CN103038856B - 带电粒子检测器 - Google Patents

带电粒子检测器 Download PDF

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Publication number
CN103038856B
CN103038856B CN201180039297.7A CN201180039297A CN103038856B CN 103038856 B CN103038856 B CN 103038856B CN 201180039297 A CN201180039297 A CN 201180039297A CN 103038856 B CN103038856 B CN 103038856B
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CN
China
Prior art keywords
detector
charged particle
charged
target
providing
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Application number
CN201180039297.7A
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English (en)
Chinese (zh)
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CN103038856A (zh
Inventor
E.克尼德勒
J.H.奥尔洛夫
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FEI Co
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FEI Co
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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/04—Means for controlling the discharge
    • H01J2237/047—Changing particle velocity
    • H01J2237/0475—Changing particle velocity decelerating
    • H01J2237/04756—Changing particle velocity decelerating with electrostatic means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/05—Arrangements for energy or mass analysis
    • H01J2237/053—Arrangements for energy or mass analysis electrostatic
    • H01J2237/0535—Mirror analyser

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measurement Of Radiation (AREA)
CN201180039297.7A 2010-08-10 2011-08-10 带电粒子检测器 Active CN103038856B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US12/854,008 US8481962B2 (en) 2010-08-10 2010-08-10 Distributed potential charged particle detector
US12/854008 2010-08-10
PCT/US2011/047294 WO2012021652A2 (en) 2010-08-10 2011-08-10 Charged particle detector

Publications (2)

Publication Number Publication Date
CN103038856A CN103038856A (zh) 2013-04-10
CN103038856B true CN103038856B (zh) 2015-10-07

Family

ID=45564131

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201180039297.7A Active CN103038856B (zh) 2010-08-10 2011-08-10 带电粒子检测器

Country Status (5)

Country Link
US (2) US8481962B2 (https=)
EP (1) EP2603926B1 (https=)
JP (1) JP5997153B2 (https=)
CN (1) CN103038856B (https=)
WO (1) WO2012021652A2 (https=)

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JP6228870B2 (ja) * 2013-06-19 2017-11-08 日本電子株式会社 検出器および荷電粒子線装置
US9418819B2 (en) 2013-09-06 2016-08-16 Kla-Tencor Corporation Asymmetrical detector design and methodology
US10040062B2 (en) 2014-01-14 2018-08-07 Wisconsin Alumni Research Foundation Device and method for transferring a target between locations
CN103823234B (zh) * 2014-03-12 2017-02-08 中国工程物理研究院电子工程研究所 一种脉冲带电粒子束探测器
JP6294758B2 (ja) * 2014-05-12 2018-03-14 株式会社ニューフレアテクノロジー 荷電粒子ビーム描画装置及び荷電粒子ビームのドーズ量異常検出方法
US9673019B2 (en) 2014-09-22 2017-06-06 El-Mul Technologies Ltd. Electron detection system
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US10236156B2 (en) 2015-03-25 2019-03-19 Hermes Microvision Inc. Apparatus of plural charged-particle beams
CN114420523B (zh) * 2015-11-30 2025-04-15 Asml荷兰有限公司 多个带电粒子束的设备
US10605755B2 (en) * 2015-12-01 2020-03-31 Academia Sinica Method and device for detecting charged particles
EP3176808B1 (en) * 2015-12-03 2019-10-16 Carl Zeiss Microscopy Ltd. Method for detecting charged particles and particle beam device for carrying out the method
TWI778667B (zh) 2017-09-29 2022-09-21 荷蘭商Ａｓｍｌ荷蘭公司 半導體基板、帶電粒子束設備、及用於判定帶電粒子信號之方法
KR101914881B1 (ko) * 2017-11-01 2018-11-02 한국기초과학지원연구원 소형 비행시간 질량 분석기
US10692694B2 (en) * 2017-12-27 2020-06-23 Fei Company Method and apparatus for enhancing SE detection in mirror-based light imaging charged particle microscopes
JP7074479B2 (ja) * 2018-01-11 2022-05-24 株式会社ニューフレアテクノロジー マルチビーム検査装置
DE102018107529B4 (de) 2018-03-29 2023-03-23 Bruker Daltonics GmbH & Co. KG Verfahren zum Betrieb eines Sekundärelektronenvervielfachers im Ionendetektor eines Massenspektrometers für die Verlängerung der Lebensdauer
US10770262B1 (en) * 2018-05-30 2020-09-08 National Technology & Engineering Solutions Of Sandia, Llc Apparatus, method and system for imaging and utilization of SEM charged particles
CN113614875B (zh) * 2019-01-08 2023-12-22 应用材料以色列公司 扫描电子显微镜及用于重叠监控的方法
CN109742007B (zh) * 2019-01-18 2021-02-26 西藏大学 一种紧凑型带电粒子检测器
JP7362477B2 (ja) * 2019-12-27 2023-10-17 浜松ホトニクス株式会社 電子増倍器およびそれを含む光電子増倍器
US10861666B1 (en) * 2020-01-30 2020-12-08 ICT Integrated Circuit Testing Gesellschaft für Halbletterprüftechnik mbH Method of operating a charged particle gun, charged particle gun, and charged particle beam device
KR102845787B1 (ko) * 2020-06-18 2025-08-13 주식회사 히타치하이테크 하전 입자선 장치
EP3929962A1 (en) * 2020-06-25 2021-12-29 FEI Company Method of imaging a specimen using a transmission charged particle microscope
US11921488B2 (en) * 2020-12-15 2024-03-05 Xerox Corporation System and method for machine-learning-enabled micro-object density distribution control with the aid of a digital computer
EP4117016A1 (en) * 2021-07-05 2023-01-11 ASML Netherlands B.V. Charged particle detector

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JP2008140723A (ja) * 2006-12-05 2008-06-19 Horiba Ltd 分析装置
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Also Published As

Publication number Publication date
US20130214156A1 (en) 2013-08-22
JP2013535800A (ja) 2013-09-12
EP2603926A4 (en) 2014-07-09
EP2603926A2 (en) 2013-06-19
EP2603926B1 (en) 2016-12-21
CN103038856A (zh) 2013-04-10
US8481962B2 (en) 2013-07-09
WO2012021652A3 (en) 2012-05-03
WO2012021652A2 (en) 2012-02-16
US8907305B2 (en) 2014-12-09
JP5997153B2 (ja) 2016-09-28
US20120037802A1 (en) 2012-02-16

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