CN108103465A - Processing stainless steel special-purpose coat cutter and preparation method thereof - Google Patents
Processing stainless steel special-purpose coat cutter and preparation method thereof Download PDFInfo
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- CN108103465A CN108103465A CN201711387535.9A CN201711387535A CN108103465A CN 108103465 A CN108103465 A CN 108103465A CN 201711387535 A CN201711387535 A CN 201711387535A CN 108103465 A CN108103465 A CN 108103465A
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/021—Cleaning or etching treatments
- C23C14/022—Cleaning or etching treatments by means of bombardment with energetic particles or radiation
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
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- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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Abstract
The present invention provides a kind of processing stainless steel special-purpose coat cutters, it includes the Ti transition zones, TiN transition zones and CrAlTiSiN main body coatings that tool matrix and from-inner-to-outer are sequentially deposited at the tool matrix surface, and the atomic ratio of Cr, Al, Ti, Si, N are respectively in the CrAlTiSiN main bodys coating：25%~35%, 15%~20%, 5%~9%, 2%~5% and 37%~46%.The cutter has high microhardness, low-friction coefficient, excellent adhesive force and excellent high-temperature service performance.The present invention also provides a kind of methods for preparing the processing stainless steel special-purpose coat cutter, including matrix cleaning, prepare Ti transition zones, prepare TiN transition zones and prepare CrAlTiSiN main body coatings.The preparation method is simple for process, is easy to industrialized production.
Description
Technical field
The invention belongs to cutting-tool engineering fields, and in particular to a kind of processing stainless steel special-purpose coat cutter and its preparation side
Method.
Background technology
Stainless steel has relatively broad application in production, such as used valve, connection fastening on industrial petroleum pipeline
Sanitation-grade valve, common life kind handware in ring flange, ball valve, medicine instrument and food instruments etc..The institute of stainless steel
Seldom to get rusty, being primarily due to it has a higher corrosion resistance, and amount containing Cr is more than 10% in usual material, and containing a large amount of
Ni ingredients, can also keep certain intensity at a higher temperature.The steel grade often selected in the market has 304,316,316L etc.,
Compared with other materials group, stainless steel belongs to hard-cutting material scope.The difficult cutting characteristic of stainless steel is mainly manifested in following several
A aspect：
It is serious to cohere phenomenon：Since toughness and plasticity ratio other materials are good, before chip is easily bonded in process
On knife face；
Resistance to cutting is big：Stainless steel is compared with other steel grades, because plasticity and toughness are preferable so that chip is not in process
It is easily separated from stainless steel base, results in larger resistance to cutting；
Thermal conductivity factor is low：Because thermal conductivity factor is low compared with other materials, therefore the big amount temperature generated in the cutting process has little time
It is expelled directly out taking away so as to which heat is attached to workpiece sheet by chip, the point of a knife position of cutting tool is caused easily to form ratio
Compared with the high cutting temperature of concentration, cause abrasion of cutting tool serious；
Processing hardening is serious：Cutting deformation is serious, is also easy to produce serious torsional deflection between lattice, and unstable austenite is by part
To martensitic transformation, strengthening effect is generated, for Surface hardened layer degree up to the 250%~350% of stainless steel raw material, hardening is deep
Degree can reach 1/3rd of cutting depth.
At present, the cutter of processing stainless steel on the market mainly has hard alloy cutter and carbide alloy coating cutter two greatly
Class, wherein coated cutting tool are quickly grown in recent years, and coating composition is mainly with TiN, TiAlN；But add in the high-speed cutting of stainless steel
In work, the performance of above-mentioned cutter can not still be competent at.
In order to solve the problems, such as present on, people are seeking a kind of preferable technical solution always.
The content of the invention
By in consideration of it, the present invention provides a kind of processing stainless steel special-purpose coat cutter, including tool matrix and from-inner-to-outer
The Ti transition zones, TiN transition zones and CrAlTiSiN main body coatings on the tool matrix surface are sequentially deposited at, it is described
The atomic ratio of Cr, Al, Ti, Si, N are respectively in CrAlTiSiN main body coatings：25%~35%, 15%~20%, 5%~9%, 2%~
5% and 37%~46%.
Based on above-mentioned, the tool matrix is ceramic matrix, hard alloy substrate or simple metal matrix.
The present invention also provides a kind of methods for preparing the processing stainless steel special-purpose coat cutter, comprise the following steps：
Matrix cleans：Pickling, alkali cleaning, deionized water rinsing and Ion Cleaning are carried out to tool matrix successively, obtain clean cutter
Matrix；
Prepare Ti transition zones：Using high-power impulse magnetron sputtering technology splash-proofing sputtering metal Ti targets, on the clean tool matrix
Depositing Ti transition zone obtains primary depositing tool matrix；
Prepare TiN transition zones：With N2For reaction gas, in the primary depositing tool matrix surface depositing TiN transition zone, obtain
Secondary deposition tool matrix；
Prepare CrAlTiSiN main body coatings：Utilize high-power impulse magnetron sputtering technology sputtering TiSi composition targets, AlCr composition targets
Material and pure Cr targets deposit CrAlTiSiN main body coatings on the secondary deposition tool matrix, obtain the special painting of processing stainless steel
Layer cutter.
Based on above-mentioned, the atomic ratio of Ti atoms and Si atoms is 80 in the TiSi composition targets：15；The AlCr composition targets
The atomic ratio of middle Al atoms and Cr atoms is 30：70.
Based on above-mentioned, the thickness of the CrAlTiSiN main bodys coating is 3 μm~10 μm.
Based on above-mentioned, described matrix cleaning step specifically includes：First successively using diluted acid, lye and deionized water to institute
It states tool matrix and carries out cleaning 5min~10min；Then ultrasonic wave is carried out to it using acetone, alcohol and deionized water successively again
Clean 10min~15min, the tool matrix tentatively cleaned；The tool matrix tentatively cleaned is finally placed in vacuum
The vacuum degree of vacuum chamber is evacuated to 10 by interior-1Pa~10-3 Pa, Ar gas is passed through into vacuum chamber, and maintenance vacuum degree is 0.1Pa
~1Pa carries out 5 min~20 under the conditions of Dc bias is the V of -600 V~-300 to the tool matrix tentatively cleaned
The ion bombardment of min obtains the clean tool matrix.
Based on above-mentioned, the preparation Ti transition layer process specifically includes：The clean tool matrix is placed in sputtering chamber
In, it is 0.5 KW~2.5KW, bias in average output power using high-power impulse magnetron sputtering technology splash-proofing sputtering metal Ti targets
Under conditions of being 400 DEG C~600 DEG C for the V of -100 V~-60, depositing temperature, deposition thickness is on the clean tool matrix
The Ti transition zones of the nm of 200 nm~300, obtain the primary depositing tool matrix.
Based on above-mentioned, the preparation TiN transition layer process specifically includes：With N2The gas flow ratio of gas and Ar gas is 3：20
Ratio reaction gas N is passed through into the sputtering chamber2Gas and Ar gas；In average output power 0.5KW~1.5KW, vacuum degree
Under conditions of 0.2 Pa~2.0Pa, in the TiN that the primary depositing tool matrix surface deposition thickness is 100nm~200nm
Transition zone obtains the secondary deposition tool matrix.
Based on above-mentioned, the preparation CrAlTiSiN main body coating steps specifically include：By the secondary deposition tool matrix
It is placed in sputtering chamber, the vacuum degree of sputtering chamber is first evacuated to 5 × 10-3Pa~6 × 10-3Pa, with N2The gas stream of gas and Ar gas
Measure ratio 1：5 ratio is passed through reaction gas N into the sputtering chamber2Gas and Ar gas；
Average output power 1KW~3KW, bias be -120V~-80V, vacuum degree is 0.1Pa~3.0Pa, depositing temperature is
Under conditions of 500 DEG C~650 DEG C, TiSi composition targets, AlCr composition targets are sputtered respectively using high-power impulse magnetron sputtering technology
With pure Cr targets, deposition thickness is 3 μm~10 μm of CrAlTiSiN main body coatings on the secondary deposition tool matrix, is obtained
The processing stainless steel special-purpose coat cutter.
Cr elements are to improve to resist in main body coating contained by processing stainless steel special-purpose coat cutter provided by the present invention
The essential element of hot corrosion resistance, meanwhile, a small amount of Cr elements are mixed in Ti-Al-N can improve the fracture toughness and coating of cutter
Combination power between tool matrix, and the thermostability temperature of cutter can be improved and start oxidizing temperature and be significantly improved.
Al elements can be solid-solubilized in TiN lattices, play solution strengthening effect.In coated cutting tool working angles, Al elements are with O element knots
It closes, fine and close Al is formed on cutting edge roundness surface2O3Film, moreover it is possible to play self-lubricating function.Si elements can greatly improve hardness and
Wearability, research show that, when Al, Si atomicity content reach certain proportion, the Si elements in coating are instead of metastable state c-
Ti in TiAlN forms the TiAlSiN with face-centred cubic structure, can improve its hardness and oxidation resistance temperature；Ti elements
With extraordinary combination power.
Therefore, processing stainless steel special-purpose coat cutter provided by the invention is using Ti layers and TiN layer as transition zone
CrAlTiSiN multicomponent composite coating cutters, while with excellent combination power, coating hardness, inoxidizability increase
And also there is relatively low coefficient of friction.Experiments have shown that processing stainless steel special-purpose coat cutter provided by the invention is micro- hard
Degree can reach 31.2 GPa~37.3GPa, oxidation resistance temperature can reach 1059 DEG C~1237 DEG C, inter-layer bonding force can reach 47N
~85N, coefficient of friction are 0.2~0.58.
Specific embodiment
Below by specific embodiment, technical scheme is described in further detail.
Embodiment 1
A kind of processing stainless steel special-purpose coat cutter is present embodiments provided, it includes tool matrix and from-inner-to-outer is sequentially depositing
In the Ti transition zones on the tool matrix surface, TiN transition zones and CrAlTiSiN main body coatings, the CrAlTiSiN main bodys apply
The atomic ratio of Cr, Al, Ti, Si, N are respectively in layer：25%th, 20%, 5%, 5% and 45%.Wherein, the tool matrix is ceramic base
Body.
The present embodiment also provides a kind of method for preparing the processing stainless steel special-purpose coat cutter, comprises the following steps：
Matrix cleans：Cleaning 10min is carried out to the tool matrix using diluted acid, lye and deionized water successively first；Then
Ultrasonic cleaning 15min is carried out to it using acetone, alcohol and deionized water successively again, the tool matrix tentatively cleaned；
Finally the tool matrix tentatively cleaned is placed in vacuum chamber, the vacuum degree of vacuum chamber is first evacuated to 10-3 Pa, to vacuum
Interior is passed through Ar gas, and maintenance vacuum degree is 0.1Pa, to the cutter base tentatively cleaned under the conditions of Dc bias is -300 V
Body carries out the ion bombardment of 20 min, obtains the clean tool matrix.
Prepare Ti transition zones：The clean tool matrix is placed in sputtering chamber, utilizes high-power impulse magnetron sputtering
Technology splash-proofing sputtering metal Ti targets, in institute under conditions of average output power is 2.5KW, bias is 600 DEG C for -60V, depositing temperature
The Ti transition zones that deposition thickness on clean tool matrix is 300 nm are stated, obtain primary depositing tool matrix.
Prepare TiN transition zones：With N2The gas flow ratio of gas and Ar gas is 3：20 ratio is passed through into the sputtering chamber
Reaction gas N2Gas and Ar gas under conditions of average output power 1.5KW, vacuum degree is 2.0Pa, sink in Ti transition layer surfaces
Product thickness is TiN transition zones described in 150nm, obtains secondary deposition tool matrix.
Prepare CrAlTiSiN main body coatings：The secondary deposition tool matrix is placed in sputtering chamber, first by sputtering chamber
Vacuum degree be evacuated to 6 × 10-3Pa, with N2The gas flow ratio 1 of gas and Ar gas：5 ratio is passed through reaction into the sputtering chamber
Gas N2Gas and Ar gas, average output power 3KW, bias be -80V, vacuum degree 3.0Pa, depositing temperature are 650 DEG C of items
Under part, TiSi composition targets, AlCr composition targets and pure Cr targets are sputtered respectively described two using high-power impulse magnetron sputtering technology
Secondary deposition tool substrate deposit thickness is 10 μm of CrAlTiSiN main body coatings, obtains processing stainless steel special-purpose coat knife
Tool.
Experiment proves：Using DHV-10002 type micro Vickerses, load is 0.49N to side provided by the present invention
Processing stainless steel special-purpose coat cutter prepared by method does impression test, departs from mode, impression circumferential crack, impression half from coated film
The combination power of CrAlTiSiN main bodys coating and tool matrix is analyzed in terms of footpath three.As a result surface, processing provided in this embodiment
Though stainless steel special-purpose coat tool surface has Indentation Damage but impression unobvious and radius are less than 30 μm, impression periphery flawless.
Therefore, processing stainless steel special-purpose coat cutter provided by the present invention has stronger combination power with tool matrix.Also, through inspection
Survey can obtain the processing stainless steel special-purpose coat cutter microhardness can reach 31.2GPa, oxidation resistance temperature can reach 1200 DEG C,
Inter-layer bonding force can reach 85N, coefficient of friction 0.3.
Embodiment 2
The present embodiment provides a kind of processing stainless steel special-purpose coat cutters, it includes tool matrix and from-inner-to-outer is sequentially deposited at
Ti transition zones, TiN transition zones and the CrAlTiSiN main body coatings on the tool matrix surface, the CrAlTiSiN main bodys coating
The atomic ratio of middle Cr, Al, Ti, Si, N is respectively：30%th, 15%, 9%, 5% and 41%.Wherein, the tool matrix is hard alloy
Matrix.
The present embodiment also provides a kind of method for preparing the processing stainless steel special-purpose coat cutter, and specific steps are with implementing
Step in example 1 is roughly the same, the difference is that：
The step of Ti transition zones are prepared described in the present embodiment includes：The clean tool matrix is placed in sputtering chamber, profit
With high-power impulse magnetron sputtering technology splash-proofing sputtering metal Ti targets, it is 1KW, biases as -60V, depositing temperature in average output power
For the Ti transition zones that deposition thickness is 250nm on the clean tool matrix under conditions of 500 DEG C, primary depositing cutter is obtained
Matrix.
The step of preparation TiN transition zones, includes：With N2The gas flow ratio of gas and Ar gas is 3：20 ratio is to institute
It states and reaction gas N is passed through in sputtering chamber2Gas and Ar gas, under conditions of average output power 1KW, vacuum degree is 1.0Pa, in Ti
Transition layer surface deposition thickness is TiN transition zones described in 130 nm, obtains secondary deposition tool matrix.
The step of preparation CrAlTiSiN main body coatings, includes：The secondary deposition tool matrix is placed in sputtering
In room, the vacuum degree of sputtering chamber is first evacuated to 5.5 × 10-3Pa, with N2The gas flow ratio 1 of gas and Ar gas：5 ratio is to described
Reaction gas N is passed through in sputtering chamber2Gas and Ar gas, average output power 1.5KW, bias for -120V, vacuum degree 3.0Pa,
Under conditions of depositing temperature is 560 DEG C, it is multiple that TiSi composition targets, AlCr are sputtered respectively using high-power impulse magnetron sputtering technology
The CrAlTiSiN main body coatings that target and pure Cr the targets deposition thickness on the secondary deposition tool matrix are 8 μm are closed, obtain institute
State processing stainless steel special-purpose coat cutter.
Experiment proves：It is special that processing stainless steel provided in this embodiment is measured using test method same as Example 1
The microhardness of coated cutting tool can reach 31.2 GPa, oxidation resistance temperature can reach 1100 DEG C, inter-layer bonding force can reach 65N,
Coefficient of friction is 0.2.
Embodiment 3
The present embodiment provides a kind of processing stainless steel special-purpose coat cutters, it includes tool matrix and from-inner-to-outer is sequentially deposited at
Ti transition zones, TiN transition zones and the CrAlTiSiN main body coatings on the tool matrix surface, the CrAlTiSiN main bodys coating
The atomic ratio of middle Cr, Al, Ti, Si, N is respectively：25%th, 20%, 5%, 5% and 45%.Wherein, the tool matrix is No. 45 base steels
Body.
The present embodiment also provides a kind of method for preparing the processing stainless steel special-purpose coat cutter, and specific steps are with implementing
Step in example 1 is roughly the same, the difference is that：
The step of CrAlTiSiN main body coatings are prepared described in the present embodiment includes：The secondary deposition tool matrix is placed in
Into sputtering chamber, the vacuum degree of sputtering chamber is first evacuated to 6 × 10-3Pa；With N2The gas flow ratio 1 of gas and Ar gas：5 ratio to
Reaction gas N is passed through in the sputtering chamber2Gas and Ar gas；Average output power 2KW, bias be -80V, vacuum degree is
3.0Pa, depositing temperature under conditions of 650 DEG C, using high-power impulse magnetron sputtering technology sputter respectively TiSi composition targets,
The CrAlTiSiN main body coatings that AlCr composition targets and pure Cr the targets deposition thickness on the secondary deposition tool matrix are 5 μm,
Obtain the processing stainless steel special-purpose coat cutter.
Experiment proves：It is special that processing stainless steel provided in this embodiment is measured using test method same as Example 1
The microhardness of coated cutting tool can reach 35GPa, oxidation resistance temperature can reach 1237 DEG C, inter-layer bonding force can reach 60N, friction
Coefficient is 0.3.
Embodiment 4
The present embodiment provides a kind of processing stainless steel special-purpose coat cutters, it includes tool matrix and from-inner-to-outer is sequentially deposited at
Ti transition zones, TiN transition zones and the CrAlTiSiN main body coatings on the blade base surface, the CrAlTiSiN main bodys coating
The atomic ratio of middle Cr, Al, Ti, Si, N is respectively：33%th, 17%, 9%, 2% and 39%.Wherein, the tool matrix is ceramic matrix.
The present embodiment, which also provides, a kind of prepares the processing stainless steel special-purpose coat cutter method, specific steps and embodiment
Step in 1 is roughly the same, the difference is that：
The step of CrAlTiSiN main body coatings are prepared described in the present embodiment includes：The secondary deposition tool matrix is placed in
Into sputtering chamber, the vacuum degree of sputtering chamber is first evacuated to 5 × 10-3Pa, with N2The gas flow ratio 1 of gas and Ar gas：5 ratio to
Reaction gas N is passed through in the sputtering chamber2Gas and Ar gas；Average output power 1KW, bias be -100V, vacuum degree is
3.0Pa, depositing temperature under conditions of 620 DEG C, using high-power impulse magnetron sputtering technology sputter respectively TiSi composition targets,
The CrAlTiSiN main body coatings that AlCr composition targets and pure Cr the targets deposition thickness on the secondary deposition tool matrix are 3 μm, obtain
To the processing stainless steel special-purpose coat cutter.
Experiments have shown that it is special to measure processing stainless steel provided in this embodiment using test method same as Example 1
The microhardness of coated cutting tool can reach 35GPa, oxidation resistance temperature can reach 1150 DEG C, inter-layer bonding force can reach 47N, friction
Coefficient is 0.35.
Finally it should be noted that：The above embodiments are merely illustrative of the technical scheme of the present invention and are not intended to be limiting thereof；To the greatest extent
The present invention is described in detail with reference to preferred embodiments for pipe, those of ordinary skills in the art should understand that：Still
It can modify to the specific embodiment of the present invention or equivalent substitution is carried out to some technical characteristics；Without departing from this hair
The spirit of bright technical solution should all cover among the claimed technical solution scope of the present invention.
Claims (9)
1. a kind of processing stainless steel special-purpose coat cutter, it includes tool matrix and from-inner-to-outer is sequentially deposited at the cutter base
Ti transition zones, TiN transition zones and the CrAlTiSiN main body coatings in body surface face, which is characterized in that the CrAlTiSiN main bodys apply
The atomic ratio of Cr, Al, Ti, Si, N are respectively in layer：25%~35%, 15%~20%, 5%~9%, 2%~5% and 37%~46%.
2. processing stainless steel special-purpose coat cutter according to claim 1, which is characterized in that the tool matrix is ceramics
Matrix, hard alloy substrate or simple metal matrix.
3. a kind of method of the processing stainless steel special-purpose coat cutter prepared described in claim 1 or 2, comprises the following steps：
Matrix cleans：Pickling, alkali cleaning, deionized water rinsing and Ion Cleaning are carried out to tool matrix successively, obtain clean cutter
Matrix；
Prepare Ti transition zones：Using high-power impulse magnetron sputtering technology splash-proofing sputtering metal Ti targets, on the clean tool matrix
Depositing Ti transition zone obtains primary depositing tool matrix；
Prepare TiN transition zones：With N2Gas is reaction gas, in the primary depositing tool matrix surface depositing TiN transition zone, is obtained
To secondary deposition tool matrix；
Prepare CrAlTiSiN main body coatings：Utilize high-power impulse magnetron sputtering technology sputtering TiSi composition targets, AlCr composition targets
Material and pure Cr targets deposit CrAlTiSiN main body coatings on the secondary deposition tool matrix, obtain the special painting of processing stainless steel
Layer cutter.
4. the method according to claim 3 for preparing processing stainless steel special-purpose coat cutter, which is characterized in that the TiSi
The atomic ratio of Ti atoms and Si atoms is 80 in composition target：15；The atomic ratio of Al atoms and Cr atoms in the AlCr composition targets
For 30：70.
5. the method according to claim 4 for preparing processing stainless steel special-purpose coat cutter, which is characterized in that described
The thickness of CrAlTiSiN main body coatings is 3 μm~10 μm.
6. the method according to claim 5 for preparing processing stainless steel special-purpose coat cutter, which is characterized in that described matrix
Cleaning step specifically includes：First successively using diluted acid, lye and deionized water the tool matrix is carried out cleaning 5min~
10min；Then ultrasonic cleaning 10min~15min is carried out to it using acetone, alcohol and deionized water successively again, obtained just
Walk the tool matrix of cleaning；Finally the tool matrix tentatively cleaned is placed in vacuum chamber, the vacuum degree of vacuum chamber is taken out
To 10-1Pa~10-3 Pa is passed through Ar gas into vacuum chamber, and maintenance vacuum degree is 0.1Pa~1Pa, is -600 V in Dc bias
The ion bombardment of the min of 5 min~20 is carried out under conditions of~-300 V to the tool matrix that tentatively cleans, is obtained described
Clean tool matrix.
7. the method according to claim 6 for preparing processing stainless steel special-purpose coat cutter, which is characterized in that the preparation
Ti transition layer process specifically includes：The clean tool matrix is placed in sputtering chamber, utilizes high-power impulse magnetron sputtering
Technology splash-proofing sputtering metal Ti targets, average output power be 0.5 KW~2.5KW, bias is the V of -100 V~-60, depositing temperature is
Under the conditions of 400 DEG C~600 DEG C, deposition thickness is the Ti transition zones of 200nm~300nm on the clean tool matrix, is obtained
The primary depositing tool matrix.
8. the method according to claim 7 for preparing processing stainless steel special-purpose coat cutter, which is characterized in that the preparation
TiN transition layer process specifically includes：With N2The gas flow ratio of gas and Ar gas is 3：20 ratio is passed through into the sputtering chamber
Reaction gas N2Gas and Ar gas；Under conditions of average output power 0.5KW~1.5KW, vacuum degree is 0.2 Pa~2.0Pa,
In the TiN transition zones that the primary depositing tool matrix surface deposition thickness is 100nm~200nm, the secondary deposition is obtained
Tool matrix.
9. the method according to claim 8 for preparing processing stainless steel special-purpose coat cutter, which is characterized in that the preparation
CrAlTiSiN main body coating steps specifically include：The secondary deposition tool matrix is placed in sputtering chamber, first by sputtering chamber
Vacuum degree be evacuated to 5 × 10-3Pa~6 × 10-3Pa, with N2The gas flow ratio 1 of gas and Ar gas：5 ratio, to the sputtering chamber
Inside it is passed through reaction gas N2Gas and Ar gas；
Average output power 1KW~3KW, bias be -120V~-80V, vacuum degree is 0.1Pa~3.0Pa, depositing temperature is
Under conditions of 500 DEG C~650 DEG C, TiSi composition targets, AlCr composition targets are sputtered respectively using high-power impulse magnetron sputtering technology
With pure Cr targets, deposition thickness is 3 μm~10 μm of CrAlTiSiN main body coatings on the secondary deposition tool matrix, is obtained
The processing stainless steel special-purpose coat cutter.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109295425A (en) * | 2018-09-28 | 2019-02-01 | 深圳市奥美特纳米科技有限公司 | Cr/CrN/CrAlSiN/CrAlTiSiN nanometer multilayer Gradient Film and preparation method thereof |
| CN114026269A (en) * | 2019-06-28 | 2022-02-08 | 瓦尔特公开股份有限公司 | Coated cutting tool |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103071819A (en) * | 2012-12-31 | 2013-05-01 | 四川大学 | Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating |
| CN105839054A (en) * | 2016-05-24 | 2016-08-10 | 上海都浩真空镀膜技术有限公司 | CrAlTiSiN cutter protective coating and preparation method thereof |
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2017
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103071819A (en) * | 2012-12-31 | 2013-05-01 | 四川大学 | Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating |
| CN105839054A (en) * | 2016-05-24 | 2016-08-10 | 上海都浩真空镀膜技术有限公司 | CrAlTiSiN cutter protective coating and preparation method thereof |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109295425A (en) * | 2018-09-28 | 2019-02-01 | 深圳市奥美特纳米科技有限公司 | Cr/CrN/CrAlSiN/CrAlTiSiN nanometer multilayer Gradient Film and preparation method thereof |
| CN109295425B (en) * | 2018-09-28 | 2020-07-14 | 深圳市奥美特纳米科技有限公司 | Cr/CrN/CrAlSiN/CrAlTiSiN nano multilayer gradient film and preparation method thereof |
| CN114026269A (en) * | 2019-06-28 | 2022-02-08 | 瓦尔特公开股份有限公司 | Coated cutting tool |
| CN114026269B (en) * | 2019-06-28 | 2024-01-09 | 瓦尔特公开股份有限公司 | Coated cutting tool |
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