CN103071819A - Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating - Google Patents
Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating Download PDFInfo
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Abstract
The invention discloses a Ti/TiN/MaN composite coating on the surface of a cutter. The Ti/TiN/MaN composite coating is divided into three layers, namely a Ti transition layer, a TiN layer and an (Al, Ti, Cr) N layer in sequence outwards from the surface of the cutter, wherein the thicknesses of the Ti transition layer, the TiN layer and the (Al, Ti, Cr) N layer are respectively 50-200nm, or 100-500nm or 2-5Mu m; the tissue structure of the Ti/TiN/MaN composite coating is a nanocrystalline structure; the (111) surface diffraction intensity I of the Ti/TiN/MaN composite coating in X-ray diffraction is lower than 400 and the surface of the Ti/TiN/MaN composite coating is 22-33GPa in hardness and 1-2-level in indentation grade. The invention also discloses a preparation method of the Ti/TiN/MaN composite coating. According to the invention, because a plasma reinforced intermediate-frequency reactive magnetron sputtering technology is used as the preparation method of the composite coating, not only is sputtering evaporation of various reactants facilitated, but also the obtained Ti/TiN/MaN composite coating is dense in tissue, high in purity, flat in surface, high in binding force with a cutter and good in wear resistance, the segregation of film components can be furthest restricted, the ionization rate and the deflection property are greatly improved, and therefore the life of the Ti/TiN/MaN composite coating in cutting machining of stainless steel is prolonged by 50-100 percent; and in addition, the Ti/TiN/MaN composite coating is simple in process, easy to master and control and is convenient for industrial production of a cutter coating.
Description
Technical field
The invention belongs to tool and mould surface hard coating and preparing technical field thereof, be specifically related to a kind of cutting tool surface Ti/TiN/MaN composite coating and preparation method thereof.
Background technology
The physics coating technology that industrial production adopts usually mainly contains two kinds: magnetic controlled sputtering ion plating and cathodic arc ion plating.Though the coating that adopts the magnetic controlled sputtering ion plating technology to obtain have organize fine and closely woven, purity is high, surfacing, and is beneficial to the advantages such as sputter vaporization of all kinds of reactants, the ionization level of its existence is low and limited its development around the poor shortcoming of plating property.Though and cathodic arc ion plating has the ionization level height, deposition velocity is fast, film-substrate cohesion good, coating is around advantages such as plating property are good, but there is phenomenons such as organizing thick, surface irregularity, " drop " and for the character of reactant certain deficiencies such as requirement arranged.Based on above factor, thereafter the plasma that being intended to of occurring promotes the magnetic controlled sputtering ion plating ionization level strengthens the production that the magnetic controlled sputtering ion plating technology more and more is applied to cutter coat, its advantage that not only has common magnetic controlled sputtering ion plating has again the high characteristic of cathodic arc ion plating ionization level, therefore the gained coating product has better combination property, simultaneously, make the preparation of multielement coating become possibility.
In recent years, though because the ternary coatings such as TiAlN, CrAlN and CrTiN have preferably physics, chemical property, be widely used in industrial production, but along with cutting speed improves constantly and the popularizing of DRY CUTTING mode, the performance such as wear-resisting, anti-oxidant of this type coating can't satisfy instructions for use.Studies show that (Al, Ti, Cr) N composite coating has than the better wearability of TiAlN ternary coating and non-oxidizability.The adding of Cr element can affect the growth and wear-resisting formation mutually of coating to a certain extent, and can effectively alleviate the increase of coating stress, improves the adhesion of cutter and coating, prolongs the service life of coated cutting tool.Though patent ZL200910220272.1 and patent ZL201010596751.6 disclose the method that a kind of cathodic arc ion plating prepares CrTiAlN quaternary coating, but what the method adopted is that the mode that TiAl target and Cr target split is carried out, so there are the problems such as complex process, coating uniformity, lack of homogeneity.If adopt composite alloy material as target, for the cathode arc ion technology, be subjected to the impact of saturated vapour pressure, easily cause the segregation of thin film composition, thereby cause the reduction of properties of coating.
Summary of the invention
The objective of the invention is to exist in industrial production for existing TiAlN coating the shortcoming of combination property and poor stability, a kind of tool surface Ti/TiN/MaN composite coating of excellent performance is provided.
Another object of the present invention provides a kind of preparation method of above-mentioned tool surface Ti/TiN/MaN composite coating, and the method technique is simple, and preparation cost is cheap, is easy to suitability for industrialized production.
Tool surface Ti/TiN/MaN composite coating provided by the invention [Ma(multicomponent alloy)], this composite coating is three layers, outwards be respectively successively Ti transition zone, TiN layer and MaN layer from tool surface, wherein the thickness of Ti transition zone is 50～200nm; The thickness of TiN layer is 100～500nm; The thickness of Ma N layer is 2～5 μ m, and its institutional framework is nanocrystalline structure, and is lower than 400 at (111) of X-ray diffraction face diffracted intensity I.
Ma in the MaN layer of above-mentioned tool surface composite coating is (Al, Ti, Cr), and the case hardness of its composite coating is 22 ~ 33GPa, and the impression grade is 1 ~ 2 grade.
Above-mentioned cutter is carbide alloy or high-speed steel tool.
The preparation method of above-mentioned tool surface Ti/TiN/MaN composite coating provided by the invention, the method will behind the cutter cleaning-drying that is coated with, place in the coating chamber to be coated with by following processing step and condition first:
1) first coating chamber is evacuated to 5.0 * 10
-3Then Pa passes into argon gas, and making the interior total pressure of coating machine is 2.5 * 10
-1～4.0 * 10
-1Pa, and power ratio control 7 ~ 9KW treat being coated with cutter heating 60～150min;
2) at pressure 1.5 * 10
-1～2.5 * 10
-1Under the argon shield of Pa, control Dc bias-100 ~-200V, pulsed bias-500 ~-800V, be plasma cleaning cutter 15～30min to be coated with of 4 ~ 6KW with power;
3) under argon shield, with plasma enhancing source heating, be coated with as evaporation source with Ti first, and then pass into nitrogen and be coated with Ti;
4) under argon shield, keep plasma enhancing source operation, and with MF reactive magnetron sputtering Ma composite alloy material, pass into simultaneously nitrogen and react and be coated with, then cool off and get final product.
In the above method the 3rd) the step concrete technology condition that is coated with transition zone Ti, TiN is:
1) be 8 * 10 at pressure
-2～1.5 * 10
-1Under the Pa argon shield, with the plasma enhancing source heating Ti evaporation source of power 7.5～10KW, control Dc bias-100～-200V, pulsed bias-300～-be coated with 5～10min under the 600V;
2) pass into the nitrogen of 70 ~ 150sccm, continue with the Ti evaporation source at power 7.5～10KW, control Dc bias-100～-be coated with 5～15min under the 200V.
In the above method the 4th) the step concrete technology condition that is coated with the MaN wearing layer is:
With MF reactive magnetron sputtering sputter Ma composite alloy material, its power is 3～5KW, and sputtering current is 3.0～8.0A, passes into the nitrogen of 30～80sccm when passing into argon gas 60～120sccm, and Dc bias-30～-80V is coated with 150～300min.
The used Ma composite alloy material of above method is Al
XTi
YCr
1-X-YComposite alloy material, this composite alloy material disposes four by being mutually 90 degree as target in coating machine, and composition is identical, and its aluminium titanium chromium atom ratio is 50 ~ 70:20 ~ 30:10 ~ 20, and purity is 99.99%.
Above method the 4th) be 70～120min the cool time behind the step cutter plated film.
The present invention compared with prior art has following good effect:
1. because the present invention has adopted plasma to strengthen the MF reactive magnetron sputtering technology as the preparation method of composite coating, thereby not only be conducive to the sputter vaporization of all kinds of reactants, the coating that obtains is had organize fine and closely woven, purity is high, surfacing, and solved the difficult point of general magnetron sputtering technique, it has significantly improved ionization level and rich plating property, so that can be widely used in the suitability for industrialized production of cutter coat.
2. because having adopted plasma to strengthen the MF reactive magnetron sputtering method, the present invention evaporates Al
XTi
YCr
1-X-YComposite alloy material, thereby for multi-element coating, can suppress to greatest extent the segregation of thin film composition, guarantee the stability of coating performance, also reduce the complexity of coating process simultaneously and be coated with the cycle, it is more suitable in suitability for industrialized production.
3. because Ti/TiN/ provided by the invention (Al, Ti, Cr) N composite coating is organized as nanocrystalline structure, thereby with common (Ti, Al) the thick columanar structure of N coating compares, and organizes more fine and closely wovenly, and uniformity and the uniformity of coating hardness and thickness are better.
4. because Ti/TiN/ provided by the invention (Al, Ti, Cr) N composite coating is organized fine and closely woven, uniformity and the uniformity of coating layer thickness are better, thereby compare with common TiAlN coating, have higher adhesion with cutter, can match in excellence or beauty with the coating that cathodic arc technique is coated with.
5. because Ti/TiN/ (Al provided by the invention, Ti, Cr) the thick columnar structure of N composite coating is tending towards reduction, and presents fine and closely woven nanocrystalline structure, and the uniformity of case hardness and uniformity are better in addition, thereby compare with common TiAlN coating, cutter with Ti/ TiN/ (Al, Ti, Cr) N coating has better wearability, especially in stainless machining, the life-span of coated cutting tool can improve 50 ~ 100%.
6. because the present invention adopts is that plasma strengthens the MF reactive magnetron sputtering technology as the preparation method of composite coating, thereby technique is simple, is easy to grasp control.
Description of drawings
Fig. 1 is the Ti/ TiN/TiAlN coating fracture apperance stereoscan photograph of Comparative Examples preparation.
Fig. 2 is Ti/TiN/ (Al, Ti, Cr) the N coating fracture apperance stereoscan photograph that the present invention prepares.
Fig. 3 is the Ti/TiN/TiAlN film surface impression pattern photo of Comparative Examples preparation.
Fig. 4 is Ti/ TiN/ (Al, Ti, Cr) the N film surface impression pattern photo that the present invention prepares.
Fig. 5 is the X-ray diffraction spectrogram of the Ti/TiN/TiAlN coating of Ti/ TiN/ (Al, Ti, Cr) the N coating for preparing of the present invention and Comparative Examples preparation.
The specific embodiment
The present invention is further illustrated below by specific embodiment, but protection content of the present invention is not limited to following examples.
What deserves to be explained is that the hardness of the cutter product that following examples and Comparative Examples are prepared adopts nanohardness tester TB15192-12-8-20, by surperficial closing speed 10nm/s, the dark 200nm of minimum pressure, maximum presses dark 300nm condition to test.
Embodiment 1
First the high-speed steel hobboing cutter is carried out putting into coating machine behind blasting treatment and the Ultrasonic Cleaning with conventional method, then coating chamber is evacuated to 5.0 * 10
-3Pa passes into argon gas, and making the interior total pressure of coating machine is 3.5 * 10
-1Pa, and control heating power 9KW treats and is coated with cutter heating 120min; At pressure 2.0 * 10
-1Under the argon shield of Pa, the Dc bias of control cutter is-200V that pulsed bias-800V is the plasma cleaning cutter 30min to be coated with of 6KW with power; Be 1.5 * 10 at pressure
-1Under the Pa argon shield, the plasma enhancing source heating Ti evaporation source with power 10KW in Dc bias-200V, is coated with 10min under pulsed bias-600V; Pass into the nitrogen of 150sccm, continuation at power 10KW, is coated with 10min under Dc bias-200V with the Ti evaporation source; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than being the composite alloy material of 55:25:20, its power is 4.5KW, sputtering current is 6.0A, when passing into argon gas 100sccm, pass into the nitrogen of 50sccm, and be coated with 240min at Dc bias-80V, naturally behind the cooling 90min, can take out cutter.
Applying on this high-speed steel hobboing cutter and recording hardness behind Ti/TiN/ (Al, Ti, Cr) the N composite coating is 23 ~ 30GPa; The thickness of Ti transition zone is 200nm, and the thickness of TiN layer is 300nm, and the thickness of (Al, Ti, Cr) N layer is 4 μ m; The impression grade is 2 grades.
Embodiment 2
First high-speed steel drill is carried out putting into coating machine behind blasting treatment and the Ultrasonic Cleaning with conventional method, then coating chamber is evacuated to 5.0 * 10
-3Pa passes into argon gas, and making the interior total pressure of coating machine is 2.5 * 10
-1Pa, and control heating power 7KW treats and is coated with cutter heating 60min; At pressure 2.5 * 10
-1Under the argon shield of Pa, the Dc bias of control cutter is-100V that pulsed bias-500V is the plasma cleaning cutter 15min to be coated with of 4KW with power; Be 1.2 * 10 at pressure
-1Under the Pa argon shield, the plasma enhancing source heating Ti evaporation source with power 7.5KW in Dc bias-100V, is coated with 5min under pulsed bias-400V; Pass into the nitrogen of 110sccm, continuation at power 7.5KW, is coated with 5min under Dc bias-130V with the Ti evaporation source; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than being the composite alloy material of 50:30:20, its power is 3KW, sputtering current is 3.0A, when passing into argon gas 60sccm, pass into the nitrogen of 30sccm, and be coated with 180min at Dc bias-50V, naturally behind the cooling 70min, can take out cutter.
Applying on this high-speed steel drill and recording hardness behind Ti/TiN/ (Al, Ti, Cr) the N composite coating is 22 ~ 28GPa; The thickness of Ti transition zone is 50nm, and the thickness of TiN layer is 100nm, and the thickness of (Al, Ti, Cr) N layer is 2.8 μ m; The impression grade is 2 grades.
Embodiment 3
First carbide-tipped milling cutter is carried out putting into coating machine behind blasting treatment and the Ultrasonic Cleaning with conventional method, then coating chamber is evacuated to 5.0 * 10
-3Pa passes into argon gas, and making the interior total pressure of coating machine is 4.0 * 10
-1Pa, and control heating power 9KW treats and is coated with cutter heating 150min; At pressure 1.8 * 10
-1Under the argon shield of Pa, the Dc bias of control cutter is-200V that pulsed bias-600V is the plasma cleaning cutter 30min to be coated with of 6KW with power; Be 8 * 10 at pressure
-2Under the Pa argon shield, the plasma enhancing source heating Ti evaporation source with power 9KW in Dc bias-200V, is coated with 8min under pulsed bias-400V; Pass into the nitrogen of 100sccm, continuation at power 9KW, is coated with 10min under Dc bias-150V with the Ti evaporation source; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than being the composite alloy material of 70:20:10, its power is 4.5KW, sputtering current is 6.0A, when passing into argon gas 80sccm, pass into the nitrogen of 40sccm, and be coated with 200min at Dc bias-30V, naturally behind the cooling 90min, can take out cutter.
Applying on this carbide-tipped milling cutter and recording hardness behind Ti/TiN/ (Al, Ti, Cr) the N composite coating is 26 ~ 33GPa; The thickness of Ti transition zone is 170nm, and the thickness of TiN layer is 300nm, and the thickness of (Al, Ti, Cr) N layer is 3 μ m; The impression grade is 1 grade.
Embodiment 4
First tungsten carbide tap is carried out putting into coating machine behind blasting treatment and the Ultrasonic Cleaning with conventional method, then coating chamber is evacuated to 5.0 * 10
-3Pa passes into argon gas, and making the interior total pressure of coating machine is 3.0 * 10
-1Pa, and control heating power 8KW treats and is coated with cutter heating 60min; At pressure 1.5 * 10
-1Under the argon shield of Pa, the Dc bias of control cutter is-150V that pulsed bias-500V is the plasma cleaning cutter 20min to be coated with of 5KW with power; Be 1.2 * 10 at pressure
-1Under the Pa argon shield, the plasma enhancing source heating Ti evaporation source with power 8KW in Dc bias-100V, is coated with 7min under pulsed bias-300V; Pass into the nitrogen of 70sccm, continuation at power 8KW, is coated with 10min under Dc bias-100V with the Ti evaporation source; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than being the composite alloy material of 60:20:20, its power is 4KW, sputtering current is 5.0A, when passing into argon gas 90sccm, pass into the nitrogen of 50sccm, and be coated with 150min at Dc bias-40V, naturally behind the cooling 70min, can take out cutter.
Applying on this tungsten carbide tap and recording hardness behind Ti/TiN/ (Al, Ti, Cr) the N composite coating is 24 ~ 30GPa; The thickness of Ti transition zone is 120nm, and the thickness of TiN layer is 300nm, and the thickness of (Al, Ti, Cr) N layer is 2 μ m; The impression grade is 1 grade.
Embodiment 5
First carbide-tipped lathe tool is carried out putting into coating machine behind blasting treatment and the Ultrasonic Cleaning with conventional method, then coating chamber is evacuated to 5.0 * 10
-3Pa passes into argon gas, and making the interior total pressure of coating machine is 4.0 * 10
-1Pa, and control heating power 9KW treats and is coated with cutter heating 150min; At pressure 1.8 * 10
-1Under the argon shield of Pa, the Dc bias of control cutter is-200V that pulsed bias-700V is the plasma cleaning cutter 30min to be coated with of 6KW with power; Be 8 * 10 at pressure
-2Under the Pa argon shield, the plasma enhancing source heating Ti evaporation source with power 9KW in Dc bias-200V, is coated with 10min under pulsed bias-500V; Pass into the nitrogen of 100sccm, continuation at power 9KW, is coated with 15min under Dc bias-150V with the Ti evaporation source; With MF reactive magnetron sputtering sputtered aluminum titanium chromium atom than being the composite alloy material of 60:25:15, its power is 5KW, sputtering current is 8.0A, when passing into argon gas 120sccm, pass into the nitrogen of 80sccm, be coated with 300min at Dc bias-45V, naturally behind the cooling 120min, can take out cutter.
Applying on this carbide-tipped lathe tool and recording hardness behind Ti/TiN/ (Al, Ti, Cr) the N composite coating is 22 ~ 28GPa; The thickness of Ti transition zone is 200nm, and the thickness of TiN layer is 500nm, and the thickness of (Al, Ti, Cr) N layer is 5 μ m; The impression grade is 1 grade.
Comparative Examples
First carbide-tipped milling cutter is carried out putting into coating machine behind blasting treatment and the Ultrasonic Cleaning with conventional method, then coating chamber is evacuated to 5.0 * 10
-3Pa passes into argon gas, and making the interior total pressure of coating machine is 4.0 * 10
-1Pa, and control heating power 9KW treats and is coated with cutter heating 150min; At pressure 1.8 * 10
-1Under the argon shield of Pa, the Dc bias of control cutter is-200V that pulsed bias-600V is the plasma cleaning cutter 30min to be coated with of 6KW with power; Be 8 * 10 at pressure
-2Under the Pa argon shield, the plasma enhancing source heating Ti evaporation source with power 9KW in Dc bias-200V, is coated with 8min under pulsed bias-400V; Pass into the nitrogen of 100sccm, continuation at power 9KW, is coated with 10min under Dc bias-150V with the Ti evaporation source; Than being the composite alloy material of 50:50, its power is 4.5KW with MF reactive magnetron sputtering sputtered aluminum titanium atom, and sputtering current is 6.0A, pass into argon gas 80sccm, pass into simultaneously the nitrogen of 40sccm, be coated with 200min at Dc bias-30V, naturally behind the cooling 90min, can take out cutter.
Recording hardness behind the coating Ti/TiN/TiAlN composite coating on this carbide-tipped milling cutter is 26 ~ 33GPa; The thickness of Ti transition zone is 170nm, and the thickness of TiN layer is 300nm, and the thickness of (Al, Ti, Cr) N layer is 3 μ m; The impression grade is 5 grades.
First carbide-tipped milling cutter is carried out putting into coating machine behind blasting treatment and the Ultrasonic Cleaning with conventional method, then coating chamber is evacuated to 5.0 * 10
-3Pa passes into argon gas, and making the interior total pressure of coating machine is 4.0 * 10
-1Pa, and control heating power 9KW treats and is coated with cutter heating 150min; At pressure 1.8 * 10
-1Under the argon shield of Pa, the Dc bias of control cutter is-200V that pulsed bias-600V is the plasma cleaning cutter 30min to be coated with of 6KW with power; Be 8 * 10 at pressure
-2Under the Pa argon shield, the plasma enhancing source heating Ti evaporation source with power 9KW is coated with 8min under cutter bias voltage-400V; Pass into the nitrogen of 100sccm, continuation at power 9KW, is coated with 10min under cutter bias voltage-150V with the Ti evaporation source; Than being the composite alloy material of 50:50, its power is 4.5KW with MF reactive magnetron sputtering sputtered aluminum titanium atom, and sputtering current is 6.0A, passes into simultaneously the nitrogen of 40sccm, and bias voltage-30V is coated with 200min at cutter, naturally behind the cooling 90min, can take out cutter.
Applying on this carbide-tipped milling cutter and recording hardness behind Ti/TiN/ (Al, Ti, Cr) the N composite coating is 26 ~ 33GPa; The thickness of Ti transition zone is 50～200nm, and the thickness of TiN layer is 100～500nm, and the thickness of (Al, Ti, Cr) N layer is 2～5 μ m; The impression grade is 1 ~ 2 grade.
In order to investigate the performance of above embodiment and Comparative Examples cutter composite coating, the present invention has done following detection to it:
1) coating fracture apperance scanning electron microscopic observation
Adopt JSM-5900, secondary electron image, multiplication factor 50000.Observation post gets photo and sees Fig. 1,2.Can observe from Fig. 1, the Ti/TiN/TiAlN film has obvious column structure.Can observe from Fig. 2, there is not thick column structure in Ti/TiN/ (Al, Ti, Cr) N film, organizes more fine and closely woven nanocrystalline structure and become.
2) film surface impression morphology observation
Adopt common Rockwell apparatus, top is 120 ° of diamond circular cone pressure heads, load 588N, multiplication factor 200.Observation post gets photo and sees Fig. 3,4.Can observe from Fig. 3, Ti/TiN/TiAlN obvious crackle occurs and comes off under the pressure of 588N, and belonging to HF5(is impression class 5 level).Can observe from Fig. 4, Ti/ TiN/(Al, Ti, Cr) N film obscission do not occur under the pressure of 588N, a small amount of crackle is only arranged, and belonging to HF1(is 1 grade of impression grade).
3) coating X-ray diffraction test
Employing is based on the dx series x x ray diffractometer x DX-1000 of Cu radiation, 40KV/25mA, 30 ~ 70 ° of measurement categorys, measuring speed 0.06/1 second.Test gained spectrogram is seen Fig. 5.As seen from the figure, the Ti/TiN/TiAlN film, mask has obvious preferred orientation in (111), and diffracted intensity I reaches 2000; And Ti/ TiN/ (Al, Ti, Cr) this orientation of N film obviously reduces, I is lower than 400 at (111) face diffracted intensity, existing studies show that, for AlTi base coating, the reduction of (111) face diffracted intensity I, the thick columnar structure of expression film is tending towards reduction, and the raising of the anti-wear performance of film.
4) hardness test
The cutter coat that the cutter coat that embodiment 3 makes and Comparative Examples make adopts nanohardness tester TB15192-12-8-20, by surperficial closing speed 10nm/s, and the dark 200nm of minimum pressure, maximum presses dark 300nm condition to test.The test the data obtained sees the following form.
From upper table as seen, Ti/TiN/ (Al, Ti, Cr) N and Ti/TiN/TiAlN nano hardness are in same level, but under identical experiment condition, Ti/TiN/ (Al, Ti, Cr) standard deviation of N nano hardness only is 3.74, the Young amount of touching standard deviation is 54.1; The standard deviation of Ti/TiN/TiAlN nano hardness has then reached 16.5, and the Young amount of touching standard deviation has then reached 330.4, that is to say that the uniformity of this coating product is well below Ti/TiN/ (Al, Ti, Cr) N.
Claims (10)
1. tool surface Ti/TiN/MaN composite coating, this composite coating is three layers, outwards is respectively successively Ti transition zone, TiN layer and MaN layer from tool surface, wherein the thickness of Ti transition zone is 50～200nm; The thickness of TiN layer is 100～500nm; The thickness of MaN layer is 2～5 μ m; Its institutional framework is nanocrystalline structure, and face diffracted intensity I is lower than 400 in (111) of X-ray diffraction.
2. tool surface Ti/TiN/MaN composite coating according to claim 1, the Ma in this composite coating in the MaN layer is (Al, Ti, Cr), and the case hardness of its composite coating is 22 ~ 33GPa, and the impression grade is 1 ~ 2 grade.
3. the preparation method of the described tool surface Ti/TiN/MaN of claim 1 composite coating, the method will behind the cutter cleaning-drying that is coated with, place in the coating chamber to be coated with by following processing step and condition first:
1) first coating chamber is evacuated to 5.0 * 10
-3Then Pa passes into argon gas, and making the interior total pressure of coating machine is 2.5 * 10
-1～4.0 * 10
-1Pa, and power ratio control 7 ~ 9KW treat being coated with cutter heating 60～150min;
2) at pressure 1.5 * 10
-1～2.5 * 10
-1Under the argon shield of Pa, control Dc bias-100 ~-200V, pulsed bias-500 ~-800V, be plasma cleaning cutter 15～30min to be coated with of 4 ~ 6KW with power;
3) under argon shield, with plasma enhancing source heating, be coated with as evaporation source with Ti first, and then pass into nitrogen and be coated with Ti;
4) under argon shield, keep plasma enhancing source operation, and with MF reactive magnetron sputtering Ma composite alloy material, pass into simultaneously nitrogen and react and be coated with, then cool off and get final product.
4. the preparation method of tool surface Ti/TiN/MaN composite coating according to claim 3 is in the method the 3rd) the step concrete technology condition that is coated with transition zone Ti, TiN is:
1) be 8 * 10 at pressure
-2～1.5 * 10
-1Under the Pa argon shield, with the plasma enhancing source heating Ti evaporation source of power 7.5～10KW, control Dc bias-100～-200V, pulsed bias-300～-be coated with 5～10min under the 600V;
2) pass into the nitrogen of 70 ~ 150sccm, continue with the Ti evaporation source at power 7.5～10KW, control Dc bias-100～-be coated with 5～15min under the 200V.
5. according to claim 3 or the preparation method of 4 described tool surface Ti/TiN/MaN composite coatings, in the method the 4th) the step concrete technology condition that is coated with the MaN wearing layer is:
With MF reactive magnetron sputtering sputter Ma composite alloy material, its power is 3～5KW, and sputtering current is 3.0～8.0A, passes into the nitrogen of 30～80sccm when passing into argon gas 60～120sccm, and Dc bias-30～-80V is coated with 150～300min.
6. according to claim 3 or the preparation method of 4 described tool surface Ti/TiN/MaN composite coatings, the used Ma composite alloy material of the method is Al
XTi
YCr
1-X-YComposite alloy material, this composite alloy material disposes four by being mutually 90 degree, and composition is identical, and its aluminium titanium chromium atom ratio is 50 ~ 70:20 ~ 30:10 ~ 20, and purity is 99.99%.
7. the preparation method of tool surface Ti/TiN/MaN composite coating according to claim 5, the used Ma composite alloy material of the method is Al
XTi
YCr
1-X-YComposite alloy material, this composite alloy material disposes four by being mutually 90 degree, and composition is identical, and its aluminium titanium chromium atom ratio is 50 ~ 70:20 ~ 30:10 ~ 20, and purity is 99.99%.
8. according to claim 3 or the preparation method of 4 described tool surface Ti/TiN/MaN composite coatings, the method the 4th) be 70～120min the cool time behind the step cutter plated film.
9. the preparation method of tool surface Ti/TiN/MaN composite coating according to claim 5 is in the method the 4th) cool time behind the step cutter plated film is 70～120min.
10. the preparation method of tool surface Ti/TiN/MaN composite coating according to claim 7 is in the method the 4th) cool time behind the step cutter plated film is 70～120min.
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Cited By (8)
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| CN103290358A (en) * | 2013-06-18 | 2013-09-11 | 合肥力恒液压系统有限公司 | Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof |
| CN103774096A (en) * | 2013-11-18 | 2014-05-07 | 四川大学 | Preparation method for anti-oxidation composite hard coating |
| CN106048541A (en) * | 2016-07-27 | 2016-10-26 | 西安热工研究院有限公司 | Nanometer multi-layer film for cutter ring of cutter of tunneling machine and preparing method of nanometer multi-layer film |
| CN107034438A (en) * | 2017-05-03 | 2017-08-11 | 成都真锐科技涂层技术有限公司 | High speed steel screw tap preparation method of surface coating |
| RU2637188C1 (en) * | 2016-10-11 | 2017-11-30 | федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" | Method of producing multi-layer coating for cutting tool |
| CN108103465A (en) * | 2017-12-20 | 2018-06-01 | 富耐克超硬材料股份有限公司 | Processing stainless steel special-purpose coat cutter and preparation method thereof |
| CN111254399A (en) * | 2019-10-10 | 2020-06-09 | 东南大学 | Ta-TaN-TaWN superhard coating cutter and preparation method thereof |
| CN113463046A (en) * | 2021-07-05 | 2021-10-01 | 大连德泰控股有限公司 | Coating material for enhancing wear resistance of water pump impeller and coating method |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290358A (en) * | 2013-06-18 | 2013-09-11 | 合肥力恒液压系统有限公司 | Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof |
| CN103774096A (en) * | 2013-11-18 | 2014-05-07 | 四川大学 | Preparation method for anti-oxidation composite hard coating |
| CN103774096B (en) * | 2013-11-18 | 2015-12-30 | 四川大学 | A kind of preparation method of anti-oxidant rigid composite coating |
| CN106048541A (en) * | 2016-07-27 | 2016-10-26 | 西安热工研究院有限公司 | Nanometer multi-layer film for cutter ring of cutter of tunneling machine and preparing method of nanometer multi-layer film |
| CN106048541B (en) * | 2016-07-27 | 2019-05-03 | 西安热工研究院有限公司 | A kind of nano-multilayer film and preparation method thereof of tunnel piercing rounding machine cutter cutter ring |
| RU2637188C1 (en) * | 2016-10-11 | 2017-11-30 | федеральное государственное бюджетное образовательное учреждение высшего образования "Ульяновский государственный технический университет" | Method of producing multi-layer coating for cutting tool |
| CN107034438A (en) * | 2017-05-03 | 2017-08-11 | 成都真锐科技涂层技术有限公司 | High speed steel screw tap preparation method of surface coating |
| CN107034438B (en) * | 2017-05-03 | 2019-05-31 | 成都真锐科技涂层技术有限公司 | High speed steel screw tap preparation method of surface coating |
| CN108103465A (en) * | 2017-12-20 | 2018-06-01 | 富耐克超硬材料股份有限公司 | Processing stainless steel special-purpose coat cutter and preparation method thereof |
| CN111254399A (en) * | 2019-10-10 | 2020-06-09 | 东南大学 | Ta-TaN-TaWN superhard coating cutter and preparation method thereof |
| CN113463046A (en) * | 2021-07-05 | 2021-10-01 | 大连德泰控股有限公司 | Coating material for enhancing wear resistance of water pump impeller and coating method |
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