CN103021776A - Transmission electron microscope with near-field optical scanning function - Google Patents
Transmission electron microscope with near-field optical scanning function Download PDFInfo
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- CN103021776A CN103021776A CN201210518692XA CN201210518692A CN103021776A CN 103021776 A CN103021776 A CN 103021776A CN 201210518692X A CN201210518692X A CN 201210518692XA CN 201210518692 A CN201210518692 A CN 201210518692A CN 103021776 A CN103021776 A CN 103021776A
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Abstract
The invention relates to a transmission electron microscope with a near-field optical scanning function. The transmission electron microscope comprises a transmission electron microscope body. A sample rod is inserted on the transmission electron microscope body, a sample clamp for loading samples is arranged at one end of the sample rod which is hollow, a locating unit stretching to a sample is arranged in a rod body, an optical fiber probe for acquiring and leading in near-end signals is arranged on the locating unit, and the optical fiber probe is close to or attached to the sample by controlling the locating unit and in optical fiber connection with an exciting light source and/or an optical signal analyzer to achieve two-way transmission of the near-end signals. By means of the transmission electron microscope, conventional structure observation and representation is performed on samples through the transmission electron microscope, and near-field spectroscopy representation can be performed on the samples through the optical fiber probe simultaneously, accordingly, sample microstructures and optical properties are related one by one, the optical fiber probe with a metal coating can be further used for measuring sample electrical transport properties simultaneously, and the transmission electron microscope is an enormous expansion of transmission electron microscope functions.
Description
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Technical field
The present invention relates to a kind of transmission electron microscope, have especially simultaneously the transmission electron microscope of near field optic scan function.
Background technology
Transmission electron microscope is a kind of large-scale experimental device for the material microstructure sign, can accomplish the resolution of atom level.But conventional transmission electron microscope only has the structural characterization function.Spectral technique is the powerful measure that another material characterizes, and is all applicable to physics, chemistry even all kinds of samples such as biomedical, and generally its spatial resolution is in macroscopic view and arrives the meso-scale scope.The near field of light spectral technology that development in recent years is got up is brought up to nanoscale to spatial resolution especially.How spectral technique is combined with transmission electron microscope, become the emphasis of researcher's research.
Summary of the invention
For problems of the prior art, the object of the present invention is to provide a kind of transmission electron microscope with near field optic scan function, by in the specimen holder of transmission electron microscope, installing optical fiber probe additional, realize the introducing of light signal and draw, and can under the high-amplification-factor of transmission electron microscope, accurately control optical fiber probe to the distance of sample, realize the detection of near field of light signal.The microstructure resolving power of transmission electron microscope and near field of light spectral technology are combined, and the microstructure of setting up nanoscale is related one by one with its spectral quality.
And the present invention does not relate to the complicated transmission electron microscope body of repacking, just by redesign example of transmission electron microscope bar, just realize the very big expansion of transmission electron microscope function, changed researcher's Traditional Thinking, have very strong practicality, the cost of input is low.
To achieve these goals, a kind of transmission electron microscope with near field optic scan function of the present invention, comprise the transmission electron microscope body, be fitted with specimen holder on the described transmission microscopy body, one end of this specimen holder is equipped with the sample clamp for load sample, described specimen holder hollow arranges, be provided with the positioner that stretches to described sample in the shaft, the optical fiber probe that gathers and introduce the near field of light signal is installed on the described positioner, by control positioner make described optical fiber probe near or abut on the sample, described optical fiber probe is connected with exciting light sources and/or optical signal analyzer device optical fiber, realizes the transmitted in both directions of near field of light signal.
Further, this transmission electron microscope also comprises the electrical testing instrument, described sample clamp is made by conducting metal, be welded with the first cable on it, the described optical fiber probe outside is coated with conductive metal layer, be welded with the second cable on it, described the first cable and the second cable pass described specimen holder and described electrical testing Instrument connection.
Further, described conductive metal layer is coated on the front end of described optical fiber probe at least.
Further, described positioner is for carrying out the 3 D locating device of three-dimensional localization in the space, and described 3 D locating device is connected by the 3rd bunch of cables that multi-cable is combined into its driving control device.
Further, there are vacuum optical fiber flange and cable vacuum flange that the inner vacuum environment of described transmission electron microscope body is isolated from the outside away from an end shutoff of described sample clamp on the described specimen holder, described the first cable, described the second cable and described the 3rd bunch of cables are connected with described electrical testing instrument or described driving control device by described cable vacuum flange, and the optical fiber that connects described optical fiber probe is connected with described exciting light sources and/or described optical signal analyzer device by described vacuum optical fiber flange.
The present invention has realized that the available fiber probe carries out the near field of light Spectroscopic Characterization to sample when specimen material being made the conventional structure observation of transmission electron microscope, characterizing, realization sample microstructure is related one by one with optical property, can also use simultaneously the electronic transport character of the optical fiber probe measurement sample of the coat of metal, be the tremendous expansion of transmission electron microscope function.
Description of drawings
Fig. 1 is the structural representation of the first execution mode of a kind of transmission electron microscope with near field optic scan function of the present invention;
Fig. 2 is A place generalized section among Fig. 1;
Fig. 3 is the structural representation of the second execution mode of the present invention;
Fig. 4 is the structural representation of the third execution mode of the present invention.
Embodiment
The invention will be further described below in conjunction with specific embodiment.
As depicted in figs. 1 and 2, have the first embodiment of the transmission electron microscope of near field optic scan function for the present invention is a kind of, from another perspective, the first embodiment carries out the exciting light irradiation to sample.Be plugged with specimen holder 7 in the transmission electron microscope body (not shown), specimen holder 7 hollow settings are by rubber seal 19 and the sealing of transmission electron microscope lens barrel.End at specimen holder 7 is provided with bracing frame 3, be fixed with the sample clamp 1 for load sample on the bracing frame 3, end shutoff away from sample clamp 1 on the specimen holder 7 has vacuum optical fiber flange 8 and cable vacuum flange 9, be isolated from the outside by vacuum optical fiber flange 8 and the cable vacuum flange 9 inner vacuum environment with the transmission electron microscope body, vacuum area is zone shown in the B in Fig. 1, be provided with the 3 D locating device 4 that stretches to sample in the shaft of specimen holder 7, the scope of activities of preferred 3 D locating device 4 is at grade, and positioning accuracy is in inferior nanometer scale.The end of 3 D locating device 4 is equipped with optical fiber probe 2, and optical fiber probe 2 is used for gathering and introducing light signal, and optical fiber probe 2 is the monomode fibers at the tip of hot-stretch or chemical corrosion one-tenth, and the most advanced and sophisticated metal level that is coated with at least 2 centimeter length.Metal level clad optical fiber outer wall has opening in most advanced part, forms the nanoscale diaphragm.
Be provided with driving control device 13 in the transmission electron microscope body exterior, electrical testing instrument 14 and exciting light sources 12, sample clamp 1 is by the first cable 6 and electrical testing instrument 14, optical fiber probe 2 is connected with electrical testing instrument 14 equally by the second cable 5,3 D locating device 4 is connected with its driving control device 13 by the 3rd bunch of cables 11 that multi-cable is combined into, optical fiber probe 2 is connected with exciting light sources 12 by optical fiber 10, the first cable 6, the second cable 5 and the 3rd bunch of cables 11 stretch out vacuum area by cable vacuum flange 9, and optical fiber 10 stretches out vacuum area by vacuum optical fiber flange 8.Simultaneously, in order to guarantee the transmission of the signal of telecommunication, sample clamp 1 is made by conducting metal, perhaps is coated with conductive metal layer; Optical fiber probe 2 outsides are coated with conductive metal layer, are coated at least the front end of optical fiber probe 2, and effect has 3 points like this: (1) is as optical fiber probe 2 most advanced and sophisticated limited aperture and optical fiber probe 2 tip portion light signal reflector; (2) can be used as the conductive layer of optical fiber probe 2, optical fiber probe 2 signals of telecommunication are drawn the transmission electron microscope body; (3) as conductive layer, prevent that transmission electron microscope observation from being that beam bombardment causes charge accumulated to affect electron microscope observation at optical fiber probe 2 tips.
During use, by driving control device 13 can control 3 D locating device 4 make optical fiber probe 2 near or abut on the sample, 10 conduction finally shine on the sample from optical fiber probe 2 outgoing the exciting light that is sent by exciting light sources 12 through optical fiber, be connected to the first cable 6 on the sample and the second cable 5 that is connected on the optical fiber probe 2 and be connected on the electrical measurement instrument 14, the test exciting light is according to the electrical properties of lower sample.
Be illustrated in figure 2 as the second embodiment of the present invention, its structure and the first embodiment are basic identical, and difference is, changes exciting light sources 12 into optical signal analyzer device 15, optical signal analyzer device 15 such as spectrometer etc.
During collected specimens near field utilizing emitted light, by 3 D locating device 4 with optical fiber probe 2 near samples, collected specimens near field utilizing emitted light, light signal by optical fiber 10 conduction is out finally sent into the optical signal analyzer devices 15 such as spectrometer.The second cable 5 that is connected to the first cable 6 on the sample clamp 1 and is connected on the optical fiber probe 2 can be received on the electrical measurement instrument 14 photoelectric property of specimen with signal of telecommunication transmission.
Be illustrated in figure 3 as the third embodiment of the present invention, its structure and the first embodiment are basic identical, difference is, the third enforcement is to gather utilizing emitted light when importing exciting light into, use a collimating lens 16 that optical fiber 10 emergent lights are converged to directional light at optical fiber 10 tail ends, then by a mirror shape light splitting piece (semi-transparent semi-reflecting lens) 17, collimated light beam is divided into two bundles, a branch of through focusing on the optical signal analyzer device 15 such as optical signal analyzer device etc. behind the convergent mirror 18, another bundle directional light enters exciting light sources 15.Like this, but exciting light sources 15 directional light coupled into optical fibres 10 out, and the light signal that optical fiber probe 12 gathers can enter optical signal analyzer device 15.Realize that an optical fiber probe 2 sends into simultaneously exciting light and gather utilizing emitted light.Be connected to the first cable 6 on the sample clamp 1 and the second cable 5 that is connected on the optical fiber probe 2 and the signal of telecommunication delivered on the electrical measurement instrument 14 photoelectric property of specimen.
Above-mentioned example just is used for explanation the present invention, and embodiments of the present invention are not limited to these examples, and the various embodiments that meet inventive concept that those skilled in the art make are all within protection scope of the present invention.
Claims (5)
1. transmission electron microscope with near field optic scan function, comprise the transmission electron microscope body, be fitted with specimen holder on the described transmission microscopy body, one end of this specimen holder is equipped with the sample clamp for load sample, it is characterized in that: described specimen holder hollow arranges, be provided with the positioner that stretches to described sample in the shaft, the optical fiber probe that gathers and introduce the near field of light signal is installed on the described positioner, by control positioner make described optical fiber probe near or abut on the sample, described optical fiber probe is connected with exciting light sources and/or optical signal analyzer device optical fiber, realizes the transmitted in both directions of near field of light signal.
2. the transmission electron microscope with near field optic scan function as claimed in claim 1, it is characterized in that: this transmission electron microscope also comprises the electrical testing instrument, described sample clamp is made by conducting metal, be welded with the first cable on it, the described optical fiber probe outside is coated with conductive metal layer, be welded with the second cable on it, described the first cable and the second cable pass described specimen holder and described electrical testing Instrument connection.
3. the transmission electron microscope with near field optic scan function as claimed in claim 2, it is characterized in that: described conductive metal layer is coated on the front end of described optical fiber probe at least.
4. the transmission electron microscope with near field optic scan function as claimed in claim 2, it is characterized in that: described positioner is for carrying out the 3 D locating device of three-dimensional localization in the space, described 3 D locating device is connected by the 3rd bunch of cables that multi-cable is combined into its driving control device.
5. the transmission electron microscope with near field optic scan function as claimed in claim 4, it is characterized in that: have vacuum optical fiber flange and cable vacuum flange that the inner vacuum environment of described transmission electron microscope body is isolated from the outside away from an end shutoff of described sample clamp on the described specimen holder, described the first cable, described the second cable is connected with described electrical testing instrument or described driving control device by described cable vacuum flange with described the 3rd bunch of cables, and the optical fiber that connects described optical fiber probe is connected with described exciting light sources and/or described optical signal analyzer device by described vacuum optical fiber flange.
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| CN201210518692.XA CN103021776B (en) | 2012-12-06 | 2012-12-06 | A kind of transmission electron microscope with near field optical scanning function |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103558232A (en) * | 2013-10-16 | 2014-02-05 | 中国科学院物理研究所 | In-situ varying temperature spectral measurement device in transmission electron microscope |
| CN106098520A (en) * | 2016-07-30 | 2016-11-09 | 北京工业大学 | A kind of scanning/transmission electron microscope association analysis vacuum moving device |
| CN106645250A (en) * | 2016-11-21 | 2017-05-10 | 宁波聚瑞精密仪器有限公司 | Scanning transmission electron microscope with optical imaging function |
| CN106783494A (en) * | 2016-12-06 | 2017-05-31 | 北京工业大学 | A kind of transmission electron microscope sample bar vacuum storage and test device |
| CN109087839A (en) * | 2018-07-20 | 2018-12-25 | 姚智伟 | For testing and demarcating the field emission microscope, system of field emission electron source array |
| CN111257597A (en) * | 2018-11-30 | 2020-06-09 | 浙江大学 | Multi-degree-of-freedom sample rod with self-positioning function |
| CN111855568A (en) * | 2019-10-16 | 2020-10-30 | 中国科学院物理研究所 | Transmission electron microscope system with optical and electronic dual detection characteristics and method |
| CN111855708A (en) * | 2019-10-16 | 2020-10-30 | 中国科学院物理研究所 | Transmission electron microscope system and method for realizing optical focusing and continuous scanning |
| CN111856078A (en) * | 2019-10-16 | 2020-10-30 | 中国科学院物理研究所 | Sample rod for transmission electron microscope system and corresponding transmission electron microscope system |
| CN111855567A (en) * | 2019-10-16 | 2020-10-30 | 中国科学院物理研究所 | Transmission electron microscope system and method for realizing optical intelligent focusing |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008270056A (en) * | 2007-04-24 | 2008-11-06 | National Institute For Materials Science | Scanning transmission electron microscope |
| CN102262996A (en) * | 2011-05-31 | 2011-11-30 | 北京工业大学 | Comprehensive test sample rod for double-shaft tilting in-situ force and electric property of transmission electron microscope |
| CN102405107A (en) * | 2009-04-15 | 2012-04-04 | 纳米工厂仪器有限公司 | Optical probing in electron microscopes |
-
2012
- 2012-12-06 CN CN201210518692.XA patent/CN103021776B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008270056A (en) * | 2007-04-24 | 2008-11-06 | National Institute For Materials Science | Scanning transmission electron microscope |
| CN102405107A (en) * | 2009-04-15 | 2012-04-04 | 纳米工厂仪器有限公司 | Optical probing in electron microscopes |
| CN102262996A (en) * | 2011-05-31 | 2011-11-30 | 北京工业大学 | Comprehensive test sample rod for double-shaft tilting in-situ force and electric property of transmission electron microscope |
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103558232B (en) * | 2013-10-16 | 2015-10-28 | 中国科学院物理研究所 | A kind of device in transmission electron microscope situ alternating temperature measure spectrum |
| CN103558232A (en) * | 2013-10-16 | 2014-02-05 | 中国科学院物理研究所 | In-situ varying temperature spectral measurement device in transmission electron microscope |
| CN106098520A (en) * | 2016-07-30 | 2016-11-09 | 北京工业大学 | A kind of scanning/transmission electron microscope association analysis vacuum moving device |
| CN106645250A (en) * | 2016-11-21 | 2017-05-10 | 宁波聚瑞精密仪器有限公司 | Scanning transmission electron microscope with optical imaging function |
| CN106645250B (en) * | 2016-11-21 | 2024-04-26 | 宁波聚瑞精密仪器有限公司 | Scanning transmission electron microscope with optical imaging function |
| CN106783494A (en) * | 2016-12-06 | 2017-05-31 | 北京工业大学 | A kind of transmission electron microscope sample bar vacuum storage and test device |
| CN109087839A (en) * | 2018-07-20 | 2018-12-25 | 姚智伟 | For testing and demarcating the field emission microscope, system of field emission electron source array |
| CN111257597B (en) * | 2018-11-30 | 2021-06-29 | 浙江大学 | Multi-degree-of-freedom sample rod with self-positioning function |
| CN111257597A (en) * | 2018-11-30 | 2020-06-09 | 浙江大学 | Multi-degree-of-freedom sample rod with self-positioning function |
| CN111855708A (en) * | 2019-10-16 | 2020-10-30 | 中国科学院物理研究所 | Transmission electron microscope system and method for realizing optical focusing and continuous scanning |
| CN111855567A (en) * | 2019-10-16 | 2020-10-30 | 中国科学院物理研究所 | Transmission electron microscope system and method for realizing optical intelligent focusing |
| CN111856078A (en) * | 2019-10-16 | 2020-10-30 | 中国科学院物理研究所 | Sample rod for transmission electron microscope system and corresponding transmission electron microscope system |
| CN111855567B (en) * | 2019-10-16 | 2021-07-20 | 中国科学院物理研究所 | Transmission electron microscope system and method for realizing optical intelligent focusing |
| CN111855568B (en) * | 2019-10-16 | 2021-11-02 | 中国科学院物理研究所 | Transmission electron microscope system with optical and electronic dual detection characteristics and method |
| CN111856078B (en) * | 2019-10-16 | 2022-05-24 | 中国科学院物理研究所 | Sample rod for transmission electron microscope system and corresponding transmission electron microscope system |
| CN111855568A (en) * | 2019-10-16 | 2020-10-30 | 中国科学院物理研究所 | Transmission electron microscope system with optical and electronic dual detection characteristics and method |
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| CN103021776B (en) | 2015-10-28 |
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Effective date of registration: 20170707 Address after: 244000, No. 101, building D, hi tech Innovation Service Center, Tongling economic and Technological Development Zone, Anhui Patentee after: Anhui Ze Yau Technology Co. Ltd. Address before: 100190 Beijing City, Haidian District Zhongguancun South Street No. 8 Patentee before: Research Institute of Physics, Chinese Academy of Sciences |