CN103290358A - Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof - Google Patents
Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof Download PDFInfo
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- CN103290358A CN103290358A CN2013102441786A CN201310244178A CN103290358A CN 103290358 A CN103290358 A CN 103290358A CN 2013102441786 A CN2013102441786 A CN 2013102441786A CN 201310244178 A CN201310244178 A CN 201310244178A CN 103290358 A CN103290358 A CN 103290358A
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Abstract
The invention discloses an antiwear and anticorrosion composite coating for a mechanical part surface, and a preparation method thereof. The composite coating includes a transition layer and a function layer, and the transition layer is made of a pure metal choosing from chromium, titanium or nickel and is arranged between the functional layer and the surface of a workpiece. The preparation method for the composite coating comprises the following processing steps: 1, cleaning and drying the workpiece, and then putting the workpiece in a vacuum chamber of a nonequilibrium magnetron sputtering coating device; 2, setting the vacuum pressure of 3*10<-3> Pa; setting the temperature of 200 DEG C to 500 DEG C, and holding for 30 minutes; and while performing heat preservation, performing plasma cleaning of the workpiece; 3, inletting argon gas, and preparing the transition layer by a nonequilibrium magnetron sputtering method; 4, with the argon gas as a working gas, inletting nitrogen reaction gas to prepare the functional layer; and 5, cooling the workpiece along with a furnace to 100 DEG C or less, and then taking out. A composite material surface design method is employed, and a structure with two layers (the transition layer and the function layer) is used for improving properties of the mechanical part surface.
Description
Technical field:
The present invention relates to a kind of compound coating that is applied in the component of machine surface with wear-resisting, corrosion-resistant requirement and preparation method thereof.Utilize this compound coating, can improve with steel, non-ferrous metal, cast iron etc. is wear-resistant, the corrosion resistance nature of the piece surface of material.
Background technology:
With the component that metal material processing such as steel, non-ferrous metal, cast iron form, it is the chief component of industrial equipments, instrument, mould.Along with Economic development and continuous advancement in technology, also more and more higher to surface property (especially corrosion-resistant, the abrasion resistance properties) requirement of various components of machine.Adopt electro-deposition method to be coated with hard chrome, Ni at piece surface traditionally, or adopt surface heat-treatment process that piece surface is handled, the performance requriements that has satisfied part of these method parts, but there is following shortcoming:
1. seriously polluted, the especially pollution that causes of electrodeposition technology;
2. under abominable service condition, easily lost efficacy, as in parts such as piston rod, piston ring, easy to crack under the hard chromium high load condition, come off.
3. can't adapt to complicated service condition, as: under the high temperature oxidation condition, under the high capacity, stack occasion such as corrosion-resistant, traditional hard chrome is coated with, surface heat is handled and often can't be met the demands.
For these reasons, the searching cost is lower, functional characteristics outstanding, the strong and environment friendly and pollution-free surface treatment method of adaptability is the striving direction of scientific research and industry member always.
Summary of the invention:
For overcoming the defective of prior art, the object of the present invention is to provide a kind of non-balance magnetically controlled sputter method that utilizes, preparation has corrosion-resistant, anti abrasive compound coating, is used for improving the component of machine surface property.The present invention adopts the composite material surface method of design, adopts double-layer structure (transition layer, functional layer) to satisfy and uses needs.
Technical solution problem of the present invention adopts following technical scheme:
Be used for component of machine surface abrasion resistance damage, corrosion resistant compound coating, described compound coating comprises transition layer and functional layer, and described transition layer is between described functional layer and component of machine surface.
Described transition layer is by Cr(chromium), the Ti(titanium) or Ni(nickel) pure metal preparation.Described functional layer is carbide (MC), nitride (MN) or carbonitride (MNC), and M wherein is selected from Al(aluminium) or transition metal Ti(titanium), the Zr(zirconium), the Mo(molybdenum).
The thickness of described transition layer is between 0.5 μ m ~ 5 μ m.The thickness of described functional layer is between 0.5 μ m ~ 10 μ m.
The preparation method who is used for component of machine surface abrasion resistance damage, corrosion resistant compound coating comprises following processing step:
1. component of machine through deoil, anti-dandruff after, after ultrasonic cleaning and oven dry, place the vacuum chamber of non-balance magnetically controlled sputter filming equipment;
2. open the vacuum system of non-balance magnetically controlled sputter equipment, the vacuum in the vacuum chamber is extracted into 3 * 10
-3Pa; Component of machine is heated to 200 ℃～500 ℃ insulations 30 minutes; In insulating process, simultaneously component of machine is carried out plasma clean;
3. use argon gas as working gas, utilize non-balance magnetically controlled sputter method to prepare transition layer, according to workpiece military service characteristics, the thickness of transition layer prepares between 0.5 μ m ~ 5 μ m;
4. use argon gas as working gas, feed reactant gases and prepare functional layer, according to workpiece military service characteristics, the thickness of functional layer prepares between 0.5 μ m ~ 10 μ m; Described reactant gases is nitrogen or acetylene;
5. in the component of machine furnace cooling to 100 ℃, take out and get final product.
Compared with the prior art, beneficial effect of the present invention is embodied in:
Because nitride, carbide, carbonitride and the metal base bonding force of physical vapor deposition preparation are relatively poor, all has the metallic film of good combination performance as transition layer so consider use and component of machine metallic substance, functional layer film material.Transition layer can improve the combination on rete integral body and component of machine surface on the one hand, also can improve the corrosion resistance nature of component of machine on the other hand.
The zone that directly contacts with external environment when functional layer is on active service as component of machine, performance requriements are tending towards variation.For this reason, in conjunction with magnesium-yttrium-transition metal compound good mechanical performance and corrosion resistance nature, according to different environments for use, use carbide (MC), nitride (MN) or carbonitride (MNC) as film material.The M here is selected from Al(aluminium) or Cr(chromium), the Ti(titanium), the Mo(molybdenum), the Zr(zirconium) etc. transition metal.
The non-balance magnetically controlled sputter method in the physical vapor deposition (PVD) technology is used in the preparation of compound coating of the present invention.In preparation process, component integral body " is immersed " in plasma body glow discharge zone, can realize the plasma clean to component, and can improve the density of film.In addition, because intrinsic " low temperature ", " at a high speed " characteristics of magnetically controlled sputter method, compound coating involved in the present invention and preparation method can not influence the original mechanical property of component itself.
Description of drawings:
Fig. 1 is sectional structure chart of the present invention.
Number in the figure: 1 component of machine, 2 transition layers, 3 functional layers.
Below by embodiment, the invention will be further described.
Embodiment:
In conjunction with Fig. 1, of the present invention it comprises transition layer 2 and functional layer 3 for component of machine surface abrasion resistance damage, corrosion resistant compound coating, and described transition layer 2 is between the surface of functional layer 3 and component of machine 1.
Embodiment 1: substitute the application of galvanic deposit hard chromium in hydraulic stem, hydraulic stem places on the work rest in the non-balance magnetically controlled sputter vacuum installation → vacuum system work and will be extracted into 3 * 10 in the vacuum chamber body after deoiling, utilizing ultrasonic cleaning equipment that hydraulic stem is cleaned, dries after anti-dandruff
-3Pa → hydraulic pressure the rod member is heated to 200 ℃ and be incubated 0.5 hour, insulation utilizes plasma clean that rod member is further cleaned → feed argon gas simultaneously, vacuum chamber pressure is adjusted to 0.5 ~ 1Pa, utilize non-balance magnetically controlled sputter source (using Cr(chromium) as target) deposition Cr(chromium) film 1 μ m → feeding nitrogen and argon gas, vacuum chamber pressure remains unchanged, utilize non-balance magnetically controlled sputter, at Ar:N
2Be coated with about 6 μ m of CrN film → stop plated film under the=2:1 condition, with in the hydraulic pressure rod member furnace cooling to 100 ℃, take out.Cr(chromium wherein) film is transition layer, the CrN(chromium nitride) film is functional layer.
Embodiment 2: substitute the application of surperficial heat treatment technics in press tool (drift): drift places on the work rest in the non-balance magnetically controlled sputter vacuum installation → vacuum system work and will be extracted into 3 * 10 in the vacuum chamber body after deoiling, utilizing ultrasonic cleaning equipment that drift is cleaned, dries after anti-dandruff
-3Pa → drift is heated to 200 ℃ and be incubated 0.5 hour, insulation utilizes plasma clean that drift is further cleaned → feed argon gas simultaneously, vacuum chamber pressure is adjusted to 0.5 ~ 1Pa, utilize non-balance magnetically controlled sputter source deposition Cr(chromium) film 0.5 μ m → feeding nitrogen and argon gas, vacuum chamber pressure remains unchanged, utilize non-balance magnetically controlled sputter (adopting Al and Cr target), at Ar:N
2Be coated with about 4 μ m of AlCrN film → stop plated film under the=2:1 condition, with in the drift furnace cooling to 100 ℃, take out.Cr(chromium wherein) film is transition layer, AlCrN(aluminium nitride chromium) film is functional layer.
Claims (6)
1. be used for component of machine surface abrasion resistance damage, corrosion resistant compound coating, it is characterized in that described compound coating comprises transition layer and functional layer, described transition layer is between described functional layer and component of machine surface.
2. according to claim 1 for component of machine surface abrasion resistance damage, corrosion resistant compound coating, it is characterized in that described transition layer is by chromium, titanium or the preparation of nickel pure metal.
According to claim 1 for the component of machine surface abrasion resistance decrease, corrosion resistant compound coating, it is characterized in that described functional layer is carbide MC, nitride MN or carbonitride MNC, M wherein is selected from aluminium or transition metals Ti, zirconium, molybdenum.
4. according to claim 2 for component of machine surface abrasion resistance damage, corrosion resistant compound coating, it is characterized in that the thickness of described transition layer is between 0.5 μ m ~ 5 μ m.
5. according to claim 3 for component of machine surface abrasion resistance damage, corrosion resistant compound coating, it is characterized in that the thickness of described functional layer is between 0.5 μ m ~ 10 μ m.
Among the claim 1-6 arbitrary claim described for the component of machine surface abrasion resistance decrease, the preparation method of corrosion resistant compound coating, it is characterized in that comprising following processing step:
1. component of machine through deoil, anti-dandruff after, after ultrasonic cleaning and oven dry, place the vacuum chamber of non-balance magnetically controlled sputter filming equipment;
2. open the vacuum system of non-balance magnetically controlled sputter equipment, the vacuum in the vacuum chamber is extracted into 3 * 10
-3Pa; Component of machine is heated to 200 ℃～500 ℃ insulations 30 minutes; In insulating process, simultaneously component of machine is carried out plasma clean;
3. use argon gas as working gas, utilize non-balance magnetically controlled sputter method to prepare transition layer, according to workpiece military service characteristics, the thickness of transition layer prepares between 0.5 μ m ~ 5 μ m;
4. use argon gas as working gas, feed reactant gases and prepare functional layer, according to workpiece military service characteristics, the thickness of functional layer prepares between 0.5 μ m ~ 10 μ m; Described reactant gases is nitrogen or acetylene;
5. in the component of machine furnace cooling to 100 ℃, take out and get final product.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103789726A (en) * | 2014-02-17 | 2014-05-14 | 四川大学 | AlTiCrN/MoN nano laminated coating firmly combined with surface of tool, and preparation method of coating |
| CN104388899A (en) * | 2014-12-10 | 2015-03-04 | 武汉大学 | Piston ring with MoN/Cr/CrN/Cr nano composite ultra-thick coating and preparation method of piston ring |
| CN104789847A (en) * | 2015-04-22 | 2015-07-22 | 上海电机学院 | High-entropy alloy, high-entropy alloy coating and plating method for high-entropy alloy coating on rolling surface of bearing |
| CN109403876A (en) * | 2018-10-19 | 2019-03-01 | 北京工商大学 | A kind of ni base alloy coating oil pumping polish rod and processing technology comprising soft transition zone |
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| JPH04193949A (en) * | 1990-11-28 | 1992-07-14 | Hitachi Ltd | Sputtering electrode and its cleaning method |
| CN101746091A (en) * | 2009-12-17 | 2010-06-23 | 董志良 | Composite coating for abrasion-resistance and anti-corrosion treatments on surface of machine components and preparation method |
| CN102776474A (en) * | 2012-07-12 | 2012-11-14 | 济南大学 | Nano composite coating layer for surface treatment of substrate, and preparation method and device of nano composite coating layer |
| CN103071819A (en) * | 2012-12-31 | 2013-05-01 | 四川大学 | Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating |
| CN203270033U (en) * | 2013-06-18 | 2013-11-06 | 合肥力恒液压系统有限公司 | Wear-resistant and corrosion-resistant composite coating layer on surface of mechanical part |
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2013
- 2013-06-18 CN CN2013102441786A patent/CN103290358A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH04193949A (en) * | 1990-11-28 | 1992-07-14 | Hitachi Ltd | Sputtering electrode and its cleaning method |
| CN101746091A (en) * | 2009-12-17 | 2010-06-23 | 董志良 | Composite coating for abrasion-resistance and anti-corrosion treatments on surface of machine components and preparation method |
| CN102776474A (en) * | 2012-07-12 | 2012-11-14 | 济南大学 | Nano composite coating layer for surface treatment of substrate, and preparation method and device of nano composite coating layer |
| CN103071819A (en) * | 2012-12-31 | 2013-05-01 | 四川大学 | Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating |
| CN203270033U (en) * | 2013-06-18 | 2013-11-06 | 合肥力恒液压系统有限公司 | Wear-resistant and corrosion-resistant composite coating layer on surface of mechanical part |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103789726A (en) * | 2014-02-17 | 2014-05-14 | 四川大学 | AlTiCrN/MoN nano laminated coating firmly combined with surface of tool, and preparation method of coating |
| CN103789726B (en) * | 2014-02-17 | 2016-06-08 | 四川大学 | AlTiCrN/MoN nano laminated coating being firmly combined with tool surfaces and preparation method thereof |
| CN104388899A (en) * | 2014-12-10 | 2015-03-04 | 武汉大学 | Piston ring with MoN/Cr/CrN/Cr nano composite ultra-thick coating and preparation method of piston ring |
| CN104789847A (en) * | 2015-04-22 | 2015-07-22 | 上海电机学院 | High-entropy alloy, high-entropy alloy coating and plating method for high-entropy alloy coating on rolling surface of bearing |
| CN109403876A (en) * | 2018-10-19 | 2019-03-01 | 北京工商大学 | A kind of ni base alloy coating oil pumping polish rod and processing technology comprising soft transition zone |
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Application publication date: 20130911 |