CN103035491B - 一种电力半导体芯片台面处理方法 - Google Patents
一种电力半导体芯片台面处理方法 Download PDFInfo
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- CN103035491B CN103035491B CN201210580864.6A CN201210580864A CN103035491B CN 103035491 B CN103035491 B CN 103035491B CN 201210580864 A CN201210580864 A CN 201210580864A CN 103035491 B CN103035491 B CN 103035491B
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 15
- 238000003672 processing method Methods 0.000 title claims abstract description 14
- 238000005260 corrosion Methods 0.000 claims abstract description 65
- 230000007797 corrosion Effects 0.000 claims abstract description 65
- 239000007788 liquid Substances 0.000 claims abstract description 19
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000004140 cleaning Methods 0.000 claims abstract description 11
- 238000012545 processing Methods 0.000 claims abstract description 9
- 238000001035 drying Methods 0.000 claims abstract description 8
- 229920003023 plastic Polymers 0.000 claims description 6
- 125000000391 vinyl group Chemical group [H]C([*])=C([H])[H] 0.000 claims description 3
- 229920002554 vinyl polymer Polymers 0.000 claims description 3
- 238000000034 method Methods 0.000 description 12
- 230000000694 effects Effects 0.000 description 3
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000002351 wastewater Substances 0.000 description 2
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229960000583 acetic acid Drugs 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000012362 glacial acetic acid Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Abstract
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CN201210580864.6A CN103035491B (zh) | 2012-12-28 | 2012-12-28 | 一种电力半导体芯片台面处理方法 |
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CN201210580864.6A CN103035491B (zh) | 2012-12-28 | 2012-12-28 | 一种电力半导体芯片台面处理方法 |
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CN103035491A CN103035491A (zh) | 2013-04-10 |
CN103035491B true CN103035491B (zh) | 2015-11-18 |
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Families Citing this family (1)
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CN103730487B (zh) * | 2013-12-16 | 2017-07-18 | 启东吉莱电子有限公司 | 一种提高正向耐压的可控硅台面结构及其制造工艺 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1231500A (zh) * | 1998-03-13 | 1999-10-13 | 日本电气株式会社 | 半导体器件的生产工艺和其中使用的清洗装置 |
CN101276856A (zh) * | 2008-04-30 | 2008-10-01 | 苏州纳米技术与纳米仿生研究所 | 硅太阳能电池清洗刻蚀、干燥工艺及其设备 |
CN101345189A (zh) * | 2007-07-12 | 2009-01-14 | 株式会社瑞萨科技 | 基板的清洗方法和清洗装置 |
CN102237435A (zh) * | 2010-04-21 | 2011-11-09 | 陕西众森电能科技有限公司 | 一种太阳电池的去边方法 |
CN102412172A (zh) * | 2011-11-01 | 2012-04-11 | 浙江光益硅业科技有限公司 | 切割、研磨硅片表面清洗方法 |
CN102716866A (zh) * | 2011-03-31 | 2012-10-10 | 江苏新潮光伏能源发展有限公司 | 太阳能电池用方型硅片清洗花篮 |
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2012
- 2012-12-28 CN CN201210580864.6A patent/CN103035491B/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1231500A (zh) * | 1998-03-13 | 1999-10-13 | 日本电气株式会社 | 半导体器件的生产工艺和其中使用的清洗装置 |
CN101345189A (zh) * | 2007-07-12 | 2009-01-14 | 株式会社瑞萨科技 | 基板的清洗方法和清洗装置 |
CN101276856A (zh) * | 2008-04-30 | 2008-10-01 | 苏州纳米技术与纳米仿生研究所 | 硅太阳能电池清洗刻蚀、干燥工艺及其设备 |
CN102237435A (zh) * | 2010-04-21 | 2011-11-09 | 陕西众森电能科技有限公司 | 一种太阳电池的去边方法 |
CN102716866A (zh) * | 2011-03-31 | 2012-10-10 | 江苏新潮光伏能源发展有限公司 | 太阳能电池用方型硅片清洗花篮 |
CN102412172A (zh) * | 2011-11-01 | 2012-04-11 | 浙江光益硅业科技有限公司 | 切割、研磨硅片表面清洗方法 |
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Address after: 321400 Zhejiang County of Jinyun city of Lishui Province East five East Industrial Zone Zhejiang Zhengbang Power Electronics Co Ltd Patentee after: ZHEJIANG ZHENGBANG ELECTRONIC CO.,LTD. Address before: 321400 Zhejiang County of Jinyun city of Lishui Province East five East Industrial Zone Zhejiang Zhengbang Power Electronics Co Ltd Patentee before: ZHEJIANG ZHENGBANG ELECTRIC POWER ELECTRONICS Co.,Ltd. |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A Surface Processing Method for Power Semiconductor Chips Granted publication date: 20151118 Pledgee: Lishui Jinyun Sub branch of Zhejiang Tailong Commercial Bank Co.,Ltd. Pledgor: ZHEJIANG ZHENGBANG ELECTRONIC CO.,LTD. Registration number: Y2024980007381 |
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PE01 | Entry into force of the registration of the contract for pledge of patent right |