CN103100539A - Device and method for decontaminating surface of optical element - Google Patents
Device and method for decontaminating surface of optical element Download PDFInfo
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- CN103100539A CN103100539A CN2013100384609A CN201310038460A CN103100539A CN 103100539 A CN103100539 A CN 103100539A CN 2013100384609 A CN2013100384609 A CN 2013100384609A CN 201310038460 A CN201310038460 A CN 201310038460A CN 103100539 A CN103100539 A CN 103100539A
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Abstract
The invention discloses a device and a method for decontaminating a surface of an optical element. The device comprises a vacuum chamber (5), a flashlight light source (1) positioned inside the vacuum chamber (5), an air purging head (3), the optical element (4), a flashlight power source (2) positioned outside the vacuum chamber (5) and a vacuum unit (6). The flashlight power source (2) is connected with the flashlight light source (1) through an electrode lead (7) which passes through the vacuum chamber (5) and provides working voltage for the flashlight light source (1). The flashlight light source (1) is placed near the inner surface of the optical element (4) which needs decontaminating, and light rays (10) given out by the flashlight light source (1) acts on the optical element (4) surface which needs decontaminating. The device for decontaminating the surface of the optical element is capable of removing absorbate and pollutant on the surface of the optical element, the inner surface of the vacuum cavity and the surface of materials, the system and the structure of the device are simple, and the device is easy to operate.
Description
Technical field
The present invention relates to a kind of apparatus and method that the demanding material surface adsorbate of cleanliness factor, pollutant are cleared up, be specially adapted to the cleaning of the pollutant of optical element, vacuum cavity surface deposition, belong to optics, vacuum technique field.
Background technology
in high power strong laser and application system, in the exposure system of semiconductor technology, the transmission of light laser and the optical element of convergence, generally be placed on vacuum system or fill in the vacuum system of protective gas, after working long hours, at optical element surface, on system's inner surface because light laser is applied to light path with the various parts of exterior domain, the pollutant that produces on material can adsorb or be deposited on optical element surface, these pollutants will affect transmitance and the beam quality of optical element, and because the reduction of transmitance produces fuel factor, optical element is produced harmful effect.
Therefore, after waiting the optical element surface pollutant to acquire a certain degree, it is very important how the pollution of optical element being cleared up.For other vacuum industries, semicon industry etc., the material cleannes are required in very high system simultaneously, pollutant removing to material surface is also very important, therefore how under the prerequisite that system works is not produced large impact, the pollutant in system to be carried out removing fast that extraordinary application prospect is arranged fast.
Pollutant cleaning under the action of plasma utilized, the modes such as systemic contamination thing removing of mode of washing are arranged in prior art, element need to be removed from system, maybe might be damaged optical element surface, the process operation difficulty is large, is not suitable for on-the-spot cleaning demand fast.
Summary of the invention
Technical problem: the purpose of this invention is to provide under the effect of a kind of employing high light pollutant is excited from optical element surface or vacuum cavity inner surface and discharge, and employing gas purging mode, jointly extract pollutant and purge gas out vacuum cavity with vacuum system, adopt simultaneously the purge gas such as hydrogen, can make to be deposited on optical surface and the large carbon pollutant of performance impact to be changed into the gas componants such as methane and exclude system.The method and device possess the characteristics of carrying out fast the removing of material surface pollutant, and system architecture is simple to operation.
Technical scheme: for solving the problems of the technologies described above, the invention provides a kind of device that optics original paper surface contaminant is cleared up, this device comprises vacuum cavity, is located at the flash light source of vacuum cavity inside, gas purging head, optical element, the flash generator of being located at the vacuum cavity outside, vacuum unit;
Flash generator is connected with flash light source and provides operating voltage for it by the contact conductor that passes vacuum cavity;
Flash light source is placed on the inside near surface of the optical element that need to carry out pollutant cleaning, and the effect of light of sending when making its work is to surface that optical element need to be cleared up;
During flash light source work, the gas purging head is used for gas jet, and this gas jet acts on optical element and needs on the vacuum cavity inner surface of cleaning, and the pollutant that optical element surface and vacuum cavity inner surface discharge under the flash light source effect reacts or taken away by air-flow.
Preferably, the gas of gas purging head injection is the mixture of inorganic gas or organic volatile gas or above-mentioned gas.
Preferably, inorganic gas is hydrogen, nitrogen, and organic volatile gas is alcohol, acetone.
Preferably, flash light source is the high power density light source, the light action that sends is when optical element surface or vacuum cavity inner surface, make and be deposited on these lip-deep pollutants and discharge from the surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas and form new gas componant by vacuum unit extraction vacuum cavity.
Preferably, described high power density light source comprises xenon flash lamp, Halogen lamp LED, Solid State Laser light source.
The present invention also provides a kind of method that optics original paper surface contaminant is cleared up, and the method comprises the steps:
Flash light source is placed on the optical element that need to carry out pollutant cleaning and the inside near surface of vacuum cavity, and the light action that sends when making its work is to the surface that needs cleaning;
After adopting the vacuum unit that vacuum cavity is vacuumized, open flash generator and make flash light source work, and simultaneously with the surperficial blow gas of gas purging head to the needs cleaning.
The light action that flash light source sends is when optical element surface or vacuum cavity inner surface, make and be deposited on these lip-deep pollutants and discharge from the surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas and form new gas componant by vacuum unit extraction vacuum cavity;
Preferably, adopt the vacuum unit that vacuum cavity is vacuumized and adopt sweeping head to be blown continuously in vacuum cavity inside to vacuum cavity inside simultaneously, then open flash generator and make flash light source work, the pollutant that discharges is extracted out vacuum cavity by the vacuum unit together with purge gas.
Preferably, when purge gas is hydrogen or organic gas, carry out technological processing for explosion protection feature at vacuum unit exhaust outlet.
Beneficial effect: compared with prior art, the present invention has following advantage: possess the removing of carrying out fast optical element surface, vacuum cavity inner surface, material surface adsorbate, pollutant, and simple in structure easy to operate.
Description of drawings
Fig. 1 is the device schematic diagram that the optical element surface pollutant is cleared up,
Wherein have: flash light source 1, flash generator 2, gas purging head 3, optical element 4, vacuum cavity 5, vacuum unit 6, contact conductor 7, sweeping head blow the body 8 of emanating, the pollutant 9 of optical element surface release, the light 10 that flash light source sends.
The specific embodiment
The device that optics original paper surface contaminant is cleared up provided by the invention, this device comprise vacuum cavity 5, are located at the flash light source 1 of vacuum cavity 5 inside, gas purging head 3, optical element 4, the flash generator 2 of being located at vacuum cavity 5 outsides, vacuum unit 6.
Flash light source 1 is placed on the inside near surface of the optical element 4 that need to carry out the pollutant cleaning, and the light 10 that sends when making its work is applied to the surface that optical element 4 needs cleaning.
During flash light source 1 work, gas purging head 3 is used for gas jet 8, and this gas jet 8 acts on optical element 4 and needs on vacuum cavity 5 inner surfaces of cleaning, and the pollutants 9 of optical element 4 surfaces and vacuum cavity 5 inner surfaces releases react or taken away by air-flow under flash light source 1 effect.
In order to protect optical element; and the chemical reaction of avoiding being harmful to occurs; the gas 8 that the gas purging head sprays; inorganic gas or organic volatile gas such as alcohol, acetone or their mixtures such as inert gas, hydrogen, nitrogen; particularly adopt hydrogen; on with optical element surface impact serious the carbon pollutant, will issue biochemical reaction in the high light effect, generate the gas componant such as methane and extracted out vacuum cavity by the vacuum unit.The material such as alcohol, acetone does not produce pollution to system, easily removes from vacuum cavity 5, and be also the cleaning solvent of commonly using simultaneously, therefore also can be used as purge gas.But can produce blast when reaching finite concentration due to organic gas such as hydrogen and alcohol, acetone in air, therefore control at the content of the corresponding composition of vacuum unit exhaust outlet reply, carry out simultaneously technological processing for explosion protection feature.Adopt inert gas to be because inert gas does not produce chemical reaction to vacuum cavity 5 internal materials and brings new pollution, might form light current simultaneously under the high light effect and clear up from effects on surface.
Purge gas can make when flash lamp is worked and purge in short-term, also can use flash lamp to clear the pollution off in purge continuously.
For the optical surface pollutant can fully be discharged, and produce possible and the chemical reaction purge gas such as hydrogen, the luminous intensity of flash light source, power density require high, therefore to flash light source 1 can the strobe pulse xenon lamp, the high power density light sources such as Halogen lamp LED, Solid State Laser light source.The light action that these light sources are launched is when optical element surface or vacuum cavity inner surface, can make and be deposited on these lip-deep pollutants 9 and discharge from the surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas 8 and form new gas componant by vacuum unit extraction vacuum cavity 5.
The present invention also provides a kind of method that optics original paper surface contaminant is cleared up, and the method comprises the steps:
Flash light source 1 is placed on the optical element 4 that need to carry out pollutant cleaning and the inside near surface of vacuum cavity 5, and the light action that sends when making its work is to the surface that needs cleaning;
The light action that flash light source 1 sends is when optical element 4 surfaces or vacuum cavity 5 inner surface, make and be deposited on these lip-deep pollutants 9 and discharge from the surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas 8 and form new gas componant by vacuum unit 6 extraction vacuum cavities 5;
After adopting 6 pairs of vacuum cavities 5 of vacuum unit to vacuumize, open flash generator 2 and make flash light source 1 work, and simultaneously with 3 pairs of surperficial blow gas 8 that need cleaning of gas purging head.
Adopt 6 pairs of vacuum cavities 5 of vacuum unit to vacuumize and blow continuously to 3 pairs of vacuum cavities of vacuum cavity 5 inner employing sweeping heads 5 are inner simultaneously, then open flash generator 2 and make flash light source 1 work, the pollutant 9 that discharges is extracted out vacuum cavity 5 by vacuum unit 6 together with purge gas 8.
When purge gas 3 is hydrogen or organic gas, carry out technological processing for explosion protection feature at vacuum unit 6 exhaust outlets.
Adopt stainless steel material to make vacuum cavity, and be connected as vacuum system with vacuum unit that mechanical pump, molecular pump form, there is the optical element of optical system vacuum system inside, and employing vacuum unit vacuumizes whole system.For the pollutant on optical element and vacuum cavity inner surface is removed, at the interior placement xenon flash lamp of vacuum cavity 5, and be connected by the contact conductor pulse xenon lamp power source outer with being placed on vacuum cavity.On optical system top, the purging shower nozzle is set, when xenon flash lamp flash of light work, spray hydrogen gas stream in shower nozzle, the light that flash lamp sends can be applied to optical element surface and vacuum cavity is surperficial, make to be deposited on lip-deep pollutant and to discharge, the hydrogen that purges the shower nozzle ejection can be taken away the pollutant that optical element surface discharges, and can generate with carbon pollutant generation chemical reaction the gas such as methane, and extracted by the vacuum unit, reach the effect that clears the pollution off.
In the situation that vacuum cavity 5 is larger, on the basis of example 1, many xenon flash lamps can be set, making needs the surface of cleaning pollutant all can be irradiated by light.
The above is only better embodiment of the present invention; protection scope of the present invention is not limited with above-mentioned embodiment; as long as the equivalence that those of ordinary skills do according to disclosed content is modified or changed, all should include in the protection domain of putting down in writing in claims.
Claims (8)
1. device that optics original paper surface contaminant is cleared up is characterized in that: this device comprises vacuum cavity (5), is located at vacuum cavity (5) inner flash light source (1), gas purging head (3), optical element (4), is located at vacuum cavity (5) outside flash generator (2), vacuum unit (6);
Flash generator (2) is connected and provides operating voltage for it with flash light source (1) by the contact conductor (7) that passes vacuum cavity (5);
Flash light source (1) is placed on the inside near surface of the optical element (4) that need to carry out the pollutant cleaning, and the light that sends when making its work (10) is applied to the surface that optical element (4) needs cleaning;
During flash light source (1) work, gas purging head (3) is used for gas jet (8), and this gas jet (8) acts on optical element (4) and needs on vacuum cavity (5) inner surface of cleaning, reacts or taken away by air-flow at the pollutant (9) of flash light source (1) effect lower optical element (4) surface and the release of vacuum cavity (5) inner surface.
2. the device that optics original paper surface contaminant is cleared up according to claim 1 is characterized in that: the gas (8) that gas purging head (3) sprays is the mixture of inorganic gas or organic volatile gas or above-mentioned gas.
3. the device that optics original paper surface contaminant is cleared up according to claim 1, it is characterized in that: inorganic gas is inert gas, hydrogen, nitrogen, organic volatile gas is alcohol, acetone.
4. the device that optics original paper surface contaminant is cleared up according to claim 1, it is characterized in that: flash light source (1) is the high power density light source, the light action that sends is on optical element (4) surface or during vacuum cavity (5) inner surface, make and be deposited on these lip-deep pollutants (9) and discharge from the surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas (8) and form new gas componant by vacuum unit (6) extraction vacuum cavity (5).
5. the device that optics original paper surface contaminant is cleared up according to claim 4, it is characterized in that: described high power density light source comprises xenon flash lamp, Halogen lamp LED, Solid State Laser light source.
6. method that optics original paper surface contaminant is cleared up, it is characterized in that: the method comprises the steps:
Flash light source (1) is placed on the optical element (4) that need to carry out pollutant cleaning and the inside near surface of vacuum cavity (5), and the light action that sends when making its work is to the surface that needs cleaning;
After adopting vacuum unit (6) that vacuum cavity (5) is vacuumized, open flash generator (2) and make flash light source (1) work, and use simultaneously gas purging head (3) to the surperficial blow gas (8) of needs cleaning;
The light action that flash light source (1) sends is on optical element (4) surface or during vacuum cavity (5) inner surface, make and be deposited on these lip-deep pollutants (9) and discharge from the surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas (8) and form new gas componant by vacuum unit (6) extraction vacuum cavity (5).
7. the method that optics original paper surface contaminant is cleared up according to claim 6, it is characterized in that: adopt vacuum unit (6) that vacuum cavity (5) is vacuumized and simultaneously the inner sweeping head (3) that adopts of vacuum cavity (5) blown continuously to vacuum cavity (5) inside, then open flash generator (2) and make flash light source (1) work, the pollutant that discharges (9) is extracted out vacuum cavity (5) by vacuum unit (6) together with purge gas (8).
8. the method that optics original paper surface contaminant is cleared up according to claim 6, is characterized in that: when purge gas (3) is hydrogen or organic gas, carry out technological processing for explosion protection feature at vacuum unit (6) exhaust outlet.
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| CN201310038460.9A CN103100539B (en) | 2013-01-31 | 2013-01-31 | Device and method for decontaminating surface of optical element |
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| CN201310038460.9A CN103100539B (en) | 2013-01-31 | 2013-01-31 | Device and method for decontaminating surface of optical element |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103894372A (en) * | 2014-03-31 | 2014-07-02 | 中国科学院上海光学精密机械研究所 | Online observing and removing device for dust on surfaces of transmission mirrors and implementation method of online observing and removing device |
| CN104165882A (en) * | 2014-08-29 | 2014-11-26 | 四川九高科技有限公司 | Gas input device and Raman spectrometer comprising gas input device |
| CN104226637A (en) * | 2014-07-18 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Hydrogen atom collection device and cleaning method for cleaning contaminated optical component |
| CN105215008A (en) * | 2015-09-28 | 2016-01-06 | 中国科学院半导体研究所 | Extract the gas nozzle structure of erase residual waste gas |
| CN106370301A (en) * | 2016-08-24 | 2017-02-01 | 中国科学院合肥物质科学研究院 | Moisture-proof and anti-pollution diversion nitrogen purging protection system for space-borne atmospheric environment detector |
| CN108906763A (en) * | 2018-05-16 | 2018-11-30 | 深圳仕上电子科技有限公司 | Utilize the method for acetone detergent solution removing workpiece surface film |
| CN110252737A (en) * | 2019-05-13 | 2019-09-20 | 江苏大学 | A kind of flash of light cleaning equipment and method |
| CN112605055A (en) * | 2020-11-09 | 2021-04-06 | 中广核核电运营有限公司 | Component cleaning device |
| CN112718702A (en) * | 2020-12-30 | 2021-04-30 | 中国科学院微电子研究所 | Controllable microlens array cleaning device |
| WO2021208825A1 (en) * | 2020-04-14 | 2021-10-21 | 深圳光峰科技股份有限公司 | Photoelectric device provided with anti-contamination appartus |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103894372A (en) * | 2014-03-31 | 2014-07-02 | 中国科学院上海光学精密机械研究所 | Online observing and removing device for dust on surfaces of transmission mirrors and implementation method of online observing and removing device |
| CN104226637A (en) * | 2014-07-18 | 2014-12-24 | 中国科学院长春光学精密机械与物理研究所 | Hydrogen atom collection device and cleaning method for cleaning contaminated optical component |
| CN104226637B (en) * | 2014-07-18 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | For cleaning hydrogen atom collection device and the purging method of contaminated optical element |
| CN104165882A (en) * | 2014-08-29 | 2014-11-26 | 四川九高科技有限公司 | Gas input device and Raman spectrometer comprising gas input device |
| CN105215008A (en) * | 2015-09-28 | 2016-01-06 | 中国科学院半导体研究所 | Extract the gas nozzle structure of erase residual waste gas |
| CN106370301A (en) * | 2016-08-24 | 2017-02-01 | 中国科学院合肥物质科学研究院 | Moisture-proof and anti-pollution diversion nitrogen purging protection system for space-borne atmospheric environment detector |
| CN108906763A (en) * | 2018-05-16 | 2018-11-30 | 深圳仕上电子科技有限公司 | Utilize the method for acetone detergent solution removing workpiece surface film |
| CN110252737A (en) * | 2019-05-13 | 2019-09-20 | 江苏大学 | A kind of flash of light cleaning equipment and method |
| CN110252737B (en) * | 2019-05-13 | 2022-04-26 | 江苏大学 | Flash cleaning equipment and method |
| WO2021208825A1 (en) * | 2020-04-14 | 2021-10-21 | 深圳光峰科技股份有限公司 | Photoelectric device provided with anti-contamination appartus |
| CN112605055A (en) * | 2020-11-09 | 2021-04-06 | 中广核核电运营有限公司 | Component cleaning device |
| CN112718702A (en) * | 2020-12-30 | 2021-04-30 | 中国科学院微电子研究所 | Controllable microlens array cleaning device |
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| CN103100539B (en) | 2015-04-15 |
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