CN103100539B - Device and method for decontaminating surface of optical element - Google Patents
Device and method for decontaminating surface of optical element Download PDFInfo
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- CN103100539B CN103100539B CN201310038460.9A CN201310038460A CN103100539B CN 103100539 B CN103100539 B CN 103100539B CN 201310038460 A CN201310038460 A CN 201310038460A CN 103100539 B CN103100539 B CN 103100539B
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- vacuum cavity
- optical element
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Abstract
The invention discloses a device and a method for decontaminating a surface of an optical element. The device comprises a vacuum chamber (5), a flashlight light source (1) positioned inside the vacuum chamber (5), an air purging head (3), the optical element (4), a flashlight power source (2) positioned outside the vacuum chamber (5) and a vacuum unit (6). The flashlight power source (2) is connected with the flashlight light source (1) through an electrode lead (7) which passes through the vacuum chamber (5) and provides working voltage for the flashlight light source (1). The flashlight light source (1) is placed near the inner surface of the optical element (4) which needs decontaminating, and light rays (10) given out by the flashlight light source (1) acts on the optical element (4) surface which needs decontaminating. The device for decontaminating the surface of the optical element is capable of removing absorbate and pollutant on the surface of the optical element, the inner surface of the vacuum cavity and the surface of materials, the system and the structure of the device are simple, and the device is easy to operate.
Description
Technical field
The present invention relates to a kind of material surface adsorbate high to purity requirements, apparatus and method that pollutant is cleared up, be specially adapted to the cleaning of pollutant of optical element, vacuum cavity surface deposition, belong to optics, technical field of vacuum.
Background technology
In high power strong laser and application system, in the exposure system of semiconductor technology, the transmission of light laser and the optical element of convergence, generally be placed on vacuum system or fill in the vacuum system of protective gas, after working long hours, at optical element surface, because light laser is applied to light path with the various parts of exterior domain on system inner surface, the pollutant that material produces can adsorb or be deposited on optical element surface, these pollutants will affect transmitance and the beam quality of optical element, and because the reduction of transmitance produces fuel factor, harmful effect is produced to optical element.
Therefore, after waiting optical element surface pollutant to acquire a certain degree, it is very important for how carrying out cleaning to the pollution of optical element.Require in very high system for other vacuum industry, semicon industries etc. to material cleanliness simultaneously, removing also very important to the pollutant of material surface, therefore how the pollutant in system being carried out removing fast have extraordinary application prospect under the quick prerequisite not producing large impact to system works.
The mode such as systemic contamination thing removing of the pollutant cleaning utilized under action of plasma, mode of washing is had in prior art, need element is removed from system or likely damages optical element surface, process operation difficulty is large, is not suitable for on-the-spot cleaning demand fast.
Summary of the invention
Technical problem: the object of this invention is to provide a kind of adopt pollutant to be excited from optical element surface or vacuum cavity inner surface under high light effect discharge, and adopt gas purging mode, jointly pollutant and purge gas is extracted out vacuum cavity by vacuum system, adopt the purge gas such as hydrogen simultaneously, can make to be deposited on the optical surface carbon pollutant large to performance impact and change the gas componants such as methane into and exclude system.The method and device possess the feature of carrying out the removing of material surface pollutant fast, and system architecture is simple to operation.
Technical scheme: for solving the problems of the technologies described above, the invention provides a kind of device that optical component surface contaminant is cleared up, this device comprise vacuum cavity, be located at the flash light source of vacuum cavity inside, gas purging head, optical element, the flash generator being located at vacuum cavity outside, vacuum pump set;
Flash generator is by be connected with flash light source through the contact conductor of vacuum cavity and to provide operating voltage for it;
Flash light source be placed on need the optical element carrying out pollutant cleaning interior surface near, make the effect of light that sends during its work need the surface of cleaning to optical element;
During flash light source work, gas purging head is used for gas jet, and this gas jet acts on optical element and needs on the vacuum cavity inner surface of cleaning, under flash light source effect, the pollutant of optical element surface and the release of vacuum cavity inner surface reacts or is taken away by air-flow.
Preferably, the gas that gas purging head sprays is the mixture of inorganic gas or organic volatile gas or above-mentioned gas.
Preferably, inorganic gas is hydrogen, nitrogen, and organic volatile gas is alcohol, acetone.
Preferably, flash light source is high power density light source, the light action sent is when optical element surface or vacuum cavity inner surface, deposition pollutant is on these surfaces discharged from surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas and form new gas componant and extracted out vacuum cavity by vacuum pump set.
Preferably, described high power density light source comprises xenon flash lamp, Halogen lamp LED, Solid State Laser light source.
Present invention also offers a kind of method of clearing up optical component surface contaminant, the method comprises the steps:
Flash light source is placed on to be needed to carry out near the optical element of pollutant cleaning and the interior surface of vacuum cavity, makes the light action sent during its work to the surface needing cleaning;
After adopting vacuum pump set to vacuumize vacuum cavity, open flash generator and make flash light source work, and simultaneously with the surperficial blow gas of gas purging head to needs cleaning.
The light action that flash light source sends is when optical element surface or vacuum cavity inner surface, deposition pollutant is on these surfaces discharged from surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas and form new gas componant and extracted out vacuum cavity by vacuum pump set;
Preferably, adopt vacuum pump set to vacuumize vacuum cavity and adopt sweeping head to blow continuously to vacuum cavity inside to vacuum cavity inside simultaneously, then open flash generator and make flash light source work, the pollutant discharged is extracted out vacuum cavity by vacuum pump set together with purge gas.
Preferably, when purge gas be hydrogen or organic gas time, carry out technological processing for explosion protection feature at vacuum pump set exhaust outlet.
Beneficial effect: compared with prior art, tool of the present invention has the following advantages: possess the removing carrying out optical element surface, vacuum cavity inner surface, material surface adsorbate, pollutant fast, structure is simple to operation.
Accompanying drawing explanation
Fig. 1 is the device schematic diagram cleared up optical element surface pollutant,
Wherein have: flash light source 1, flash generator 2, gas purging head 3, optical element 4, vacuum cavity 5, vacuum pump set 6, contact conductor 7, sweeping head blow body 8 of emanating, light 10 that pollutant 9, the flash light source of optical element surface release send.
Detailed description of the invention
The device cleared up optical component surface contaminant provided by the invention, this device comprises vacuum cavity 5, is located at the flash light source 1 of vacuum cavity 5 inside, gas purging head 3, optical element 4, the flash generator 2 being located at vacuum cavity 5 outside, vacuum pump set 6.
Flash generator 2 to be connected with flash light source 1 by the contact conductor 7 through vacuum cavity 5 and to provide operating voltage for it.
Flash light source 1 is placed near the interior surface of the optical element 4 needing to carry out pollutant cleaning, makes the light 10 sent during its work be applied to the surface of optical element 4 needs cleaning.
When flash light source 1 works, gas purging head 3 is for gas jet 8, and this gas jet 8 acts on optical element 4 and needs on vacuum cavity 5 inner surface of cleaning, under flash light source 1 acts on, the pollutant 9 of optical element 4 surface and the release of vacuum cavity 5 inner surface reacts or is taken away by air-flow.
In order to protect optical element; and avoid the chemical reaction be harmful to occur; the gas 8 that gas purging head sprays; the inorganic gas such as inert gas, hydrogen, nitrogen or organic volatile gas such as alcohol, acetone or their mixture; particularly adopt hydrogen; affect serious carbon pollutant to optical element surface, biochemical reaction will be issued in high light effect, generate the gas componants such as methane and also extracted out vacuum cavity by vacuum pump set.The material such as alcohol, acetone does not produce pollution to system, easily removes from vacuum cavity 5, is also conventional cleaning solvent simultaneously, therefore also can be used as purge gas.But owing to can produce blast when hydrogen and the organic gas such as alcohol, acetone reach finite concentration in atmosphere, the content of therefore tackling corresponding composition at vacuum pump set exhaust outlet controls, and carries out technological processing for explosion protection feature simultaneously.Adopt inert gas to be because inert gas does not produce chemical reaction to vacuum cavity 5 internal material and brings new pollution, under high light effect, likely form weakly ionized effects on surface simultaneously and clear up.
Purge gas can make to purge in short-term when flash lamp operation, also can flash lamp be used to clear the pollution off in continuous purge.
Fully discharge to enable optical surface contamination thing, and produce possible with chemical reaction that the is purge gas such as hydrogen, luminous intensity, the power density requirements of flash light source are high, therefore can the high power density light source such as strobe pulse xenon lamp, Halogen lamp LED, Solid State Laser light source to flash light source 1.The light action that these light sources are launched is when optical element surface or vacuum cavity inner surface, deposition pollutant 9 on these surfaces can be made to discharge from surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas 8 and form new gas componant and extracted out vacuum cavity 5 by vacuum pump set.
Present invention also offers a kind of method of clearing up optical component surface contaminant, the method comprises the steps:
Flash light source 1 is placed near the interior surface of the optical element 4 and vacuum cavity 5 needing to carry out pollutant cleaning, makes the light action sent during its work to the surface needing cleaning;
The light action that flash light source 1 sends is when optical element 4 surface or vacuum cavity 5 inner surface, deposition pollutant 9 is on these surfaces discharged from surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas 8 and form new gas componant and extracted out vacuum cavity 5 by vacuum pump set 6;
After adopting vacuum pump set 6 pairs of vacuum cavities 5 to vacuumize, open flash generator 2 and flash light source 1 is worked, and simultaneously with the surperficial blow gas 8 of gas purging head 3 to needs cleaning.
Adopt vacuum pump set 6 pairs of vacuum cavities 5 to vacuumize and adopt sweeping head 3 pairs of vacuum cavities 5 inside to blow continuously to vacuum cavity 5 inside simultaneously, then opening flash generator 2 makes flash light source 1 work, and the pollutant 9 discharged is extracted out vacuum cavity 5 by vacuum pump set 6 together with purge gas 8.
When purge gas 3 be hydrogen or organic gas time, carry out technological processing for explosion protection feature at vacuum pump set 6 exhaust outlet.
Embodiment 1
Adopt stainless steel material to make vacuum cavity, and be connected as vacuum system with the vacuum pump set that mechanical pump, molecular pump form, there is the optical element of optical system vacuum system inside, adopts vacuum pump set to vacuumize whole system.For removing the pollutant on optical element and vacuum cavity inner surface, in vacuum cavity 5, placing xenon flash lamp, and be connected with the pulse xenon lamp power source be placed on outside vacuum cavity by contact conductor.On optical system top, purging shower nozzle is set, when xenon flash lamp flash of light work, hydrogen gas stream is sprayed in shower nozzle, the light that flash lamp sends can be applied to optical element surface and vacuum cavity surface, the pollutant be deposited on surface is discharged, and the pollutant that optical element surface discharges can be taken away by the hydrogen purging shower nozzle ejection, and can generate the gases such as methane with carbon pollutant generation chemical reaction, and extracted by vacuum pump set, reach the effect cleared the pollution off.
Embodiment 2
When vacuum cavity 5 is larger, on the basis of example 1, can many xenon flash lamps be set, the surface needing to clear up pollutant all can be irradiated by light.
The foregoing is only better embodiment of the present invention; protection scope of the present invention is not limited with above-mentioned embodiment; in every case those of ordinary skill in the art modify or change according to the equivalence that disclosed content is done, and all should include in the protection domain recorded in claims.
Claims (3)
1. to the device that optical component surface contaminant is cleared up, it is characterized in that: this device comprises vacuum cavity (5), be located at the inner flash light source (1) of vacuum cavity (5), gas purging head (3), optical element (4), be located at vacuum cavity (5) outside flash generator (2), vacuum pump set (6);
Flash generator (2) is by be connected with flash light source (1) through the contact conductor (7) of vacuum cavity (5) and to provide operating voltage for it;
Flash light source (1) is placed near the interior surface of the optical element (4) needing to carry out pollutant cleaning, makes the light (10) sent during its work be applied to the surface of optical element (4) needs cleaning;
During flash light source (1) work, gas purging head (3) is for gas jet (8), and this gas jet (8) acts on optical element (4) and needs on vacuum cavity (5) inner surface of cleaning, under flash light source (1) effect, the pollutant (9) of optical element (4) surface and the release of vacuum cavity (5) inner surface reacts or is taken away by air-flow;
The gas (8) that gas purging head (3) sprays is the mixture of inorganic gas or organic volatile gas or above-mentioned gas;
Inorganic gas is inert gas, hydrogen, nitrogen, and organic volatile gas is alcohol, acetone;
Flash light source (1) is high power density light source, the light action sent is when optical element (4) surface or vacuum cavity (5) inner surface, deposition pollutant on these surfaces (9) is discharged from surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas (8) and form new gas componant and extracted out vacuum cavity (5) by vacuum pump set (6);
Described high power density light source comprises xenon flash lamp, Halogen lamp LED, Solid State Laser light source.
2. to the method that optical component surface contaminant is cleared up, it is characterized in that: the method comprises the steps:
Flash light source (1) is placed near the interior surface of optical element (4) and the vacuum cavity (5) needing to carry out pollutant cleaning, makes the light action sent during its work to the surface needing cleaning;
After adopting vacuum pump set (6) to vacuumize vacuum cavity (5), opening flash generator (2) makes flash light source (1) work, and uses gas purging head (3) to the surperficial blow gas (8) needing cleaning simultaneously;
The light action that flash light source (1) sends is when optical element (4) surface or vacuum cavity (5) inner surface, deposition pollutant on these surfaces (9) is discharged from surface, and the pollutant component that discharges of part is ionized, or react to produce with purge gas (8) and form new gas componant and extracted out vacuum cavity (5) by vacuum pump set (6);
Adopt vacuum pump set (6) to vacuumize vacuum cavity (5) and adopt sweeping head (3) to blow continuously to vacuum cavity (5) inside to vacuum cavity (5) inside simultaneously, then opening flash generator (2) makes flash light source (1) work, and the pollutant (9) discharged is extracted out vacuum cavity (5) by vacuum pump set (6) together with purge gas (8).
3. method of clearing up optical component surface contaminant according to claim 2, is characterized in that: when purge gas (3) be hydrogen or organic gas time, carry out technological processing for explosion protection feature at vacuum pump set (6) exhaust outlet.
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| CN201310038460.9A CN103100539B (en) | 2013-01-31 | 2013-01-31 | Device and method for decontaminating surface of optical element |
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| CN201310038460.9A CN103100539B (en) | 2013-01-31 | 2013-01-31 | Device and method for decontaminating surface of optical element |
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| CN103100539A CN103100539A (en) | 2013-05-15 |
| CN103100539B true CN103100539B (en) | 2015-04-15 |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103894372B (en) * | 2014-03-31 | 2016-01-06 | 中国科学院上海光学精密机械研究所 | Transmission mirror surface dirt is observed and removal device and implementation method thereof online |
| CN104226637B (en) * | 2014-07-18 | 2016-06-01 | 中国科学院长春光学精密机械与物理研究所 | For cleaning hydrogen atom collection device and the purging method of contaminated optical element |
| CN104165882B (en) * | 2014-08-29 | 2018-04-27 | 四川九高科技有限公司 | Raman spectrometer including gas input device |
| CN105215008B (en) * | 2015-09-28 | 2017-06-20 | 中国科学院半导体研究所 | Extract the gas nozzle structure of cleaning residual gas |
| CN106370301A (en) * | 2016-08-24 | 2017-02-01 | 中国科学院合肥物质科学研究院 | Moisture-proof and anti-pollution diversion nitrogen purging protection system for space-borne atmospheric environment detector |
| CN108906763A (en) * | 2018-05-16 | 2018-11-30 | 深圳仕上电子科技有限公司 | Utilize the method for acetone detergent solution removing workpiece surface film |
| CN110252737B (en) * | 2019-05-13 | 2022-04-26 | 江苏大学 | Flash cleaning equipment and method |
| CN113521972A (en) * | 2020-04-14 | 2021-10-22 | 深圳光峰科技股份有限公司 | Optoelectronic device with contamination prevention means |
| CN112605055A (en) * | 2020-11-09 | 2021-04-06 | 中广核核电运营有限公司 | Component cleaning device |
| CN112718702A (en) * | 2020-12-30 | 2021-04-30 | 中国科学院微电子研究所 | Controllable microlens array cleaning device |
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| CN102218415A (en) * | 2011-03-10 | 2011-10-19 | 大连理工大学 | Method and device for cleaning tokamak first mirror by vacuum ultraviolet laser |
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| JP2005040736A (en) * | 2003-07-24 | 2005-02-17 | Canon Inc | Washing method and apparatus of optical parts |
| JP2005268358A (en) * | 2004-03-17 | 2005-09-29 | Nikon Corp | Mirror cleaning device and optical illumination equipment |
| JP2006326477A (en) * | 2005-05-25 | 2006-12-07 | Toyota Motor Corp | Method for manufacturing catalyst for cleaning exhaust gas |
| US8507879B2 (en) * | 2006-06-08 | 2013-08-13 | Xei Scientific, Inc. | Oxidative cleaning method and apparatus for electron microscopes using UV excitation in an oxygen radical source |
| JP5098019B2 (en) * | 2007-04-27 | 2012-12-12 | ギガフォトン株式会社 | Extreme ultraviolet light source device |
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| CN102218415A (en) * | 2011-03-10 | 2011-10-19 | 大连理工大学 | Method and device for cleaning tokamak first mirror by vacuum ultraviolet laser |
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