CN109087839A - For testing and demarcating the field emission microscope, system of field emission electron source array - Google Patents
For testing and demarcating the field emission microscope, system of field emission electron source array Download PDFInfo
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/285—Emission microscopes, e.g. field-emission microscopes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
- G01T1/2914—Measurement of spatial distribution of radiation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
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Abstract
It is a kind of for testing and demarcating the field emission microscope, system of field emission electron source array, the connection relationship of the system is: main light source generates light source illumination by half reflection eyeglass and motor driven mirror and secondary light source jointly；In optical path subsystem, image successively generates ocular image by glass evacuated cavity wall, motor driven camera lens and half reflection eyeglass；High-speed camera generates high frame rate image and low frame rate image；Low frame rate image is by the soft generation focus control signals of image procossing for controlling motor driven camera lens to improve the clarity of image；Isochronous controller generates camera control signal, current acquisition control signal and power control signal, to control high-speed camera, pulsed high voltage generator and high speed current acquisition；Pulsed high voltage generator applies high-voltage pulse between the field emitting electronic source and transparency conducting layer in image recording components, and generates Flied emission electric current；Flied emission current digitalization is generated current data by high speed current acquisition.
Description
[technical field]
The present invention is a kind of for testing and demarcating the field emission microscope, system of field emission electron source array, is applied to vacuum
The technical fields such as electronic equipment, X-ray, electron gun, computed tomography and non-destructive testing.This system can be used for Flied emission electricity
The test and calibration of component.
[background technique]
Theoretical research all the year round has been carried out as a kind of pure quantum appearance in Field Electron Emission (Flied emission).It is a variety of
Field emitting electronic source is developed, and most representative is metal pointed cone cathode and carbon nanotube cathod.Based on Flied emission skill
The x-ray source of art has operating temperature low, does not have the advantages of heat radiation, therefore, can be used for developing highdensity X-ray battle array
Column.This cannot achieve using traditional tungsten wire hot cathode.With the development of Flied emission technology, a large amount of Novel medicals and industry
It is suggested with X ray image technology, for example, the flux field modulation technique based on high density arrays and the inverse geometry based on multiple beam
Computed tomography.But field emission is understood in depth due to lacking, the performance of field emitting electronic source is always
It is not able to satisfy the needs of the marketization and industrialization.In order to improve the reliability and service life of field emitting electronic source, one kind is needed
Easy method quantitatively describes and assesses the performance of field emitting electronic source.It is aobvious to have developed a kind of novel Flied emission for we thus
Micromirror systems predominantly detect equipment as what field emitting electronic source was developed.
Field emission microscope, was proposed by Ai Erwen Muller in 1936 earliest, for studying molecular surface structures and electronics point
Cloth.For the structural diagrams of this method in Figure 1A, basic structure is in spherical glass vacuum chamber 101 coated inner wall, one layer of phosphor
Material 102, the field-transmitting cathode 103 as studied object is made into the cone-shaped center for being placed in spherical glass vacuum chamber 101, when
Field-transmitting cathode 103 is connected to the cathode of high voltage power supply, and the pattern of electron emission will be shown on fluorescent material 102.It should
Technology can achieve 0.3 nanometer of image resolution ratio.However due to the limitation of geometry, existing field emission microscope, is only capable of
Single field emitting electronic source is observed, cannot achieve the research to field emission electron source array.In addition, what the design used
Fluorescent material 102 has obvious delay and halation, so that the time of image and spatial resolution are not able to satisfy to based on carbon nanometer
The observation demand of the field emitting electronic source of tube cathode array.
In our early stage research process, it has been found that polymethyl methacrylate materials have record electronics distribution
Ability, while the Beam distribution that the material is recorded can achieve nanoscale image resolution ratio.Further, since poly- methyl-prop
The remolding sensitivity fluorescent material of e pioic acid methyl ester electron beam lower for kinetic energy is high, and the image recorded will not disappear, and adopt
The field emission microscope, for using polymethyl methacrylate as recording materials can be used for quantitatively measuring from field emitting electronic source
The accumulation and distribution of the electronics beam electrons of transmitting.The section of the design is illustrated in Figure 1B, and basic structure is parallel to each other
Glass window 111 and conductive substrates 115.Layer of transparent conductive layer 112 and polymethyl are applied on glass window 111
Sour methyl esters 114.Field emitting electronic source 113 is produced on the side in conductive substrates 115 close to glass window 111.Glass observation
It is separated between window 111 and conductive substrates 115 with insulating layer 116.Wherein transparency conducting layer 112 and polymethyl methacrylate 114
Thickness less than 100 nanometers.The altitude range of field emitting electronic source 113 is at several microns between several hundred microns.Insulating layer 116
Thickness is from 100 microns to several hundred microns.The design sees document Y.Sun, D.A.Jaffray, L.-Y.Chen, and
J.T.W.Yeow,“PolyMethyl Methacrylate Thin-Film-Based Field Emission
Microscope,"IEEE Trans.Nanotechnol.,vol.11,no.3,pp.441–443,May 2012.Though this method
The design of image recording components is so proposed, but without providing the method for synchronously recording image and data.
Do not have real-time detection in view of the prior art and records the ability of field emitting electronic source electronics distributing homogeneity, field hair
The detection device market for penetrating system is all at home and abroad blank.
[summary of the invention]
Blank present invention is generally directed to the detection of current field-transmitting cathode in market and technical aspect provides a kind of for big
The field emission microscope, system of area field emission electron source record electronics distribution intensity and uniformity.The system is with above-mentioned Figure 1B
Field emission microscope, system based on shown image recording components.The system has synchronous recording field emission electron point in real time
The function of cloth image and Flied emission Current density data.
The component and connection relationship of this system are shown in Fig. 2.System includes image recording components 201, optical path subsystem 202,
High-speed camera 203, pulsed high voltage generator 204, high speed current acquisition 205, high speed network 206, isochronous controller 207, image
Processing software 208 and data storage 209.The component and connection relationship of optical path subsystem are shown in Fig. 3.Optical path subsystem includes master
Light source 301, secondary light source 302, glass evacuated cavity wall 303, motor driven camera lens 304 and half reflection eyeglass 305.
The connection relationship of each main component is: main light source 301 by half reflection eyeglass 305 and motor driven camera lens 304 with
Secondary light source 302 generates light source illumination 211 jointly, provides enough illumination for image.Light source illumination 211 penetrates glass evacuated cavity wall
303 illuminate image recording components 201.The Flied emission image 212 generated on image recording components 201 passes through optical path subsystem
202 enter high-speed camera 203.In optical path subsystem 202, image successively passes through glass evacuated cavity wall 303, motor driven mirror
First 304 and half reflection eyeglass 305 generate ocular image 213.High-speed camera 203 generates high frame rate image 242 and low frame per second figure
As 243.Low frame rate image 243 generates focus control signals 222 for controlling motor driven camera lens by image processing software 208
304 to improve the clarity of image.Isochronous controller 207 generates camera control signal 221, and current acquisition controls signal 224
With power control signal 223, to control high-speed camera 203, pulsed high voltage generator 204 and high speed current acquisition 205.Pulse
High voltage power supply 204 applies high-tension pulse between the field emitting electronic source 113 in image recording components 201 and transparency conducting layer 112
Punching 231, and generate Flied emission electric current 232.Flied emission electric current 232 is digitized and generates current data by high speed current acquisition 205
241.The electricity that the high frame rate image 242 that high-speed camera 203 generates is captured by high speed network 206 and high speed current acquisition 205
The generation of flow data 241 blended data 244 is transported to data storage 209 and is stored, and stored blended data 244 will be used for
It achieves and post analysis research.
Due to the image data per second that can generate number G byte of high-speed camera 203, common network and hard disk be cannot achieve
The real-time storage of data, and using high-speed memory by the cost for the system that greatly improves, therefore this system passes through complex time sequence control
System realizes the vulgar storage of mass data, to substantially increase the total time of image and data acquisition, and significantly reduces and is
System cost.The control sequential of the synchronous control signal of system is shown in Figure 4.Since field emitting electronic source 113 needs work in arteries and veins
Working method is rushed, duty ratio cannot be very high, otherwise will will lead to the overheat of field emitting electronic source 113 and burn.Therefore, this system is in arteries and veins
Time that voltage source of leaping high 204 is opened acquisition image and current data, the time then closed using pulsed high voltage generator 204 into
The transmission of row data and image.For the integrality for keeping data, isochronous controller 207 issues current acquisition first and starts 421 letters
Number, high-speed camera is generated after current acquisition output is stablized and opens 411 signals, is then generated high voltage power supply and is opened 401 signals,
Electric current and image are recorded in high-speed camera 203 and high speed current acquisition 205 at this time.According to the difference that system is applied, electricity
Source controls signal 223 and will open a period of time, and range is from several microseconds to several milliseconds.Subsequent high voltage power supply closes 402 signal-off
High-voltage pulse 231.Successively issuing high-speed camera 412 signals of closing and current acquisition later terminates 422 signals, to stop high speed
Video camera 203 and high speed current acquisition 205.Later, isochronous controller 207 issues high frame rate image transmission 413 signals of beginning, high
The storage of high frame rate image 242 is arrived data storage 209 by high speed network 206 by fast video camera 203, and high frame rate image 242 passes
It is finished after finishing, isochronous controller 207 issues high 414 signal of the frame rate image end of transmission and current data transmission starts 423 letters
Number, to 241 end of transmission of current data, isochronous controller 207 issues 424 signal of the current data end of transmission.So far one it is complete
Entire data collection period terminates, and the next pulse period is ready.
This system uses image processing software 208 to improve image definition and reduce data processing time.Image procossing
The major function of software has image data screening and auto-focusing.Low frame rate image 243 enters hair by image recognition software 502
Optical codes and timestamp software 504 generate luminous point location and time stamp data to be directly targeted to when later data analysis
Correspondence image frame and current data.In addition, image recognition software 502 and image definition analysis software 503 will be according to images
Acutance generates corresponding focus control signals 222 to control motor driven camera lens 304, improves image definition.
Advantages of the present invention and beneficial effect are: the present invention is a kind of field tested and studied for field emitting electronic source
Emission microscope system.Not yet occurs similar system both at home and abroad at present.Development and market with field emission electron source technology
The propulsion of change, a kind of efficient and convenient test method and test equipment are all to pass for the research and development and production of field emitting electronic source
Important.It is an object of the invention to fill up blank at present technically and in the market.In the production process of field emitting electronic source
In, this system can become the uniformity that a detection device is used to survey the Beam distribution for setting field emitting electronic source.
[Detailed description of the invention]
Figure 1A is the equipment sectional view of traditional field emission microscope,.
Figure 1B is the sectional view of the image recording components of the field emission microscope, for field emission cathode array.
Fig. 2 is the system unit and connection relationship of field emission microscope,.
Fig. 3 is optical path subsystem component and connection relationship.
Fig. 4 is the control sequential of synchronous control signal.
Fig. 5 is the connection relationship of image recognition software and auto-focusing subsystem.
Fig. 6 is the system unit and connection relationship of embodiment two.
Figure label is described as follows:
101: spherical glass vacuum chamber 102: fluorescent material 103: field-transmitting cathode
111: glass window 112: transparency conducting layer 113: field emitting electronic source
114: polymethyl methacrylate 115: conductive substrates 116: insulating layer
201: image recording components 202: optical path subsystem 203: high-speed camera
204: pulsed high voltage generator 205: high speed current acquisition 206: high speed network
207: isochronous controller 208: image processing software 209: data storage
211: light source illumination 212: Flied emission image 213: ocular image
221: camera control signal 222: focus control signals 223: power control signal
224: current acquisition controls signal 231: high-voltage pulse 232: Flied emission electric current
241: current data 242: high frame rate image 243: low frame rate image
244: blended data
301: main light source 302: secondary light source 303: glass evacuated cavity wall
304: motor driven camera lens 305: half reflection eyeglass
401: high voltage power supply opens 402: high voltage power supply closes 411: high-speed camera is opened
412: high-speed camera closes 413: high frame rate image transmission starts
414: the high frame rate image end of transmission 421: current acquisition starts 422: current acquisition terminates
423: current data transmission beginning 424: the current data end of transmission
502: image recognition software 503: image definition analyzes software
504: shine point location and timestamp software
651: image feedback controls signal
[specific embodiment]
The system structure and light channel structure of embodiment one are shown in Fig. 2 and Fig. 3.Key light in optical path subsystem shown in Fig. 3
Source 301, secondary light source 302, motor driven camera lens 304, half reflection eyeglass 305 and high-speed camera 203 are placed in glass evacuated chamber
The air side of wall 303, and image recording components 201 are then placed in the vacuum side of glass evacuated cavity wall 303.Light source illumination 211
Image recording components 201 are illuminated through glass evacuated cavity wall 303.The Flied emission image 212 generated on image recording components 201
Enter high-speed camera 203 by optical path subsystem 202.The high-voltage pulse 231 that pulsed high voltage generator 204 generates enters image and remembers
Record component 201.Image recording components 201 generate Flied emission electric current 232 and generate Flied emission image 212.
High-speed camera 203 in the present embodiment uses the high-speed camera of 13600 frame per second.Image resolution ratio is
512x512 pixel.Current acquisition speed samples for 300000 times per second, and resolution ratio 14.High speed network 206 uses gigabit ether
Network switch and six class cables.Motor driven camera lens 304 matches 50% half reflection eyeglass using the microlens of 100 times of amplifications
305.Pulsed high voltage generator 204 has positive and negative 5000 volts of voltage, 80 milliamperes of electric currents, 50 kHz bandwidth.Image processing software makes
It is developed on high-performance computer with OpenCV computer vision library.
The camera control signal 221 that isochronous controller 207 generates, power control signal 223 and current acquisition control letter
Numbers 224 using standards Transistor-Transistor Logic level signal.The focus control signals 222 that image processing software 208 generates use pulse width tune
Pwm signal processed is to control the motor driven camera lens 304 in optical path subsystem 202.Image recognition software 502, image definition
Analysis software 503 and luminous point location and timestamp software 504 are used on LINUX platform using PYTHON language
OpenCV computer vision library is developed.And luminous point location and timestamp software 504 are recorded with the format of text file
The X, Y coordinates of luminous point and the time to shine in the point, temporal resolution are 0.1 second.
The basic operational ways of the present embodiment are: starting impulse high voltage power supply 204 and high speed current acquisition 204 first, and
It is preheated to improve the accuracy of measurement.It is finished to system warm-up, starting image processing software 208, data storage 209,
High speed network 206, high-speed camera 203, main light source 301 and secondary light source 302.Start later and isochronous controller 207 is set
Various parameters.The high voltage power supply of power control signal 223 opens the time between 401 signals and high voltage power supply 402 signals of closing
Interval is 5 milliseconds, and the time interval that high voltage power supply is opened between 401 signals twice is 100 milliseconds, and high-speed camera opens 411
Signal opens 401 signals than high voltage power supply and shifts to an earlier date 5 microseconds.Current acquisition starts 421 signals and mentions than high voltage power supply 401 signals of unlatching
Preceding 10 microsecond.Isochronous controller 207 issues 5 microseconds after high voltage power supply closes 402 signals and issues 412 letter of high-speed camera closing
Number, postponing 10 microseconds sending current acquisition again later terminates 422 signals, successively issues high frame rate image transmission later and starts 413
Signal, high 414 signal of the frame rate image end of transmission, current data transmission starts 423 signals and the current data end of transmission 424 is believed
Number.So far, a full test cycle terminates, and system is that next cycle is ready.Repeating above period several times can be with
Comprehensively test the emission uniformity and reliability of tested field emitting electronic source 113.
It is general to run for 50 to 100 periods when testing the emission uniformity of field emitting electronic source 113, total testing time from
Several seconds to tens seconds.When testing reliability, this test is answered continuous operation 24 hours or more, obtains image and current data 80
Ten thousand groups or more.By comparing the current data and image being spaced at regular intervals, the property of tested field emitting electronic source 113 is obtained
The trend that can be changed over time.The data can be used for quality testing and quality control in 113 production process of emission electron sources.
Embodiment two is identical as the hardware configuration of embodiment one.The system structure of embodiment two is shown in Fig. 6.Embodiment two
System structure and embodiment described above one control signal 651 the difference is that increasing image feedback, make image procossing
Software 208 can issue high voltage power supply in advance according to the content of low frame rate image 243 and close 402 signals.The present embodiment two is main
R and D applied to field emitting electronic source 113.It, can be in Flied emission electricity according to the adjustment to image recognition software 502
The different operating stage of component 113 stops test and has been easy to use the means such as scanning electron microscope to field emitting electronic source 113
It is observed and is analyzed.In addition, the present embodiment two can also develop non-linear and dynamic control by changing isochronous controller 207
Method processed, to improve the job stability of field emitting electronic source 113 and improve working efficiency.
High-speed camera 203 in the present embodiment uses the high-speed camera of 13600 frame per second.Image resolution ratio is
512x512 pixel.Current acquisition speed samples for 300000 times per second, and resolution ratio 14.High speed network 206 uses gigabit ether
Network switch and six class cables.Motor driven camera lens 304 matches 50% half reflection eyeglass using the microlens of 100 times of amplifications
305.Pulsed high voltage generator 204 has positive and negative 5000 volts of voltage, 80 milliamperes of electric currents, 50 kHz bandwidth.Image processing software makes
It is developed on high-performance computer with OpenCV computer vision library.
The camera control signal 221 that isochronous controller 207 generates, power control signal 223 and current acquisition control letter
Numbers 224 using standards Transistor-Transistor Logic level signal.The focus control signals 222 that image processing software 208 generates use pulse width tune
Pwm signal processed is to control the motor driven camera lens 304 in optical path subsystem 202.Image recognition software 502, image definition
Analysis software 503 and luminous point location and timestamp software 504 are used on LINUX platform using PYTHON language
OpenCV computer vision library is developed.And luminous point location and timestamp software 504 are recorded with the format of text file
The X, Y coordinates of luminous point and the time to shine in the point, temporal resolution are 0.1 second.
The basic operational ways of the present embodiment are: starting impulse high voltage power supply 204 and high speed current acquisition 204 first, and
It is preheated to improve the accuracy of measurement.It is finished to system warm-up, starting image processing software 208, data storage 209,
High speed network 206, high-speed camera 203, main light source 301 and secondary light source 302.Start later and isochronous controller 207 is set
Various parameters.The time interval that high voltage power supply is opened between 401 signals twice of power control signal 223 is 100 milliseconds, is taken the photograph at a high speed
Camera opens 411 signals and shifts to an earlier date 5 microseconds than high voltage power supply 401 signals of unlatching.Current acquisition starts 421 signals and opens than high voltage power supply
It opens 401 signals and shifts to an earlier date 10 microseconds.Isochronous controller 207 issues 5 microseconds after high voltage power supply closes 402 signals and issues high-speed camera
Organ closes 412 signals, and postponing 10 microseconds sending current acquisition again later terminates 422 signals, successively issues high frame rate image later
Transmission starts 413 signals, high 414 signal of the frame rate image end of transmission, current data transmission 423 signals of beginning and current data and passes
424 signals of defeated end.So far, a full test cycle terminates, and system is that next cycle is ready.It is electric in the present embodiment
The time interval that the high voltage power supply that source controls signal 223 is opened between 401 signals and high voltage power supply 402 signals of closing is to be not fixed
, maximum time interval is limited by the memory capacity of high-speed camera 203.It is opened when isochronous controller 207 issues high voltage power supply
After opening 401 signals, shine when the image recognition software 502 in image processing software 208 detects Flied emission image 212
When point, image feedback control signal 651 is just issued to isochronous controller 207, subsequent isochronous controller 207 is according to time of setting
Interval successively issues high-speed camera and closes 412 signals, and current acquisition terminates 422 signals, and high frame rate image transmission starts 413 letters
Number, the transmission of high 414 signal of the frame rate image end of transmission, current data starts 423 signals and the current data end of transmission 424 and believes
Number.So far, test terminates.Field emitting electronic source 113 and polymethyl methacrylate 114 in image recording components 201 can be with
It is observed and is studied by scanning electron microscope and atomic force microscope, with the characteristic and damage of the various field emission bodies of determination
Mechanism.If needing suitably to mention until the memory of high-speed camera 203 exhausts image processing software and could not also capture luminescence phenomenon
The voltage for the high-voltage pulse 231 that high impulse high voltage power supply 204 exports, and repeat to test, until there is luminescence phenomenon or field hair
Until radio stream 232 reaches the design maximum current value of the field emitting electronic source 113.The voltage improved every time is not to be exceeded 50
Volt.
Claims (10)
1. a kind of for testing and demarcating the field emission microscope, system of field emission electron source array, it is characterised in that: the system
Including image recording components, optical path subsystem, high-speed camera, pulsed high voltage generator, high speed current acquisition, high speed network, together
Walk controller, image processing software and data storage；Wherein, optical path subsystem includes main light source, secondary light source, glass evacuated chamber
Wall, motor driven camera lens and half reflection eyeglass；
The main light source generates light source illumination by half reflection eyeglass and motor driven mirror and secondary light source jointly, provides foot for image
Enough illumination；Light source illumination illuminates image recording components through glass evacuated cavity wall；The field hair generated on image recording components
It penetrates image and high-speed camera is entered by optical path subsystem；In optical path subsystem, image successively passes through glass evacuated cavity wall, electricity
Machine drives camera lens and half reflection eyeglass to generate ocular image；High-speed camera generates high frame rate image and low frame rate image；Low frame
Rate image is by the soft generation focus control signals of image procossing for controlling motor driven camera lens to improve the clarity of image；Together
It walks controller and generates camera control signal, current acquisition control signal and power control signal, to control high-speed camera,
Pulsed high voltage generator and high speed current acquisition；It field emitting electronic source of the pulsed high voltage generator in image recording components and transparent leads
Apply high-voltage pulse between electric layer, and generates Flied emission electric current；Flied emission current digitalization is generated electric current by high speed current acquisition
Data；The high frame rate image that high-speed camera generates is generated mixed by the current data of high speed network and the capture of high speed current acquisition
Conjunction data are transported to data storage and are stored, and stored blended data will be used to achieve and post analysis research.
2. it is according to claim 1 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: the high-speed camera image data per second that can generate number G byte, common network and hard disk cannot achieve data
Real-time storage.
3. it is according to claim 1 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: field emitting electronic source needs work in pulsed mode, and duty ratio cannot be high, otherwise will will lead to Flied emission electricity
Component overheat is burnt.
4. it is according to claim 1 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: image processing software can be carried out image data screening and auto-focusing, low frame rate image pass through image recognition software
Shine point location and time stamp data are generated into luminous point location and timestamp software, it is directly fixed when so as to later data analysis
Correspondence image frame and current data are arrived in position.
5. it is according to claim 4 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: image recognition software and image definition analysis software will generate corresponding focusing control letter according to the acutance of image
Number to control motor driven camera lens, image definition is improved.
6. it is according to claim 1 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: high-speed camera uses the high-speed camera of 13600 frame per second；Image resolution ratio is 512x512 pixel；Electric current is adopted
Collect speed to sample for 300000 times per second, resolution ratio 14；High speed network uses gigabit ethernet switch and six class cables；Electricity
The half reflection eyeglass that machine drives camera lens to match 50% using the microlens of 100 times of amplifications；Pulsed high voltage generator has positive and negative 5000
Lie prostrate voltage, 80 milliamperes of electric currents, 50 kHz bandwidth；Image processing software is using OpenCV computer vision library in high-performance calculation
It is developed on machine.
7. it is according to claim 1 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: camera control signal, power control signal and the current acquisition control signal that isochronous controller generates are using mark
Quasi- Transistor-Transistor Logic level signal.
8. it is according to claim 1 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: the focus control signals that image processing software generates are using pulse width modulation (PWM) signal, to control optical path
Motor driven camera lens in system.
9. it is according to claim 1 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: image recognition software, image definition analyzes software and luminous point location and timestamp software uses PYTHON
Language is developed on LINUX platform using OpenCV computer vision library；And luminous point location and timestamp software with
The X, Y coordinates of the format record luminous point of text file and the time to shine in the point, temporal resolution is 0.1 second.
10. it is according to claim 1 for testing and demarcating the field emission microscope, system of field emission electron source array,
Be characterized in that: the field emission microscope, system for testing and demarcating field emission electron source array is in pulsed high voltage generator
The time acquisition image and current data opened, then carry out the biography of data and image using the time that pulsed high voltage generator is closed
It is defeated；For the integrality for keeping data, isochronous controller issues current acquisition commencing signal first, after current acquisition output is stablized
High-speed camera open signal is generated, high voltage power supply open signal is then generated, electric current and image are recorded in high speed and take the photograph at this time
In camera and high speed current acquisition；According to the difference that system is applied, power control signal will be opened a period of time, and range is from several micro-
Second arrives several milliseconds；Subsequent high voltage power supply shutdown signal closes high-voltage pulse；Later successively issue high-speed camera shutdown signal and
Current acquisition end signal, to stop high-speed camera and high speed current acquisition；Later, isochronous controller issues high frame rate image
Commencing signal is transmitted, high-speed camera is stored high frame rate image to data storage, high frame rate image biography by high speed network
It is finished after finishing, isochronous controller issues high frame rate image end of transmission signal and current data transmits commencing signal, to electric current
Data end of transmission, isochronous controller issue current data end of transmission signal；So far a partial data collection period terminates,
The next pulse period is ready.
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