CN106048541B - A kind of nano-multilayer film and preparation method thereof of tunnel piercing rounding machine cutter cutter ring - Google Patents
A kind of nano-multilayer film and preparation method thereof of tunnel piercing rounding machine cutter cutter ring Download PDFInfo
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- CN106048541B CN106048541B CN201610602907.4A CN201610602907A CN106048541B CN 106048541 B CN106048541 B CN 106048541B CN 201610602907 A CN201610602907 A CN 201610602907A CN 106048541 B CN106048541 B CN 106048541B
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- rounding machine
- gas
- tunnel piercing
- cutter ring
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0641—Nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
Abstract
The invention discloses a kind of nano-multilayer films and preparation method thereof of tunnel piercing rounding machine cutter cutter ring, including several layer films being sequentially deposited on tunnel piercing rounding machine cutter cutter ring surface, each layer film successively includes metal Ti bottom, hard TiN film layer and TiCrAlN wear resistant friction reducing layer from inside to outside, the nano-multilayer film can be used in tunnel piercing rounding machine cutter cutter ring, and the service life of tunnel piercing rounding machine cutter cutter ring can be effectively improved, while preparation method is relatively simple.
Description
Technical field
The invention belongs to cutter coat fields, are related to the nano-multilayer film and its system of a kind of tunnel piercing rounding machine cutter cutter ring
Preparation Method.
Background technique
Rock tunnel(ling) machine (TBM) is the heavy mechanical equipment of subsurface rock matter tunnel (hole) engineering tunneling boring construction, mainly
It constructs for water conservancy and hydropower tunnel, Rail Highway traffic tunnel, coal mine roadway and urban subway tunneling boring.In TBM construction,
Stop 3-4 hours daily, check cutter ring service condition, abnormal phenomenon or cutter ring radius abrasion 30mm (cutter ring outer diameter occurs
Cutter ring is then needed replacing more than 483mm)；Cutter ring relies on import, and buying hour is long, expensive；To the constructing tunnel duration and apply
Work cost has a significant impact.According to statistics, up to 80%, cutter ring is lost most the cutter ring quantity replaced in TBM construction by tool wear
Greatly.
Exist by TiN and CrN ganoine thin film prepared by chemical vapor deposition (CVD) and physical vapour deposition (PVD) (PVD) method
Largely improve parts surface performance, with high-wearing feature, high intensity, high rigidity and lesser coefficient of friction.Two
First film is in severe friction or hot environment in use, its wearability, heat resistance and high-temperature oxidation resistance etc. are not ideal enough.?
On TiN and CrN Membranous Foundations add Al, C, Si, Cr element formed TiAlN, TiCN, CrAlN, TiSiN, CrSiN,
TiSiCN, TiCrAlN film.Cr and Al element in TiCrAlN coating (film) reacts to form Al with the oxygen in air2O3
And Cr2O3Oxidation film plays inhibition oxidation, wear resistant friction reducing and heat-blocking action, takes away more heats by chip, reduce
Cutter hub temperature, to prolong the service life.The film of Ti/TiN plural layers/base junction resultant force and toughness are higher than single layer TiAlN thin film.?
TiCrAlN film layer, the Ti/TiN/TiCrAlN nano-multilayer film of formation, hardness, toughness are prepared on Ti/TiN plural layers
And high-temperature oxidation resistant and wear resistant friction reducing performance are significantly improved, and are one of the important development directions for improving ganoine thin film performance.
Multi-arc ion coating physical vapour deposition (PVD) (PVD) thin film technique is to improve the effective ways of TBM cutter cutter ring performance.
PVD multi-arc ion plating film has following advantage: projectile energy height, the consistency of film are high in plated film, and multiple electricity can be used
The evaporation source of arc improves deposition rate, and substrate and film interface, which generate the transition zone that atom diffusion is constituted, can improve interface performance,
Internal stress is reduced, film/film-substrate binding strength is high, coating process non-environmental-pollution.Cutter ring is after vacuum coating, surface roughness Ra
It < 0.1 μm (being far below coated cutting tool Ra < 1~2 μm), is expected to improve its stock-removing efficiency, accuracy and speed, prolong the service life, drop
Low cutter ring cost input improves TBM construction economy and reliability, ensures Construction of Hydropower Engineering progress and quality.Therefore it researches and develops
A kind of coating material and film plating process on TBM cutter cutter ring surface, are of great significance with improving its service life.
Summary of the invention
It is an object of the invention to overcome the above-mentioned prior art, a kind of tunnel piercing rounding machine cutter cutter ring is provided
Nano-multilayer film and preparation method thereof, which can be used in tunnel piercing rounding machine cutter cutter ring, and can have
The service life of the raising tunnel piercing rounding machine cutter cutter ring of effect, while preparation method is relatively simple.
In order to achieve the above objectives, the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring of the present invention includes successively sinking
For product in several layer films on tunnel piercing rounding machine cutter cutter ring surface, each layer film successively includes the bottom metal Ti from inside to outside
Layer, hard TiN film layer and TiCrAlN wear resistant friction reducing layer.
Hard TiN film layer is made of Ti element and N element.
TiCrAlN wear resistant friction reducing layer is made of Ti element, Cr element, Al element and N element.
Metal Ti bottom with a thickness of 0.5 μm, hard TiN film layer with a thickness of 1.0 μm, TiCrAlN wear resistant friction reducing layer
With a thickness of 3.0 μm.
The preparation method of the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring of the present invention the following steps are included:
1) surface of tunnel piercing rounding machine cutter cutter ring is cleaned, then tunnel piercing rounding machine cutter cutter ring is placed into vacuum chamber
Rotating device on rotated, and to tunnel piercing rounding machine cutter cutter ring carry out plasma clean；
2) metal is sequentially depositing on the surface of tunnel piercing rounding machine cutter cutter ring using multi-arc ion coating physical vaporous deposition
Ti bottom, hard TiN film layer and TiCrAlN wear resistant friction reducing layer, complete the deposition of thin film；
3) step 2) is repeated, the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring is obtained.
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method deposited metal Ti bottom are as follows: into vacuum chamber
It is passed through the Ar gas that flow is 50sccm, air pressure is 0.2Pa, then carries out the heavy of metal Ti bottom using Ti metal as deposition targets
Product, wherein in deposition process depositing temperature be 350 DEG C, arc current 110A, bias voltage 200V.
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method deposition hard TiN film layer are as follows: to vacuum chamber
Inside it is passed through N2The mixed gas of gas and Ar gas, wherein N2The flow of gas is 260sccm, and the flow of Ar gas is 30sccm, gaseous mixture
The air pressure of body is 0.5Pa, then the deposition of hard TiN film layer is carried out using Ti alloy as deposition targets, deposits temperature in deposition process
Degree is 350 DEG C, arc current 110A, bias voltage 100V.
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method depositing Ti CrAlN wear resistant friction reducing layer are as follows: Xiang Zhen
N is passed through in plenum chamber2The mixed gas of gas and Ar gas, wherein N2The flow of gas and the flow of Ar gas be respectively 260sccm and
30sccm is carried out the deposition of TiCrAlN wear resistant friction reducing layer in deposition process using Cr and TiAl alloy as deposition targets, deposited
Arc current and bias voltage in journey are respectively 110A and 100V.
Rotating device includes pivoted frame, support plate, support rod and motor, wherein the output shaft of motor is connected with pivoted frame, branch
Support plate is fixed on pivoted frame by support rod, and tunnel piercing rounding machine cutter cutter ring is placed in support plate.
The invention has the following advantages:
The plural layers of tunnel piercing rounding machine cutter cutter ring of the present invention include metal Ti bottom, hard TiN film layer and
TiCrAlN wear resistant friction reducing layer, wherein the bond strength of film and tunnel piercing rounding machine cutter cutter ring is improved by metal Ti bottom；
Tunnel piercing rounding machine cutter cutter ring film hardness is improved by hard TiN film layer, while improving the toughness and film of plural layers
Binding force between cutter ring plays the role of wear resistant friction reducing by TiCrAlN wear resistant friction reducing layer, to effectively improve tunnel digging
The service life of feed tool cutter ring.The present invention in the preparation, first cleans the surface of tunnel piercing rounding machine cutter cutter ring, then adopt
It is sequentially depositing metal Ti bottom, hard TiN film layer and TiCrAlN wear resistant friction reducing layer with multi-arc ion coating physical vaporous deposition,
Easy to operate, at low cost and environmentally protective, no any pollutant effluents exhaust gas generates.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of tunnel piercing rounding machine cutter cutter ring；
Fig. 2 is the XRD spectra of wear resistant friction reducing layer in the present invention.
Specific embodiment
The invention will be described in further detail with reference to the accompanying drawing:
With reference to Fig. 1, the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring of the present invention includes being sequentially deposited to tunnel
Several layer films on road boring machine cutter cutter ring surface, each layer film successively include metal Ti bottom, hard from inside to outside
TiN film layer and TiCrAlN wear resistant friction reducing layer.
Hard TiN film layer is made of Ti element and N element.
TiCrAlN wear resistant friction reducing layer is made of Ti element, Cr element, Al element and N element.
Metal Ti bottom with a thickness of 0.5 μm, hard TiN film layer with a thickness of 1.0 μm, TiCrAlN wear resistant friction reducing layer
With a thickness of 3.0 μm.
The preparation method of the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring of the present invention the following steps are included:
1) surface of tunnel piercing rounding machine cutter cutter ring is cleaned, then tunnel piercing rounding machine cutter cutter ring is placed into vacuum chamber
Rotating device on rotated, and to tunnel piercing rounding machine cutter cutter ring carry out plasma clean；
2) metal is sequentially depositing on the surface of tunnel piercing rounding machine cutter cutter ring using multi-arc ion coating physical vaporous deposition
Ti bottom, hard TiN film layer and TiCrAlN wear resistant friction reducing layer, complete the deposition of thin film；
3) step 2) is repeated, the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring is obtained.
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method deposited metal Ti bottom are as follows: into vacuum chamber
It is passed through the Ar gas that flow is 50sccm, air pressure is 0.2Pa, then carries out the heavy of metal Ti bottom using Ti metal as deposition targets
Product, wherein in deposition process depositing temperature be 350 DEG C, arc current 110A, bias voltage 200V.
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method deposition hard TiN film layer are as follows: to vacuum chamber
Inside it is passed through N2The mixed gas of gas and Ar gas, wherein N2The flow of gas is 260sccm, and the flow of Ar gas is 30sccm, gaseous mixture
The air pressure of body is 0.5Pa, then the deposition of hard TiN film layer is carried out using Ti alloy as deposition targets, deposits temperature in deposition process
Degree is 350 DEG C, arc current 110A, bias voltage 100V.
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method depositing Ti CrAlN wear resistant friction reducing layer are as follows: Xiang Zhen
N is passed through in plenum chamber2The mixed gas of gas and Ar gas, wherein N2The flow of gas and the flow of Ar gas be respectively 260sccm and
30sccm is carried out the deposition of TiCrAlN wear resistant friction reducing layer in deposition process using Cr and TiAl alloy as deposition targets, deposited
Arc current and bias voltage in journey are respectively 110A and 100V.
Rotating device includes pivoted frame, support plate, support rod and motor, wherein the output shaft of motor is connected with pivoted frame, branch
Support plate is fixed on pivoted frame by support rod, and tunnel piercing rounding machine cutter cutter ring is placed in support plate.
Fig. 2 is the XRD spectra of TiCrAlN wear resistant friction reducing layer, and as can be known from Fig. 2, phase composition is face-centred cubic structure
TiAlN and CrN.
Claims (4)
1. a kind of preparation method of the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring, which is characterized in that the tunnel piercing
The nano-multilayer film of rounding machine cutter cutter ring includes several layer films being sequentially deposited on tunnel piercing rounding machine cutter cutter ring surface, respectively
Layer film successively includes metal Ti bottom, hard TiN film layer and TiCrAlN wear resistant friction reducing layer from inside to outside；
Metal Ti bottom with a thickness of 0.5 μm, hard TiN film layer with a thickness of 1.0 μm, the thickness of TiCrAlN wear resistant friction reducing layer
It is 3.0 μm；
The following steps are included:
1) surface of tunnel piercing rounding machine cutter cutter ring is cleaned, then tunnel piercing rounding machine cutter cutter ring is placed into the indoor rotation of vacuum chamber
It is rotated on rotary device, and plasma clean is carried out to tunnel piercing rounding machine cutter cutter ring；
2) bottom metal Ti is sequentially depositing on the surface of tunnel piercing rounding machine cutter cutter ring using multi-arc ion coating physical vaporous deposition
Layer, hard TiN film layer and TiCrAlN wear resistant friction reducing layer, complete the deposition of thin film；
3) step 2) is repeated, the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring is obtained；
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method deposited metal Ti bottom are as follows: be passed through into vacuum chamber
The Ar gas that flow is 50sccm, air pressure is 0.2Pa, then using Ti metal as deposition targets carry out metal Ti bottom deposition,
In, in deposition process depositing temperature be 350 DEG C, arc current 110A, bias voltage 200V；
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method deposition hard TiN film layer are as follows: lead into vacuum chamber
Enter N2The mixed gas of gas and Ar gas, wherein N2The flow of gas is 260sccm, and the flow of Ar gas is 30sccm, mixed gas
Air pressure is 0.5Pa, then the deposition of hard TiN film layer is carried out using Ti alloy as deposition targets, and depositing temperature is in deposition process
350 DEG C, arc current 110A, bias voltage 100V；
Using the concrete operations of multi-arc ion coating physical gas-phase deposite method depositing Ti CrAlN wear resistant friction reducing layer are as follows: to vacuum chamber
Interior is passed through N2The mixed gas of gas and Ar gas, wherein N2The flow of gas and the flow of Ar gas are respectively 260sccm and 30sccm,
Using Cr and TiAl alloy as the deposition of deposition targets progress TiCrAlN wear resistant friction reducing layer in deposition process, in deposition process
Arc current and bias voltage are respectively 110A and 100V.
2. the preparation method of the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring according to claim 1, feature exist
In hard TiN film layer is made of Ti element and N element.
3. the preparation method of the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring according to claim 1, feature exist
In TiCrAlN wear resistant friction reducing layer is made of Ti element, Cr element, Al element and N element.
4. the preparation method of the nano-multilayer film of tunnel piercing rounding machine cutter cutter ring according to claim 1, feature exist
In rotating device includes pivoted frame, support plate, support rod and motor, wherein the output shaft of motor is connected with pivoted frame, support plate
It is fixed on pivoted frame by support rod, tunnel piercing rounding machine cutter cutter ring is placed in support plate.
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| CN201610602907.4A CN106048541B (en) | 2016-07-27 | 2016-07-27 | A kind of nano-multilayer film and preparation method thereof of tunnel piercing rounding machine cutter cutter ring |
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| CN201610602907.4A CN106048541B (en) | 2016-07-27 | 2016-07-27 | A kind of nano-multilayer film and preparation method thereof of tunnel piercing rounding machine cutter cutter ring |
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| CN106048541B true CN106048541B (en) | 2019-05-03 |
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| CN107354436A (en) * | 2017-07-18 | 2017-11-17 | 西安热工研究院有限公司 | A kind of TiSi base multilayer hard films of hobboing cutter cutter ring and preparation method thereof |
| CN107419223A (en) * | 2017-07-18 | 2017-12-01 | 西安热工研究院有限公司 | A kind of TiSi base nano composite structure ganoine thin films of hobboing cutter cutter ring and preparation method thereof |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1648286A (en) * | 2004-05-17 | 2005-08-03 | 成都凯贝克纳米镀膜技术有限公司 | TiN-TiAIN series hard nano structure multilayer coating layer |
| CN101323945A (en) * | 2008-07-25 | 2008-12-17 | 西南大学 | Hard film containing stress relaxation layer and method for preparing the same |
| CN102166849A (en) * | 2010-12-20 | 2011-08-31 | 武汉新铬涂层设备有限公司 | Chromium nitride aluminum-titanium composite coating, cutter deposited with same, and preparation method |
| KR101190324B1 (en) * | 2010-02-11 | 2012-10-11 | 대구텍 유한회사 | Cutting tool |
| CN103071819A (en) * | 2012-12-31 | 2013-05-01 | 四川大学 | Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating |
| JP5499861B2 (en) * | 2010-04-14 | 2014-05-21 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent chipping resistance due to hard coating layer |
-
2016
- 2016-07-27 CN CN201610602907.4A patent/CN106048541B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1648286A (en) * | 2004-05-17 | 2005-08-03 | 成都凯贝克纳米镀膜技术有限公司 | TiN-TiAIN series hard nano structure multilayer coating layer |
| CN101323945A (en) * | 2008-07-25 | 2008-12-17 | 西南大学 | Hard film containing stress relaxation layer and method for preparing the same |
| KR101190324B1 (en) * | 2010-02-11 | 2012-10-11 | 대구텍 유한회사 | Cutting tool |
| JP5499861B2 (en) * | 2010-04-14 | 2014-05-21 | 三菱マテリアル株式会社 | Surface coated cutting tool with excellent chipping resistance due to hard coating layer |
| CN102166849A (en) * | 2010-12-20 | 2011-08-31 | 武汉新铬涂层设备有限公司 | Chromium nitride aluminum-titanium composite coating, cutter deposited with same, and preparation method |
| CN103071819A (en) * | 2012-12-31 | 2013-05-01 | 四川大学 | Ti/TiN/MaN composite coating on surface of cutter and preparation method of Ti/TiN/MaN composite coating |
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