CN103000480A - Transmission electron microscope sample rod capable of being added with optical fibers - Google Patents

Transmission electron microscope sample rod capable of being added with optical fibers Download PDF

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Publication number
CN103000480A
CN103000480A CN201210501122XA CN201210501122A CN103000480A CN 103000480 A CN103000480 A CN 103000480A CN 201210501122X A CN201210501122X A CN 201210501122XA CN 201210501122 A CN201210501122 A CN 201210501122A CN 103000480 A CN103000480 A CN 103000480A
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electron microscope
sample
transmission electron
bar
guide groove
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CN201210501122XA
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CN103000480B (en
Inventor
姚湲
杨新安
段晓峰
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Institute of Physics of CAS
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Institute of Physics of CAS
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Abstract

The invention discloses a transmission electron microscope sample rod capable of being added with optical fibers. The optical fibers enter a transmission electron microscope sample room from the outside of a transmission electron microscope through the sample rod and are used for exerting optical signals outside the transmission electron microscope to a sample in the sample room or transmitting the optical signals produced by the sample in the sample room to the outside of the transmission electron microscope. The sample rod comprises a sample rod head, a sample rod body and a handheld handle. The sample rod head is provided with a bearing platform for bearing the sample. The sample rod body is provided with a seal ring for keeping sealing of the sample room when the sample rod is placed into the transmission electron microscope sample room. At least one guide groove is arranged at the outer surface position of at least a part of sample rod body and extends to the sample rod head along the length direction of the rod body, and the optical fibers are arranged in at least one guide groove. At least one part of optical fibers are paved in the guide groove on the surface of the sample rod, an inclined transmission device inside the sample rod is avoided as far as possible, and accordingly mutual influence between the optical fibers and the double-inclining inclined transmission device inside the sample rod is avoided.

Description

The example of transmission electron microscope bar that can add optical fiber
Technical field
The present invention relates to the transmission electron microscope accessory, more specifically, relate to a kind of example of transmission electron microscope bar that adds optical fiber.
Background technology
In-situ techniques in the transmission electron microscope (abbreviation transmission electron microscope) is the current research field that develops rapidly.Because it can study structural change and the physical property of materials and devices under near the practical application condition, be conducive in the micro-scale practical effect of Knowing material and device exactly.Optical property is a critical nature of materials and devices, can reflect many physical properties of materials and devices, can reflect that such as the characteristics of luminescence energy level feature of semi-conducting material, fluorescence spectrum can reflect the position of specific molecular and kind etc.When needs research light radiation during on the affecting of sample, light signal need to be shone on the sample performance change of sample under the research light radiation.When the luminous situation that needs on the study sample, the light signal that excites such as electron beam irradiation, or the light signal that produces of other reasons just need to light signal by outside optical fiber or the photoconductive tube derivation Electronic Speculum, be analyzed with spectrometer.At present, installing optical fiber additional to realize importing and the derivation of light signal at the sample for use in transmitted electron microscope bar, is an important content of original position electron microscopy research.Existing technical scheme mainly contains following two kinds:
The first scheme is the optics of lens barrel insertion at transmission electron microscope, light signal can be shone on the sample or by optical fiber or photoconductive tube and collect from the signal of sample.Because the lens barrel segment space is relatively large, be conducive to the optical system of design and installation more complicated, more easily realize vacuum seal, also need not carry out any change to specimen holder simultaneously, say that from technological angle difficulty is less.In order to improve the capture range of light signal, can design the reflecting surface of an indent at the head of optics, to increase the solid angle of signal collection, allow more light signal enter photoconductive tube or optical fiber.Defective is need to will collect probe close sample as far as possible in order to improve the collection efficiency of light signal.Because the portion structure of the placement sample of transmission electron microscope is complicated, probe is difficult to sample, and signal strength signal intensity is difficult the raising.In addition, owing to need to transform the lens barrel of transmission electron microscope, certain risk is arranged, must under the assistance of Electronic Speculum manufacturer, finish.And system is limited in having limited its scope of application on the specific transmission electron microscope.
First scheme is to transmit light signal by photoconductive tube or optical fiber are set in specimen holder inside, and photoconductive tube or optical fiber are partly realized connection between sample and external light source or the spectrometer by being arranged on the specimen holder inner hollow.By with photoconductive tube or fiber placing on the standard sample bar, can be neatly carry out same research at the transmission electron microscope of any corresponding model, greatly expanded its scope of application.But because photoconductive tube or optical fiber are by specimen holder conducted inside light signal, for two specimen holders that incline, shaft inside is provided with and drives the transmission device that the specimen holder Y direction is verted, on the one hand photoconductive tube or optical fiber certainly will with the mutually mutual interference of these mechanical devices, also limited on the other hand the quantity of optical fiber.In order to improve the collection efficiency of light signal, also need to a mirror surface be installed at the specimen holder head simultaneously.However, the ability of its optical signal transmission is still not strong.
Summary of the invention
One object of the present invention is for the defects that exists in the prior art, and a kind of example of transmission electron microscope bar that adds optical fiber is provided, and reduces specimen holder internal optical fiber and the transmission device phase mutual interference of verting.Another object of the present invention is under the prerequisite of specimen holder normal running, loads the optical fiber of a greater number in specimen holder, does not improve the light signal collection efficiency thereby do not need additionally to arrange mirror surface.
To achieve these goals, the invention provides a kind of example of transmission electron microscope bar that adds optical fiber, described optical fiber enters the sample for use in transmitted electron microscope chamber by described specimen holder from the transmission electron microscope outside, be used for that light signal with the transmission electron microscope outside imposes on the sample in the sample room or the light signal transduction that the sample in the sample room is produced is outside to transmission electron microscope, described specimen holder comprises:
The specimen holder head, described specimen holder head is provided with microscope carrier, is used for the carrying sample;
The sample shaft, described sample shaft is provided with sealing ring, is used for keeping when specimen holder is put into the example of transmission electron microscope chamber sealing of sample room; And
Hold handle,
Be provided with at least one guide groove at least part of sample shaft outer surface and extend to the specimen holder head along the shaft length direction, optical fiber is arranged in described at least one guide groove.
In one embodiment, described sample shaft outer surface is provided with at least one guide groove along the shaft length direction, lays the epoxy curing agent sealing in the guide groove at sealing ring place, to guarantee the sealing at sealing ring place.
Described sample shaft can comprise front end thin bar and the rear end thick bar of coaxial setting, described front end thin bar is connected by the tapering transition section with the rear end thick bar, described front end thin bar is connected with the specimen holder head, the rear end thick bar with hold handle and be connected, described sealing ring is arranged on the thick bar of rear end.
In one embodiment, described front end thin bar outer surface is provided with at least one guide groove along the shaft length direction, offer through hole in the tapering transition section, described guide groove extends to described through hole on the shaft surface, and the optical fiber at specimen holder head place enters thick bar inside, rear end along described at least one guide groove via through holes.
In one embodiment, described front end thin bar outer surface is provided with at least one guide groove along the shaft length direction, and in the rear end thick bar one through hole is set; Described guide groove extends to described through hole on the shaft surface via the tapering transition section, and the optical fiber at specimen holder head place enters thick bar inside, rear end along described at least one guide groove through described through hole;
Described sealing ring is arranged on described through hole and holds on the rear end thick bar between the handle.
In one embodiment, described example of transmission electron microscope bar is two specimen holders that incline, and is provided with turning handle in the end of holding handle, and after described optical fiber entered thick bar inside, rear end, to handle the turning handle of lever protruding from holding handle inside.
In one embodiment, described sealing ring and the thick bar surface, rear end of holding between the handle are provided with fairlead, and it is protruding by described fairlead that optical fiber enters thick bar inside, rear end, and seal by epoxy curing agent at described fairlead place.
Preferably, the groove width of described guide groove is 0.5-1mm.
Preferably, the cross section of the optical fiber at described specimen holder head place is set to towards the microscope carrier surface that is in initial position.
In one embodiment, the cross section of described specimen holder head place optical fiber is set to the microscope carrier surface angle that is in initial position in predetermined angular range.Described predetermined angular range can be the 0-40 degree.
The present invention avoids the transmission device that verts of specimen holder inside by at least part of optical fiber being laid in the guide groove on specimen holder surface as far as possible, thereby has avoided optical fiber and two specimen holder inside of the inclining transmission device that verts to influence each other.And the present invention can increase number of fibers as much as possible on the basis that guarantees mechanical strength, be conducive to improve optical signal transmission amount and reliability.Among the present invention, the quantity of optical fiber depends on width and the quantity of guide groove.Because the specimen holder external surface area is larger, on the basis that guarantees mechanical strength, can offer guide groove as much as possible, therefore can increase widely the quantity of optical fiber, be conducive to improve the collection efficiency of light signal.
Description of drawings
Fig. 1 is the structural representation according to an embodiment of example of transmission electron microscope bar of the present invention.
Fig. 2 is the structural representation that example of transmission electron microscope bar shown in Figure 1 cuts along the axis.
Fig. 3 is the structural representation according to an embodiment of the driver that verts of the present invention.
Fig. 4 is the structural representation according to another embodiment of example of transmission electron microscope bar of the present invention.
Embodiment
For the purpose, technical scheme and the advantage that make the embodiment of the invention is clearer, below in conjunction with accompanying drawing specific embodiment is described in detail.
As depicted in figs. 1 and 2, of the present invention add optical fiber the example of transmission electron microscope bar, optical fiber enters the sample for use in transmitted electron microscope chamber by specimen holder from the transmission electron microscope outside, is used for that light signal with the transmission electron microscope outside imposes on the sample in the sample room or the light signal transduction that the sample in the sample room is produced is outside to transmission electron microscope.Specimen holder comprises specimen holder head 1, sample shaft and holds handle 4, and specimen holder head 1 is provided with microscope carrier 7, and sample is carried on the microscope carrier 7.Specimen holder is as hollow structure, and outer surface is provided with sealing ring 5, is used for keeping when specimen holder is put into the example of transmission electron microscope chamber sealing of sample room.Be provided with at least one guide groove at least part of sample shaft outer surface and extend to the specimen holder head along the shaft length direction, optical fiber is arranged at least one guide groove.
The specimen holder of the specimen holder shown in Fig. 1 and Fig. 2 and FEI Co. is similar, and the sample shaft can comprise front end thin bar 2 and the rear end thick bar 3 of coaxial setting.Front end thin bar 2 and rear end thick bar 3 are hollow structure.Front end thin bar 2 can be connected by tapering transition section 9 with rear end thick bar 3.Wherein, front end thin bar 2 is connected with specimen holder head 1, rear end thick bar 3 with hold handle 4 and be connected.Sealing ring 5 is arranged on the rear end thick bar 3.Specimen holder shown in the figure is two specimen holders that incline, and is provided with the driver 10 that verts that verts in Y-axis for driving microscope carrier 7 in sample shaft inside.The driver 10 that verts can have the structure of similar bent axle, and more common situation can be as shown in Figure 3, and the driver 10 that verts is connected to form by front end axle 101, cylindroid 102 and rear end axle 103.Wherein, front end axle 101 is connected with microscope carrier 7, and the rear end axle 103 of the driver 10 that verts passes front end thin bar 2, rear end thick bar 3 from specimen holder head 1 successively, until hold handle 4.Can a turning handle 6 be set holding handle 4 ends, can drive easily the driver 10 that verts at the Y direction sample that verts by rotation turning handle 6.Because front end thin bar 2 diameters are less, and inside comprised rear end axle 103, and for fear of the optical fiber that weares and teares when rear end axle 103 rotates, so optical fiber does not preferably pass through from front end thin bar 2.The diameter of rear end thick bar 3 is thicker, and its inner space is larger, and optical fiber and the impact of verting between the driver 10 are less.Therefore optical fiber can pass through from the inside of rear end thick bar 3.
In one embodiment, front end thin bar 2 outer surfaces are provided with at least one guide groove 21 along the shaft length direction, offer through hole 91 in tapering transition section 9, guide groove 21 extends to through hole 91 on the shaft surface, and the optical fiber 8 at specimen holder head 1 place enters the inside of rear end thick bar 3 along at least one guide groove, 21 via through holes 91.In one embodiment, through hole 91 can be arranged on tapering transition section 9 near an end of front end thin bar 2, and optical fiber 8 can enter shaft inside along direct via through holes at least one guide groove of front end thin bar 2 like this, and does not need guide groove is extended to tapering transition section 9.In another embodiment, through hole 91 can be arranged on tapering transition section 9 near an end of rear end thick bar 3, guide groove need to be extended to like this outer surface of tapering transition section 9, optical fiber 8 can be along the guide groove that enters tapering transition section 9 outer surfaces at least one guide groove of front end thin bar 2, and via through holes enters rear end thick bar 3 again.The benefit of this embodiment is, can more near the circumference of shaft, avoid better the transmission mechanism phase mutual interference with the shaft inside center at the optical fiber of rear end thick bar 3 inside.
In one embodiment, front end thin bar 2 outer surfaces are provided with at least one guide groove 21 along the shaft length direction, also be provided with at least one guide groove (not shown) on changeover portion 9 surfaces along the shaft length direction, and in the rear end thick bar one through hole (not shown) be set; Guide groove extends to through hole on the shaft surface via the tapering transition section, and the optical fiber at specimen holder head place enters thick bar inside, rear end along at least one guide groove through institute's through hole; In this embodiment, sealing ring 5 is arranged on through hole and holds on the rear end thick bar 3 between the handle 4.
After optical fiber 8 enters thick bar inside, rear end, can to handle the turning handle 6 of lever protruding from holding handle 4 inside.Also can be provided with the fairlead (not shown) on rear end thick bar 3 surfaces that sealing ring and 5 is held between the handle 4, it is protruding by fairlead that optical fiber 8 enters thick bar inside, rear end, is connected with light source or the spectrometer of outside.In order to guarantee the vacuum degree of inside, sample room, also need to seal by epoxy curing agent at the fairlead place.Can affect the evenness on specimen holder surface even such benefit is coated with resins, and owing to apply the position in the Electronic Speculum outside, therefore can not affect the plug operation of specimen holder.And also very convenient in dismounting optical fiber, do not worry when striking off resin, causing that the specimen holder surface is smooth not.
In other embodiment, also guide groove can be arranged to run through sample shaft surface, allow optical fiber 8 pass through from the outside of specimen holder fully, form the optical channel with internal independence.In embodiment as shown in Figure 4, front end thin bar 2 outer surfaces are provided with at least one guide groove 21 along the shaft length direction, thick bar 3 outer surfaces in rear end also are provided with at least one guide groove 31 along the shaft length direction, optical fiber 8 extends along at least one guide groove 21 on front end thin bar 2 surfaces, extend at least one guide groove 31 on rear end thick bar 3 surfaces from sealing ring 5 inside, optical fiber can directly extend out from least one guide groove 31 on rear end thick bar 3 surfaces and be connected with light source or spectrometer.For the ease of keeping the vacuum degree of transmission electron microscope inside, need to guarantee the sealing at sealing ring place.In this case, after optical fiber laid, also need the guide groove 31 interior laying epoxy resin curing agent sealings at sealing ring 5 places, and be processed into and the level and smooth consistent profile of sample shaft, in order to avoid guide groove 31 causes the sealing of sealing ring place bad by sealing ring the time.Because transmission electron microscope need to keep very high vacuum degree when work, so this embodiment is higher to requirement on machining accuracy.
In the above-described embodiment, because the microscope carrier 7 of specimen holder can carry out Y-axis and vert, the position that is microscope carrier is variable, for the ease of the optical fiber cross section at statement specimen holder head place and the relativeness of microscope carrier, the initial position of definition microscope carrier: residing position when microscope carrier 7 does not carry out any verting.Further, when microscope carrier was in initial position, it is indoor that specimen holder is put into sample for use in transmitted electron microscope, microscope carrier surface basic horizontal.After having defined such initial position, cross section that just can specimen holder head place optical fiber is set to towards the microscope carrier surface that is in initial position.If but the cross section of all optical fiber all is arranged to face mutually with the microscope carrier surface that is in initial position, when microscope carrier carries out Y-axis when verting, might collect the light signal that sends less than sample on the microscope carrier by optical fiber.Therefore the cross section of optical fiber preferably is arranged to the microscope carrier surface that is in initial position at a certain anglely, and the size of this angle is in predetermined angular range.Here " predetermined angular range " is relevant with the angle that the microscope carrier Y-axis is verted, and for example can be the 0-40 degree.
In the present invention, the quantity of optical fiber depends on width and the quantity of guide groove.General specimen holder self diameter is less, and the groove width of guide groove can be arranged between the 0.5-1m m.Because the specimen holder external surface area is larger, on the basis that guarantees mechanical strength, can as often as possible offer guide groove, thereby greatly increase the quantity of optical fiber, and possibility of almost having evaded in the present invention the transmission device wearing and tearing of verting of optical fiber and two specimen holder inside of inclining, improved reliability and the durability of the specimen holders that pair incline.
The example of transmission electron microscope bar that adds optical fiber of the present invention has very high versatility, can be used for the transmission electron microscope of same producer, and the concrete structure of specimen holder then can be different because of the design of transmission electron microscope producer.
The above only is preferred implementation of the present invention; should be pointed out that for those skilled in the art, under the prerequisite that does not break away from the principle of the invention; can also make some improvements and modifications, these improvements and modifications also should be considered as protection scope of the present invention.

Claims (11)

1. example of transmission electron microscope bar that can add optical fiber, described optical fiber enters the sample for use in transmitted electron microscope chamber by described specimen holder from the transmission electron microscope outside, be used for that light signal with the transmission electron microscope outside imposes on the sample in the sample room or the light signal transduction that the sample in the sample room is produced is outside to transmission electron microscope, described specimen holder comprises:
The specimen holder head, described specimen holder head is provided with microscope carrier, is used for the carrying sample;
The sample shaft, described sample shaft is provided with sealing ring, is used for keeping when specimen holder is put into the example of transmission electron microscope chamber sealing of sample room; And
Hold handle,
It is characterized in that be provided with at least one guide groove at least part of sample shaft outer surface and extend to the specimen holder head along the shaft length direction, optical fiber is arranged in described at least one guide groove.
2. example of transmission electron microscope bar according to claim 1, it is characterized in that, described sample shaft outer surface is provided with at least one guide groove along the shaft length direction, lays the epoxy curing agent sealing in the guide groove at sealing ring place, to guarantee the sealing at sealing ring place.
3. example of transmission electron microscope bar according to claim 1, it is characterized in that, described sample shaft comprises front end thin bar and the rear end thick bar of coaxial setting, described front end thin bar is connected by the tapering transition section with the rear end thick bar, described front end thin bar is connected with the specimen holder head, the rear end thick bar with hold handle and be connected, described sealing ring is arranged on the thick bar of rear end.
4. example of transmission electron microscope bar according to claim 3, it is characterized in that, described front end thin bar outer surface is provided with at least one guide groove along the shaft length direction, offer through hole in the tapering transition section, described guide groove extends to described through hole on the shaft surface, and the optical fiber at specimen holder head place enters thick bar inside, rear end along described at least one guide groove via through holes.
5. example of transmission electron microscope bar according to claim 3 is characterized in that, described front end thin bar outer surface is provided with at least one guide groove along the shaft length direction, and in the rear end thick bar one through hole is set; Described guide groove extends to described through hole on the shaft surface via the tapering transition section, and the optical fiber at specimen holder head place enters thick bar inside, rear end along described at least one guide groove through described through hole;
Described sealing ring is arranged on described through hole and holds on the rear end thick bar between the handle.
6. according to claim 4 or 5 described example of transmission electron microscope bars, it is characterized in that, described example of transmission electron microscope bar is two specimen holders that incline, be provided with turning handle in the end of holding handle, after described optical fiber entered thick bar inside, rear end, to handle the turning handle of lever protruding from holding handle inside.
7. according to claim 4 or 5 described example of transmission electron microscope bars, it is characterized in that, described sealing ring and the thick bar surface, rear end of holding between the handle are provided with fairlead, it is protruding by described fairlead that optical fiber enters thick bar inside, rear end, and seal by epoxy curing agent at described fairlead place.
8. each described example of transmission electron microscope bar is characterized in that according to claim 1-7, and the groove width of described guide groove is 0.5-1mm.
9. each described example of transmission electron microscope bar is characterized in that according to claim 1-8, and the cross section of the optical fiber at described specimen holder head place is set to towards the microscope carrier surface that is in initial position.
10. example of transmission electron microscope bar according to claim 9 is characterized in that, the cross section of described specimen holder head place optical fiber is set to the microscope carrier surface angle that is in initial position in predetermined angular range.
11. example of transmission electron microscope bar according to claim 10 is characterized in that, described predetermined angular range is the 0-40 degree.
CN201210501122.XA 2012-11-29 2012-11-29 The example of transmission electron microscope bar of optical fiber can be added Expired - Fee Related CN103000480B (en)

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Cited By (12)

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CN103558232A (en) * 2013-10-16 2014-02-05 中国科学院物理研究所 In-situ varying temperature spectral measurement device in transmission electron microscope
CN104215580A (en) * 2014-09-23 2014-12-17 中国科学技术大学 Method and device for correlated micro-imaging of frozen light microscope and frozen electron microscope
CN104916516A (en) * 2015-05-26 2015-09-16 兰州大学 Transmission electron microscope sample rod capable of realizing electric and magnetic field loading
CN105789005A (en) * 2016-04-29 2016-07-20 西安交通大学 Split-type transmission electron microscope sample rod
CN105931938A (en) * 2016-04-22 2016-09-07 东南大学 Transmission electron microscope sample rod capable of measuring nano-monomer absorption spectrum and use method thereof
CN106098520A (en) * 2016-07-30 2016-11-09 北京工业大学 A kind of scanning/transmission electron microscope association analysis vacuum moving device
CN108375598A (en) * 2018-01-17 2018-08-07 华东理工大学 A kind of electron microscope novel optical fiber coupling in-situ liquid sample system and application method
CN109490344A (en) * 2018-08-21 2019-03-19 厦门芯极科技有限公司 A kind of example of transmission electron microscope bar
CN110441334A (en) * 2019-07-11 2019-11-12 安徽泽攸科技有限公司 A kind of more in situ TEM specimen holders
CN110895252A (en) * 2019-09-25 2020-03-20 北京工业大学 Optical sample rod system for in-situ liquid-gas environment transmission electron microscope
CN111261478A (en) * 2018-11-30 2020-06-09 浙江大学 Multi-freedom-degree sample rod with optical fibers
CN111307847A (en) * 2020-03-11 2020-06-19 中国科学院地质与地球物理研究所 Micro-nano-scale sample vacuum storage device

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CN201196592Y (en) * 2008-05-06 2009-02-18 中国科学院南海海洋研究所 Underwater radiance probe with optical fiber
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Publication number Priority date Publication date Assignee Title
CN103558232A (en) * 2013-10-16 2014-02-05 中国科学院物理研究所 In-situ varying temperature spectral measurement device in transmission electron microscope
CN103558232B (en) * 2013-10-16 2015-10-28 中国科学院物理研究所 A kind of device in transmission electron microscope situ alternating temperature measure spectrum
CN104215580A (en) * 2014-09-23 2014-12-17 中国科学技术大学 Method and device for correlated micro-imaging of frozen light microscope and frozen electron microscope
CN104916516A (en) * 2015-05-26 2015-09-16 兰州大学 Transmission electron microscope sample rod capable of realizing electric and magnetic field loading
CN104916516B (en) * 2015-05-26 2017-03-22 兰州大学 Transmission electron microscope sample rod capable of realizing electric and magnetic field loading
CN105931938A (en) * 2016-04-22 2016-09-07 东南大学 Transmission electron microscope sample rod capable of measuring nano-monomer absorption spectrum and use method thereof
CN105789005A (en) * 2016-04-29 2016-07-20 西安交通大学 Split-type transmission electron microscope sample rod
CN106098520A (en) * 2016-07-30 2016-11-09 北京工业大学 A kind of scanning/transmission electron microscope association analysis vacuum moving device
CN108375598A (en) * 2018-01-17 2018-08-07 华东理工大学 A kind of electron microscope novel optical fiber coupling in-situ liquid sample system and application method
CN108375598B (en) * 2018-01-17 2022-04-15 华东理工大学 Novel optical fiber coupling in-situ liquid sample system for electron microscope and use method
CN109490344A (en) * 2018-08-21 2019-03-19 厦门芯极科技有限公司 A kind of example of transmission electron microscope bar
CN111261478A (en) * 2018-11-30 2020-06-09 浙江大学 Multi-freedom-degree sample rod with optical fibers
CN111261478B (en) * 2018-11-30 2021-10-26 浙江大学 Multi-freedom-degree sample rod with optical fibers
CN110441334A (en) * 2019-07-11 2019-11-12 安徽泽攸科技有限公司 A kind of more in situ TEM specimen holders
CN110895252A (en) * 2019-09-25 2020-03-20 北京工业大学 Optical sample rod system for in-situ liquid-gas environment transmission electron microscope
CN111307847A (en) * 2020-03-11 2020-06-19 中国科学院地质与地球物理研究所 Micro-nano-scale sample vacuum storage device

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