CN103033247A - 一种基于电子天平的硅片自动计片装置 - Google Patents
一种基于电子天平的硅片自动计片装置 Download PDFInfo
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- CN103033247A CN103033247A CN2012103888237A CN201210388823A CN103033247A CN 103033247 A CN103033247 A CN 103033247A CN 2012103888237 A CN2012103888237 A CN 2012103888237A CN 201210388823 A CN201210388823 A CN 201210388823A CN 103033247 A CN103033247 A CN 103033247A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 98
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 98
- 239000010703 silicon Substances 0.000 title claims abstract description 98
- 238000004519 manufacturing process Methods 0.000 claims description 20
- 230000001186 cumulative effect Effects 0.000 claims description 4
- 238000012545 processing Methods 0.000 abstract description 7
- 230000000704 physical effect Effects 0.000 abstract 1
- 238000005303 weighing Methods 0.000 description 14
- 238000004364 calculation method Methods 0.000 description 11
- 239000004065 semiconductor Substances 0.000 description 8
- 238000010586 diagram Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 230000008570 general process Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
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- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
Description
测试次数 | 重量(g) | 片数(pcs) | 情况 |
1 | 272.5 | 50 | 正常 |
2 | 273.3 | 50 | 正常 |
3 | 272.8 | 50 | 正常 |
4 | 277.5 | 51 | 异常 |
5 | 273.1 | 50 | 正常 |
6 | 272.6 | 50 | 正常 |
7 | 272.5 | 50 | 正常 |
8 | 273.3 | 50 | 正常 |
9 | 273.4 | 50 | 正常 |
10 | 272.8 | 50 | 正常 |
Claims (6)
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CN201210388823.7A CN103033247B (zh) | 2012-10-12 | 2012-10-12 | 一种基于电子天平的硅片自动计片装置 |
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CN201210388823.7A CN103033247B (zh) | 2012-10-12 | 2012-10-12 | 一种基于电子天平的硅片自动计片装置 |
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CN103033247A true CN103033247A (zh) | 2013-04-10 |
CN103033247B CN103033247B (zh) | 2014-11-12 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104142175A (zh) * | 2013-05-08 | 2014-11-12 | 株式会社百利达 | 测量装置 |
CN104215313A (zh) * | 2014-09-11 | 2014-12-17 | 珠海格力电器股份有限公司 | 一种空调的标准工件的自动计数装置及系统 |
CN104457943A (zh) * | 2014-12-18 | 2015-03-25 | 常熟市意欧仪器仪表有限公司 | 一种带记录功能的电子天平 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58144717A (ja) * | 1981-10-30 | 1983-08-29 | Teraoka Seiko Co Ltd | 電子計数「あ」 |
JPS59168326A (ja) * | 1983-03-15 | 1984-09-22 | Ishida Scales Mfg Co Ltd | 電子計数秤 |
JPS61122525A (ja) * | 1984-11-20 | 1986-06-10 | Teraoka Seiko Co Ltd | 計数装置 |
CN202869626U (zh) * | 2012-10-12 | 2013-04-10 | 孙新利 | 一种基于电子天平的硅片自动计片装置 |
-
2012
- 2012-10-12 CN CN201210388823.7A patent/CN103033247B/zh active Active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58144717A (ja) * | 1981-10-30 | 1983-08-29 | Teraoka Seiko Co Ltd | 電子計数「あ」 |
JPS59168326A (ja) * | 1983-03-15 | 1984-09-22 | Ishida Scales Mfg Co Ltd | 電子計数秤 |
JPS61122525A (ja) * | 1984-11-20 | 1986-06-10 | Teraoka Seiko Co Ltd | 計数装置 |
CN202869626U (zh) * | 2012-10-12 | 2013-04-10 | 孙新利 | 一种基于电子天平的硅片自动计片装置 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104142175A (zh) * | 2013-05-08 | 2014-11-12 | 株式会社百利达 | 测量装置 |
CN104215313A (zh) * | 2014-09-11 | 2014-12-17 | 珠海格力电器股份有限公司 | 一种空调的标准工件的自动计数装置及系统 |
CN104457943A (zh) * | 2014-12-18 | 2015-03-25 | 常熟市意欧仪器仪表有限公司 | 一种带记录功能的电子天平 |
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Address after: 313100, No. 1299, front East Street, Changxing County Economic Development Zone, Zhejiang, Huzhou Patentee after: ZHEJIANG ZHONGJING TECHNOLOGY CO., LTD. Address before: 313100, No. 1299, front East Street, Changxing County Economic Development Zone, Zhejiang, Huzhou Patentee before: Zhejiang Cowin Electronics Co., Ltd. |