Inc. | Method of reducing wafer etching defect |
JP2005221801A (ja) * | 2004-02-06 | 2005-08-18 | Semiconductor Leading Edge Technologies Inc | レジストパターン形成方法 |
TW200845302A (en) * | 2007-05-09 | 2008-11-16 | Promos Technologies Inc | A method of two-step backside etching |
CN102053487A (zh) * | 2009-10-29 | 2011-05-11 | 上海华虹Nec电子有限公司 | 正光阻形成倒梯形形状的工艺方法 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112650026A (zh) * | 2020-03-06 | 2021-04-13 | 腾讯科技(深圳)有限公司 | 基于单种光刻胶的多层胶膜、其图形化方法及其剥离方法 |
CN112650026B (zh) * | 2020-03-06 | 2022-09-30 | 腾讯科技(深圳)有限公司 | 基于单种光刻胶的多层胶膜、其图形化方法及其剥离方法 |
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CN103137465B (zh) | 2015-10-14 |
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