CN203270033U - Wear-resistant and corrosion-resistant composite coating layer on surface of mechanical part - Google Patents
Wear-resistant and corrosion-resistant composite coating layer on surface of mechanical part Download PDFInfo
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- CN203270033U CN203270033U CN 201320347932 CN201320347932U CN203270033U CN 203270033 U CN203270033 U CN 203270033U CN 201320347932 CN201320347932 CN 201320347932 CN 201320347932 U CN201320347932 U CN 201320347932U CN 203270033 U CN203270033 U CN 203270033U
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Abstract
The utility model discloses a wear-resistant and corrosion-resistant composite coating layer on the surface of a mechanical part. The composite coating layer comprises a transition layer and a functional layer, wherein the transition layer is prepared from pure metal of chromium, titanium or nickel and is positioned between the functional layer and the surface of a workpiece. A preparation method of the composite coating layer comprises the following technical steps of: (1) after cleaning and drying the workpiece, placing the workpiece in a vacuum chamber of unbalanced magnetron sputtering coating equipment; (2) setting vacuum pressure to be (3*10)<-3>Pa and temperature to be 200-500 DEG C, preserving the temperature for 30 minutes and meanwhile cleaning the workpiece with plasma; (3) introducing argon gas to prepare the transition layer through an unbalanced magnetron sputtering method; (4) taking the argon gas as working gas and introducing nitrogen reaction gas to prepare the functional layer; (5) cooling the workpiece to be within 100 DEG C along a furnace and taking out the workpiece. A composite material surface design method and a double-layer (the transition layer and the functional layer) structure are adopted for enhancing the surface properties of the mechanical part.
Description
Technical field:
The utility model relates to a kind of compound coating that is applied in the component of machine surface with wear-resisting, corrosion-resistant requirement.Utilize this compound coating, can improve wear-resistant, the corrosion resistance nature of the piece surface take steel, non-ferrous metal, cast iron etc. as material.
Background technology:
With the component that the metal material processing such as steel, non-ferrous metal, cast iron form, it is the chief component of industrial equipments, instrument, mould.Along with the continuous progress of Economic development and technology, also more and more higher to surface property (especially corrosion-resistant, the abrasion resistance properties) requirement of various components of machine.Adopt traditionally electro-deposition method to be coated with hard chrome, Ni at piece surface, or adopt surface heat-treatment process that piece surface is processed, the performance requriements that has satisfied part of these method parts, but there is following shortcoming:
1. seriously polluted, the especially pollution that causes of electrodeposition technology;
2. easily lost efficacy under abominable service condition, as in the parts such as piston rod, piston ring, easy to crack under the hard chromium high load condition, come off.
3. can't adapt to complicated service condition, as: under the high temperature oxidation condition, under high capacity, the stack occasion such as corrosion-resistant, traditional hard chrome is coated with, surface heat is processed and often can't be met the demands.
For these reasons, seek that cost is lower, functional characteristics outstanding, strong adaptability and environment friendly and pollution-free surface treatment method be the striving direction of scientific research and industry member always.
Summary of the invention:
For overcoming the defective of prior art, the purpose of this utility model is to provide a kind of non-balance magnetically controlled sputter method that utilizes, and preparation has corrosion-resistant, anti abrasive compound coating, is used for improving the component of machine surface property.The utility model adopts the composite material surface method of design, adopts double-layer structure (transition layer, functional layer) to satisfy and uses needs.
The utility model technical solution problem adopts following technical scheme:
Be used for that the component of machine surface abrasion resistance damages, corrosion resistant compound coating, described compound coating comprises transition layer and functional layer, and described transition layer is between described functional layer and component of machine surface.
Described transition layer is Cr(chromium), the Ti(titanium) or Ni(nickel) the pure metal layer.Described functional layer is carbide (MC), nitride (MN) or carbonitride (MNC), and M wherein is selected from Al(aluminium) or transition metal Ti(titanium), the Zr(zirconium), the Mo(molybdenum).
The thickness of described transition layer is between 0.5 μ m ~ 5 μ m.The thickness of described functional layer is between 0.5 μ m ~ 10 μ m.
The preparation method who is used for component of machine surface abrasion resistance damage, corrosion resistant compound coating comprises following processing step:
1. component of machine through deoil, anti-dandruff after, after ultrasonic cleaning and oven dry, be placed in the vacuum chamber of non-balance magnetically controlled sputter filming equipment;
2. open the vacuum system of non-balance magnetically controlled sputter equipment, the vacuum in vacuum chamber is extracted into 3 * 10
-3Pa; Component of machine is heated to 200 ℃～500 ℃ insulations 30 minutes; In insulating process, simultaneously component of machine is carried out plasma clean;
3. use argon gas as working gas, utilize non-balance magnetically controlled sputter method to prepare transition layer, according to workpiece military service characteristics, the thickness of transition layer prepares between 0.5 μ m ~ 5 μ m;
4. use argon gas as working gas, pass into reactant gases and prepare functional layer, according to workpiece military service characteristics, the thickness of functional layer prepares between 0.5 μ m ~ 10 μ m; Described reactant gases is nitrogen or acetylene;
5. in component of machine furnace cooling to 100 ℃, take out and get final product.
Compared with the prior art, the beneficial effects of the utility model are embodied in:
Because nitride, carbide, carbonitride and the metal base bonding force of physical vapor deposition preparation are relatively poor, therefore consider that use and component of machine metallic substance, functional layer film material all have the metallic film of good combination performance as transition layer.Transition layer can improve on the one hand the combination on the whole and component of machine of rete surface, also can improve on the other hand the corrosion resistance nature of component of machine.
The zone that directly contacts with external environment when functional layer is on active service as component of machine, performance requriements are tending towards variation.For this reason, in conjunction with magnesium-yttrium-transition metal compound good mechanical property and corrosion resistance nature, according to different environments for use, use carbide (MC), nitride (MN) or carbonitride (MNC) as film material.The M here is selected from Al(aluminium) or Cr(chromium), the Ti(titanium), the Mo(molybdenum), the Zr(zirconium) etc. transition metal.
The non-balance magnetically controlled sputter method in the physical vapor deposition (PVD) technology is used in the preparation of the utility model compound coating.In preparation process, component whole " immersing " can be realized the plasma clean to component, and can improve the density of film in plasma body glow discharge zone.In addition, due to magnetically controlled sputter method intrinsic " low temperature ", " at a high speed " characteristics, the compound coating that the utility model is related and preparation method can not affect the original mechanical property of component itself.
Description of drawings:
Fig. 1 is sectional structure chart of the present utility model.
Number in the figure: 1 component of machine, 2 transition layers, 3 functional layers.
Below by embodiment, the utility model is described in further detail.
Embodiment:
Embodiment: in conjunction with Fig. 1, the present embodiment is used for component of machine surface abrasion resistance damage, corrosion resistant compound coating, and it comprises transition layer 2 and functional layer 3, and described transition layer 2 is between the surface of functional layer 3 and component of machine 1.
In specifically arranging, transition layer 2 is by chromium, titanium or the preparation of nickel pure metal, and thickness is between 0.5 μ m ~ 5 μ m; Functional layer 3 is carbide MC, nitride MN or carbonitride MNC, and M wherein is selected from aluminium or transition metals Ti, zirconium, molybdenum.Functional layer thickness is between 0.5 μ m ~ 10 μ m.
The preparation method of the utility model compound coating below is described by way of example:
1, substitute the application of galvanic deposit hard chromium in hydraulic stem, hydraulic stem is placed on the work rest in the non-balance magnetically controlled sputter vacuum installation → vacuum system work and will be extracted into 3 * 10 in the vacuum chamber body after deoiling, utilizing ultrasonic cleaning equipment that hydraulic stem is cleaned, dries after anti-dandruff
-3Pa → hydraulic pressure the rod member is heated to 200 ℃ and be incubated 0.5 hour, insulation utilizes plasma clean further to clean → pass into argon gas to rod member simultaneously, vacuum chamber pressure is adjusted to 0.5 ~ 1Pa, utilize unbalanced magnetron sputtering (use Cr(chromium) as target) deposition Cr(chromium) film 1 μ m → pass into nitrogen and argon gas, vacuum chamber pressure remains unchanged, utilize non-balance magnetically controlled sputter, at Ar:N
2Be coated with approximately 6 μ m → stop plated film of CrN film under=2:1 condition, with in hydraulic pressure rod member furnace cooling to 100 ℃, take out.Cr(chromium wherein) film is transition layer, the CrN(chromium nitride) film is functional layer.
2, substitute the application of surperficial heat treatment technics in press tool (drift): drift is placed on the work rest in the non-balance magnetically controlled sputter vacuum installation → vacuum system work and will be extracted into 3 * 10 in the vacuum chamber body after deoiling, utilizing ultrasonic cleaning equipment that drift is cleaned, dries after anti-dandruff
-3Pa → drift is heated to 200 ℃ and be incubated 0.5 hour, insulation utilizes plasma clean further to clean → pass into argon gas to drift simultaneously, vacuum chamber pressure is adjusted to 0.5 ~ 1Pa, utilize unbalanced magnetron sputtering deposition Cr(chromium) film 0.5 μ m → pass into nitrogen and argon gas, vacuum chamber pressure remains unchanged, utilize non-balance magnetically controlled sputter (adopting Al and Cr target), at Ar:N
2Be coated with approximately 4 μ m → stop plated film of AlCrN film under=2:1 condition, with in drift furnace cooling to 100 ℃, take out.Cr(chromium wherein) film is transition layer, AlCrN(aluminium nitride chromium) film is functional layer.
Claims (5)
1. be used for that the component of machine surface abrasion resistance damages, corrosion resistant compound coating, it is characterized in that described compound coating comprises transition layer and functional layer, described transition layer is between described functional layer and component of machine surface.
2. according to claim 1 for component of machine surface abrasion resistance damage, corrosion resistant compound coating, it is characterized in that described transition layer is chromium, titanium or nickel pure metal layer.
According to claim 1 for the component of machine surface abrasion resistance damage, corrosion resistant compound coating, it is characterized in that described functional layer is carbide MC, nitride MN or carbonitride MNC, M wherein is selected from aluminium or transition metals Ti, zirconium, molybdenum.
4. according to claim 2 for component of machine surface abrasion resistance damage, corrosion resistant compound coating, it is characterized in that the thickness of described transition layer is between 0.5 μ m ~ 5 μ m.
5. according to claim 3 for component of machine surface abrasion resistance damage, corrosion resistant compound coating, it is characterized in that the thickness of described functional layer is between 0.5 μ m ~ 10 μ m.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201320347932 CN203270033U (en) | 2013-06-18 | 2013-06-18 | Wear-resistant and corrosion-resistant composite coating layer on surface of mechanical part |
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| CN 201320347932 CN203270033U (en) | 2013-06-18 | 2013-06-18 | Wear-resistant and corrosion-resistant composite coating layer on surface of mechanical part |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290358A (en) * | 2013-06-18 | 2013-09-11 | 合肥力恒液压系统有限公司 | Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103290358A (en) * | 2013-06-18 | 2013-09-11 | 合肥力恒液压系统有限公司 | Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof |
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| Date | Code | Title | Description |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Antiwear and anticorrosion composite coating for mechanical part surface, and preparation method thereof Effective date of registration: 20181012 Granted publication date: 20131106 Pledgee: Hefei high tech Company limited by guarantee Pledgor: Hefei Liheng Hydraulic System Co., Ltd. Registration number: 2018340000550 |
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| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20131106 Termination date: 20190618 |
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| CF01 | Termination of patent right due to non-payment of annual fee |