CN103071819B - Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating - Google Patents
Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating Download PDFInfo
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Abstract
The invention discloses a Ti/TiN/MaN composite coating on the surface of a cutter. The Ti/TiN/MaN composite coating is divided into three layers, namely a Ti transition layer, a TiN layer and an (Al, Ti, Cr) N layer in sequence outwards from the surface of the cutter, wherein the thicknesses of the Ti transition layer, the TiN layer and the (Al, Ti, Cr) N layer are respectively 50-200nm, or 100-500nm or 2-5Mu m; the tissue structure of the Ti/TiN/MaN composite coating is a nanocrystalline structure; the (111) surface diffraction intensity I of the Ti/TiN/MaN composite coating in X-ray diffraction is lower than 400 and the surface of the Ti/TiN/MaN composite coating is 22-33GPa in hardness and 1-2-level in indentation grade. The invention also discloses a preparation method of the Ti/TiN/MaN composite coating. According to the invention, because a plasma reinforced intermediate-frequency reactive magnetron sputtering technology is used as the preparation method of the composite coating, not only is sputtering evaporation of various reactants facilitated, but also the obtained Ti/TiN/MaN composite coating is dense in tissue, high in purity, flat in surface, high in binding force with a cutter and good in wear resistance, the segregation of film components can be furthest restricted, the ionization rate and the deflection property are greatly improved, and therefore the life of the Ti/TiN/MaN composite coating in cutting machining of stainless steel is prolonged by 50-100 percent; and in addition, the Ti/TiN/MaN composite coating is simple in process, easy to master and control and is convenient for industrial production of a cutter coating.
Description
Technical field
The invention belongs to tool and mould surface hard coating and preparing technical field thereof, be specifically related to a kind of cutting tool surface Ti/TiN/MaN composite coating and preparation method thereof.
Background technology
The physics coating technology that industrial production adopts usually mainly contains two kinds: magnetic controlled sputtering ion plating and cathodic arc ion plating.Though the coating adopting magnetic controlled sputtering ion plating technology to obtain have organize fine and closely woven, purity is high, surfacing, and is beneficial to the advantages such as the sputter vaporization of all kinds of reactant, low and around plating property difference the shortcoming of its ionization level existed limits its development.And though cathodic arc ion plating has that ionization level is high, deposition velocity is fast, film-substrate cohesion is good, coating around advantages such as plating property are good, but exists and organizes the phenomenon such as thick, surface irregularity, " drop " and have the deficiencies such as certain requirement for the character of reactant.Based on above factor, thereafter the plasma being intended to promote magnetic controlled sputtering ion plating ionization level occurred strengthens magnetic controlled sputtering ion plating technology and is more and more applied to the production of cutter coat, its advantage not only with common magnetron sputtering ion plating has again the characteristic that cathodic arc ion plating ionization level is high, therefore gained coating product has better combination property, meanwhile, the preparation of multielement coating is made to become possibility.
In recent years, though because the ternary coatings such as TiAlN, CrAlN and CrTiN have good physics, chemical property, be widely used in industrial production, but along with cutting speed, to improve constantly with DRY CUTTING mode universal, and the performance such as wear-resisting, anti-oxidant of this type coating cannot meet instructions for use.Research shows, (Al, Ti, Cr) N composite coating has than the better wearability of TiAlN ternary coating and non-oxidizability.Adding of Cr element can affect the growth of coating and the formation of wear-resisting phase to a certain extent, and effectively can alleviate the increase of coating stress, improves the adhesion of cutter and coating, extends the service life of coated cutting tool.Though patent ZL200910220272.1 and patent ZL201010596751.6 discloses a kind of method that cathodic arc ion plating prepares CrTiAlN quaternary coating, but what the method adopted is that the mode that TiAl target and Cr target split is carried out, therefore there is the problems such as complex process, coating uniformity, lack of homogeneity.According to composite alloy material as target, for cathode arc ion technology, by the impact of saturated vapour pressure, easily cause the segregation of thin film composition, thus cause the reduction of properties of coating.
Summary of the invention
The object of the invention is the shortcoming that there is combination property and poor stability for existing TiAlN coating in the industrial production, a kind of tool surface Ti/TiN/MaN composite coating of excellent performance is provided.
Another object of the present invention provides a kind of preparation method of above-mentioned tool surface Ti/TiN/MaN composite coating, and the method technique is simple, and preparation cost is cheap, is easy to suitability for industrialized production.
Tool surface Ti/TiN/MaN composite coating provided by the invention [Ma(multicomponent alloy)], this composite coating is three layers, outwards be respectively Ti transition zone, TiN layer and MaN layer successively from tool surface, wherein the thickness of Ti transition zone is 50 ~ 200nm; The thickness of TiN layer is 100 ~ 500nm; The thickness of Ma N layer is 2 ~ 5 μm, and its institutional framework is nanocrystalline structure, and at (111) face diffracted intensity I of X-ray diffraction lower than 400.
Ma in the MaN layer of above-mentioned tool surface composite coating is (Al, Ti, Cr), and the case hardness of its composite coating is 22 ~ 33GPa, and impression grade is 1 ~ 2 grade.
Above-mentioned cutter is carbide alloy or high-speed steel tool.
The preparation method of above-mentioned tool surface Ti/TiN/MaN composite coating provided by the invention, the method is first by after cutter cleaning-drying to be plated, is placed in coating chamber and is coated with by following processing step and condition:
1) first 5.0 × 10 are evacuated to coating chamber
-3pa, then passes into argon gas, makes total pressure in coating machine be 2.5 × 10
-1~ 4.0 × 10
-1pa, and control power 7 ~ 9KW, to cutter heating to be plated 60 ~ 150min;
2) at pressure 1.5 × 10
-1~ 2.5 × 10
-1under the argon shield of Pa, control Dc bias-100 ~-200V, pulsed bias-500 ~-800V is the plasma cleaning cutter 15 ~ 30min to be plated of 4 ~ 6KW with power;
3) under argon shield, strengthen source heating with plasma, be first coated with as evaporation source using Ti, and then pass into nitrogen and be coated with together with Ti;
4) under argon shield, maintain plasma and strengthen source and run, and with MF reactive magnetron sputtering Ma composite alloy material, pass into nitrogen simultaneously and carry out reaction and be coated with, then cool.
In above method the 3rd) the step concrete technology condition that is coated with transition zone Ti, TiN is:
1) be 8 × 10 at pressure
-2~ 1.5 × 10
-1under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 7.5 ~ 10KW, control Dc bias-100 ~-200V, under pulsed bias-300 ~-600V, be coated with 5 ~ 10min;
2) pass into the nitrogen of 70 ~ 150sccm, continue at power 7.5 ~ 10KW together with Ti evaporation source, under controlling Dc bias-100 ~-200V, be coated with 5 ~ 15min.
In above method the 4th) the step concrete technology condition that is coated with MaN wearing layer is:
With MF reactive magnetron sputtering sputtering Ma composite alloy material, its power is 3 ~ 5KW, and sputtering current is 3.0 ~ 8.0A, passes into the nitrogen of 30 ~ 80sccm while passing into argon gas 60 ~ 120sccm, and is coated with 150 ~ 300min at Dc bias-30 ~-80V.
Above method Ma composite alloy material used is Al
xti
ycr
1-X-Ycomposite alloy material, this composite alloy material configures four by being mutually 90 degree as target in coating machine, and composition is identical, and its aluminium titanium chromium atom ratio is 50 ~ 70:20 ~ 30:10 ~ 20, and purity is 99.99%.
Above method the 4th) cool time after step cutter plated film is 70 ~ 120min.
The present invention compared with prior art, has following good effect:
1. the preparation method of MF reactive magnetron sputtering technology as composite coating is strengthened owing to present invention employs plasma, thus the sputter vaporization of all kinds of reactant is not only conducive to, obtained coating is had organize fine and closely woven, purity is high, surfacing, and solve the difficult point of general magnetron sputtering technique, significantly improve ionization level and rich plating property, make it can be widely used in the suitability for industrialized production of cutter coat.
2. MF reactive magnetron sputtering method is strengthened to evaporate Al owing to present invention employs plasma
xti
ycr
1-X-Ycomposite alloy material, thus for multi-element coating, can suppress the segregation of thin film composition to greatest extent, guarantee the stability of coating performance, also reduces the complexity of coating process simultaneously and is coated with the cycle, making it be more suitable for suitability for industrialized production.
3. because Ti/TiN/ provided by the invention (Al, Ti, Cr) N composite coating is organized as nanocrystalline structure, thus with common (Ti, Al) the thick columanar structure of N coating compares, and organizes more fine and closely woven, and uniformity and the uniformity of coating hardness and thickness are better.
4. because Ti/TiN/ provided by the invention (Al, Ti, Cr) N composite coating is organized fine and closely woven, uniformity and the uniformity of coating layer thickness are better, thus compared with common TiAlN coating, have higher adhesion with cutter, the coating that can be coated with cathodic arc technique matches in excellence or beauty.
5. due to Ti/TiN/ (Al provided by the invention, Ti, Cr) the thick columnar structure of N composite coating is tending towards weakening, and presents fine and closely woven nanocrystalline structure, in addition the uniformity of case hardness and uniformity better, thus compared with common TiAlN coating, the cutter with Ti/ TiN/ (Al, Ti, Cr) N coating has better wearability, especially, in stainless machining, the life-span of coated cutting tool can improve 50 ~ 100%.
6. due to the present invention's employing is that plasma strengthens the preparation method of MF reactive magnetron sputtering technology as composite coating, and thus technique is simple, is easy to grasp control.
Accompanying drawing explanation
Fig. 1 is Ti/ TiN/TiAlN coating fracture apperance stereoscan photograph prepared by comparative example.
Fig. 2 is Ti/TiN/ (Al, Ti, Cr) N coating fracture apperance stereoscan photograph prepared by the present invention.
Fig. 3 is Ti/TiN/TiAlN film surface vickers indentation photo prepared by comparative example.
Fig. 4 is Ti/ TiN/ (Al, Ti, Cr) N thin film surface indentation pattern photo prepared by the present invention.
Fig. 5 is the X-ray diffraction spectrogram of Ti/TiN/TiAlN coating prepared by Ti/ TiN/ (Al, Ti, Cr) the N coating prepared of the present invention and comparative example.
Detailed description of the invention
Below by specific embodiment, the present invention is further illustrated, but protection content of the present invention is not limited to following examples.
What deserves to be explained is, the hardness of following examples and the cutter product prepared by comparative example adopts nanohardness tester TB15192-12-8-20, and by surperficial closing speed 10nm/s, the dark 200nm of minimum pressure, the dark 300nm condition of maximum pressure carries out testing.
Embodiment 1
Put into coating machine after first blasting treatment and Ultrasonic Cleaning being carried out to high-speed steel hobboing cutter by conventional method, then 5.0 × 10 are evacuated to coating chamber
-3pa, passes into argon gas, makes total pressure in coating machine be 3.5 × 10
-1pa, and control heating power 9KW to cutter heating 120min to be plated; At pressure 2.0 × 10
-1under the argon shield of Pa, the Dc bias controlling cutter is-200V, and pulsed bias-800V is the plasma cleaning cutter 30min to be plated of 6KW with power; Be 1.5 × 10 at pressure
-1under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 10KW, in Dc bias-200V, under pulsed bias-600V, be coated with 10min; Pass into the nitrogen of 150sccm, continue, at power 10KW together with Ti evaporation source, under Dc bias-200V, to be coated with 10min; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than the composite alloy material being 55:25:20, its power is 4.5KW, sputtering current is 6.0A, the nitrogen of 50sccm is passed into while passing into argon gas 100sccm, and be coated with 240min at Dc bias-80V, naturally, after cooling 90min, cutter can be taken out.
Recording hardness after this high-speed steel hobboing cutter applying Ti/TiN/ (Al, Ti, Cr) N composite coating is 23 ~ 30GPa; The thickness of Ti transition zone is 200nm, and the thickness of TiN layer is 300nm, and the thickness of (Al, Ti, Cr) N layer is 4 μm; Impression grade is 2 grades.
Embodiment 2
Put into coating machine after first blasting treatment and Ultrasonic Cleaning being carried out to high-speed steel drill by conventional method, then 5.0 × 10 are evacuated to coating chamber
-3pa, passes into argon gas, makes total pressure in coating machine be 2.5 × 10
-1pa, and control heating power 7KW to cutter heating 60min to be plated; At pressure 2.5 × 10
-1under the argon shield of Pa, the Dc bias controlling cutter is-100V, and pulsed bias-500V is the plasma cleaning cutter 15min to be plated of 4KW with power; Be 1.2 × 10 at pressure
-1under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 7.5KW, in Dc bias-100V, under pulsed bias-400V, be coated with 5min; Pass into the nitrogen of 110sccm, continue, at power 7.5KW together with Ti evaporation source, under Dc bias-130V, to be coated with 5min; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than the composite alloy material being 50:30:20, its power is 3KW, sputtering current is 3.0A, the nitrogen of 30sccm is passed into while passing into argon gas 60sccm, and be coated with 180min at Dc bias-50V, naturally, after cooling 70min, cutter can be taken out.
Recording hardness after this high-speed steel drill applying Ti/TiN/ (Al, Ti, Cr) N composite coating is 22 ~ 28GPa; The thickness of Ti transition zone is 50nm, and the thickness of TiN layer is 100nm, and the thickness of (Al, Ti, Cr) N layer is 2.8 μm; Impression grade is 2 grades.
Embodiment 3
Put into coating machine after first blasting treatment and Ultrasonic Cleaning being carried out to carbide-tipped milling cutter by conventional method, then 5.0 × 10 are evacuated to coating chamber
-3pa, passes into argon gas, makes total pressure in coating machine be 4.0 × 10
-1pa, and control heating power 9KW to cutter heating 150min to be plated; At pressure 1.8 × 10
-1under the argon shield of Pa, the Dc bias controlling cutter is-200V, and pulsed bias-600V is the plasma cleaning cutter 30min to be plated of 6KW with power; Be 8 × 10 at pressure
-2under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 9KW, in Dc bias-200V, under pulsed bias-400V, be coated with 8min; Pass into the nitrogen of 100sccm, continue, at power 9KW together with Ti evaporation source, under Dc bias-150V, to be coated with 10min; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than the composite alloy material being 70:20:10, its power is 4.5KW, sputtering current is 6.0A, the nitrogen of 40sccm is passed into while passing into argon gas 80sccm, and be coated with 200min at Dc bias-30V, naturally, after cooling 90min, cutter can be taken out.
Recording hardness after this carbide-tipped milling cutter applying Ti/TiN/ (Al, Ti, Cr) N composite coating is 26 ~ 33GPa; The thickness of Ti transition zone is 170nm, and the thickness of TiN layer is 300nm, and the thickness of (Al, Ti, Cr) N layer is 3 μm; Impression grade is 1 grade.
Embodiment 4
Put into coating machine after first blasting treatment and Ultrasonic Cleaning being carried out to tungsten carbide tap by conventional method, then 5.0 × 10 are evacuated to coating chamber
-3pa, passes into argon gas, makes total pressure in coating machine be 3.0 × 10
-1pa, and control heating power 8KW to cutter heating 60min to be plated; At pressure 1.5 × 10
-1under the argon shield of Pa, the Dc bias controlling cutter is-150V, and pulsed bias-500V is the plasma cleaning cutter 20min to be plated of 5KW with power; Be 1.2 × 10 at pressure
-1under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 8KW, in Dc bias-100V, under pulsed bias-300V, be coated with 7min; Pass into the nitrogen of 70sccm, continue, at power 8KW together with Ti evaporation source, under Dc bias-100V, to be coated with 10min; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than the composite alloy material being 60:20:20, its power is 4KW, sputtering current is 5.0A, the nitrogen of 50sccm is passed into while passing into argon gas 90sccm, and be coated with 150min at Dc bias-40V, naturally, after cooling 70min, cutter can be taken out.
Recording hardness after this tungsten carbide tap applying Ti/TiN/ (Al, Ti, Cr) N composite coating is 24 ~ 30GPa; The thickness of Ti transition zone is 120nm, and the thickness of TiN layer is 300nm, and the thickness of (Al, Ti, Cr) N layer is 2 μm; Impression grade is 1 grade.
Embodiment 5
Put into coating machine after first blasting treatment and Ultrasonic Cleaning being carried out to carbide-tipped lathe tool by conventional method, then 5.0 × 10 are evacuated to coating chamber
-3pa, passes into argon gas, makes total pressure in coating machine be 4.0 × 10
-1pa, and control heating power 9KW to cutter heating 150min to be plated; At pressure 1.8 × 10
-1under the argon shield of Pa, the Dc bias controlling cutter is-200V, and pulsed bias-700V is the plasma cleaning cutter 30min to be plated of 6KW with power; Be 8 × 10 at pressure
-2under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 9KW, in Dc bias-200V, under pulsed bias-500V, be coated with 10min; Pass into the nitrogen of 100sccm, continue, at power 9KW together with Ti evaporation source, under Dc bias-150V, to be coated with 15min; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than the composite alloy material being 60:25:15, its power is 5KW, sputtering current is 8.0A, the nitrogen of 80sccm is passed into while passing into argon gas 120sccm, 300min is coated with at Dc bias-45V, naturally, after cooling 120min, cutter can be taken out.
Recording hardness after this carbide-tipped lathe tool applying Ti/TiN/ (Al, Ti, Cr) N composite coating is 22 ~ 28GPa; The thickness of Ti transition zone is 200nm, and the thickness of TiN layer is 500nm, and the thickness of (Al, Ti, Cr) N layer is 5 μm; Impression grade is 1 grade.
Comparative example
Put into coating machine after first blasting treatment and Ultrasonic Cleaning being carried out to carbide-tipped milling cutter by conventional method, then 5.0 × 10 are evacuated to coating chamber
-3pa, passes into argon gas, makes total pressure in coating machine be 4.0 × 10
-1pa, and control heating power 9KW to cutter heating 150min to be plated; At pressure 1.8 × 10
-1under the argon shield of Pa, the Dc bias controlling cutter is-200V, and pulsed bias-600V is the plasma cleaning cutter 30min to be plated of 6KW with power; Be 8 × 10 at pressure
-2under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 9KW, in Dc bias-200V, under pulsed bias-400V, be coated with 8min; Pass into the nitrogen of 100sccm, continue, at power 9KW together with Ti evaporation source, under Dc bias-150V, to be coated with 10min; With MF reactive magnetron sputtering sputtered aluminum titanium atom than the composite alloy material being 50:50, its power is 4.5KW, and sputtering current is 6.0A, pass into argon gas 80sccm, pass into the nitrogen of 40sccm simultaneously, be coated with 200min at Dc bias-30V, naturally, after cooling 90min, cutter can be taken out.
Recording hardness after this carbide-tipped milling cutter applying Ti/TiN/TiAlN composite coating is 26 ~ 33GPa; The thickness of Ti transition zone is 170nm, and the thickness of TiN layer is 300nm, and the thickness of (Al, Ti, Cr) N layer is 3 μm; Impression grade is 5 grades.
Put into coating machine after first blasting treatment and Ultrasonic Cleaning being carried out to carbide-tipped milling cutter by conventional method, then 5.0 × 10 are evacuated to coating chamber
-3pa, passes into argon gas, makes total pressure in coating machine be 4.0 × 10
-1pa, and control heating power 9KW to cutter heating 150min to be plated; At pressure 1.8 × 10
-1under the argon shield of Pa, the Dc bias controlling cutter is-200V, and pulsed bias-600V is the plasma cleaning cutter 30min to be plated of 6KW with power; Be 8 × 10 at pressure
-2under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 9KW, under cutter bias voltage-400V, be coated with 8min; Pass into the nitrogen of 100sccm, continue at power 9KW together with Ti evaporation source, under cutter bias voltage-150V, be coated with 10min; With MF reactive magnetron sputtering sputtered aluminum titanium atom than the composite alloy material being 50:50, its power is 4.5KW, and sputtering current is 6.0A, passes into the nitrogen of 40sccm simultaneously, is coated with 200min at cutter bias voltage-30V, after naturally cooling 90min, can take out cutter.
Recording hardness after this carbide-tipped milling cutter applying Ti/TiN/ (Al, Ti, Cr) N composite coating is 26 ~ 33GPa; The thickness of Ti transition zone is 50 ~ 200nm, and the thickness of TiN layer is 100 ~ 500nm, and the thickness of (Al, Ti, Cr) N layer is 2 ~ 5 μm; Impression grade is 1 ~ 2 grade.
In order to investigate the performance of above embodiment and comparative example cutter composite coating, the present invention has done following detection to it:
1) coating fracture apperance scanning electron microscopic observation
Adopt JSM-5900, secondary electron image, multiplication factor 50000.Observe gained photo and see Fig. 1,2.Can observe from Fig. 1, Ti/TiN/TiAlN film has obvious column structure.Can observe from Fig. 2, there is not thick column structure in Ti/TiN/ (Al, Ti, Cr) N thin film, and become and organize more fine and closely woven nanocrystalline structure.
2) film surface vickers indentation is observed
Adopt common Rockwell apparatus, top is 120 ° of Diamond Cone indenter, load 588N, multiplication factor 200.Observe gained photo and see Fig. 3,4.Can observe from Fig. 3, under the pressure of 588N, there is obvious crackle and come off in Ti/TiN/TiAlN, belongs to HF5(and impression class 5 level).Can observe from Fig. 4, under the pressure of 588N, not there is obscission, only have a small amount of crackle in Ti/ TiN/(Al, Ti, Cr) N thin film, belongs to HF1(and impression grade 1 grade).
3) coating X-ray diffraction test
Adopt the dx series x-ray diffractometer DX-1000 based on Cu radiation, 40KV/25mA, measurement category 30 ~ 70 °, measuring speed 0.06/1 second.Test gained spectrogram is shown in Fig. 5.As seen from the figure, Ti/TiN/TiAlN film, in (111), mask has obvious preferred orientation, and diffracted intensity I reaches 2000; And Ti/ TiN/ (Al, Ti, Cr) this orientation of N thin film obviously reduces, at (111) face diffracted intensity I lower than 400, existing research shows, for AlTi base coating, and the reduction of (111) face diffracted intensity I, represent that the thick columnar structure of film is tending towards weakening, and the raising of the anti-wear performance of film.
4) hardness test
The cutter coat that embodiment 3 is obtained and the cutter coat that comparative example obtains adopt nanohardness tester TB15192-12-8-20, and by surperficial closing speed 10nm/s, the dark 200nm of minimum pressure, the dark 300nm condition of maximum pressure is tested.Test the data obtained sees the following form.
From upper table, Ti/TiN/ (Al, Ti, Cr) N and Ti/TiN/TiAlN nano hardness is in same level, but under identical experiment condition, Ti/TiN/ (Al, Ti, Cr) standard deviation of N nano hardness is only 3.74, and the Young amount of touching standard deviation is 54.1; The standard deviation of Ti/TiN/TiAlN nano hardness then reaches 16.5, and the Young amount of touching standard deviation then reaches 330.4, and that is the uniformity of this coating product is well below Ti/TiN/ (Al, Ti, Cr) N.
Claims (7)
1. a preparation method for tool surface Ti/TiN/MaN composite coating, the method is first by after cutter cleaning-drying to be plated, is placed in coating chamber and is coated with by following processing step and condition:
1) first 5.0 × 10 are evacuated to coating chamber
-3pa, then passes into argon gas, makes total pressure in coating machine be 2.5 × 10
-1~ 4.0 × 10
-1pa, and control power 7 ~ 9KW, to cutter heating to be plated 60 ~ 150min;
2) at pressure 1.5 × 10
-1~ 2.5 × 10
-1under the argon shield of Pa, control Dc bias-100 ~-200V, pulsed bias-500 ~-800V is the plasma cleaning cutter 15 ~ 30min to be plated of 4 ~ 6KW with power;
3) under argon shield, strengthen source heating with plasma, be first coated with as evaporation source using Ti, and then pass into nitrogen and be coated with together with Ti;
4) under argon shield, maintain plasma and strengthen source and run, and with MF reactive magnetron sputtering Ma composite alloy material, pass into nitrogen simultaneously and carry out reaction and be coated with, then cool,
Ma composite alloy material wherein used is Al
xti
ycr
1-X-Ycomposite alloy material, its aluminium titanium chromium atom ratio is 50 ~ 70:20 ~ 30:10 ~ 20, and purity is 99.99%; The concrete technology condition being coated with MaN wearing layer is: with MF reactive magnetron sputtering sputtering Ma composite alloy material, its power is 3 ~ 5KW, sputtering current is 3.0 ~ 8.0A, while passing into argon gas 60 ~ 120sccm, pass into the nitrogen of 30 ~ 80sccm, and be coated with 150 ~ 300min at Dc bias-30 ~-80V.
2. the preparation method of tool surface Ti/TiN/MaN composite coating according to claim 1, in the method the 3rd) the step concrete technology condition that is coated with transition zone Ti, TiN is:
1) be 8 × 10 at pressure
-2~ 1.5 × 10
-1under Pa argon shield, strengthen source heating Ti evaporation source with the plasma of power 7.5 ~ 10KW, control Dc bias-100 ~-200V, under pulsed bias-300 ~-600V, be coated with 5 ~ 10min;
2) pass into the nitrogen of 70 ~ 150sccm, continue at power 7.5 ~ 10KW together with Ti evaporation source, under controlling Dc bias-100 ~-200V, be coated with 5 ~ 15min.
3. the preparation method of tool surface Ti/TiN/MaN composite coating according to claim 1 and 2, the method composite alloy material used configures four by being mutually 90 degree, and composition is identical.
4. the preparation method of tool surface Ti/TiN/MaN composite coating according to claim 1 and 2, the method the 4th) cool time after step cutter plated film is 70 ~ 120min.
5. the preparation method of tool surface Ti/TiN/MaN composite coating according to claim 3, in the method the 4th) cool time after step cutter plated film is 70 ~ 120min.
6. the tool surface Ti/TiN/MaN composite coating prepared of method described in claim 1, this composite coating is three layers, is outwards respectively Ti transition zone, TiN layer and MaN layer successively from tool surface, and wherein the thickness of Ti transition zone is 50 ~ 200nm; The thickness of TiN layer is 100 ~ 500nm; The thickness of MaN layer is 2 ~ 5 μm; Its institutional framework is nanocrystalline structure, and at (111) face diffracted intensity I of X-ray diffraction lower than 400, the Ma wherein in MaN layer is (Al, Ti, Cr).
7. tool surface Ti/TiN/MaN composite coating according to claim 6, the case hardness of this composite coating is 22 ~ 33GPa, and impression grade is 1 ~ 2 grade.
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| CN103774096B (en) * | 2013-11-18 | 2015-12-30 | 四川大学 | A kind of preparation method of anti-oxidant rigid composite coating |
| CN106048541B (en) * | 2016-07-27 | 2019-05-03 | 西安热工研究院有限公司 | A kind of nano-multilayer film and preparation method thereof of tunnel piercing rounding machine cutter cutter ring |
| RU2637188C1 (en) * | 2016-10-11 | 2017-11-30 | федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" | Method of producing multi-layer coating for cutting tool |
| CN107034438B (en) * | 2017-05-03 | 2019-05-31 | 成都真锐科技涂层技术有限公司 | High speed steel screw tap preparation method of surface coating |
| CN108103465A (en) * | 2017-12-20 | 2018-06-01 | 富耐克超硬材料股份有限公司 | Processing stainless steel special-purpose coat cutter and preparation method thereof |
| CN111254399A (en) * | 2019-10-10 | 2020-06-09 | 东南大学 | Ta-TaN-TaWN superhard coating cutter and preparation method thereof |
| CN113463046A (en) * | 2021-07-05 | 2021-10-01 | 大连德泰控股有限公司 | Coating material for enhancing wear resistance of water pump impeller and coating method |
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| CN1133756C (en) * | 1998-11-26 | 2004-01-07 | 武汉大学 | Multi-layer compounded superhard C3N4/MN film and its synthesizing equipment and process |
| CN101570849B (en) * | 2009-05-08 | 2012-02-01 | 四川大学 | Method for preparing hard coating of tool and mould by binary evaporation source |
| CN101698362B (en) * | 2009-10-30 | 2013-07-10 | 华南理工大学 | Self-lubricating hard nanocomposite laminated coating and preparation method thereof |
| IL205090A0 (en) * | 2010-04-14 | 2010-11-30 | Iscar Ltd | Hard carbon coating and method of forming the same |
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