CN103098160B - 用于赝电容能量存储的纳米结构电极 - Google Patents

用于赝电容能量存储的纳米结构电极 Download PDF

Info

Publication number
CN103098160B
CN103098160B CN201180042946.9A CN201180042946A CN103098160B CN 103098160 B CN103098160 B CN 103098160B CN 201180042946 A CN201180042946 A CN 201180042946A CN 103098160 B CN103098160 B CN 103098160B
Authority
CN
China
Prior art keywords
pseudocapacitive
substrate
nanopillars
layer
aao
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN201180042946.9A
Other languages
English (en)
Chinese (zh)
Other versions
CN103098160A (zh
Inventor
R·A·海特
S·M·罗斯纳格尔
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Core Usa Second LLC
GlobalFoundries Inc
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of CN103098160A publication Critical patent/CN103098160A/zh
Application granted granted Critical
Publication of CN103098160B publication Critical patent/CN103098160B/zh
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G9/00Electrolytic capacitors, rectifiers, detectors, switching devices, light-sensitive or temperature-sensitive devices; Processes of their manufacture
    • H01G9/004Details
    • H01G9/04Electrodes or formation of dielectric layers thereon
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • H01G11/24Electrodes characterised by structural features of the materials making up or comprised in the electrodes, e.g. form, surface area or porosity; characterised by the structural features of powders or particles used therefor
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • H01G11/26Electrodes characterised by their structure, e.g. multi-layered, porosity or surface features
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • H01G11/30Electrodes characterised by their material
    • H01G11/32Carbon-based
    • H01G11/36Nanostructures, e.g. nanofibres, nanotubes or fullerenes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01GCAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
    • H01G11/00Hybrid capacitors, i.e. capacitors having different positive and negative electrodes; Electric double-layer [EDL] capacitors; Processes for the manufacture thereof or of parts thereof
    • H01G11/22Electrodes
    • H01G11/30Electrodes characterised by their material
    • H01G11/46Metal oxides
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/13Energy storage using capacitors
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Nanotechnology (AREA)
  • Electric Double-Layer Capacitors Or The Like (AREA)
  • Battery Electrode And Active Subsutance (AREA)
  • Secondary Cells (AREA)
  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
CN201180042946.9A 2010-09-07 2011-07-20 用于赝电容能量存储的纳米结构电极 Expired - Fee Related CN103098160B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/876,441 US8599533B2 (en) 2010-09-07 2010-09-07 Nanostructure electrode for pseudocapacitive energy storage
US12/876,441 2010-09-07
PCT/US2011/044643 WO2012033570A1 (en) 2010-09-07 2011-07-20 Nanostructure electrode for pseudocapacitive energy storage

Publications (2)

Publication Number Publication Date
CN103098160A CN103098160A (zh) 2013-05-08
CN103098160B true CN103098160B (zh) 2016-12-07

Family

ID=45770566

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180042946.9A Expired - Fee Related CN103098160B (zh) 2010-09-07 2011-07-20 用于赝电容能量存储的纳米结构电极

Country Status (8)

Country Link
US (1) US8599533B2 (https=)
JP (1) JP5629381B2 (https=)
CN (1) CN103098160B (https=)
DE (1) DE112011102970T5 (https=)
GB (1) GB2497040B (https=)
RU (1) RU2521083C2 (https=)
TW (1) TWI497547B (https=)
WO (1) WO2012033570A1 (https=)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8797715B2 (en) * 2011-03-23 2014-08-05 Empire Technology Development Llc Capacitor with parallel nanotubes
JP2014535124A (ja) 2011-09-30 2014-12-25 インテル コーポレイション エネルギー貯蔵デバイスのエネルギー密度及び達成可能な電力出力を増やす方法
US9396883B2 (en) * 2013-04-26 2016-07-19 Intel Corporation Faradaic energy storage device structures and associated techniques and configurations
CA2851434A1 (en) 2013-05-03 2014-11-03 The Governors Of The University Of Alberta Carbon nanosheets
US10090376B2 (en) 2013-10-29 2018-10-02 Micron Technology, Inc. Methods of forming semiconductor device structures, and methods of forming capacitor structures
WO2015112628A1 (en) * 2014-01-23 2015-07-30 Masdar Institute Of Science And Technology Fabrication of enhanced supercapacitors using atomic layer deposition of metal oxide on nanostructures
CN106252071B (zh) * 2016-08-05 2018-04-03 南京理工大学 一种高比容量纳米电介质电容器及其制备方法
CN106449158B (zh) * 2016-09-12 2018-07-17 武汉理工大学 钛基底上镍锰复合氧化物纳米菱柱阵列电极及其制备方法
JP2017130669A (ja) * 2017-02-27 2017-07-27 インテル コーポレイション エネルギー貯蔵デバイスのエネルギー密度及び達成可能な電力出力を増やす方法
RU2678055C2 (ru) * 2017-07-14 2019-01-22 ООО "Нелан-оксид плюс" Способ получения эластичной алюмооксидной наномембраны
CN108133838B (zh) * 2017-12-21 2019-09-17 北京理工大学 一种基于飞秒激光复合阳极氧化制备赝电容电极的方法
EP3570307A1 (en) * 2018-05-18 2019-11-20 Murata Manufacturing Co., Ltd. Integrated energy storage component
RU2716700C1 (ru) * 2019-08-28 2020-03-16 Акционерное общество "Концерн "Созвездие" Способ модификации поверхности фольги для электролитических конденсаторов
CN114744211B (zh) * 2022-05-13 2024-03-29 南京邮电大学 一种超分支氧化的多孔金属负极集流体及其制备方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050142898A1 (en) * 2003-12-30 2005-06-30 Hyundai Motor Company Method for manufacturing a nano-structured electrode of metal oxide
US20070045692A1 (en) * 2005-08-31 2007-03-01 Samsung Electronics Co., Ltd. Nonvolatile memory devices and methods of manufacturing the same
WO2007125282A2 (en) * 2006-04-21 2007-11-08 Imperial Innovations Limited Energy storage device
US7623340B1 (en) * 2006-08-07 2009-11-24 Nanotek Instruments, Inc. Nano-scaled graphene plate nanocomposites for supercapacitor electrodes
CN101625930A (zh) * 2009-06-19 2010-01-13 东南大学 有序纳米管阵列结构电极材料及其制备方法和储能应用

Family Cites Families (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2800616A (en) 1954-04-14 1957-07-23 Gen Electric Low voltage electrolytic capacitor
US3652902A (en) * 1969-06-30 1972-03-28 Ibm Electrochemical double layer capacitor
RU2123738C1 (ru) * 1997-03-21 1998-12-20 Воронежский государственный технический университет Пористое покрытие для модификации поверхности фольги электролитического конденсатора
US6231744B1 (en) 1997-04-24 2001-05-15 Massachusetts Institute Of Technology Process for fabricating an array of nanowires
US6205016B1 (en) 1997-06-04 2001-03-20 Hyperion Catalysis International, Inc. Fibril composite electrode for electrochemical capacitors
US6129901A (en) 1997-11-18 2000-10-10 Martin Moskovits Controlled synthesis and metal-filling of aligned carbon nanotubes
KR100403611B1 (ko) * 2000-06-07 2003-11-01 삼성전자주식회사 금속-절연체-금속 구조의 커패시터 및 그 제조방법
JP4002829B2 (ja) 2000-09-06 2007-11-07 日立マクセル株式会社 電気化学素子用電極材料とその製造方法および電気化学素子
AU2002307151A1 (en) * 2001-04-06 2002-10-21 Carnegie Mellon University A process for the preparation of nanostructured materials
US7355216B2 (en) * 2002-12-09 2008-04-08 The Regents Of The University Of California Fluidic nanotubes and devices
CA2478004A1 (en) * 2003-08-18 2005-02-18 Wilson Greatbatch Technologies, Inc. Use of pad printing in the manufacture of capacitors
US7400490B2 (en) * 2005-01-25 2008-07-15 Naturalnano Research, Inc. Ultracapacitors comprised of mineral microtubules
CN101283422A (zh) * 2005-09-22 2008-10-08 本田技研工业株式会社 可极化电极和双电层电容器
KR100760530B1 (ko) 2005-10-27 2007-10-04 한국기초과학지원연구원 음극산화알루미늄 템플릿을 이용한 산화망간 나노튜브 또는나노막대의 제조방법
RU2308112C1 (ru) * 2005-12-26 2007-10-10 Общество с ограниченной ответственностью "Восток" Анодная многослойная пленка
JP2008192695A (ja) * 2007-02-01 2008-08-21 Matsushita Electric Ind Co Ltd 電極体、その製造方法及び電気二重層キャパシタ
US8085522B2 (en) * 2007-06-26 2011-12-27 Headway Technologies, Inc. Capacitor and method of manufacturing the same and capacitor unit
WO2009123666A2 (en) * 2007-12-19 2009-10-08 University Of Maryland College Park High-powered electrochemical energy storage devices and methods for their fabrication
US8389157B2 (en) * 2008-02-22 2013-03-05 Alliance For Sustainable Energy, Llc Oriented nanotube electrodes for lithium ion batteries and supercapacitors
US7995952B2 (en) * 2008-03-05 2011-08-09 Xerox Corporation High performance materials and processes for manufacture of nanostructures for use in electron emitter ion and direct charging devices

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20050142898A1 (en) * 2003-12-30 2005-06-30 Hyundai Motor Company Method for manufacturing a nano-structured electrode of metal oxide
US20070045692A1 (en) * 2005-08-31 2007-03-01 Samsung Electronics Co., Ltd. Nonvolatile memory devices and methods of manufacturing the same
WO2007125282A2 (en) * 2006-04-21 2007-11-08 Imperial Innovations Limited Energy storage device
US7623340B1 (en) * 2006-08-07 2009-11-24 Nanotek Instruments, Inc. Nano-scaled graphene plate nanocomposites for supercapacitor electrodes
CN101625930A (zh) * 2009-06-19 2010-01-13 东南大学 有序纳米管阵列结构电极材料及其制备方法和储能应用

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
Synthesis of Single-Crystal Tetragonal α-MnO2 Nanotubes;J.Luo, et al;《The Journal of Physical Chemicstry Letters》;20080726;第112卷;全文 *

Also Published As

Publication number Publication date
GB2497040A (en) 2013-05-29
JP5629381B2 (ja) 2014-11-19
DE112011102970T5 (de) 2013-08-08
JP2013541836A (ja) 2013-11-14
GB2497040B (en) 2014-06-18
CN103098160A (zh) 2013-05-08
RU2521083C2 (ru) 2014-06-27
US20120057273A1 (en) 2012-03-08
TWI497547B (zh) 2015-08-21
WO2012033570A1 (en) 2012-03-15
US8599533B2 (en) 2013-12-03
RU2012106418A (ru) 2013-10-27
GB201304363D0 (en) 2013-04-24
TW201243888A (en) 2012-11-01

Similar Documents

Publication Publication Date Title
CN103098160B (zh) 用于赝电容能量存储的纳米结构电极
CN110997986B (zh) 多孔固体材料和制备方法
US8503161B1 (en) Supercapacitor cells and micro-supercapacitors
CN107710473B (zh) 制造高纵横比结构的装置和方法
US8675346B2 (en) Mesoporous nanocrystalline film architecture for capacitive storage devices
US20150235776A1 (en) Conductive material with charge-storage material in voids
US20080218939A1 (en) Nanowire supercapacitor electrode
Klankowski et al. Higher-power supercapacitor electrodes based on mesoporous manganese oxide coating on vertically aligned carbon nanofibers
WO2014011294A2 (en) Flexible and transparent supercapacitors and fabrication using thin film carbon electrodes with controlled morphologies
KR20100101885A (ko) 전이금속산화물 코팅층을 가지는 금속 전극의 제조 방법 및그에 의해 제조된 금속 전극
CN110574132B (zh) 用于片上超级电容器的蚀刻的硅上的沉积的碳膜
CN116097383A (zh) 用于超级电容器应用的在微结构化的金属基底上的直接生长的交联的碳纳米管
US9099241B1 (en) Enhanced charge-storage electrochemical double layer capacitors with nanoscale electrolyte confinement tunability, and a method for production thereof to obtain axi-symmetric, high surface area electrode growth
Liu et al. Electrochemical materials design for micro-supercapacitors
US20260112550A1 (en) Fabricating an electrode for a lithium-ion capacitor
EP4047626A1 (en) Superimposed multilayer nanostructure for a supercapacitor electrode
TW201414879A (zh) 核-殼結構的製備方法
Sherrill Single to multi-dimensional AAO template synthesized heterogeneous nanostructures for electrochemical energy storage

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
C14 Grant of patent or utility model
GR01 Patent grant
TR01 Transfer of patent right
TR01 Transfer of patent right

Effective date of registration: 20171103

Address after: Grand Cayman, Cayman Islands

Patentee after: GLOBALFOUNDRIES INC.

Address before: American New York

Patentee before: Core USA second LLC

Effective date of registration: 20171103

Address after: American New York

Patentee after: Core USA second LLC

Address before: American New York

Patentee before: International Business Machines Corp.

CF01 Termination of patent right due to non-payment of annual fee
CF01 Termination of patent right due to non-payment of annual fee

Granted publication date: 20161207

Termination date: 20190720